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Conference Digest [Includes 'Late News Papers' volume] Device Research Conference, 2004. 62nd DRC.最新文献

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Electrical properties of p- and n-type silicon nanowires p型和n型硅纳米线的电学特性
Yanfeng Wang, Marco A. Cabassi, T. Ho, K. Lew, J. Redwing, T. Mayer
There has been considerable interest in bottom-up integration of semiconductor nanowires for their application in future logic, memory, and sensor circuits. The ability to integrate field effect devices with p- and n-type conduction channels is a challenge that must be overcome to fabricate complementary logic circuits using such technologies. In this talk, we present the results of four-point resistivity and gate-dependent conductance measurements taken on unintentionally-doped, p-type, and n-type silicon nanowires (SiNWs). These results emphasize that future efforts must address the source of the high p-type background doping concentration in vapor-liquid-solid grown SiNWs to facilitate improvements in the properties of n-channel devices.
半导体纳米线自下而上的集成技术在未来的逻辑、存储和传感器电路中的应用已经引起了人们极大的兴趣。将场效应器件与p型和n型导通通道集成的能力是利用这种技术制造互补逻辑电路必须克服的挑战。在这次演讲中,我们介绍了在无意掺杂、p型和n型硅纳米线(SiNWs)上进行的四点电阻率和栅极相关电导测量的结果。这些结果强调了未来的努力必须解决在气液固生长SiNWs中高p型背景掺杂浓度的来源,以促进n通道器件性能的改善。
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引用次数: 1
A printable form of single crystal silicon for high performance thin film transistors on plastic 一种可印刷的单晶硅,用于塑料上的高性能薄膜晶体管
E. Menard, D. Khang, K. Lee, R. Nuzzo, J. Rogers
This talk describes the fabrication and electrical characteristics of high performance thin film transistors derived from printed and solution cast micro/nanoscale objects of single crystal silicon. These elements are fabricated from conventional bulk silicon substrates or from silicon-on-insulator wafers by patterning a layer of resist by soft lithography, anisotropically wet etching the exposed silicon, and then lifting off the silicon. A large collection of such objects - which can have geometries that range from ribbons to platelets, sheets, disks and other shapes - constitutes a type of material, which we refer to as microstructured silicon (ps-Si), that can be deposited and patterned, by dry transfer printing or solution casting, onto plastic substrates to yield mechanically flexible thin film transistors that have excellent electrical properties.
本讲座介绍了高性能薄膜晶体管的制造和电学特性,这些晶体管来源于单晶硅的印刷和溶液铸造微/纳米物体。这些元件是由传统的块状硅衬底或绝缘体上的硅晶圆制成的,通过软光刻法绘制一层抗蚀剂,各向异性湿蚀刻暴露的硅,然后从硅上取下。大量这样的物体——其几何形状可以从带状到片状、片状、圆盘和其他形状——构成了一种材料,我们称之为微结构硅(ps-Si),它可以通过干转移印刷或溶液铸造的方式沉积和图案化到塑料基板上,从而产生具有优异电性能的机械柔性薄膜晶体管。
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引用次数: 0
Collector vertical scaling and performance tradeoffs in 300 GHz SiGe HBTs 300ghz SiGe hbt中收集器垂直缩放和性能权衡
J. Rieh, M. Khater, K. Schonenberg, F. Pagette, P. Smith, T. Adam, K. Stein, D. Ahlgren, G. Freeman
This study investigates the impact of the collector vertical scaling on the tradeoff between f/sub T/ and f/sub max/ with SiGe HBTs of /spl sim/300 GHz performance. We further proceed to discuss its impact on the avalanche breakdown behavior of the devices. It is observed that the selectively implanted collector (SIC) dose variation affects f/sub T/ and f/sub max/ in opposite directions, in 300 GHz SiGe HBTs, which can be exploited to selectively optimize the devices for either f/sub T/ or f/sub max/ depending on the requirement from a given application. This trend also indicates, along with the observed SIC dose dependence of the breakdown voltages, that the traditional speed-breakdown voltage (BV) tradeoff is valid for f/sub T/-BV, but not necessarily for f/sub max/-BV.
本研究研究了收集器垂直缩放对f/sub T/和f/sub max/之间权衡的影响,SiGe HBTs为/spl sim/300 GHz性能。我们进一步讨论了它对器件雪崩击穿行为的影响。观察到,在300 GHz SiGe hbt中,选择性植入集电极(SIC)剂量变化对f/sub T/和f/sub max/的影响方向相反,这可以根据给定应用的要求选择性地优化器件的f/sub T/或f/sub max/。这一趋势还表明,随着观察到的SIC剂量对击穿电压的依赖性,传统的速度击穿电压(BV)权衡对f/sub T/-BV有效,但对f/sub max/-BV不一定有效。
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引用次数: 11
Fin width scaling criteria of body-tied FinFET in sub-50 nm regime 体系FinFET在50nm以下的翅片宽度标度标准
H. Cho, J. Choe, Ming Li, J. Y. Kim, S. Chung, C. Oh, E. Yoon, Dong-Won Kim, Donggun Park, Kinam Kim
For better subthreshold swing (SS) and drain induced barrier lowering (DIBL) of FinFETs, the fin width is a more important parameter than the physical gate length. And it should be very thin and fully depleted. In this article, we introduce the fabrication of body-tied FinFETs with various fin widths, fabricated on bulk Si instead of SOI wafer, and propose a new gate length/fin width (L/sub g//W/sub fin/) criterion to get nearly ideal SS and DIBL for body-tied FinFETs. From experiments and simulations, it is proven that threshold voltage (V/sub th/) control is possible even under a 20 nm narrow fin width, and high performance FinFET operation is obtainable even under a 5 nm fin width.
为了获得更好的亚阈值摆幅(SS)和漏极诱导势垒降低(DIBL),翅片宽度是比物理栅极长度更重要的参数。它应该非常薄,并且完全耗尽。在本文中,我们介绍了不同翅片宽度的体系finfet的制造方法,用硅片代替SOI晶片制造,并提出了一种新的栅极长度/翅片宽度(L/sub g//W/sub fin/)准则,以获得接近理想的体系finfet的SS和DIBL。实验和仿真证明,即使在20nm的窄鳍宽下也可以控制阈值电压(V/sub /),并且即使在5nm的鳍宽下也可以获得高性能的FinFET工作。
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引用次数: 12
Linearity performance of GaN HEMTs with field plates 场极板GaN hemt的线性性能
Y. Wu, A. Saxler, T. Wisleder, M. Moore, R.P. Smith, S. Sheppard, P. Chavarkar, P. Parikh
Recently, electric field modification with GaN-based high-electron-mobility-transistors (HEMTs) using field plates (FP) has resulted in dramatically enhanced power performance. Power densities up to 32 W/mm at 4 GHz have been demonstrated with power-added-efficiency (PAE) of 55%. When scaled to a large periphery, a total output power of 149 W was obtained at 2 GHz. Modern communication applications also require high linearity for power devices. Here we present the linearity performance of GaN-channel HEMTs with various FP lengths at biases up to 108V.
近年来,利用场极板(FP)对氮化镓基高电子迁移率晶体管(hemt)进行电场改造,显著提高了其功率性能。在4ghz下,功率密度高达32w /mm,功率附加效率(PAE)为55%。当缩放到较大的外围时,在2 GHz时获得了149w的总输出功率。现代通信应用也要求功率器件具有高线性度。在这里,我们展示了gan沟道hemt在高达108V的偏置下具有不同FP长度的线性性能。
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引用次数: 12
Air-stable chemical doping of carbon nanotube transistors [CNFETs] 空气稳定碳纳米管晶体管的化学掺杂
J. Chen, C. Klinke, A. Afzali, P. Avouris
In this paper, we have successfully demonstrated, for the first time, air-stable chemical p-doping of CNFETs via charge transfer; introduced tunability of the V/sub th/, transformed scaled CNFETs from ambipolar to unipolar, improved I/sub on/ by 2-3 orders of magnitude, suppressed minority carrier injection (immunity from drain induced I/sub off/ degradation from intrinsic Schottky barrier CNFET), yielding an excellent I/sub on//I/sub off/ ratio of 10/sup 6/, and demonstrated excellent DIBL-like behavior.
在本文中,我们首次成功地通过电荷转移证明了cnfet的空气稳定化学p掺杂;引入了V/sub /的可调性,将缩放后的CNFET从双极性转换为单极性,将I/sub - on/提高了2-3个数量级,抑制了少数载流子注入(从固有肖特基势阱CNFET引起的I/sub - off/降解的免疫),产生了10/sup 6/的优异I/sub - on//I/sub - off/比率,并表现出优异的dibl样行为。
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引用次数: 10
A new fabrication method for self-aligned nanoscale I-MOS (impact-ionization MOS) 一种自对准纳米I-MOS(冲击电离MOS)制备新方法
W. Choi, B. Choi, D. Woo, J. Lee, Byung-Gook Park
I-MOS uses modulation of the avalanche breakdown voltage of a gated p-i-n structure to control the output current. Because the p-n junction barrier lowering is not the mechanism of current flow control in the device, it can reduce the subthreshold swing to less than 60 mV/dec at room temperature. However, there are two main obstacles to scale the I-MOS down to nanoscale regime: 1) the source and drain are made up of different types of dopants; 2) the i-region, which is not overlapped by the gate, lies between channel and source. Therefore, in the conventional I-MOS process, the gate, the source and the drain cannot be self-aligned. In this paper, a 130 nm n-channel I-MOS was fabricated for the first time using a novel self-aligned fabrication method. It showed normal transistor operation with dramatically small subthreshold swing (7.2 mV/dec) at room temperature. In addition, to make the I-MOS more practical, we also proposed a novel biasing scheme based on the device physics.
I-MOS采用门控p-i-n结构的雪崩击穿电压调制来控制输出电流。由于该器件中p-n结势垒降低不是电流控制的机制,因此在室温下可以将亚阈值摆幅降低到60 mV/dec以下。然而,将I-MOS缩小到纳米级存在两个主要障碍:1)源极和漏极由不同类型的掺杂剂组成;2) i区位于通道和源之间,不与栅极重叠。因此,在传统的I-MOS工艺中,栅极、源极和漏极不能自对准。本文采用一种新颖的自对准制备方法,首次制备了130 nm的n沟道I-MOS。在室温下,晶体管工作正常,亚阈值摆幅极小(7.2 mV/dec)。此外,为了使I-MOS更加实用,我们还提出了一种基于器件物理的新型偏置方案。
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引用次数: 19
Single-monolayer inkjetted oligothiophene organic TFTs exhibiting high performance and low leakage 具有高性能、低泄漏的单-单层喷墨低硫有机tft
P. Chang, Mole Se, A. Murphy, J. Fréchet, V. Subramanian
Through the use of a novel oligothiophene precursor, we have demonstrated organic TFTs exhibiting relatively high mobility while simultaneously retaining ultra-low leakage and excellent on-off ratios. The unique tendency of this material to self-assemble into a crystalline morphology allows non-uniform printed droplets to reorganize into high-quality monolayers. The resulting structure provides excellent electrostatic characteristics, ideal for low power analog applications.
通过使用一种新型的低聚噻吩前驱体,我们证明了有机tft具有相对高的迁移率,同时保持超低泄漏和优异的通断比。这种材料自组装成晶体形态的独特趋势允许不均匀的印刷液滴重新组织成高质量的单层。由此产生的结构具有优异的静电特性,是低功耗模拟应用的理想选择。
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引用次数: 7
Physical limits on binary logic switch scaling 二进制逻辑开关缩放的物理限制
C. Lent, Mo Liu, J. Timler
We examine the scaling limits of energy dissipation in a specific and concrete physical model - that of clocked quantum-dot cellular automata (QCA). Prototype QCA devices exist and have demonstrated true power gain, an essential feature for any general-purpose computational technology. Though present devices operate at cryogenic temperatures, much work has been done on molecular implementations which can operate at room temperature and are notably smaller than 1.5 nm. QCA represents a radical departure from CMOS, but is still a charge-based binary approach. We solve the equations of motion for the system in the presence of a thermal environment with no a priori assumptions about energy flow. We show directly the effect of the logical structure of the calculation on the heat generated by a circuit. These calculations point to the real nature of the thermodynamic limitations of scaling binary logic devices and suggest strategies for achieving the ultimate limits of device scaling.
我们研究了一个特定的和具体的物理模型-时钟量子点元胞自动机(QCA)的能量耗散的缩放极限。QCA原型设备已经存在,并且已经证明了真正的功率增益,这是任何通用计算技术的基本特征。虽然目前的器件在低温下工作,但在室温下工作的分子实现方面已经做了很多工作,特别是小于1.5 nm。QCA代表了对CMOS的彻底背离,但仍然是基于电荷的二元方法。我们解了系统在热环境下的运动方程,没有关于能量流的先验假设。我们直接展示了计算的逻辑结构对电路产生的热量的影响。这些计算指出了缩放二进制逻辑器件的热力学限制的真实本质,并提出了实现器件缩放的最终限制的策略。
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引用次数: 2
Characteristics of high-performance 1.0 /spl mu/m and 1.3 /spl mu/m quantum dot lasers: impact of p-doping and tunnel injection 高性能1.0 /spl μ m和1.3 /spl μ m量子点激光器的特性:p掺杂和隧道注入的影响
S. Fathpour, Z. Mi, S. Chakrabarti, P. Bhattacharya, A. R. Kovsh, S. Mikhrin, I. Krestnikov, A. Kozhukhov, N. Ledentsov
There is a need to understand the performance limitations and the role of special techniques to enhance quantum dot (QD) laser performance. In this context, we have examined the role of p-doping in the dots and tunnel injection of electrons into the active dots in the lasers. Utilizing these techniques, we demonstrate QD lasers with zero temperature dependence of the threshold current (T/sub 0/=/spl infin/) and the output slope efficiency and small signal modulation bandwidth /spl cong/25 GHz. It is apparent that an optimal level of p-doping, combined with tunnel injection, will lead to lasers with high modulation bandwidth, zero chirp and very high T/sub 0/. These results are presented and discussed.
有必要了解性能限制和特殊技术的作用,以提高量子点(QD)激光的性能。在这种情况下,我们研究了p掺杂在点中的作用以及在激光器中向有源点注入电子的隧道。利用这些技术,我们展示了阈值电流(T/sub 0/=/spl infin/)和输出斜率效率与小信号调制带宽/spl长/25 GHz零温度依赖的QD激光器。很明显,最佳水平的p掺杂与隧道注入相结合,将导致具有高调制带宽,零啁啾和非常高的T/sub 0/的激光器。对这些结果进行了介绍和讨论。
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引用次数: 1
期刊
Conference Digest [Includes 'Late News Papers' volume] Device Research Conference, 2004. 62nd DRC.
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