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2010 Proceedings 60th Electronic Components and Technology Conference (ECTC)最新文献

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Evaluation of electromigration (EM) life of ENEPIG and CuSOP surface finishes with various solder bump materials 不同凸点材料的ENEPIG和CuSOP表面处理的电迁移(EM)寿命评估
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490713
Dong Wook Kim, J. K. J. Lee, Myung-June Lee, S. Pai, Stan Chen, F. Kuo
Eutectic PbSn solder joints assembled with CuSOP and ENEPIG surface finished substrates were tested at three different temperatures and input currents to predict EM life. Estimated EM life of CuSOP with PbSn solder system is 3 to 4 X longer than that of ENEPIG surface finish. Both EM failures in solder bumps are caused by void formation at the current crowding area and propagation mechanism, however, they exhibited two distinct failure modes. The Eutectic bump with ENEPIG finish failed due to the UBM over-consumption as a result of reaction of Ni with Sn while the EM failure of bumps assembled with CuSOP was caused by the crack created between bulk and Ni3Sn4 IMC. Nevertheless, the UBM was kept intact in the latter case. The difference of UBM consumption rate induced by Cu influx from the substrate is identified as the main reason of this performance difference. The failure mechanisms of both EM failures were proposed and discussed in details.
用CuSOP和ENEPIG表面加工衬底组装的共晶PbSn焊点在三种不同的温度和输入电流下进行了测试,以预测EM寿命。使用PbSn焊料系统的CuSOP的EM寿命比使用ENEPIG表面处理的CuSOP的EM寿命长3到4倍。锡点的电磁破坏都是由电流拥挤区形成的空洞和扩展机制引起的,但它们表现出两种不同的破坏模式。带有ENEPIG的共晶凸包由于Ni与Sn反应导致UBM过度消耗而失效,而带有CuSOP的凸包由于本体与Ni3Sn4 IMC之间产生裂纹而导致EM失效。然而,后一种情况下,UBM完好无损。基材Cu流入引起的UBM消耗速率差异是造成这种性能差异的主要原因。提出并详细讨论了两种电磁破坏的破坏机制。
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引用次数: 8
CMOS compatible thin wafer processing using temporary mechanical wafer, adhesive and laser release of thin chips/wafers for 3D integration CMOS兼容薄晶圆加工采用临时机械晶圆、粘合剂和激光释放的薄芯片/晶圆进行3D集成
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490820
B. Dang, P. Andry, C. Tsang, J. Maria, R. Polastre, R. Trzcinski, A. Prabhakar, J. Knickerbocker
This paper reports a thin wafer handling technology that is compatible to CMOS processing conditions to enable 3D integration and assembly with high throughput at low cost. Using pulsed ultraviolet (UV) radiation from excimer lasers, device wafers as thin as 50µm can be released from the temporary mechanical handler wafer in less than 1min. Bonding, adhesive, debonding and post debond clean processes were demonstrated. CMOS circuit test vehicles were shown to be compatible with this temporary bonding and debonding processes.
本文报道了一种与CMOS加工条件兼容的薄晶圆处理技术,以低成本实现高通量的3D集成和组装。利用准分子激光器的脉冲紫外线(UV)辐射,可以在不到1分钟的时间内从临时机械处理晶圆中释放出厚度为50µm的器件晶圆。演示了粘接、粘接、脱粘和脱粘后的清洁过程。CMOS电路测试车辆被证明与这种临时粘接和脱粘接工艺兼容。
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引用次数: 38
Assessment of residual damage in leadfree electronics subjected to multiple thermal environments of thermal aging and thermal cycling 热老化和热循环等多种热环境下无铅电子产品的残余损伤评估
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490907
P. Lall, R. Vaidya, V. More, K. Goebel, J. Suhling
Electronic systems are often stored for long periods prior to deployment in the intended environment. Aging has been previously shown to effect the reliability and constitutive behavior of second-level leadfree interconnects. Deployed systems may be subjected to cyclic thermo-mechanical loads subsequent to deployment. Prognostication of accrued damage and assessment of residual life is extremely critical for ultra-high reliability systems in which the cost of failure is too high. The presented methodology uses leading indicators of failure based on microstructural evolution of damage to identify impending failure in electronic systems subjected to sequential stresses of thermal aging and thermal cycling. The methodology has been demonstrated on area-array ball-grid array test assemblies with Sn3Ag0.5Cu interconnects subjected to thermal aging at 125°C and thermal cycling from −55 to 125°C for various lengths of time and cycles. Damage equivalency methodologies have been developed to map damage accrued in thermal aging to the reduction in thermo-mechanical cyclic life based on damage proxies. Assemblies have been prognosticated to assess the error with interrogation of system state and assessment of residual life. Prognostic metrics including α-λ metric, sample standard deviation, mean square error, mean absolute percentage error, average bias, relative accuracy, and cumulative relative accuracy have been used to compare the performance of the damage proxies.
电子系统在部署到预期的环境之前,通常要存储很长时间。老化已经被证明会影响二级无铅互连的可靠性和本构行为。部署后的系统可能会受到循环热机械负荷的影响。对于失效成本过高的超高可靠性系统,累积损伤的预测和剩余寿命的评估是至关重要的。提出的方法使用基于损伤微观结构演变的主要失效指标来识别受热老化和热循环顺序应力影响的电子系统即将发生的失效。该方法已在具有Sn3Ag0.5Cu互连的区域阵列球栅阵列测试组件上进行了验证,测试组件在125°C下进行了热老化,并在- 55至125°C之间进行了不同长度的时间和周期的热循环。损伤等效方法已经被开发出来,将热老化过程中累积的损伤映射到基于损伤代理的热-机械循环寿命的减少。通过对系统状态的询问和剩余寿命的评估,对装配进行了预测,以评估误差。预后指标包括α-λ度量、样本标准差、均方误差、平均绝对百分比误差、平均偏差、相对精度和累积相对精度,用于比较损害代理的性能。
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引用次数: 16
Tungsten as a CMOS compatible catalyst for the Metal-assisted Chemical Etching of silicon to create 2D and 3D nanostructures 钨作为CMOS兼容催化剂,用于硅的金属辅助化学蚀刻,以创建2D和3D纳米结构
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490739
O. Hildreth, C. Álvarez, C. Wong
This paper demonstrates the use of tungsten as a viable, low cost catalyst for Metal-assisted Chemical Etching (MaCE) of silicon to create high aspect ratio nanostructures in silicon. The effect of etchant composition and etching time is reported along with Scanning Electron Microscope (SEM) and Atomic Force Microscopy (AFM) images confirming that tungsten acted as a catalyst for MaCE.
本文展示了钨作为一种可行的、低成本的催化剂,用于硅的金属辅助化学蚀刻(MaCE),以在硅中产生高纵横比的纳米结构。通过扫描电镜(SEM)和原子力显微镜(AFM)分析,证实了钨作为MaCE催化剂的作用。
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引用次数: 5
Influence of bonding atmosphere on low-temperature wafer bonding 键合气氛对低温晶圆键合的影响
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490936
Yinghui Wang, T. Suga
The influence of bonding atmosphere was investigated for the wafer bonding at 25~200°C using a surface activated bonding method. The results of the analysis of activated Si surfaces under different vacuum background and the residual gases in vacuum before and after Ar fast atom beam irradiation is reported. Based on the analysis, bonding of Si wafers in nitrogen atmosphere is demonstrated with showing the effect of the timing of nitrogen introduction into the bonding chamber. The bonding energy of the bonded Si-Si wafer may reach 2 J/m2 under the vacuum pressure of 5 × 10−5 Pa and N2 atmosphere by controlling the exposure time and the residual gas of water to less than 5 × 10−4 Pa-s. Using Au or Cu thin-films can reduce the influence of bonding atmosphere. Bond interfaces with few voids can be achieved, which is benefit on diffusion and plastic deformation of the Au or Cu thin-films.
采用表面活化键合法,研究了在25~200℃条件下,键合气氛对晶圆键合的影响。本文报道了不同真空背景下活化硅表面和氩快原子束辐照前后真空残余气体的分析结果。在此基础上,研究了硅晶片在氮气气氛下的键合过程,并展示了氮气引入时间对键合室的影响。通过控制曝光时间和水残余气体小于5 × 10−4 Pa-s,在5 × 10−5 Pa和N2气氛的真空压力下,硅硅晶片的键合能可达到2 J/m2。使用Au或Cu薄膜可以减少键合气氛的影响。可以形成孔洞较少的键合界面,有利于Au或Cu薄膜的扩散和塑性变形。
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引用次数: 2
Inductance properties of silicon-in-grown horizontal carbon nanotubes 硅生长水平碳纳米管的电感特性
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490649
Minghui Sun, Zhiyong Xiao, Y. Chai, Yuan Li, P. Chan
In this study, we investigated the inductance properties of as-grown horizontal MWNT arrays with different length and width combinations. Statistical data processing was employed to explore the relationship between kinetic inductance and dimension of CNT arrays. We have experimentally confirmed that kinetic inductance forward scales with the length of CNTs and reversely scales with the number of CNTs in parallel. This work provides a systematic experimental study of CNT kinetic inductance and provides useful data for further investigating the possibility of using CNT-based inductors in RFIC.
在这项研究中,我们研究了不同长度和宽度组合的生长水平MWNT阵列的电感特性。采用统计数据处理方法探讨了碳纳米管阵列的动态电感与尺寸之间的关系。我们通过实验证实,动态电感与碳纳米管的长度成正比,与碳纳米管的数量成反比。这项工作提供了一个系统的碳纳米管动态电感的实验研究,并为进一步研究在RFIC中使用碳纳米管电感器的可能性提供了有用的数据。
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引用次数: 4
Neural network modeling to predict quality and reliability for BGA solder joints BGA焊点质量和可靠性预测的神经网络建模
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490772
S. Meyer, H. Wohlrabe, K. Wolter
Quality is major competitive advantages in today's business environment. Engineering tasks encompasses the assurance of quality and reliability. Therefore, one goal is the prediction and modeling of quality and later on reliability of systems, subsystems and components. An approach of quality and reliability assurance uses failure prevention and process control, which by itself is based on quality data and technological understanding. The bases for quality and reliability prediction are information about used materials, design parameters and process parameters as well as the underlying relationships. Analyzing these data for underlying relationships between control parameters (materials and process setups), monitoring parameters (such as humidity) and target variables is one approach to assure quality output. Within this paper neural networks for analyzing relationships are investigated. Two types of neural networks are investigated which are namely back propagation networks (BPNN) and secondly radial basis function networks (RBFNN). The test objects are BGA solder joints which are manufactured using different process setups and materials. As quality measure the ratio of voids in a solder joint is used. The criterion for good prediction quality is the ability of generalization of the depicted models when applying new data to it.
质量是当今商业环境中的主要竞争优势。工程任务包括质量和可靠性的保证。因此,一个目标是对系统、子系统和组件的质量以及后来的可靠性进行预测和建模。质量和可靠性保证的一种方法是使用故障预防和过程控制,这本身是基于质量数据和技术理解。质量和可靠性预测的基础是有关所用材料、设计参数和工艺参数及其内在关系的信息。分析这些数据以了解控制参数(材料和工艺设置)、监测参数(如湿度)和目标变量之间的潜在关系,是确保质量输出的一种方法。本文研究了用于关系分析的神经网络。研究了两类神经网络,即反向传播网络(BPNN)和径向基函数网络(RBFNN)。测试对象是使用不同工艺设置和材料制造的BGA焊点。作为质量的衡量标准,焊点的空隙率是常用的。良好预测质量的标准是将新数据应用于所描述模型时的泛化能力。
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引用次数: 3
Three dimensional air-gap structures for MEMS packaging MEMS封装的三维气隙结构
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490722
R. Saha, N. Fritz, S. Bidstrup-Allen, P. Kohl
Air-gap structures are of interest in a range of microelectronic applications especially in microelectromechanical systems (MEMS). In this work, we investigate the application of an unique trimaterial for MEMS packaging composed of polypropylene carbonate (PPC) as a sacrificial material, a photosensitive, hybrid inorganic/organic dielectric epoxycyclohexyl polyhedral oligomeric silsesquioxanes (POSS) as the overcoat material, and Al/Cr-Cu thin metal film as a hermetic seal. POSS was used both for patterning the PPC over the structures as well as a stable overcoat material thus reducing the complexity of the fabrication process. A wide range of device sizes and structures (from 20 × 100 µm to 600 × 1000 µm) were fabricated and the processing protocol was found to be compliant over these size/structure variations. Metal adhesion on the overcoat was substantially improved by using low power oxygen plasma for short durations. Cavity-strength was evaluated for different metals and thicknesses. An increase of 5.6 times in cavity-strength was observed for a thicker (3X) Al metal film. Current work is focused on implementing the wafer-level air-cavity package into a lead frame packaged MEMS device through injection and compression molding techniques.
气隙结构在微电子领域的应用非常广泛,特别是在微机电系统(MEMS)中。在这项工作中,我们研究了一种独特的MEMS封装材料的应用,该材料由碳酸聚丙烯(PPC)作为牺牲材料,光敏,无机/有机杂化介电环氧环己基多面体低聚硅氧烷(POSS)作为涂层材料,Al/Cr-Cu薄金属薄膜作为密封材料组成。POSS既用于在结构上绘制PPC图案,也用于稳定的涂层材料,从而降低了制造过程的复杂性。制造了广泛的器件尺寸和结构(从20 × 100 μ m到600 × 1000 μ m),并且发现处理方案符合这些尺寸/结构变化。在短时间内使用低功率氧等离子体,可以显著提高涂层上金属的附着力。对不同金属和厚度的空腔强度进行了评估。较厚的(3X) Al金属膜的空腔强度增加了5.6倍。目前的工作重点是通过注射和压缩成型技术将晶圆级空腔封装实现到引线框架封装的MEMS器件中。
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引用次数: 2
Integrated power electronics using a ferrite-based low-temperature co-fired ceramic materials system 采用基于铁氧体的低温共烧陶瓷材料系统集成电力电子器件
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490764
A. Roesler, J. Schare, Chad Hettler, D. Abel, G. Slama, D. Schofield
This paper discusses a new approach to making hybrid power electronic circuits by combining a low-temperature (850°C to 950°C) co-fired ceramic (LTCC) substrate, planar LTCC ferrite transformers/inductors and integrated passive components into a multilayer monolithic package using a ferrite-based LTCC material system. A ferrite tape functions as the base material for this LTCC system. The material system includes physically and chemically compatible dielectric paste, dielectric tape and conductor materials which can be co-fired with the base ferrite LTCC tape to create sintered devices with excellent magnetic coupling, high permeability (~400), high resistivity (> 1012 Ω·cm) and good saturation (~0.3 T). The co-fired ferrite and dielectric materials can be used as a substrate for attaching or housing semiconductor components and other discrete devices that are part of the power electronics system. Furthermore, the ability to co-fire the ferrite with dielectric and conductor materials allows for the incorporation of embedded passives in the multilayer structure to create hybrid power electronic circuits. Overall this thick film material set offers a unique approach to making hybrid power electronics and could potentially allow a size reduction for many commercial dc-dc converter and other power electronic circuits.
本文讨论了一种制造混合电力电子电路的新方法,该方法将低温(850°C至950°C)共烧陶瓷(LTCC)衬底,平面LTCC铁氧体变压器/电感器和集成无源元件结合使用基于铁氧体的LTCC材料系统集成到多层单片封装中。铁氧体带作为LTCC系统的基础材料。该材料体系包括物理和化学相容的介电浆料、介电带和导体材料,它们可与基铁氧体LTCC带共烧,以创建具有优异磁耦合、高磁导率(~400)、高电阻率(> 1012 Ω·cm)和良好的饱和度(~0.3 T)。共烧铁氧体和介电材料可用作衬底,用于连接或容纳半导体元件和其他分立器件,这些器件是电力电子系统的一部分。此外,铁氧体与介电和导体材料共烧的能力允许在多层结构中加入嵌入式无源,以创建混合电力电子电路。总的来说,这种厚膜材料为制造混合电力电子产品提供了一种独特的方法,并有可能使许多商用dc-dc转换器和其他电力电子电路的尺寸减小。
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引用次数: 7
An evaluation of die crack risk of over-molded packages due to external impact 外部冲击对过模件模具裂纹风险的评价
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490767
P. Su, Boaz Khan, Min Ding
Component failures due to physical damage to the silicon are occasionally observed on board assembly processes. Such failures typically are not detected until electrical testing is performed at the end of the process, making it challenging to identify where and how such damages could occur. While process steps are designed to apply the lowest force possible on components, excessive load can be introduced by unexpected events such as machine malfunction or accidental external impact. For over-molded packages, particularly for packages with a large die and thin mold cap thickness, protection for such abnormal impact is reduced and even low levels of force can induce damage to the silicon. In this work, impact test is performed on two types of over-molded packages that have different die and package geometries. External load is applied on the top of the packages through the drop of a probe from different heights. The damages induced in the silicon are evaluated with ultrasonic scan and cross-section. The results from these analytical steps will help identify the threshold force for the die crack failures. A finite element model is constructed to simulate the impact test for one of the packages. The time-history of the load is analyzed and the maximum stress levels in the silicon for the different drop heights are compared. Two different mold cap thicknesses are also simulated. By comparing the stress levels from the model and the real-life testing results, we are able to obtain general guidelines for the maximal impact allowed for the package investigated in this study and provide references for analysis of future failures.
由于硅的物理损坏导致的组件故障在板载组装过程中偶尔会观察到。此类故障通常要到最后进行电气测试时才会被检测到,这使得确定此类损坏可能发生的位置和方式具有挑战性。虽然工艺步骤旨在对组件施加尽可能低的力,但意外事件(如机器故障或意外的外部冲击)可能会引入过度负载。对于过度成型的封装,特别是对于具有大模具和薄模盖厚度的封装,对这种异常冲击的保护减少,即使低水平的力也会导致硅的损坏。在这项工作中,对两种具有不同模具和包装几何形状的复模封装进行了冲击试验。外部负载通过探头从不同高度的下降施加在封装的顶部。采用超声扫描和横截面法对硅的损伤进行了评价。这些分析步骤的结果将有助于确定模具裂纹失效的阈值力。建立了一个有限元模型来模拟其中一个包装的冲击试验。分析了载荷的时程,比较了不同跌落高度下硅片的最大应力水平。两种不同的模盖厚度也进行了模拟。通过比较模型的应力水平和实际测试结果,我们能够得到本研究中所研究的包装允许的最大冲击的一般准则,并为分析未来的失效提供参考。
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引用次数: 1
期刊
2010 Proceedings 60th Electronic Components and Technology Conference (ECTC)
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