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2010 Proceedings 60th Electronic Components and Technology Conference (ECTC)最新文献

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High speed touch screen panels (TSPs) assembly using anisotropic conductive adhesives (ACAs) vertical ultrasonic bonding method 高速触摸屏面板(tsp)组装采用各向异性导电胶粘剂(ACAs)垂直超声粘接方法
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490683
Seunghwan Kim, Kiwon Lee, K. Paik
In this study, the effects of vertical ultrasonic (VUS) bonding parameters such as vibration amplitudes and bonding pressures were investigated and optimized in terms of thermal deformation of TSP polymer substrates, electrical continuity, and pull adhesion strength of anisotropic conductive adhesive (ACA) joints. And the reliability of VUS bonded TSP ACA joints were evaluated at various test conditions. As the vertical ultrasonic vibration was applied, ACA temperatures rapidly increased due to the spontaneous heat generation in the ACA itself and surrounding polymers. The ultrasonic vibration showed significant effects on the peak temperature of the ACA layers, and the bonding pressure affected the heating rates. By adjusting both ultrasonic vibration and bonding pressure, the ACA temperature could be successfully controlled. In terms of thermal deformation, VUS bonding showed no severe thermal deformation of TSPs up to 120°C which is much higher than the Tg of polyethylene terephthalates (PETs) which are the base material of TSPs. In terms of electrical continuity of the ACA joints, VUS bonded TSPs showed stable electrical resistances at 2 MPa bonding pressures, and there were no significant effects of vibration amplitudes and bonding times on contact resistances. At the same time, VUS bonded TSPs showed strong adhesion at the ACA joints with 1 second bonding time at 7.5 um vibration amplitude and 2 MPa bonding pressure. During the FPCB pull test, VUS bonded TSPs showed higher than 3 kgf pull strengths. Therefore, VUS bonding parameters were optimized at 7.5 um vibration amplitude, 2 MPa bonding pressure, and 1 second bonding time in terms of PET thermal deformation, electrical continuity and pull adhesion strength of the TSP ACA joints. With the optimized parameters, various reliability tests were conducted such as thermal shock test, salt spray test, high temperature/high humidity test, high temperature storage test and writing test. After each test, the VUS bonded TSPs showed no significant changes in electrical resistance compared with those of thermo-compression bonding. As a summary, the VUS method can be successfully used in TSPs assembly with no thermal damages, higher speed assembly and good reliability.
本研究从TSP聚合物基板的热变形、电连续性和各向异性导电胶(ACA)接头的拉接强度三个方面考察并优化了垂直超声(VUS)键合参数(振动振幅和键合压力)对TSP聚合物基板的影响。并在各种试验条件下对VUS键合TSP ACA接头的可靠性进行了评价。当施加垂直超声振动时,由于ACA本身和周围聚合物的自发热,ACA的温度迅速升高。超声振动对ACA层的峰值温度有显著影响,键合压力对加热速率有显著影响。通过调节超声振动和键合压力,可以成功地控制ACA的温度。在热变形方面,VUS键合在120°C时,tsp没有出现严重的热变形,远高于tsp的基材聚对苯二甲酸乙二醇酯(pet)的Tg。在ACA接头的电连续性方面,VUS键合的tsp在2 MPa键合压力下具有稳定的电阻,振动幅度和键合次数对接触电阻没有显著影响。同时,VUS键合的tsp在振动振幅为7.5 um、键合压力为2 MPa、键合时间为1秒时,在ACA接头处表现出较强的附着力。在FPCB拉拔测试中,VUS键合tsp的拉拔强度高于3kgf。因此,从TSP ACA接头的PET热变形、电连续性和拉接强度三个方面对7.5 um振动幅值、2 MPa键合压力、1 s键合时间下的VUS键合参数进行了优化。利用优化后的参数,进行了热冲击试验、盐雾试验、高温/高湿试验、高温贮存试验和书写试验等各项可靠性试验。每次测试后,VUS键合的tsp与热压键合的tsp相比,电阻没有明显变化。综上所述,VUS方法可以成功地用于tsp装配,没有热损伤,装配速度快,可靠性好。
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引用次数: 2
Dense 24 TX + 24 RX fiber-coupled optical module based on a holey CMOS transceiver IC 基于有孔CMOS收发器集成电路的致密24tx + 24rx光耦合模块
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490966
F. Doany, C. Schow, Benjamin G. Lee, A. Rylyakov, C. Jahnes, Y. Kwark, C. Baks, D. Kuchta, J. Kash
A novel, compact 48-channel optical transceiver module has been designed and fabricated. At the heart of the assembly is a “holey” Optochip — a single-chip CMOS transceiver integrated circuit (IC) with 24 receiver and 24 laser driver circuits each with a corresponding through-substrate optical via (hole). The holes enable 24-channel 850-nm VCSEL and photodiode (PD) arrays to be directly flipchip soldered to the CMOS IC with substrate-side optical I/O through the otherwise absorbing bulk silicon substrate. This feature of the holey Optochip not only facilitates direct fiber-coupling to a standard 4 × 12 MMF (multimode fiber) array through a 2-lens optical system, but also maximizes highspeed performance through the close integration of the VCSEL and PD devices with the CMOS amplifier circuits. Furthermore, the holey Optochip is directly compatible with current mass-produced 850-nm VCSELs and photodiodes. These Optochips were packaged into complete modules by flip-chip soldering to high-density, high-speed organic carriers using a process very similar to standard C4 soldering used for electrical ICs. The full assembly of the Optomodule involves further attachment to a pin grid array pluggable connector. Electrical characterization of Optomodules plugged into a test circuit board incorporating the socket half of the connector was carried out and dc electrical characterization showed fully operational 24 transmitter (TX) + 24 receiver (RX) Optomodules with uniform performance for all devices within the module. High-speed characterization of all 48-channels (ch) showed good performance up to 12.5 Gb/s/ch. At 12.5Gb/s/ch, an aggregate data rate 300 Gb/s TX + 300 Gb/s RX is provided by the holey Optomodule.
设计并制作了一种新型的、紧凑的48通道光收发模块。该组件的核心是一个“孔”光芯片——一个带有24个接收器和24个激光驱动电路的单芯片CMOS收发器集成电路(IC),每个电路都有一个相应的穿过基板的光学通孔(孔)。这些孔使24通道850纳米VCSEL和光电二极管(PD)阵列能够通过吸收体硅衬底直接倒装焊接到具有基板侧光学I/O的CMOS IC上。这一特性不仅有利于通过双透镜光学系统将光纤直接耦合到标准的4 × 12 MMF(多模光纤)阵列,而且还通过将VCSEL和PD器件与CMOS放大器电路紧密集成,实现了高速性能的最大化。此外,该芯片可与目前量产的850纳米vcsel和光电二极管直接兼容。这些光电芯片被封装成完整的模块,通过倒装芯片焊接到高密度、高速的有机载体上,使用非常类似于用于电子集成电路的标准C4焊接工艺。Optomodule的完整组装包括进一步连接到引脚网格阵列可插拔连接器。将光电模块插入到包含连接器一半插座的测试电路板上进行电学表征,直流电学表征显示,模块内所有设备的24个发射器(TX) + 24个接收器(RX)完全可运行。所有48通道(ch)的高速特性显示出高达12.5 Gb/s/ch的良好性能。在12.5Gb/s/ch下,有孔的Optomodule提供了300 Gb/s TX + 300 Gb/s RX的总数据速率。
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引用次数: 15
Development of rigid-flex and multilayer flex for electronic packaging 电子封装用刚性挠性和多层挠性的发展
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490911
R. Das, F. Egitto, B. Wilson, M. Poliks, V. Markovich
Recent development work on flex joining using different pre-pregs is highlighted, particularly with respect to their integration in laminate chip carrier substrates, and the reliability of the joints formed between the rigid and flex surfaces. A variety of rigid-flex structures were fabricated, with 1 to 3 flex layers laminated into printed wiring board substrates. Photographs and optical microscopy were used to investigate the joining, bending, and failure mechanism. Flexibility decreased with increasing number of metal layers. The flexibility of the various flexes was characterized by roll diameter and bend angle. Flex substrates exhibited roll diameter with polyimide dielectric as low as 180 mils for 2 metal layers, and as high as 1300 mils for 6 metal layers. Similarly, bending for 12 metal layers flex with thin and thick dielectric were <1 inch and >1 inch, respectively. Reliability of the rigid-flex was ascertained by IR-reflow, thermal cycling, pressure cooker test (PCT), and solder shock. There was no delamination for Resin coated copper (rigid)-polyimide (flex) samples after IR-reflow, PCT, and solder shock. The paper also describes a novel approach for the fabrication of flexible electronics on PDMS substrates. It was found that with increasing thickness, the flexibility of the polydimethylsiloxane (PDMS) based substrate decreased less due to stretching property of PDMS. The present process evaluates the fabrication of PDMS substrates using different circuit lines and spaces.
强调了使用不同预浸料的柔性连接的最新发展工作,特别是关于它们在层压板芯片载体基板中的集成,以及在刚性和柔性表面之间形成的连接的可靠性。制作了各种刚性-柔性结构,将1至3个柔性层层合到印刷线路板基板上。使用照片和光学显微镜研究了连接、弯曲和破坏机制。柔韧性随金属层数的增加而降低。各种挠度的柔度以辊径和弯曲角为特征。具有聚酰亚胺介电介质的柔性基板的辊径低至180密尔(2金属层),高至1300密尔(6金属层)。同样,12个金属层在薄介质和厚介质下弯曲的弯曲度分别为1英寸。通过红外回流、热循环、压力锅试验(PCT)和焊料冲击来确定刚性弯曲的可靠性。经ir回流、PCT和焊接冲击后,树脂涂层铜(刚性)-聚酰亚胺(柔性)样品没有分层现象。本文还介绍了一种在PDMS基板上制造柔性电子器件的新方法。研究发现,随着厚度的增加,聚二甲基硅氧烷(PDMS)基基底的柔韧性下降幅度较小,这是由于PDMS的拉伸特性所致。本工艺评估了PDMS基板的制造使用不同的电路线路和空间。
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引用次数: 9
A comparison of thin film polymers for Wafer Level Packaging 晶圆级封装用薄膜聚合物的比较
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490751
M. Töpper, T. Fischer, T. Baumgartner, H. Reichl
Polymers are a key building block for all WLP and related technologies like IPD (integrated passives devices) and 3D-SiP (system in Package). A couple of different classes of photo-sensitive polymeric materials are available for the integration, for example: Polyimide (PI), Polybenzoxazole (PBO), Benzocyclobuten (BCB), Silicones, Acrylates and Epoxy. A list of commercially available polymers will be compared in this paper with the focus of processing, material properties and reliability. Curing and the resulting shrinkage play an important role due to temperature sensitive devices and the topography of the metallization which have to be passivated. Test structures have been designed to measure planarization with respect to different feature sizes. In addition Cu compatibility is very important to polymer processing to avoid Cu migration. The mechanical properties have a strong influence on the reliability of non-underfilled WLP. There are different failure modes using different polymers for WLP on FR4 boards. Most important material properties are elongation to break and tensile strength. This is much less important for WLP if an underfiller is used.
聚合物是所有WLP和相关技术(如IPD(集成无源器件)和3D-SiP(封装系统))的关键组成部分。有几种不同类别的光敏聚合材料可用于集成,例如:聚酰亚胺(PI)、聚苯并恶唑(PBO)、苯并环丁烯(BCB)、硅酮、丙烯酸酯和环氧树脂。本文将比较市面上可买到的聚合物,重点是加工、材料性能和可靠性。由于温度敏感装置和金属化的地形必须钝化,固化和由此产生的收缩起着重要的作用。测试结构被设计用来测量相对于不同特征尺寸的平面化。此外,铜的相容性对于避免铜的迁移也是非常重要的。力学性能对未充分填充的WLP的可靠性有很大影响。在FR4板上使用不同聚合物的WLP存在不同的失效模式。最重要的材料性能是断裂伸长率和抗拉强度。如果使用衬底填料,这对WLP来说就不那么重要了。
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引用次数: 66
A multidisciplinary approach for effective packaging of MEMS accelerometer MEMS加速度计有效封装的多学科方法
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490850
Jian Wen, V. Sarihan, B. Myers, Gary Li
Micro-electro-mechanical systems (MEMS) packaging is becoming increasingly critical and plays a major role in the successful commercialization of MEMS product. The packaging system should eable the MEMS perform the sensing function and at the same time protect it from the environmental disturbance, and help improve product quality to the sub-ppm level. One of our accelerometers in an SOIC package experienced a low ppm occurrence of device fracture. This MEMS package is unique in that the package has to maintain a certain resonance frequency to protect the transducer from sticking or clipping. At the same time, the package has to deliver a reliable and intact transducer with no cracking or output offset. A multidisciplinary approach inclusive of vibration analysis, electrical response determination, stress analysis, and fracture mechanics was used to determine the appropriate die attach material to completely resolve the device fracture issue.
微机电系统(MEMS)封装正变得越来越重要,并在MEMS产品的成功商业化中起着重要作用。封装系统应能使MEMS发挥传感功能,同时保护其免受环境干扰,并有助于将产品质量提高到亚ppm水平。我们在SOIC封装中的一个加速度计发生了低ppm的器件断裂。这种MEMS封装的独特之处在于,封装必须保持一定的谐振频率,以保护换能器不被粘住或夹住。同时,封装必须提供可靠和完整的传感器,没有破裂或输出偏移。采用包括振动分析、电响应测定、应力分析和断裂力学在内的多学科方法来确定合适的模具附着材料,以彻底解决器件断裂问题。
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引用次数: 4
Demonstration of a novel hybrid silicon-resin high density interconnect (HDI) substrate 一种新型杂化硅树脂高密度互连(HDI)衬底的展示
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490727
B. Smith, P. Kwok, J. Thompson, A. Mueller, L. Rácz
We examine the thermomechanical tradeoffs in a novel technology for high density interconnect (HDI) substrates. Fabricated from silicon (Si) wafers with planar cavities of highly-filled composite encapsulant, the technology leverages established Si photolithography but offers improved mechanical properties. Modules are subject to thermomechanical stress during encapsulant cure, assembly reflow, module fabrication, and operation. We show that improvements in junction-to-ambient sinking offset the heat density increase in such systems and low expansion encapsulants prevent failure during cure. We employ finite element modeling and materials testing to show the effect of wafer design and material selection on the stresses in the module.
我们研究了高密度互连(HDI)衬底的一种新技术的热机械权衡。该技术由硅(Si)晶圆和高度填充的复合封装剂的平面腔制成,利用了现有的硅光刻技术,但提供了改进的机械性能。在密封剂固化、组装回流、模块制造和操作过程中,模块受到热机械应力的影响。我们表明,结向环境下沉的改进抵消了此类系统中热密度的增加,并且低膨胀封装剂可以防止固化过程中的故障。我们采用有限元建模和材料测试来展示晶片设计和材料选择对模块内应力的影响。
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引用次数: 4
NCF for wafer lamination process in higher density electronic packages 高密度电子封装晶圆层积工艺的NCF
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490708
K. Honda, T. Enomoto, A. Nagai, N. Takano
We have developed a novel NCF (Non Conductive Film) which can be applied to the wafer lamination process and shows the excellent bondability & reliability. For lamination processability, we improved the transparency of NCF in order to recognize the dicing pattern or alignment marks on wafer through NCF. As a result, NCF-laminated wafer can be diced simultaneously and smoothly. For the bondability, the use of the high heat-resistant components and the optimization of the hardenability and viscosity made it possible to form the excellent bonding part and fill the narrow gap between chip & substrate without voids even at the high temperature condition (>300 degC for 1s) of Au-Sn eutectic bonding. For the reliability, we found that a kind of antioxidant prevented remarkably the electrochemical migration at finer pitch wiring and we confirmed the good electronic insulation property up to 25 μm pitch. Furthermore, the addition of the flux component into NCF enabled Cu-solder bonding. From these features, this NCF is expected to be a promising material for the high density electronic packages including 3D package with TSV (Through Silicon Via) [1–3].
我们开发了一种新型的NCF(不导电薄膜),可以应用于晶圆层合工艺,并显示出优异的粘合性和可靠性。为了提高层压的可加工性,我们提高了NCF的透明度,以便通过NCF识别晶圆上的切割图案或对中标记。结果表明,nfc层合硅片可同时顺利切割。在粘接性能方面,采用高耐热组分,优化淬透性和黏度,使得即使在金锡共晶粘接的高温条件下(>300℃,1s),也能形成优良的粘接部分,填补芯片与衬底之间的狭窄缝隙,无空隙。在可靠性方面,我们发现一种抗氧剂显著地阻止了细间距布线的电化学迁移,并证实了在25 μm间距内具有良好的电子绝缘性能。此外,在NCF中添加助焊剂成分使Cu-solder键合成为可能。从这些特点来看,这种NCF有望成为高密度电子封装的一种有前途的材料,包括具有TSV (Through Silicon Via)的3D封装[1-3]。
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引用次数: 10
Terahertz packaging: Study of substrates for novel component designs 太赫兹封装:新元件设计的基板研究
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490763
J. Hejase, P. Paladhi, P. Chahal
This paper will examine a new side to packaging: Terahertz (THz) Packaging. The goal of this paper is three fold: 1) characterizing dielectric materials for THz packaging applications; 2) Using these materials in the fabrication of THz passives (integrated and quasi-optical); and 3) Demonstrating non-destructive evaluation of packages using THz. In this manuscript, detailed characteristics of dielectric packaging materials in the THz spectral region are presented along with the theory used for the characterization procedure. THz non destructive evaluation (NDE) of electronics packages is observed in the form of delamination thickness detection and moisture content studies. Using the materials characterized, a planar THz power splitter and a quasi-optical THz bandstop interference filter are demonstrated. Furthermore, the power splitter is used as a THz microfluidic sensor.
本文将研究包装的一个新的方面:太赫兹(THz)包装。本文的目标有三个方面:1)表征太赫兹封装应用的介电材料;2)利用这些材料制造太赫兹无源器件(集成和准光学);3)演示使用太赫兹对包装进行无损评估。在这篇论文中,详细介绍了介质封装材料在太赫兹光谱区域的特性,以及用于表征过程的理论。电子封装的太赫兹无损评价(NDE)以分层厚度检测和含水率研究的形式进行。利用所表征的材料,设计了一个平面太赫兹功率分路器和一个准光学太赫兹带阻干涉滤光器。此外,该功率分配器被用作太赫兹微流控传感器。
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引用次数: 6
Design of wideband bandpass filters using Si-BCB technology for millimeter-wave applications 采用Si-BCB技术设计用于毫米波应用的宽带带通滤波器
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490922
Rui Li, T. Lim, S. W. Ho, Y. Xiong, D. Pinjala
This paper presents the design of two types of wideband bandpass filters with different bandwidths for millimeter-wave D-band applications. The proposed filters are implemented on a three-layer structure deposited on a 400-µm silicon (Si) bulk with benzocyclobutene (BCB) as the substrate. The characteristics of the basic structures for these two types of bandpass filters, a square ring resonator and a stub-loaded multiple-mode resonator (MMR), are studied. The bandpass filters are implemented and measured, and the measurement results agree with the simulations well and exhibit bandpass filtering responses at 134.3 GHz and 132.8 GHz, with fractional bandwidths of 25.7% and 34.3%, respectively.
本文设计了两种不同带宽的毫米波d波段宽带带通滤波器。所提出的滤波器是在以苯并环丁烯(BCB)为衬底的400微米硅(Si)块上沉积的三层结构上实现的。研究了两种带通滤波器的基本结构,即方环谐振器和桩负载多模谐振器(MMR)。实现并测量了带通滤波器,测量结果与仿真结果吻合较好,在134.3 GHz和132.8 GHz处表现出带通滤波响应,分数带宽分别为25.7%和34.3%。
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引用次数: 6
A synchrotron micro-diffraction investigation of crystallographic texture of high-Sn alloy films and its effects on whisker growth 用同步微衍射研究高锡合金薄膜的晶体织构及其对晶须生长的影响
Pub Date : 2010-06-01 DOI: 10.1109/ECTC.2010.5490896
P. Sarobol, A. Pedigo, J. Blendell, C. Handwerker, P. Su, Li Li, J. Xue
For electroplated Sn and Sn alloy finishes, one of the reliability concerns remains the risk of whisker growth. Results from recent work have suggested that whiskers are most likely to form in regions of the films where high stress or a stress gradient exists. If strain/stress distribution information can be collected at a grain-by-grain level, correlations between such information and the propensity of whisker growth can be further understood. In this work, we utilized a highly focused X-ray beam from a synchrotron source to perform micro-diffraction on a series of Sn and Sn-containing finishes. The high brightness and small beam size of the X-ray enabled the generation of grain-by-grain orientation map as well as the strain/stress levels in individual grains. The electroplated finishes analyzed included pure Sn, Sn-Cu, and Sn-Cu-Pb finishes with various concentrations of Cu and Pb. Plating current density was also varied for each finish composition and the textures of these finishes were compared. After plating, these finishes were stored at ambient condition and examined regularly for surface defect formation. Once hillock or whisker growth was observed, the areas surrounding the growth were scanned with the X-ray. Additionally, these samples were also analyzed with standard X-ray diffraction and inverse pole figures were generated to compare the texture of the samples. A finite element model was also generated to simulate the texture of the finishes. By implementing the stiffness matrix of the finishes, we were able to explicitly implement the variation of finish texture on a grain-by-grain basis, and thus assess the strain/stress distribution in the finish. The analytical and simulation results from this study suggest that plating process parameters such as current density have a significant impact on the crystallographic texture of the plated finishes. Under similar strain conditions, certain textures would generate higher stresses in the finishes and result in higher levels of whisker growth.
对于电镀锡和锡合金表面,可靠性问题之一仍然是晶须生长的风险。最近的研究结果表明,晶须最有可能在薄膜中存在高应力或应力梯度的区域形成。如果能逐粒收集应变/应力分布信息,则可以进一步了解这些信息与晶须生长倾向之间的相关性。在这项工作中,我们利用来自同步加速器源的高度聚焦x射线束对一系列锡和含锡表面进行微衍射。x射线的高亮度和小光束尺寸能够生成逐粒的取向图以及单个颗粒的应变/应力水平。所分析的电镀饰面包括纯Sn、Sn-Cu和Sn-Cu-Pb饰面,其中含有不同浓度的Cu和Pb。镀层电流密度随镀层成分的变化而变化,并对镀层的纹理进行了比较。电镀后,这些表面处理被保存在环境条件下,并定期检查表面缺陷的形成。一旦观察到小丘或晶须生长,就用x射线扫描生长周围的区域。此外,还对这些样品进行了标准x射线衍射分析,并生成了反极图来比较样品的纹理。还生成了一个有限元模型来模拟饰面的纹理。通过实现饰面刚度矩阵,我们能够明确地实现饰面纹理的逐粒变化,从而评估饰面中的应变/应力分布。本研究的分析和模拟结果表明,电镀工艺参数(如电流密度)对镀层的晶体结构有显著影响。在相似的应变条件下,某些织构会在成品中产生更高的应力,从而导致更高水平的晶须生长。
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引用次数: 8
期刊
2010 Proceedings 60th Electronic Components and Technology Conference (ECTC)
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