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2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)最新文献

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Temperature control of an SThM micro-probe with an heat source estimator and a lock-in measurement 带有热源估计器和锁定测量的SThM微探针的温度控制
Michel Lenczner, B. Yang, Scott Cogan, S. Domas, D. Ke, Raphaël Couturier, D. Renault, Bernd Koehler, Pawel Janus
In view of qualitative temperature measurement by scanning thermal microscopy, we introduce a model-based control law for a new microfabricated probe. The underlying model is the time-space two-scale electro-thermal model presented in [15], since it has the power to represent transcients of harmonic modulations. The control method accounts for an estimation of the heat source in the sample and for the delay in the lock-in filter based observation. Experiment-based model calibration is a prerequisite and is discussed in detail.
针对扫描热显微镜的定性温度测量,提出了一种基于模型的微探针控制律。其基础模型是[15]中提出的时空双尺度电热模型,因为它具有表征谐波调制瞬态的能力。该控制方法考虑了样品中热源的估计和基于观测的锁相滤波器的延迟。基于实验的模型校准是一个先决条件,并进行了详细的讨论。
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引用次数: 0
Simulating wafer bow for integrated capacitors using a multiscale approach 用多尺度方法模拟集成电容器的晶圆弯曲
A. Wright, F. Krach, N. Thielen, S. Grunler, T. Erlbacher, P. Pichler
To simulate the bow of wafers with integrated capacitors in the form of pit arrays, various approaches were pursued. After unfruitful attempts to reliably obtain the wafer bow directly from simulating part of the wafer, a multi-scale approach was used. In this approach, the layer with the integrated capacitors was replaced by a homogeneous material having the same properties. Small-scale simulations of representative parts of the layer were performed to determine its effective stiffness tensor. Inclusion of the intrinsic strains of the grown and deposited dielectric and conductive layers enabled the volume change to be calculated of the layer with the integrated capacitors upon fabrication. Finally, the structure obtained was used in a full-wafer-scale model to simulate the bow of the wafers. Even for uncalibrated values for the coefficients of thermal expansion, most simulations agreed well with measurements.
为了模拟以凹坑阵列形式集成电容的晶圆弯曲,采用了各种方法。在尝试直接通过模拟部分晶圆来可靠地获得晶圆弯曲后,采用了多尺度方法。在这种方法中,具有集成电容器的层被具有相同性质的均匀材料所取代。对该层的代表性部件进行了小尺度模拟,以确定其有效刚度张量。包含生长和沉积的介电层和导电层的本禀应变,可以在制造时计算具有集成电容器的层的体积变化。最后,将得到的结构用在全晶圆尺度模型上,模拟了晶圆的弯曲。即使对于未校准的热膨胀系数值,大多数模拟也与测量结果吻合得很好。
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引用次数: 1
In-situ cure shrinkage measurement of die attach and underfill materials 模具附着物和底料的原位固化收缩测量
M. van Soestbergen, J. L. M. Llacer Martinez, J. Zaal, A. Mavinkurve
We present a robust method for measuring the cure shrinkage of dispensable organic films in-situ. Samples consist of dispensed organic material (e.g. die attach or underfill) sandwiched between a glass substrate and a silicon die. A Thermal Mechanical Analyzer (TMA) was used to accurately measure the displacement of the die during cure, and to control the temperature. An analytical model has been derived to disentangle the thermal shrinkage, and chemical cure shrinkage, which is verified by surface profile measurements (projection Moiré). We show that the measured displacement can be directly related to the cure shrinkage. To verify this methodology we have characterized a commercially available die attach material. The characterization yields a simultaneous measurement of the magnitude of cure shrinkage and the cure kinetics.
我们提出了一种可靠的方法来测量可有可无的有机薄膜的固化收缩率。样品由夹在玻璃基板和硅模之间的分配有机材料(例如,贴片或下填料)组成。利用热机械分析仪(TMA)精确测量了模具在固化过程中的位移,并对温度进行了控制。导出了一个解析模型来解算热收缩和化学固化收缩,并通过表面轮廓测量(投影莫尔图)进行了验证。结果表明,实测位移与固化收缩率有直接关系。为了验证这种方法,我们对一种市售的模具附加材料进行了表征。表征产生了固化收缩幅度和固化动力学的同时测量。
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引用次数: 0
Multi-physics simulation in high power IGBT module design 大功率IGBT模块设计中的多物理场仿真
Daohui Li, M. Packwood, Fang Qi, Wei Zhou, Yangang Wang, Steve Jones, X. Dai
High power Insulated Gate Bipolar Transistor (IGBT) modules have been utilised in power electronics industrial applications, such as electrical vehicle, traction, renewable energy, et al. The power module with higher power density, higher voltage and current rating, higher switching frequency, higher operation temperature and much lower/higher storage temperature with lower cost is the development tendency driven by the highly competeting market. The standard 3.3kV/1500A single switch IGBT module with 190mm×140mm footprint has been re-designed using latest multiphysics simulation packages together with novel assembly processes and materials to consider electro-magnetic(EM) design, such as partial discharge, low parasitic inductance of module; to design and optimise thermal, mechanical performance of the module.
大功率绝缘栅双极晶体管(IGBT)模块已应用于电力电子工业应用,如电动汽车、牵引、可再生能源等。更高的功率密度、更高的电压和电流额定值、更高的开关频率、更高的工作温度和更低成本的更低/更高的存储温度是市场竞争激烈推动的发展趋势。标准3.3kV/1500A单开关IGBT模块190mm×140mm占地面积已重新设计,采用最新的多物理场仿真包和新颖的组装工艺和材料,考虑电磁(EM)设计,如局部放电,模块的低寄生电感;设计和优化模块的热、机械性能。
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引用次数: 7
On the application of topology optimisation techniques to thermal management of microelectronics systems 拓扑优化技术在微电子系统热管理中的应用
M. Santhanakrishnan, T. Tilford, C. Bailey
In this paper, an autonomous thermal management design process based on a topological optimisation algorithm is presented. The numerical framework uses a finite element multiphysics solver to assess fluid flow and heat transfer, coupled with the Method of Moving Asymptotes approach for topology optimisation. The design framework is utilised to develop a copper heatsink for a simplified electronics package at two differing Reynolds numbers. In both cases, the final shape resembles a tree like structure rather than a more conventional fin structure.
本文提出了一种基于拓扑优化算法的自主热管理设计过程。数值框架使用有限元多物理场求解器来评估流体流动和传热,并结合移动渐近线方法进行拓扑优化。该设计框架用于在两个不同雷诺数下为简化的电子封装开发铜散热器。在这两种情况下,最终的形状都类似于树状结构,而不是更传统的鳍状结构。
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引用次数: 1
Modelling of thermal processes in catalytic gas microsensors implementing a measurement of combustible gas concentration 实现可燃气体浓度测量的催化气体微传感器的热过程建模
A. Kozlov
Thermal processes in catalytic gas microsensors consisting of the micromachined sensitive and reference elements are considered. The modelling procedure for determining the weighted mean temperatures in the elements of the microsensors is proposed. The 2D structure of each element is divided into the regions. The heat differential equation for the regions has the identical form and takes into account two ways of heat power generation: by heater and by catalytic layer. The specific heat power generated in the regions by the heater is determined from consideration of the processes in the Wheatstone bridge circuit with the catalytic gas microsensor. To find the specific heat power generated in the regions with the catalytic layer during oxidation of combustible gas the similarity theory is used. The temperature distribution in the regions is found by using the eigenfunction method and iteration procedure which allows the temperature dependencies of the parameters to take into account. For the catalytic gas microsensor implementing a measurement of methane concentration the following characteristics were determined: the output voltage of the bridge circuit with the catalytic gas microsensor as a function of the methane concentration in air; the dependencies of the weighted mean temperature of the micro-hotplate for each element and the heat power generated in elements on the methane concentration.
研究了由微机械敏感元件和参考元件组成的催化气体微传感器的热过程。提出了确定微传感器元件加权平均温度的建模方法。每个元素的二维结构被划分为区域。该区域的热微分方程具有相同的形式,并考虑了加热器和催化层两种热发电方式。加热器在各区域产生的比热功率是通过考虑带有催化气体微传感器的惠斯通电桥电路的过程来确定的。利用相似理论求解可燃气体氧化过程中有催化层区域的比热功率。利用特征函数法和迭代法,考虑了各参数对温度的依赖关系,得到了各区域的温度分布。对于实现甲烷浓度测量的催化气体微传感器,确定了以下特性:催化气体微传感器桥接电路的输出电压与空气中甲烷浓度的函数关系;各单元微热板的加权平均温度和单元发热量与甲烷浓度的关系。
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引用次数: 0
Thermal-electric-mechanical simulation of a multilevel metallization system 多层金属化系统的热电力学模拟
Yanpeng Liu, K. Weide-Zaage
In modern metallization systems mechanical stress due to CTE mismatch is one of the reliability problems. With the help of finite element simulations the thermal-electrical-mechanical behavior can be calculated. The use of a reference temperature for the stress free state in the simulations is insufficient to determine the stress field in the metallization. The intrinsic stress resulting from the processing is hereby not considered. The simulation of the process steps by the birth and die capability of ANSYS is time consuming and complex. A possibility to consider the intrinsic stress in the metallization system is the use of averaged CTEs from measurements of a multi-level stack depending on the horizontal running direction of the interconnect in the x- or y-direction, or in from literature. The values were taken for a comparison between calculated stress field of the stacked metallization system with process steps and the reference temperature for the stress free state. The achieved simulation results help for a better understanding of the stress behavior.
在现代金属化系统中,由CTE失配引起的机械应力是可靠性问题之一。在有限元模拟的帮助下,可以计算出热电力学性能。在模拟中使用无应力状态的参考温度不足以确定金属化过程中的应力场。在此不考虑加工过程中产生的固有应力。利用ANSYS的生模能力对工艺步骤进行仿真,既耗时又复杂。考虑金属化系统中固有应力的一种可能性是使用多层堆叠测量的平均cte,这取决于互连在x或y方向上的水平运行方向,或根据文献。采用该数值将按工艺步骤计算的叠层金属化体系应力场与无应力状态的参考温度进行比较。得到的模拟结果有助于更好地理解应力行为。
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引用次数: 0
Numerical study of near-optimal parameters of polymeric encapsulation layer containing a periodic array of piezoelectric nanowires used for force sensing 力传感用压电纳米线周期阵列聚合物包封层近最优参数的数值研究
R. Dauksevicius, R. Gaidys, E. O’Reilly, M. Seifikar
This paper presents the results of finite element modeling and analysis of a dynamically loaded array of individually addressable vertical ZnO nanowires (piezo-pixels) encapsulated in a polymer, which is intended to function as a pressure sensor having the purpose of identification of fingerprints with very high spatial resolution. Two multiphysics models were implemented by formulating different conditions of mechanical interfacial coupling between the nanowires and the surrounding polymer (with and without contact interactions). Parametric simulations were conducted in order to predict near-optimal values of polymer Young's modulus and layer thickness in terms of magnitude and variability of electrical signals generated by the nanowires. Numerical results also revealed the impact of different system parameters and load conditions on the electrical response of the nanowires.
本文介绍了一种封装在聚合物中的动态加载的可单独寻址的垂直ZnO纳米线(压电像素)阵列的有限元建模和分析结果,该阵列旨在作为具有极高空间分辨率的指纹识别目的的压力传感器。通过制定纳米线与周围聚合物之间机械界面耦合的不同条件(有和没有接触相互作用),实现了两个多物理场模型。为了预测聚合物杨氏模量和层厚度在纳米线产生的电信号的大小和可变性方面的接近最佳值,进行了参数化模拟。数值结果还揭示了不同系统参数和负载条件对纳米线电响应的影响。
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引用次数: 4
A multi-scale simulation method to predict delamination and adhesion force in UV-nanoimprint lithography 一种预测uv -纳米压印中分层和附着力的多尺度模拟方法
Yinsheng Zhong, Stephen C. T. Kwok, M. Yuen
Nanoimprint lithography (NIL) provides a low cost process for nano-pattern mass production. Polymer filling and de-molding processes determine the quality of the imprinted pattern in NIL. In UV-nanoimprint lithography, low viscous polymer reduces the requirement of imprint pressure in polymer filling. The interaction between pre-patterned mold and UV-curable polymer during de-molding greatly affect the patterning result. Due to the length scale issues, molecular simulation or traditional finite element method cannot individually simulate the de-molding process. Therefore, a multi-scale approach combining both MD simulation and finite element analysis is proposed to predict the adhesion force between the mold and polymer layer in UV-nanoimprint lithography. The present study is focused on incorporating material behavior at the de-molding interface of nano-patterns. Simulation of molecular dynamics is used to calculate the interfacial energy between the polyvinyl alcohol mold and a methacrylate-based resist layer. A stress-displacement curve can be achieved from the slope of the energy-displacement relation. The result is then utilized to characterize the material properties of cohesive zone elements at the finite element model. A contact debonding model is built to simulate the de-molding process. And the model is verified by the results from peel-off experiment.
纳米压印技术为纳米图案的批量生产提供了低成本的工艺。聚合物填充和脱模工艺决定了NIL压印图案的质量。在uv -纳米压印技术中,聚合物的低粘性降低了聚合物填充对压印压力的要求。在脱模过程中,预模与紫外光固化聚合物之间的相互作用对模化效果影响很大。由于长度尺度的问题,分子模拟或传统的有限元方法无法单独模拟脱模过程。因此,提出了一种结合MD模拟和有限元分析的多尺度方法来预测uv -纳米压印工艺中模具与聚合物层之间的附着力。目前的研究主要集中在纳米图案脱模界面处的材料行为。采用分子动力学模拟方法计算了聚乙烯醇模与甲基丙烯酸酯基抗蚀剂层之间的界面能。从能量-位移关系的斜率可以得到应力-位移曲线。然后利用所得结果在有限元模型上表征黏聚区单元的材料特性。建立了接触脱粘模型,模拟了脱模过程。并通过剥离实验对模型进行了验证。
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引用次数: 2
Determination of average heat transfer coefficient value in compact thermal models 紧凑热模型中平均传热系数值的确定
A. Samson, M. Janicki, T. Raszkowski, M. Zubert
The investigations presented in this paper illustrate the problem of modelling the average value of the convective heat transfer coefficient in the case of a free convection cooled power device with a heat sink. The total junction-to-ambient thermal resistance is dominated then by its component reflecting the heat exchange with the ambient at outer surfaces of the heat sink. Therefore, the proper modelling of this physical phenomenon is crucial for the accurate prediction of device junction temperature. Based on obtained temperature measurement results an empirical formula is proposed allowing the determination of the average heat transfer coefficient value in function of the heat sink surface temperature rise.
本文的研究说明了带散热器的自由对流冷却动力装置的对流换热系数平均值的建模问题。总结对环境热阻由其反映散热器外表面与环境热交换的分量决定。因此,这种物理现象的适当建模对于器件结温的准确预测至关重要。根据得到的测温结果,提出了计算平均换热系数随散热器表面温升变化的经验公式。
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引用次数: 3
期刊
2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
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