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Conference Digest [Includes 'Late News Papers' volume] Device Research Conference, 2004. 62nd DRC.最新文献

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Simulation study of tunneling devices with quantum confinement in source and drain 源极和漏极量子约束隧道器件的仿真研究
Y. Katayama, S. Laux
Tunneling devices being studied so far are mostly inter-band or resonant tunneling devices where discrete energy levels due to quantum confinement do not exist or exist only in the channel. Tunneling devices with quantum confinement in the source and drain (discrete energy levels there), such as coupled quantum well devices, are relatively new (A. Simmons et al., Tech. Dig. IEEE IEDM, pp. 755-758, 1997). We present self-consistent DC analyses of the electron transport in coupled quantum well systems through 2D computer simulation for the first time.
目前所研究的隧道装置多为带间或共振隧道装置,由于量子约束而不存在离散能级或仅存在于通道中。在源极和漏极(那里的离散能级)中具有量子约束的隧道装置,如耦合量子阱装置,是相对较新的(A. Simmons等人,Tech. Dig)。IEEE IEDM, pp. 755-758, 1997)。本文首次通过二维计算机模拟对耦合量子阱系统中的电子输运进行了自洽直流电分析。
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引用次数: 3
Conductive copper patterning by nanotransfer printing 导电铜图案的纳米转移印刷
K. Felmet, Yangming Sun, Y. Loo
In this paper, we report a solventless, additive approach for patterning conductive copper in the 1-100 /spl mu/m range at ambient conditions. A freshly-etched GaAs substrate is treated with 1,8-octanedithiol molecules, resulting in covalent bonds between the GaAs substrate and one of the thiol functionalities. A poly(dimethylsiloxane), PDMS, elastomeric stamp, freshly evaporated with Cu, is then brought into contact with the substrate. Intimate molecular contact between the raised regions of the stamp and the substrate facilitates the permanent attachment of Cu to the GaAs substrate via the formation of covalent bonds between the unreacted thiol endgroups of octanedithiol and Cu. Pattern transfer is completed upon stamp removal; this process occurs at ambient conditions with less than 30 seconds of contact time. Currently, this technique permits large-area patterning of features with sizes ranging from 1 /spl mu/m to 500 /spl mu/m.
在本文中,我们报告了一种在环境条件下在1-100 /spl mu/m范围内对导电铜进行图像化的无溶剂添加剂方法。用1,8-辛二硫醇分子处理新蚀刻的GaAs衬底,导致GaAs衬底与其中一个硫醇官能团之间形成共价键。聚(二甲基硅氧烷),PDMS,弹性体邮票,新鲜蒸发与铜,然后与基底接触。邮票的凸起区域和衬底之间的密切分子接触,通过辛二硫醇和Cu的未反应巯基之间形成共价键,促进了Cu在GaAs衬底上的永久附着。图案转移在拆印时完成;该过程发生在环境条件下,接触时间少于30秒。目前,该技术允许大面积的特征图案,尺寸范围从1 /spl mu/m到500 /spl mu/m。
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引用次数: 0
Novel structures enabling bulk switching in carbon nanotube FETs 实现碳纳米管场效应管体开关的新结构
Y. Lin, J. Appenzeller, P. Avouris
In order to alleviate the disadvantages associated with Schottky barriers in CNFETs, it is necessary to design CNFETs with bulk switching properties meaning that the bulk portion of the nanotube rather than the interface controls the CNFET characteristics. Here we present the first self-aligned bulk-switched CNFET that operates in the enhancement mode with a p-i-p (or n-i-n) doping profile along the tube. With our novel approach, we successfully fabricated CNFETs with excellent switching (S/spl sim/63 mV/dec), the smallest value reported for CNFETs so far, and very good performance in terms of their drain-induced-barrier-lowering (DIBL)-like behavior.
为了减轻CNFET中肖特基势垒的缺点,有必要设计具有体开关特性的CNFET,这意味着由纳米管的体部分而不是界面控制CNFET的特性。在这里,我们提出了第一个自对准体开关CNFET,它在沿管的p-i-p(或n-i-n)掺杂谱线的增强模式下工作。通过我们的新方法,我们成功地制造了具有优异开关(S/spl sim/63 mV/dec)的cnfet,这是迄今为止cnfet报道的最小值,并且在漏极诱导降势垒(DIBL)方面具有非常好的性能。
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引用次数: 18
Electronic and magnetic properties of ferromagnetic p-(In,Mn)As/n-InAs heterojunctions [spintronic device applications] 铁磁p-(In,Mn)As/n-InAs异质结的电子和磁性能[自旋电子器件应用]
S. May, B. Wessels
In this work, (InMn)As/InAs p-n heterojunctions have been fabricated and their electronic and magnetic properties characterized. The (In,Mn)As films, deposited by atmospheric pressure meta organic vapor phase epitaxy, are ferromagnetic at room temperature as determined by magneto-optical Kerr effect (MOKE) measurements and variable-temperature magnetic force microscopy. The J-V characteristics of these junctions were measured over the temperature range of 78 to 300 K. In addition, the magnetic field dependence of the I-V characteristics has been measured. The magnetoresistive properties of these heterojunctions suggest they may be suitable for use in spintronic devices.
在这项工作中,制备了(InMn)As/InAs p-n异质结,并对其电子和磁性能进行了表征。经常压元有机气相外延沉积的(In,Mn)As薄膜在室温下具有铁磁性,这是通过磁光克尔效应(MOKE)测量和变温磁力显微镜确定的。在78 ~ 300 K的温度范围内测量了这些结的J-V特性。此外,还测量了其I-V特性与磁场的关系。这些异质结的磁阻特性表明它们可能适合用于自旋电子器件。
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引用次数: 0
Direct measurements of the AC performance of carbon nanotube field effect transistors 碳纳米管场效应晶体管交流性能的直接测量
D. V. Singh, K. Jenkins
Carbon nanotube field-effect transistors are expected to operate at very high frequencies, possibly in the THz regime, making them attractive for future nanoelectronics technologies. However, due to formidable measurement difficulties, this performance has not yet been demonstrated. This paper reports: 1) the first direct observation of CNFETs operating at several hundred MHz; and 2) illustrates how to extend direct frequency response measurements to the GHz regime.
碳纳米管场效应晶体管有望在非常高的频率下工作,可能在太赫兹范围内,这使它们对未来的纳米电子技术具有吸引力。然而,由于巨大的测量困难,这种性能尚未得到证实。本文报道:1)首次直接观测到工作在几百兆赫的cnfet;2)说明如何将直接频率响应测量扩展到GHz频段。
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引用次数: 0
Nano-scale MOSFETs with programmable virtual source/drain 具有可编程虚拟源/漏极的纳米级mosfet
B. Choi, Yong-kyu Lee, W. Choi, Han Park, D. Woo, J. Lee, Byung-Gook Park, Changho Oh, C. Chung, Donggun Park
In this work, we fabricated twin silicon-oxide-nitride-oxide-silicon (SONOS) memory (TSM) cell transistors, based on the 90 nm non-volatile memory technology and showed the implementation of programmable threshold voltage (V/sub th/) MOSFETs in the nano-scale regime. It was clearly observed that the transistor has high I/sub on//I/sub off/ ratio (>106) and small drain leakage (/spl sim/10 pA) in the 30 nm regime. From the experimental result from fabricated devices, it can be deduced that the TSM transistor has various MOSFET applications due to charged states in the nitride. To evaluate the various MOSFET applications of the TSM transistor in the nano-scale regime, the simulation of a 30 nm-long gate TSM transistor was carried out on the 2D ATLAS, including tunneling and impact ionization models. It is concluded that the proposed TSM MOSFET structure promises a well-controlled short channel effect and high I/sub on//I/sub off/ characteristics.
在这项工作中,我们基于90 nm非易失性存储技术制作了双氧化硅-氮化氧化物-硅(SONOS)存储(TSM)单元晶体管,并展示了在纳米尺度下可编程阈值电压(V/sub /) mosfet的实现。在30nm范围内,晶体管具有高I/sub on//I/sub off/比率(>106)和小漏极(/spl sim/10 pA)。从制备器件的实验结果可以推断出,由于氮化物中的带电状态,TSM晶体管具有各种MOSFET应用。为了评估TSM晶体管在纳米尺度下的各种MOSFET应用,在二维ATLAS上对30纳米栅极TSM晶体管进行了模拟,包括隧道模型和冲击电离模型。结果表明,所提出的TSM MOSFET结构具有良好的控制短通道效应和高I/sub on//I/sub off/特性。
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引用次数: 0
High-efficiency, Ge-on-SOI lateral PIN photodiodes with 29 GHz bandwidth 具有29 GHz带宽的高效Ge-on-SOI横向PIN光电二极管
S. Koester, J. Schaub, G. Dehlinger, J. Chu, Q. Ouyang, A. Grill
Ge has tremendous potential for high-speed operation at /spl lambda/=850 nm, an important wavelength for short range highly-parallel interconnects, because the absorption length of Ge is only a few hundred nm. However, for thin Ge-on-Si detectors, the Ge film must be isolated from the underlying Si in order to prevent collection of slow carriers generated deep within the substrate. In this work, we present results of lateral PIN photodetectors fabricated using Ge films deposited on ultra-thin silicon-on-insulator (SOI) substrates. These devices have bandwidths as high as 29 GHz, and the highest bandwidth-efficiency product reported to date for a group-IV photodetector.
由于锗的吸收长度只有几百nm,因此在/spl λ /=850 nm处具有巨大的高速运行潜力,850 nm是短距离高平行互连的重要波长。然而,对于薄的Ge-on-Si探测器,Ge薄膜必须与底层的Si隔离,以防止在衬底深处产生的慢载流子的收集。在这项工作中,我们展示了利用沉积在超薄绝缘体上硅(SOI)衬底上的Ge薄膜制作的横向PIN光电探测器的结果。这些器件的带宽高达29 GHz,是迄今为止报道的iv类光电探测器中带宽效率最高的产品。
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引用次数: 17
Scaling issues of n-channel vertical tunnel FET with /spl delta/p/sup +/ SiGe layer 具有/spl delta/p/sup +/ SiGe层的n沟道垂直隧道场效应管的缩放问题
K. Bhuwalka, J. Schulze, I. Eisele
The performance of a n-channel vertical tunnel field-effect transistor is shown to improve significantly by bandgap engineering at the tunneling junction. The bandgap modulation is achieved by inserting a heavily doped 3 nm delta SiGe layer at the p-source end. Since the bandgap at the tunneling junction determines the tunneling barrier height, having a SiGe delta layer results in lowering it. Thereby, increasing the tunneling probability under similar bias conditions. We show that controlling the Ge mole fraction, x, in SiGe, gives an additional parameter for control of device performance. Device on-current, I/sub on/, and threshold voltage, V/sub T/, are seen to improve considerably. However, as the device is scaled down, the tunneling probability increases significantly even for V/sub GS/=0 V as x is increased. Thereby, leading to large increase in tunneling leakage current. Optimization of the device performance can then be done by appropriate choice of x with gate oxide thickness, t/sub ox/, according to technology requirements.
通过隧道结带隙工程,n沟道垂直隧道场效应晶体管的性能得到了显著提高。带隙调制是通过在p源端插入一个重掺杂的3nm δ SiGe层来实现的。由于隧道结处的带隙决定了隧道势垒的高度,因此SiGe δ层的存在会降低势垒的高度。从而增加了相似偏压条件下的隧穿概率。我们表明,在SiGe中控制Ge摩尔分数x,为控制器件性能提供了一个额外的参数。器件通流(I/sub on/)和阈值电压(V/sub T/)明显改善。然而,随着器件的缩小,即使在V/sub GS/=0 V下,隧穿概率也随着x的增加而显著增加。从而导致隧道漏电流的大幅度增加。然后可以根据技术要求,通过适当选择x与栅氧化层厚度t/sub ox/来优化器件性能。
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引用次数: 6
Planarized InP/InGaAs heterojunction bipolar transistors with f/sub MAX/ > 500 GHz f/sub MAX/ > 500 GHz的平面化InP/InGaAs异质结双极晶体管
D. Sawdai, P. C. Chang, Vincent Gambin, X. Zeng, J. Yamamoto, K. Loi, G. Leslie, Michael E. Barsky, A. Gutierrez-Aitken, A. Oki
To meet the demands for next generation high-speed electronics, the InP-based heterojunction bipolar transistor (HBT) must be scaled vertically to minimize transit times, scaled laterally to minimize the emitter width (W/sub E/) and the base-collector junction capacitance (C/sub BC/), and fabricated with high yield to support large circuits. Lateral scaling can involve a variety of processing techniques. In this work, we developed a dielectric planarization process which enabled aggressive scaling of both W/sub E/ and C/sub BC/ using production I-line lithography, resulting in emitters as small as 0.14 /spl mu/m, unity gain cutoff frequency (f/sub T/) up to 290 GHz, and maximum oscillation frequency (f/sub MAX/) greater than 500 GHz.
为了满足下一代高速电子产品的需求,基于inp的异质结双极晶体管(HBT)必须垂直缩放以最小化传输时间,横向缩放以最小化发射极宽度(W/sub E/)和基极-集电极结电容(C/sub BC/),并以高成品率制造以支持大型电路。横向缩放可以涉及多种处理技术。在这项工作中,我们开发了一种介质平面化工艺,可以使用生产线光刻技术对W/sub E/和C/sub BC/进行大规模缩放,从而使发射器小至0.14 /spl mu/m,单位增益截止频率(f/sub T/)高达290 GHz,最大振荡频率(f/sub MAX/)大于500 GHz。
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引用次数: 2
Low noise GaAs-based avalanche photodiodes for long wavelength applications 用于长波长应用的低噪声gaas基雪崩光电二极管
B. K. Ng, J. David, W. M. Soong, J. Ng, C. Tan, H. Liu, M. Hopkinson, P. Robson
Currently available avalanche photodiodes (APDs) for use in telecommunication systems operating at 1.3/1.55 /spl mu/m utilize InP and InGaAs as the multiplication and absorption medium respectively. The excess noise performance of the InP avalanching region is relatively poor, and is limited by the hole to electron ionization coefficient ratio (/spl beta///spl alpha/). We have recently reported that Al/sub 0.8/Ga/sub 0.2/As may be a suitable material for the multiplication region in APDs due to its large /spl alpha///spl beta/ ratio in bulk structures (B.K. Ng et al, IEEE Photon. Technol. Lett., vol. 14, p. 522, 2002), which results in a very low avalanche excess noise. In this work, we extend our previous study by investigating the excess noise characteristics in both bulk and sub-micron Al/sub x/Ga/sub 1-x/As diodes as a function of x. Our results here suggest that long wavelength GaAs-based APDs of superior noise characteristics than InP-based APDs can now be realized.
目前可用的雪崩光电二极管(apd)用于工作在1.3/1.55 /spl mu/m的电信系统,分别利用InP和InGaAs作为倍增介质和吸收介质。InP雪崩区的超噪性能相对较差,且受空穴与电子电离系数比值(/spl β ///spl α /)的限制。我们最近报道了Al/sub 0.8/Ga/sub 0.2/As可能是apd中乘法区的合适材料,因为它在体结构中具有较大的/spl α ///spl β /比率(B.K. Ng等,IEEE Photon)。抛光工艺。列托人。, vol. 14, p. 522, 2002),这导致了非常低的雪崩过量噪声。在这项工作中,我们扩展了之前的研究,研究了块体和亚微米Al/sub x/Ga/sub - 1-x/As二极管的多余噪声特性与x的关系。我们的研究结果表明,现在可以实现比基于inp的apd具有更优越噪声特性的长波gaas apd。
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引用次数: 0
期刊
Conference Digest [Includes 'Late News Papers' volume] Device Research Conference, 2004. 62nd DRC.
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