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2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)最新文献

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Design for maximum power transfer efficiency of thermoelectric generators using mixed mode simulations 利用混合模式模拟设计热电发电机的最大功率传输效率
G. Capeans, P. López, E. Ferro, A. Garcia Loureiro, D. Cabello, F. Rivadulla, B. Rivas‐Murias
Coupled simulations of both thermal and electrical processes are employed to perform reliable estimations of the harvesting capabilities of a novel thermoelectric generator concept based on the use of p- and n-type materials films of nanometric thickness separated by a dielectric layer. The doping and geometrical parameters of the device are optimized to maximize the thermoelectrical properties while guaranteeing optimal power transfer efficiency with the use of mixed mode simulations in conventional CAD tools.
热电过程的耦合模拟被用来对一种新型热电发电机概念的收获能力进行可靠的估计,该概念基于使用由介电层隔开的纳米厚度的p和n型材料薄膜。通过在传统CAD工具中使用混合模式模拟,优化了器件的掺杂和几何参数,以最大限度地提高热电性能,同时保证最佳的功率传输效率。
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引用次数: 3
Master curve synthesis by effective viscoelastic plastic material modeling 用有效粘弹塑性材料建模合成主曲线
F. Schindler-Saefkow, R. Pantou, G. Schlottig, Sridhar Kumar, T. Brunschwiler, J. Keller, B. Wunderle, S. Rzepka
Finite Element Simulations of highly integrated and large electronics packages with detailed elastic-plastic material modeling of thousands of solder balls are still challenging tasks for today's computation systems. The complex geometry and mesh and the usage of time consuming creep laws for solder materials makes it nearly impossible to calculate different geometries or process parameters. This paper describes a method to reduce the complexity of the mesh in the region of the solder balls and surrounding underfill with one simple block physically described as a viscoelastic material. Therefore a viscoelastic/plastic behavior of a complex unit cell was modeled in a temperature dependent harmonic frequency sweep or relaxation simulation. The reaction of the unit cell was utilized to synthesize the master curve, Prony coefficients and shift function to an effective material model. Finally an error estimation of the unit cell approach was carried out. Therefore a reliability simulation was modeled replacing the solder balls and the surrounding underfill by the effective material. A flip chip on FR4 model with underfill was used to benchmark the effective material model approach against detailed models without any complexity reduction. The results show that the introduced effective material approach can be used to cut down computation time significantly without losing accuracy in life time prediction.
对高度集成的大型电子封装进行有限元模拟,并对数千个焊接球进行详细的弹塑性材料建模,对于当今的计算系统来说仍然是一项具有挑战性的任务。复杂的几何形状和网格以及耗时的蠕变规律的使用使得计算不同的几何形状或工艺参数几乎是不可能的。本文描述了一种方法,以减少在焊接球和周围的下填土区域网格的复杂性,用一个简单的块物理上描述为粘弹性材料。因此,在温度相关的谐波频率扫描或松弛模拟中,模拟了复杂单元胞的粘弹/塑性行为。利用单元胞的反应将主曲线、proony系数和移位函数合成为有效的材料模型。最后对单元格方法进行了误差估计。在此基础上,建立了以有效材料代替焊球和周围的下填土的可靠性仿真模型。在没有任何复杂性降低的情况下,使用带下填的FR4模型上的倒装芯片对有效材料模型方法和详细模型进行基准测试。结果表明,引入的有效材料法可以在不影响寿命预测精度的前提下显著减少计算时间。
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引用次数: 2
High cycle fatigue testing and modelling of sputtered aluminium thin films on vibrating silicon MEMS cantilevers 溅射铝薄膜在振动硅MEMS悬臂梁上的高周疲劳试验与建模
T. Onken, J. Heilmann, T. Bieniek, R. Pufall, B. Wunderle
Aluminium is still one of the most important contact metallisations for power electronic chips like MOSFETs or IGBTs. With a large difference in thermal expansion coefficients (CTEs) between aluminium and silicon and the temperatures generated in hot-spots during high power transients, these layers are prone to failure due to thermo-mechanical fatigue. So far, lifetime modelling was done by subjecting dedicated test specimens to the thermal cycling one would expect during normal operation. This paper will propose a novel method for creating accelerated lifetime models of thin aluminium films within the high-cycle fatigue regime by isothermal mechanical loads. The specially designed test stand is suggested to complement or replace expensive and lengthy thermal cycling and allow in-situ monitoring of failure indicators.
铝仍然是电力电子芯片(如mosfet或igbt)最重要的接触金属材料之一。由于铝和硅之间的热膨胀系数(cte)差异很大,并且在高功率瞬态时热点产生的温度很高,这些层容易因热机械疲劳而失效。到目前为止,寿命建模是通过将专用的测试样品置于正常运行期间预期的热循环中来完成的。本文将提出一种利用等温机械载荷建立高周疲劳状态下铝薄膜加速寿命模型的新方法。特别设计的试验台建议补充或取代昂贵和漫长的热循环,并允许现场监测故障指标。
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引用次数: 6
Fatigue crack growth modeling in the metallization of power semiconductors under cyclic thermo-mechanical loading 循环热机械载荷下功率半导体金属化疲劳裂纹扩展模型
M. Springer, M. Nelhiebel, H. Pettermann
Power semiconductors may be subjected to short electric overload pulses during operation, which induce very high temperatures and temperature gradients in the multilayer chip structure. This can lead to material degradation in the ductile metallization and repetitive overload conditions can result in overheating and destruction of the device. A unified approach is presented predicting material degradation in terms of fatigue crack nucleation and fatigue crack propagation, to identify a tolerable number of electric overload pules during operation. Fatigue Indicators based on mechanical quantities are utilized to identify locations of material failure in the power metallization and material degradation is modeled. Repetitive loading leads to an evolving damage zone. The proposed approach is implemented within the framework of the Finite Element Method and exemplified at a simplified, generic metallization stack.
功率半导体在工作过程中可能会受到短过载脉冲的影响,从而在多层芯片结构中产生非常高的温度和温度梯度。这可能导致韧性金属化中的材料退化,重复过载条件可能导致设备过热和破坏。提出了一种从疲劳裂纹形核和疲劳裂纹扩展两方面预测材料退化的统一方法,以确定工作过程中可容忍的电过载脉冲数。利用基于力学量的疲劳指标来识别粉末金属化过程中材料失效的位置,并建立了材料退化模型。重复加载导致损伤区域不断演变。所提出的方法是在有限元法的框架内实现的,并在一个简化的通用金属化堆栈上进行了举例说明。
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引用次数: 0
Automatic derivation of multiharmonic formulations for nonlinear electromechanical problems with time dependent mesh deformation 具有时变网格变形的非线性机电问题多谐公式的自动推导
A. Halbach, C. Geuzaine
This paper describes a method to automatically derive multiharmonic finite element formulations for coupled, nonlinear electromechanical problems. It focuses on models of electrically actuated micromembranes using both a staggered and a monolithic Newton iteration scheme. Two- and three-dimensional examples highlight the main properties of the proposed method.
本文描述了一种自动导出耦合非线性机电问题多谐有限元公式的方法。它着重于使用交错和单片牛顿迭代方案的电驱动微膜模型。二维和三维实例突出了所提方法的主要特性。
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引用次数: 1
CTE measurements for 3D package substrates using Digital Image Correlation 使用数字图像相关技术对3D封装基板进行CTE测量
A. Salahouelhadj, M. Gonzalez
Thermo-mechanical stresses are often induced during processing of IC-packages. This is mainly due the Coefficient of Thermal Expansion (CTE) mismatch between the materials used to make these packages. Therefore, accurate CTE measurements is of great importance. In this study in-plane CTE measurements were conducted for thin film samples using Digital Image Correlation (DIC). The methodology was validated using copper test samples. Two different package substrates were characterized. DIC technique was compared to Thermal Mechanical Analysis (TMA) technique. The CTE measured by DIC is about 25-33% higher than TMA. Finally, some experimental and numerical tests were conducted to assess errors related to DIC technique. Both numerical and experimental tests, based on rigid-body motion were conducted. They allow to assess the errors related to lighting, the optical lens distortion, the noise due to CCD sensor and heat radiation, the out-of-plane displacement and the correlation algorithm.
热机械应力是集成电路封装过程中经常产生的应力。这主要是由于用于制造这些封装的材料之间的热膨胀系数(CTE)不匹配。因此,精确的CTE测量非常重要。在本研究中,使用数字图像相关(DIC)对薄膜样品进行了平面内CTE测量。用铜试样对方法进行了验证。对两种不同的封装衬底进行了表征。将DIC技术与热力学分析(TMA)技术进行比较。DIC测得的CTE比TMA约高25-33%。最后,进行了一些实验和数值测试来评估与DIC技术相关的误差。基于刚体运动进行了数值和实验测试。它们允许评估与照明、光学透镜畸变、CCD传感器和热辐射引起的噪声、面外位移和相关算法有关的误差。
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引用次数: 7
Wafer Level Chip Scale Packaging: Thermo-mechanical failure modes, challenges & guidelines 晶圆级芯片规模封装:热机械失效模式,挑战和指南
S. Gallois-Garreignot, V. Fiori, Gil Provent, R. Gonella
WLCSP (Wafer Level Chip Scale Packaging) is used to enable low-cost manufacturing and a high performance featuring low I/O density. Such a solution provides a solder interconnection directly between the die and motherboard. This paper aims at presenting the specificities of this new assembly by describing the most common thermo-mechanical failures encountered and by proposing some containment solutions and ways of improvement. Despite its advantages, this solution raises particular thermo-mechanical failures. Cracking of passivation or under layers, humidity penetration and/or delamination from the die edge are some of the main issues generally observed. Moreover, we need to pay extra attention to the die edge since this region is particularly sensitive. Indeed, for Fan-In configuration, the die is exposed to the atmosphere (no molding compound surrounding the die), leading to chemical contamination and cracks. Numerous causes are involved: e.g. non-optimized sawing process and weakness of the seal ring structure (i.e. metal pattern surrounding the die and providing mechanical and chemical shields). Furthermore, due to the bump and passivation layer proximities, some interactions may exist with the BEoL stack itself. FEM (Finite Element Method) is carried out, with a particular focus on the Fan-In package. Typical stress fields are provided, giving clues on WLCSP package specificities to mitigate mechanical hazard. Then, following the previously depicted failures, both the die and the passivation edges are comprehensively studied. It is shown that a stress peak is induced by the passivation edge, providing requirements on the deposit strategy (direct or pyramidal) and the edge location. Additionally, it is shown that the residual stress and the thickness of the BEoL passivation layer have also to be reduced and increased respectively.
WLCSP(晶圆级芯片规模封装)用于实现低成本制造和低I/O密度的高性能。这种解决方案提供了直接在芯片和主板之间的焊接互连。本文旨在通过描述所遇到的最常见的热机械故障,并提出一些密封解决方案和改进方法,来介绍这种新组件的特殊性。尽管有其优点,但这种解决方案引起了特殊的热机械故障。钝化或下层开裂、湿度渗透和/或模具边缘的分层是通常观察到的一些主要问题。另外,我们需要特别注意模具边缘,因为这个区域是特别敏感的。事实上,对于扇入配置,模具暴露在大气中(模具周围没有成型化合物),导致化学污染和裂纹。原因有很多:例如,未优化的锯切工艺和密封圈结构的弱点(即模具周围的金属图案,提供机械和化学屏蔽)。此外,由于凹凸层和钝化层的邻近性,可能与BEoL堆栈本身存在一些相互作用。FEM(有限元法)进行,特别关注风扇- in包。提供了典型应力场,为WLCSP包的特性提供了线索,以减轻机械危害。然后,在前面描述的失败之后,对模具和钝化边缘进行了全面研究。结果表明,钝化边缘会诱发应力峰值,从而对沉积策略(直接沉积或金字塔沉积)和边缘位置提出了要求。结果表明,BEoL钝化层的残余应力减小,钝化层厚度增大。
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引用次数: 4
Analytical, numerical and experimental approach to analysis properties of a silicon membrane pressure sensor 用解析、数值和实验方法分析硅膜压力传感器的性能
A. Wymyslowski, A. Gorecka-Drzazga, K. Sareło
There are more and more sophisticated sensors in microsystem applications, which seem to rivet the engineers' attention. There is an extraordinary variety of sensors types which includes pressure, temperature, acceleration processing, optical, magnetic, chemical etc. In a number of sensors the critical sensing element most often is made of a silicon. The mechanical properties of silicon are outstanding and techniques for shaping it into complex three-dimensional structures are well known and mastered from the technological point of view. Most often MEMS sensor are integral part of any electronic system. The main attention of the current research was MEMS silicon pressure sensor based on an optical detection of a membrane deflection, which can be used for a pressure detection in harsh environment. The goal of the work was to apply a numerical simulation along with an analytical analysis, which were finally followed up and validated by the experimental results in order to define the sensor RSM (Response Surface Models) model, which can be used directly in complex numerical prototyping of electronic systems using, e.g. SPICE/VERILOG type of simulators.
微系统应用中有越来越多的精密传感器,这似乎吸引了工程师们的注意力。有各种各样的传感器类型,包括压力,温度,加速处理,光学,磁,化学等。在许多传感器中,关键传感元件通常是由硅制成的。硅的力学性能是突出的,从技术的角度来看,将其塑造成复杂的三维结构的技术是众所周知的。大多数情况下,MEMS传感器是任何电子系统的组成部分。目前研究的重点是基于光学膜挠度检测的MEMS硅压力传感器,该传感器可用于恶劣环境下的压力检测。这项工作的目标是应用数值模拟和分析分析,最后通过实验结果进行跟踪和验证,以定义传感器RSM(响应面模型)模型,该模型可以直接用于电子系统的复杂数值原型,例如SPICE/VERILOG类型的模拟器。
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引用次数: 1
Interface crack propagation between epoxy moulding compound and copper 环氧树脂与铜的界面裂纹扩展
Weihai Zhang, Daoguo Yang, L. Ernst, Bingbing Zhang, Wenbo Yang, M. Cai
For the MMB delamination experiments on CU-EMC interfaces as previously discussed in [1-6], the interface fracture shows the characteristics of a "brittle interface". This is because of the fact that the actual fracture appears between the brittle EMC and the brittle CU-oxides (being present on the CU lead-frame). Low cycle fatigue fracture or sub-critical fracture under cyclic loading conditions is generally considered not to be occurring for "brittle interfaces". Therefore, it was somewhat surprising that in [7] fatigue fracture was reported to occur for CU-EMC interfaces. The reason for this surprising behaviour could possibly be found in the overloading of the CU-substrate above its yield limit or just due to local plastic phenomena in the CU near the crack tip. In such a case the J-Integral value at the crack tip could possibly rise even under non-progressive cyclic loading. In order to research this phenomena for the MMB test of [1-6], a number of cyclic deformation simulations is applied to explore the J-Integral value for the case that the CU-lead-frame is being bend above its yield limit. In this paper following steps will be discussed: As during non-progressive cyclic loading extremely small changes of the J-Integral value are expected to occur and these should be well registered, first a separate comparison of the J-Integral evaluation of the MMB test for 3 different FEM packages is discussed (ANSYS, ABAQUS, MARC). The simulation results for the J-Integral values during non-progressive cyclic loading at room temperature (=Glassy state of the EMC), are evaluated. It occurs that Shake down to Elastic action occurs after the first cycles. As a result, based on the simulation results at room temperature, sub-critical fracture is not likely to occur. It is expected that at high temperatures (=Rubbery state of the EMC) again Shake down to Elastic action will occur after the first few cycles. Consequently, plastic behaviour in the CU is not considered as the root cause of sub-critical fracture. On the other hand, in packages under cyclic loading including high temperature, the exposure at high temperature will be accompanied by continuing aging of the EMC. In parallel research [15] it was found that due to aging of the EMC the deformation and stress state of a package is dramatically changing with time. This dramatically changing state could well be the origin of previously observed sub-critical fracture. Here further research will be required.
在前面[1-6]讨论的CU-EMC界面上的MMB分层实验中,界面断裂表现为“脆性界面”特征。这是因为实际的断裂出现在易碎的EMC和易碎的CU氧化物(存在于CU引线框架上)之间。一般认为“脆性界面”在循环载荷条件下不会发生低周疲劳断裂或亚临界断裂。因此,在[7]中,CU-EMC界面出现疲劳断裂的报道有些令人惊讶。这种令人惊讶的行为的原因可能是CU衬底的过载超过其屈服极限,或者仅仅是由于CU在裂纹尖端附近的局部塑性现象。在这种情况下,即使在非渐进循环加载下,裂纹尖端的j积分值也可能上升。为了在[1-6]的MMB试验中研究这一现象,我们采用了大量的循环变形模拟来探索CU-lead-frame在其屈服极限弯曲情况下的j积分值。本文将讨论以下步骤:由于在非渐进式循环加载期间,预计j -积分值会发生极小的变化,并且这些变化应该被很好地记录下来,因此首先讨论了3种不同FEM软件包(ANSYS, ABAQUS, MARC)的MMB试验的j -积分评估的单独比较。对室温下非渐进式循环加载(电磁兼容的玻璃态)的j积分值进行了仿真计算。在第一个周期之后,会发生摇降到弹性的动作。因此,根据室温下的模拟结果,不太可能发生亚临界断裂。预计在高温下(= EMC的橡胶状态),在最初的几个循环之后,将再次发生摇降到弹性的动作。因此,CU中的塑性行为不被认为是亚临界断裂的根本原因。另一方面,在包括高温在内的循环载荷下的封装,在高温下的暴露会伴随着EMC的持续老化。并行研究[15]发现,由于电磁兼容的老化,封装的变形和应力状态随着时间的推移发生了巨大的变化。这种急剧变化的状态很可能是先前观察到的亚临界断裂的起源。这方面需要进一步的研究。
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引用次数: 3
Thermal dynamic modeling of laser diode cooling system considering surrounding ambient condition 考虑周围环境条件的激光二极管冷却系统热动力学建模
C. Byun, Sangki Park, Yonghan Lee, Sun-Kyu Lee
Laser-driven white lighting consists of blue laser diode (LD) and yellow phosphor, and it is attracting attention as a future lighting technology due to its advantages such as high luminous intensity, efficacy and the possibility of miniaturization. The optical efficiency of LD is highly affected by the temperature, cooling system is critical for many practical applications such as automotive headlamp. This study presents a single phase liquid cooling system which was selected for both higher cooling performance and lower consumption power. Also, a thermal dynamic model was proposed for predicting the LD temperature with experiment to validate the model. The system consists of an LD, heat spreader, heat sink and liquid pump. A heat spreader was designed with liquid cooling channels based on the model in consideration of both the thermal resistance and pressure drop. Also, the effect of surrounding ambient conditions was analyzed for considering real vehicle situation.
激光驱动的白光照明由蓝色激光二极管(LD)和黄色荧光粉组成,由于其发光强度高、效率高、小型化可能性大等优点,作为一种未来的照明技术备受关注。温度对发光二极管的光学效率影响很大,冷却系统在汽车前照灯等许多实际应用中至关重要。本研究提出了一种具有较高冷却性能和较低功耗的单相液冷系统。提出了一种热动力学模型,并通过实验对模型进行了验证。该系统由LD、散热器、散热器和液泵组成。在此基础上,考虑热阻和压降,设计了带液冷通道的散热器。同时,考虑到车辆的实际情况,分析了周围环境条件的影响。
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引用次数: 0
期刊
2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
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