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1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings最新文献

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Two-stage fast focus method for mask registration
M. G. He, A. Harvey
For mask registration, we require matching between masks to be fast and reliable. By using coarse/fine search, the process can be speeded up but reach a point where the search speed is maximised while the process is still reliable. A two-stage probability based fast focus search strategy is proposed for mask matching in binary or grey scale images to further increase the search step while maintaining reliability of the process.
对于掩码注册,我们要求掩码之间的匹配快速可靠。通过使用粗/细搜索,可以加快过程,但达到搜索速度最大化的程度,同时过程仍然可靠。提出了一种基于两阶段概率的快速焦点搜索策略,用于二值或灰度图像的掩模匹配,在保证过程可靠性的同时,进一步增加了搜索步长。
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引用次数: 0
High-performance microprocessor packaging in the year 2000: technical and economic barriers and alternatives 高性能微处理器封装在2000年:技术和经济壁垒和替代品
B. Siu
By the year 2000, computers capable of >1000 MIPs and operating at >500 MHz are on the horizon. As the microprocessor becomes more powerful, major technical and economic challenges in packaging technologies are evident. In this paper, we trace the emergence of the microprocessor by examining the technical and economical drivers. It is seen that specialized material processes and designs are required to package a high-performance microprocessor. Low-cost materials with low dielectric constant and high electrical and thermal conductivity metallization are required to meet these objectives. As microprocessor architectures migrate towards closely-coupled CPU/cache requiring more than one VLSI, the multichip module is emerging/re-emerging as a requirement.
到2000年,能够>1000 MIPs和>500 MHz操作的计算机即将出现。随着微处理器变得越来越强大,封装技术的主要技术和经济挑战是显而易见的。在本文中,我们通过检查技术和经济驱动因素来追溯微处理器的出现。可见,封装高性能微处理器需要专门的材料工艺和设计。为了达到这些目标,需要低介电常数和高导电性和导热性金属化的低成本材料。随着微处理器架构向需要多个VLSI的紧密耦合CPU/缓存迁移,多芯片模块正在作为一种需求出现/重新出现。
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引用次数: 2
Studies on reducing leakage current of large-area silicon PIN microstrip sensors-methods to prevent implantation damage 减小大面积硅PIN微带传感器漏电流的研究——防止植入损伤的方法
Wen-Chin Tsay, Yen-Ann Chen, Jyh-Wong Hong, A. Chen, W. Lin, Y.H. Chang, S. Hou, S. Hsu, C.R. Li, Hsien-Jen Ting, Song-Tsang Chiang
Several 8/spl times/4 cm/sup 2/ single-sided silicon microstrip sensors with capacitor coupling and polysilicon bias resistors have been fabricated by using planar technology. Sirtl etch analysis revealed that the leakage current was caused by implantation damage. A boron solid source predeposition process has been developed to replace the p/sup +/ strip implantation. Several anneal technologies have been studied to remove the implantation damge. The prototype sensors have been tested at the CERN SPS area. Test results showed that such a sensor is feasible.
利用平面技术制备了几种具有电容耦合和多晶硅偏置电阻的8/spl倍/4 cm/sup / 2/单面硅微带传感器。Sirtl腐蚀分析表明,泄漏电流是由植入损伤引起的。开发了硼固体源预沉积工艺,以取代p/sup +/带状注入工艺。研究了几种消除注入损伤的退火工艺。原型传感器已经在欧洲核子研究中心SPS区域进行了测试。测试结果表明,该传感器是可行的。
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引用次数: 0
Ar laser annealing of sputtered Si films for TFT applications 用于TFT的溅射Si薄膜的氩激光退火
Sun Zhen, K. Tong, H. Cho, Y. Wong, L. Tsang, P. W. Chan
We have shown that r.f. sputtered Si films crystallized by cw Ar/sup +/ laser irradiation is a suitable material for fabrication of polysilicon TFTs. Polycrystalline Si film with proper annealing condition has a high Hall mobility up to 120 cm/sup 2//V-s in p-type samples. The dependence of dark conductivity on temperature suggests that much reduced trap density in laser-annealed Si films is the reason for the high mobility, despite the fact that the grain size is only 30 nm.
研究结果表明,连续波Ar/sup +/激光辐照结晶的射频溅射Si薄膜是制备多晶硅tft的理想材料。在p型样品中,在适当的退火条件下,多晶Si薄膜的霍尔迁移率高达120 cm/sup 2//V-s。暗电导率对温度的依赖性表明,尽管晶粒尺寸仅为30 nm,但激光退火Si薄膜中的陷阱密度大大降低是高迁移率的原因。
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引用次数: 2
An improved circuit for high performance dc-dc/ac converters 一种高性能dc-dc/ac变换器的改进电路
Jian Liu, Zhiming Chen, Y. Zhong
Switched-capacitor DC-to-DC converters can be improved by voltage-tracking-control (VTC) regulation to get high performance. The new type of converter overcomes the drawbacks, such as small ratio of conversion, high sensitivity to parameters of the circuit elements, difficult to control output ripple, etc., which usually exist in conventional switched-capacitor converters. The new approach presented here can also realize DC-to-AC conversion without any substantial change in the circuit.
开关电容dc - dc变换器可以通过电压跟踪控制(VTC)调节来改善其性能。这种新型变换器克服了传统开关电容变换器存在的转换比小、对电路元件参数敏感性高、输出纹波难以控制等缺点。本文提出的新方法也可以实现直流到交流的转换,而无需对电路进行任何实质性的改变。
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引用次数: 5
Non-radial non-uniformity in chemo-mechanical polishing 化学机械抛光的非径向不均匀性
V. Huang, C. Nguyen, A. Chan, C. C. Ling, S.S. Wong
Within-wafer non-uniformity due to chemo-mechanical polishing (CMP) is classified in this paper as belonging to two classes: radially symmetric (radial), and not radially symmetric (non-radial). While radial non-uniformity has been well-treated both theoretically and empirically in the literature, the equally important problem of non-radial non-uniformity has received little attention. We identify the significance of the latter here through a series of CMP experiments, and propose a straightforward intermediate solution.
本文将化学机械抛光(CMP)引起的晶圆内不均匀性分为径向对称(径向)和非径向对称(非径向)两类。虽然径向非均匀性在理论和经验上都得到了很好的处理,但同样重要的非径向非均匀性问题却很少受到关注。我们通过一系列的CMP实验确定了后者的重要性,并提出了一个简单的中间解决方案。
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引用次数: 0
Uniqueness of the feasible voltage solutions for radial power networks 径向电网可行电压解的唯一性
Jiann-Fuh Chen, Wei-Ming Wang
The planning and operation of a distribution system depends heavily on the load flow solutions obtained. In this paper, the uniqueness of feasible voltage solution and its stability limit of radial distribution networks is analyzed. The DistFlow method is employed to find the load flow solutions for radial power networks. By this method, an equivalent 2-bus network can be obtained during the solving process. It is proposed that only one feasible voltage solution exists for a radial power network. Moreover, the feasibility can be judged directly from the sign of the Jacobian determinant of the equivalent 2-bus network obtained. A 22-bus practical system was tested to justify the approach.
配电网的规划和运行在很大程度上取决于所得到的潮流解。本文分析了径向配电网可行电压解的唯一性及其稳定性极限。采用DistFlow方法求解径向电网的潮流问题。通过这种方法,在求解过程中可以得到等效的2总线网络。提出了径向电网只有一个可行的电压解。此外,从得到的等效双母线网络的雅可比行列式的符号可以直接判断该方法的可行性。对一个22总线的实际系统进行了测试,证明了该方法的合理性。
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引用次数: 4
PROLIFERATION OF FABRICATION PLANTS IN THE ASIA-PACIFIC REGION 制造工厂在亚太地区的扩散
C. Tam
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引用次数: 0
A novel SOI CBiCMOS compatible device structure for analog and mixed-mode circuits 一种用于模拟和混合模式电路的新型SOI CBiCMOS兼容器件结构
M. Chan, S. Fung, C. Hu, P. Ko
A novel SOI CBiCMOS compatible structure has been developed which can be operated as both an MOS and lateral bipolar transistor. During the MOS operation, the new structure provides a very effective body contact to eliminate the floating-body effects such as I-V kink, low breakdown voltage and the anomalous subthreshold characteristics. In the bipolar mode, the structure provides a very efficient base contact with low base resistance compared to most existing base contact schemes.
提出了一种新型的SOI CBiCMOS兼容结构,可以同时作为MOS和侧双极晶体管工作。在MOS工作过程中,该结构提供了非常有效的体接触,消除了I-V结、低击穿电压和异常亚阈值特性等浮体效应。在双极模式下,与大多数现有的基极接触方案相比,该结构提供了非常有效的基极接触,基极电阻低。
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引用次数: 0
Australian MMIC prototyping in the 40, 60 and 90 GHz bands 40,60和90ghz频段的澳大利亚MMIC原型
G. Griffiths, J. Archer
Demand is growing rapidly, worldwide, for wideband telecommunications services, stimulated in part by the availability of new microwave technologies. Millimetre-wave transceivers based on GaAs monolithic microwave integrated circuits (MMICs) are a key component of these wideband systems. The CSIRO Division of Radiophysics offers an MMIC design and prototyping service which provides a low-risk entry point for those wishing to develop integrated millimetre-wave components. This paper demonstrates CSIRO's highly competitive capability for innovation in GaAs MMIC technology.
全球对宽带电信服务的需求正在迅速增长,部分原因是新的微波技术的出现。基于GaAs单片微波集成电路(mmic)的毫米波收发器是这些宽带系统的关键部件。CSIRO放射物理部门提供MMIC设计和原型服务,为那些希望开发集成毫米波组件的人提供低风险的入口点。本文论证了CSIRO在GaAs MMIC技术创新方面具有很强的竞争力。
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引用次数: 8
期刊
1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings
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