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2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)最新文献

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Optimization of the transmission yield of the ion optics on a micro mass spectrometer: Simulations and experimental results 离子光学元件在微型质谱仪上透射率的优化:模拟与实验结果
S. Vigne, C. Tassetti, T. Alava, R. Mahieu, M. Gely, B. Desloges, C. Moulin, L. Duraffourg, F. Progent
This work shows the optimization, both by simulations and experimentally of the ion source optics of a miniaturized time-of-flight mass spectrometer. The simulations are used to speed up the experiments and make them more efficient in finding optimal working points. The experimental points agree well with simulations. The ion source is used finally as a linear micro time-of-flight mass spectrometer. Simple gas mixtures are identified efficiently using this system.
本工作通过模拟和实验对小型化飞行时间质谱仪的离子源光学系统进行了优化。仿真可以加快实验速度,使实验更有效地找到最优工作点。实验结果与模拟结果吻合较好。离子源最后用作线性微飞行时间质谱仪。使用该系统可以有效地识别简单的气体混合物。
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引用次数: 0
Study of the thermoelectric properties of non-typical semiconductor materials with conventional CAD tools 利用传统CAD工具研究非典型半导体材料的热电特性
Paula López, A. J. G. Loureiro, E. Ferro, V. Brea, B. Rivas‐Murias
Computer-aided design (CAD) simulation tools offer the advantage of integrating both thermal and electrical simulations facilitating the study of new materials and structures. In this work, we demonstrate the possibility of using conventional electron devices simulation tools to study the thermoelectrical properties of non-typical semiconductor materials, which allows to do predictive parametric analysis of novel device structures without costly experiments. This is illustrated without loss of generality for scandium nitride and strontium titanate. The simulated results are in good agreement with those reported in the literature.
计算机辅助设计(CAD)仿真工具提供了集成热学和电学模拟的优势,促进了新材料和新结构的研究。在这项工作中,我们展示了使用传统电子器件模拟工具来研究非典型半导体材料热电特性的可能性,这使得无需昂贵的实验就可以对新型器件结构进行预测参数分析。这说明了不损失一般性的氮化钪和钛酸锶。模拟结果与文献报道的结果吻合较好。
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引用次数: 1
Modelling methodologies for assessment of 3D inkjet-printed electronics 3D喷墨印刷电子产品评估的建模方法
S. Stoyanov, G. Tourloukis, T. Tilford, C. Bailey
3D printing technologies provide one of the most efficient methods for product design, prototyping and manufacture in a cost-effective, high-throughput, mass-customisation and energy efficient manner. One growing application of 3D printing includes the fabrication, packaging and integration of electronic structures and components. This paper presents modelling methodologies and toolsets that can be used to address some of the present design-for-reliability challenges related to 3D inkjet-printed electronics. The use of advanced capabilities in finite element modelling is proposed and employed in order to predict the mechanical behaviour of cured ink-based materials when deposited sequentially layer-by-layer. Such build-up approach can lead to structural weakness and dimensional inaccuracy in the third dimension due to cure shrinkage. In addition, effects of different process and material parameters on the stress induced in silver ink printed conductive lines under thermal load are analysed. This analysis uses integrated finite element based design-of-simulations approach and response surface modelling. The geometric design of the investigated printed structure are found to be less influential compared with the mechanical properties of the cured insulating material and the magnitude of the temperature load to which the structure is exposed.
3D打印技术为产品设计、原型制作和制造提供了最有效的方法之一,具有成本效益、高通量、大规模定制和节能的方式。3D打印的一个日益增长的应用包括电子结构和组件的制造、包装和集成。本文介绍了建模方法和工具集,可用于解决目前与3D喷墨打印电子产品相关的一些可靠性设计挑战。提出并采用有限元建模的先进功能,以预测固化油墨基材料在逐层沉积时的机械行为。由于固化收缩,这种建立方法可能导致结构薄弱和三维尺寸不准确。此外,还分析了不同工艺和材料参数对银墨印刷导线在热负荷下产生应力的影响。本分析采用基于有限元的综合仿真设计方法和响应面建模。研究发现,与固化绝缘材料的力学性能和结构所承受的温度载荷的大小相比,所研究的印刷结构的几何设计的影响较小。
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引用次数: 5
Design of a MZI Micro-Opto-Mechanical Pressure Sensor for a SiN photonics platform 用于SiN光子平台的MZI微光机械压力传感器的设计
V. Rochus, R. Jansen, J. Goyvaerts, G. Vandenboch, B. van de Voort, P. Neutens, J. Callaghan, H. Tilmans, X. Rottenberg
This paper presents the design of Micro-Opto-Mechanical Pressure Sensors (MOMPS), which can exhibit much improved sensitivity and noise performance compared to their piezoelectric and capacitive counterparts. As the output intensity variation depends on multiple design parameters, such as the radius of the membrane, the position of the waveguide, the wavelength and the phase variation due to the opto-mechanical coupling, we first derive an analytical model which allows to predict the response of the total system. We then use a Finite Element opto-mechanical model to evaluate the variation of the effective refractive index due to the modification of the optical material properties created by mechanical stress as well as to the waveguide shape deformation. Finally, the sensitivity of the device for a single loop MOMPS and for spiral loops configuration is analyzed.
本文介绍了一种微光机械压力传感器(MOMPS)的设计,它比压电式和电容式压力传感器具有更高的灵敏度和噪声性能。由于输出强度的变化取决于多个设计参数,如膜的半径、波导的位置、波长和光-机械耦合引起的相位变化,我们首先推导了一个分析模型,可以预测整个系统的响应。然后,我们使用有限元光力学模型来评估由于机械应力和波导形状变形造成的光学材料特性的改变而导致的有效折射率的变化。最后,分析了该器件在单环MOMPS和螺旋环结构下的灵敏度。
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引用次数: 15
Thermo-mechanical simulation to optimize the integration of a BST stacked MIMIM capacitor 热机械模拟优化BST堆叠式mimm电容器的集成
P. Gardes, F. Roqueta, M. Diatta, P. Martinez, F. Lauron, E. Bouyssou, P. Poveda
For the last decade, paraelectric BaxSr1-xTiO3 (BST) thin films have been especially studied to fabricate MIM capacitor for capacitance tuning applications. This paper describes the mechanisms of cracks apparition under BST stacked MIMIM capacitors (Metal Insulator Metal Insulator Metal) built on silicon substrate. The methodology used in this study to have a further understanding of this phenomenon is to investigate 2D process simulations, based on an elastic model. Hence, it could be evidenced that the gap between the extreme stress levels induced by an annealing performed at the end of the capacitor manufacturing is the main contributor in the crack formation. Then, the change from silicon to a sapphire substrate was implemented to avoid cracks in the real process integration. Finally, the capacitor devices could be tested and were demonstrated to exhibit better electrical specifications.
在过去的十年中,对准电BaxSr1-xTiO3 (BST)薄膜进行了专门的研究,以制造用于电容调谐应用的MIM电容器。本文研究了基于硅衬底的BST叠置电容(Metal Insulator Metal Insulator Metal)产生裂纹的机理。为了进一步理解这一现象,本研究采用了基于弹性模型的二维过程模拟方法。因此,可以证明,在电容器制造结束时进行的退火引起的极端应力水平之间的差距是裂纹形成的主要原因。然后,实现了从硅衬底到蓝宝石衬底的变化,以避免在实际的工艺集成中出现裂缝。最后,电容器器件可以进行测试,并被证明具有更好的电气规格。
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引用次数: 1
Risk assessment of bond pad stacks: Combined utilization of nanoindentation and FE-modeling 键合垫堆的风险评估:纳米压痕和有限元模型的联合应用
J. Albrecht, G. M. Reuther, J. Brueckner, J. Auersperg, S. Rzepka, R. Pufall
Wire bonding as well as wafer probing can lead to oxide layer cracking. In combination with metal migration electrical failures may occur. Loading conditions comparable to the wire bonding process can be achieved using a nanoindenter. In this work a spherical tip has been used at first to determine material properties of the silicon nitride film and also to attain cracking of the film material. Based on the experimental results a finite element model using ABAQUS standardTM was established representing the experimentally observed load-displacement behavior. The introduction of the extended finite element method as well as the cohesive surface approach allow to describe different failure modes. The results of these investigations can be used to avoid failures like oxide layer cracking during wire bonding or during the wafer testing process.
焊线和晶圆探测都可能导致氧化层开裂。与金属迁移相结合,可能会发生电气故障。使用纳米压头可以实现与线键合过程相当的加载条件。在这项工作中,首先使用球形尖端来确定氮化硅薄膜的材料性能,并获得薄膜材料的开裂。在此基础上,利用ABAQUS标准软件建立了表征试验观测载荷-位移特性的有限元模型。扩展有限元法和内聚面法的引入允许描述不同的破坏模式。这些研究的结果可以用来避免在焊线或晶圆测试过程中氧化层破裂等故障。
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引用次数: 2
Junction temperature estimation for LED lamp with forward voltage method 用正向电压法估算LED灯结温
Hong-liang Ke, Qiang Sun, Jian Zhao, Hongxin Zhang, L. Jing, Yao Wang, Jian-cheng Hao
For estimating the junction temperature (Tj) of LED lamp, the Tj of LED module powering by rated current (135mA DC) and working in the thermal environment of LED lamp is measured with traditional forward voltage method in experiment 1. To calculate the Tj of LED lamp in actual working conditions (220V AC), a correction factor is introduced into the original model to process the deviation of output currents of LED driver electronics, as demonstrated in experiment 2. Compared with the surface temperature of LED obtained by infrared imaging method, the result in experiment 2 can effectively reflect the change in Tj of LED lamp under different ambient temperatures, which differs the surface temperature by 3~4°C. While due to a significant effect on the thermal environment of LED lamp introduced by LED driver electronics, the result in experiment 1 is approximately 9~10°C lower than that in experiment 2.
为了估算LED灯的结温(Tj),实验1采用传统的正向电压法测量了在额定电流(135mA DC)下工作在LED灯热环境下的LED模组的结温(Tj)。为了计算LED灯在实际工作条件下(220V交流)的Tj,在原模型中引入一个校正因子来处理LED驱动电子器件输出电流的偏差,如实验2所示。与红外成像方法获得的LED表面温度相比,实验2的结果可以有效反映不同环境温度下LED灯Tj的变化,表面温度相差3~4℃。而由于LED驱动电子器件引入对LED灯热环境的显著影响,实验1的结果比实验2的结果低约9~10℃。
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引用次数: 11
Stress investigations in 3D-integrated silicon microstructures 三维集成硅微结构的应力研究
M. Stiebing, E. Lortscher, W. Steller, D. Vogel, M. Wolf, T. Brunschwiler, B. Wunderle
With the anticipated slow-down of Moore's Law in the near future, three-dimensional (3D) packaging of microelectronic structures would enable to further increase the integration density required to meet the forecasted demands of future exa-scale computing, cloud computing, big data systems, cognitive computing, mobile communicatoin and other emerging technologies. Through-silicon vias (TSVs) are a pathway to provide electrical connections for signaling and power-delivery through 3D-stacked silicon (Si) microstructures. TSVs and related structures such as, e.g., interconnects and redistribution lines, however, induce stress in their proximity, namely upon electrochemical deposition and subsequent annealing, the latter due to the large mismatch in the coefficient of thermal expansion between Si and the TSV-filling materials used. Stress-induced crowding and relaxation of the Si lattice can cause a variety of issues ranging from active-device performance degradation, interfacial delamination or interconnect failures to cracking of the entire Si microstructures at stress hotspots upon assembly or operation. Employing a novel dual-shell Si interposer concept with both power delivery and signaling through TSVs, we aim at removing the heat dissipated from the active components sitting on top of one interposer shell through embedded liquid-cooling cavities, a strategy that generically enables true 3D stacking but may also induce additional stress. In the current paper, we reduce system complexity and first investigate, both experimentally and theoretically the TSV-induced stress profiles in one Si interposer half before introducing cooling cavities and sealing structures. After each processing step, the residual and non-thermal stress profile around the TSV is determined using a confocal Raman microscope with sub-micrometer spot-size acting as a local strain gauge. These measurements are conducted under ultra-silent conditions, revealing an unprecedented resolution of 0.01 cm-1, corresponding to approx. 4.3 MPa of stress in crystalline Si. A detailed comparison of measurements and finite element analysis (with the later taking into account geometry and material properties) is provided, revealing both a good qualitative and quantitative correlation between theory and experiment. We also show that athermal stress after copper deposition can be minimized during an annealing step.
随着摩尔定律在不久的将来放缓,微电子结构的三维封装将进一步提高集成密度,以满足未来超大规模计算、云计算、大数据系统、认知计算、移动通信等新兴技术的预测需求。硅通孔(tsv)是一种通过3d堆叠硅(Si)微结构为信号和电力输送提供电气连接的途径。然而,tsv和相关结构,如互连线和再分配线,在它们的邻近处,即在电化学沉积和随后的退火时,会产生应力,后者是由于Si与tsv填充材料之间的热膨胀系数存在很大的不匹配。应力引起的Si晶格拥挤和松弛会导致各种各样的问题,从有源器件性能下降、界面分层或互连故障到组装或操作时应力热点处整个Si微结构的开裂。采用一种新颖的双壳硅中间层概念,通过tsv进行功率传递和信号传递,我们的目标是通过嵌入式液冷腔消除位于中间层外壳顶部的主动组件散发的热量,这种策略通常可以实现真正的3D堆叠,但也可能引起额外的应力。在本文中,我们降低了系统的复杂性,在引入冷却腔和密封结构之前,首先从实验和理论上研究了tsv诱导的Si中间层的应力分布。在每个加工步骤之后,使用共聚焦拉曼显微镜以亚微米的点尺寸作为局部应变计来确定TSV周围的残余应力和非热应力剖面。这些测量是在超安静的条件下进行的,显示出前所未有的0.01厘米-1的分辨率,相当于大约。4.3 MPa的应力在晶体Si。给出了测量和有限元分析(后者考虑几何和材料特性)的详细比较,揭示了理论和实验之间良好的定性和定量相关性。我们还表明,铜沉积后的非热应力可以在退火步骤中最小化。
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引用次数: 3
Electro-optical simulation of a GaN based blue LED chip 基于GaN的蓝色LED芯片的电光模拟
C. Qian, Y. Li, Jiajie Fan, Xuejun Fan, Jiajia Fu, Lixia Zhao, Guoqi Zhang
In this study, an electro-optical simulation method is developed to simulate the light intensity distribution of a conventional GaN based blue LED chip. The entire modeling process consists of electrical simulation with ANSYS and optical simulation with LightTools, which are based on an assumption of proportional relation between the distributed current density and light emission energy on multiple quantum well layer. Experimental results show that the proposed simulation method can give a good prediction on the light intensity distribution of a packaged GaN based blue LED chip.
在本研究中,开发了一种电光模拟方法来模拟传统GaN基蓝色LED芯片的光强分布。整个建模过程包括基于多量子阱层上分布电流密度和光发射能量成比例关系的假设,利用ANSYS进行电学仿真和利用LightTools进行光学仿真。实验结果表明,所提出的模拟方法可以很好地预测封装GaN基蓝色LED芯片的光强分布。
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引用次数: 0
Four-point bending cycling as alternative for thermal cycling solder fatigue testing 四点弯曲循环作为热循环焊料疲劳测试的替代方案
B. Vandevelde, F. Vanhee, D. Pissoort, L. Degrendele, J. De Baets, B. Allaert, R. Lauwaert, R. Labie, G. Willems
This paper deals with an alternative testing approach for quantifying the life time of board level solder joint reliability of components. This approach consists of applying a relative shear displacement between component and Printed Circuit Board (PCB) through cyclic board bending. During the cycling, the temperature is kept constant, preferably at elevated temperature in order to fasten the creep deformation of the solder joint. This is done in a four-point bending setup which allows to apply an equal loading on all components lying between the inner bars. The scope of the paper is, firstly, to evaluate if the four point bending testing generates the same fatigue fracture as in thermal cycling; secondly, that the measured life times can be also predicted through finite element simulations; and thirdly if the technique can finally fasten the cycling frequency to gain testing time.
本文讨论了一种量化元件板级焊点可靠性寿命的替代测试方法。这种方法包括通过循环板弯曲在组件和印刷电路板(PCB)之间施加相对剪切位移。在循环过程中,温度保持恒定,最好在较高的温度下,以紧固焊点的蠕变。这是在四点弯曲设置中完成的,允许在位于内杆之间的所有组件上施加相等的载荷。本文的研究范围是:首先,评估四点弯曲试验是否与热循环试验产生相同的疲劳断裂;其次,通过有限元模拟也可以预测实测寿命;第三,该技术能否最终固定循环频率以获得测试时间。
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引用次数: 1
期刊
2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
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