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2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)最新文献

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Design of a MZI Micro-Opto-Mechanical Pressure Sensor for a SiN photonics platform 用于SiN光子平台的MZI微光机械压力传感器的设计
V. Rochus, R. Jansen, J. Goyvaerts, G. Vandenboch, B. van de Voort, P. Neutens, J. Callaghan, H. Tilmans, X. Rottenberg
This paper presents the design of Micro-Opto-Mechanical Pressure Sensors (MOMPS), which can exhibit much improved sensitivity and noise performance compared to their piezoelectric and capacitive counterparts. As the output intensity variation depends on multiple design parameters, such as the radius of the membrane, the position of the waveguide, the wavelength and the phase variation due to the opto-mechanical coupling, we first derive an analytical model which allows to predict the response of the total system. We then use a Finite Element opto-mechanical model to evaluate the variation of the effective refractive index due to the modification of the optical material properties created by mechanical stress as well as to the waveguide shape deformation. Finally, the sensitivity of the device for a single loop MOMPS and for spiral loops configuration is analyzed.
本文介绍了一种微光机械压力传感器(MOMPS)的设计,它比压电式和电容式压力传感器具有更高的灵敏度和噪声性能。由于输出强度的变化取决于多个设计参数,如膜的半径、波导的位置、波长和光-机械耦合引起的相位变化,我们首先推导了一个分析模型,可以预测整个系统的响应。然后,我们使用有限元光力学模型来评估由于机械应力和波导形状变形造成的光学材料特性的改变而导致的有效折射率的变化。最后,分析了该器件在单环MOMPS和螺旋环结构下的灵敏度。
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引用次数: 15
Investigation of reliability of EMC and SMC on reflectance for UV LED applications UV LED应用中电磁兼容和SMC对反射率的可靠性研究
X. Qiu, J. Lo, Andrew W. Shang, S. Lee
Conventional packaging materials for light-emitting diodes (LED) are susceptible to UV radiation and high temperature. Therefore, for developing UV LED packages, new materials with better UV and high temperature resistance are required. There are two candidates, namely, epoxy molding compound (EMC) and silicone molding compound (SMC), being considered by the industry. This paper focuses on the change in reflectance of EMC and SMC over time as a measure of reliability. Aging was performed on EMC and SMC culls under high temperature, and combination of UV exposure and high temperature simultaneously. Reflectance of EMC and SMC culls before and after aging were compared. It was concluded that both EMC and SMC degrade under simultaneous UV radiation and high temperature aging, and that SMC is more UV and thermally resistant than EMC based on change in reflectance, surface morphology, and roughness.
传统的发光二极管封装材料易受紫外线辐射和高温的影响。因此,为了开发UV LED封装,需要具有更好的抗紫外线和耐高温性能的新材料。目前业界正在考虑两种候选材料,即环氧树脂模塑复合材料(EMC)和硅树脂模塑复合材料(SMC)。本文重点研究了电磁兼容和SMC的反射率随时间的变化,以此作为可靠性的衡量标准。对EMC和SMC选材进行高温老化,以及紫外线和高温同时老化。比较了老化前后EMC和SMC选材的反射率。结果表明,在紫外线辐射和高温老化同时发生的情况下,EMC和SMC都会发生降解,从反射率、表面形貌和粗糙度的变化来看,SMC比EMC更耐紫外线和耐热。
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引用次数: 6
Study of the thermoelectric properties of non-typical semiconductor materials with conventional CAD tools 利用传统CAD工具研究非典型半导体材料的热电特性
Paula López, A. J. G. Loureiro, E. Ferro, V. Brea, B. Rivas‐Murias
Computer-aided design (CAD) simulation tools offer the advantage of integrating both thermal and electrical simulations facilitating the study of new materials and structures. In this work, we demonstrate the possibility of using conventional electron devices simulation tools to study the thermoelectrical properties of non-typical semiconductor materials, which allows to do predictive parametric analysis of novel device structures without costly experiments. This is illustrated without loss of generality for scandium nitride and strontium titanate. The simulated results are in good agreement with those reported in the literature.
计算机辅助设计(CAD)仿真工具提供了集成热学和电学模拟的优势,促进了新材料和新结构的研究。在这项工作中,我们展示了使用传统电子器件模拟工具来研究非典型半导体材料热电特性的可能性,这使得无需昂贵的实验就可以对新型器件结构进行预测参数分析。这说明了不损失一般性的氮化钪和钛酸锶。模拟结果与文献报道的结果吻合较好。
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引用次数: 1
SBPG: A secure better portable graphics compression architecture for high speed trusted image communication in the IoT SBPG:一种安全的便携式图形压缩架构,用于物联网中的高速可信图像通信
Umar A. Albalawi, S. Mohanty, E. Kougianos
This paper proposes a hardware architecture for a Secure Digital Camera (SDC) integrated with Secure Better Portable Graphics (SBPG) compression algorithm. The proposed architecture is suitable for high performance imaging in the Internet of Things (IoT). The objectives of this paper are twofold. On the one hand, the proposed SBPG architecture offers double-layer protection: encryption and watermarking. On the other hand, the paper proposes SDC integrated with secure BPG compression for real time intelligent traffic surveillance (ITS). The experimental results prove that the new compression technique BPG outperforms JPEG in terms of compression quality and size of the compression file. As the visual quality of the watermarked and compressed images improves with larger values of PSNR, the results show that the proposed SBPG substantially increases the quality of the watermarked compressed images. To achieve a high performance architecture three techniques are considered: first, using the center portion of the image to insert the encrypted signature. Second, watermarking is done in the frequency domain using block-wise DCT size 8×8. Third, in BPG encoder, the proposed architecture uses inter and intra prediction to reduce the temporal and spatial redundancy.
本文提出了一种集成安全更好便携式图形压缩算法的安全数码相机(SDC)硬件架构。该架构适用于物联网(IoT)中的高性能成像。本文的目的是双重的。一方面,提出的SBPG体系结构提供了双重保护:加密和水印。另一方面,本文提出了集成安全BPG压缩的SDC,用于实时智能交通监控。实验结果表明,新的压缩技术BPG在压缩质量和压缩文件大小方面都优于JPEG。随着PSNR值的增大,水印图像和压缩图像的视觉质量都有所提高,结果表明,所提出的SBPG大幅度提高了水印压缩图像的质量。为了实现高性能架构,考虑了三种技术:首先,使用图像的中心部分插入加密签名。其次,在频域中使用块方向DCT大小8×8进行水印。第三,在BPG编码器中,提出的结构利用帧间和帧内预测来减少时间和空间冗余。
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引用次数: 4
Characterization of polyimid-multi-layer thin films combining laser ultrasonic measurements and numerical evaluations 结合激光超声测量和数值评价的聚酰亚胺多层薄膜的表征
E. Grunwald, R. Nuster, R. Hammer, H. Asmann, G. Paltauf, R. Brunner
Modern microelectronic devices frequently require the use of thin films and multi-layer systems [1]. Especially the application of advanced material models to simulate e.g. reliability issues for such components relies on the accurate determination of the layers' elastic properties [2]. Polyimides (PI) show many beneficial mechanical and chemical properties for applications in the field of microelectronics, e.g. in the realization of MEMS packages [3]. In the work reported here, the combination of a laser ultrasonic measurement and a numerically solved theoretical model [4] is presented in order to determine the elastic properties of a multi-layer system. The multi-layer system consists of a polyimide layer of 11 μm thickness and an 800 nm silicon nitride film on a (100) silicon substrate. The theoretical model uses a partial wave ansatz and a global matrix method in order to determine the frequency dependent phase velocity [5]. For the measurement of the frequency dependent phase velocity, nanosecond laser pulses were focused to a line shape onto the sample surface. This line excitation generates plane broadband surface acoustic waves (SAWs). The phase velocity depends on the frequency as a consequence of the different sound velocities of substrate and layers. The low frequency SAWs propagate mainly in the substrate, whereas higher frequency waves propagate mostly in the thin layers. An optical beam deflection method was applied to detect the SAWs. The Young's Modulus and the Poisson ratio of the polyimide layer were derived by fitting the theoretical curve to the experiment. The presented method provides the possibility to measure contactless on wafer level. It represents a valuable tool regarding the non-destructive evaluation of elastic properties of thin films in multi-layered systems. The Young's modulus and the Poisson ratio can serve as essential input for various advanced measurement techniques and simulations [2].
现代微电子器件经常需要使用薄膜和多层系统[1]。特别是应用先进的材料模型来模拟这些部件的可靠性问题,依赖于准确确定层的弹性特性[2]。聚酰亚胺(PI)在微电子领域的应用中显示出许多有益的机械和化学特性,例如在MEMS封装的实现中[3]。在本文报道的工作中,为了确定多层体系的弹性特性,提出了激光超声测量与数值求解理论模型[4]相结合的方法。该多层体系由11 μm厚度的聚酰亚胺层和800 nm的氮化硅薄膜在(100)硅衬底上组成。理论模型采用部分波ansatz和全局矩阵法来确定频率相关相速度[5]。为了测量与频率相关的相速度,将纳秒激光脉冲聚焦在样品表面上形成线形。这种线激励产生平面宽带表面声波(saw)。相速度取决于频率,因为基片和层的声速不同。低频波主要在衬底中传播,而高频波主要在薄层中传播。采用光束偏转法对saw进行检测。将理论曲线与实验曲线拟合,得到了聚酰亚胺层的杨氏模量和泊松比。该方法提供了在晶圆级上进行非接触式测量的可能性。它是无损评价多层体系薄膜弹性性能的一种有价值的工具。杨氏模量和泊松比可以作为各种先进测量技术和模拟的重要输入[2]。
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引用次数: 2
Stress investigations in 3D-integrated silicon microstructures 三维集成硅微结构的应力研究
M. Stiebing, E. Lortscher, W. Steller, D. Vogel, M. Wolf, T. Brunschwiler, B. Wunderle
With the anticipated slow-down of Moore's Law in the near future, three-dimensional (3D) packaging of microelectronic structures would enable to further increase the integration density required to meet the forecasted demands of future exa-scale computing, cloud computing, big data systems, cognitive computing, mobile communicatoin and other emerging technologies. Through-silicon vias (TSVs) are a pathway to provide electrical connections for signaling and power-delivery through 3D-stacked silicon (Si) microstructures. TSVs and related structures such as, e.g., interconnects and redistribution lines, however, induce stress in their proximity, namely upon electrochemical deposition and subsequent annealing, the latter due to the large mismatch in the coefficient of thermal expansion between Si and the TSV-filling materials used. Stress-induced crowding and relaxation of the Si lattice can cause a variety of issues ranging from active-device performance degradation, interfacial delamination or interconnect failures to cracking of the entire Si microstructures at stress hotspots upon assembly or operation. Employing a novel dual-shell Si interposer concept with both power delivery and signaling through TSVs, we aim at removing the heat dissipated from the active components sitting on top of one interposer shell through embedded liquid-cooling cavities, a strategy that generically enables true 3D stacking but may also induce additional stress. In the current paper, we reduce system complexity and first investigate, both experimentally and theoretically the TSV-induced stress profiles in one Si interposer half before introducing cooling cavities and sealing structures. After each processing step, the residual and non-thermal stress profile around the TSV is determined using a confocal Raman microscope with sub-micrometer spot-size acting as a local strain gauge. These measurements are conducted under ultra-silent conditions, revealing an unprecedented resolution of 0.01 cm-1, corresponding to approx. 4.3 MPa of stress in crystalline Si. A detailed comparison of measurements and finite element analysis (with the later taking into account geometry and material properties) is provided, revealing both a good qualitative and quantitative correlation between theory and experiment. We also show that athermal stress after copper deposition can be minimized during an annealing step.
随着摩尔定律在不久的将来放缓,微电子结构的三维封装将进一步提高集成密度,以满足未来超大规模计算、云计算、大数据系统、认知计算、移动通信等新兴技术的预测需求。硅通孔(tsv)是一种通过3d堆叠硅(Si)微结构为信号和电力输送提供电气连接的途径。然而,tsv和相关结构,如互连线和再分配线,在它们的邻近处,即在电化学沉积和随后的退火时,会产生应力,后者是由于Si与tsv填充材料之间的热膨胀系数存在很大的不匹配。应力引起的Si晶格拥挤和松弛会导致各种各样的问题,从有源器件性能下降、界面分层或互连故障到组装或操作时应力热点处整个Si微结构的开裂。采用一种新颖的双壳硅中间层概念,通过tsv进行功率传递和信号传递,我们的目标是通过嵌入式液冷腔消除位于中间层外壳顶部的主动组件散发的热量,这种策略通常可以实现真正的3D堆叠,但也可能引起额外的应力。在本文中,我们降低了系统的复杂性,在引入冷却腔和密封结构之前,首先从实验和理论上研究了tsv诱导的Si中间层的应力分布。在每个加工步骤之后,使用共聚焦拉曼显微镜以亚微米的点尺寸作为局部应变计来确定TSV周围的残余应力和非热应力剖面。这些测量是在超安静的条件下进行的,显示出前所未有的0.01厘米-1的分辨率,相当于大约。4.3 MPa的应力在晶体Si。给出了测量和有限元分析(后者考虑几何和材料特性)的详细比较,揭示了理论和实验之间良好的定性和定量相关性。我们还表明,铜沉积后的非热应力可以在退火步骤中最小化。
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引用次数: 3
An in situ tensile test device for thermo-mechanical characterisation of interfaces between carbon nanotubes and metals 一种用于碳纳米管与金属界面热力学特性的原位拉伸试验装置
S. Hartmann, J. Bonitz, M. Heggen, S. Hermann, O. Holck, S. Schulz, T. Gessner, B. Wunderle
In this paper we present our recent efforts to develop an in situ tensile test device for thermo-mechanical characterization of interfaces between single-walled carbon nanotubes (SWCNTs) and metals. For the mechanical tests, the chosen loading condition is a pull-out test. After summarizing results of maximum stresses calculated from molecular dynamics simulations and obtained from in situ scanning electron microscope experiments we outline the requirement for an in situ experimental method with atomic resolution to study the mechanics of SWCNT-metal interfaces in further detail. To this purpose, we designed, fabricated and characterized a silicon-based micromechanical test stage with a thermal actuator for pull-out tests inside a transmission electron microscope. The objective is to obtain in situ images of SWCNT-metal interfaces under mechanical loads at the atomic scale for fundamental structure investigation. The design of this MEMS test stage permits also the integration of SWCNTs by wafer level technologies. First experiments with this MEMS test stage confirmed the presence of suspended thin metal electrodes to embed SWCNTs. These suspended thin metal electrodes are electron transparent at the designated SWCNT locations. Actuator movements were evaluated by digital image correlation and we observed systematic actuator movements that allow for a defined load application of SWCNTS. Although significant image drifts occured during actuation, we achieved atomic resolution of the metal electrode and stable movement in the focal plane of the electron microscope. The presented system may be also used and further developed for in situ characterization of other materials.
在本文中,我们介绍了我们最近开发的一种原位拉伸测试装置,用于单壁碳纳米管(SWCNTs)和金属之间界面的热力学表征。对于力学试验,选择的加载条件是拉出试验。在总结了分子动力学模拟计算的最大应力结果和原位扫描电镜实验结果后,我们概述了对原子分辨率的原位实验方法的需求,以进一步详细研究swcnts -金属界面的力学。为此,我们设计、制造并表征了一个硅基微力学测试台,该测试台带有热致动器,用于在透射电子显微镜内进行拉出测试。目的是在原子尺度上获得机械载荷下swcnts -金属界面的原位图像,用于基本结构研究。该MEMS测试阶段的设计还允许通过晶圆级技术集成SWCNTs。该MEMS测试阶段的第一次实验证实了悬浮薄金属电极嵌入SWCNTs的存在。这些悬浮的薄金属电极在指定的swcnts位置是电子透明的。通过数字图像相关评估致动器的运动,我们观察到允许SWCNTS的特定负载应用的系统致动器运动。虽然在驱动过程中发生了明显的图像漂移,但我们实现了金属电极的原子分辨率和电子显微镜焦平面上的稳定运动。所提出的系统也可用于和进一步开发用于其它材料的原位表征。
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引用次数: 1
Electro-optical simulation of a GaN based blue LED chip 基于GaN的蓝色LED芯片的电光模拟
C. Qian, Y. Li, Jiajie Fan, Xuejun Fan, Jiajia Fu, Lixia Zhao, Guoqi Zhang
In this study, an electro-optical simulation method is developed to simulate the light intensity distribution of a conventional GaN based blue LED chip. The entire modeling process consists of electrical simulation with ANSYS and optical simulation with LightTools, which are based on an assumption of proportional relation between the distributed current density and light emission energy on multiple quantum well layer. Experimental results show that the proposed simulation method can give a good prediction on the light intensity distribution of a packaged GaN based blue LED chip.
在本研究中,开发了一种电光模拟方法来模拟传统GaN基蓝色LED芯片的光强分布。整个建模过程包括基于多量子阱层上分布电流密度和光发射能量成比例关系的假设,利用ANSYS进行电学仿真和利用LightTools进行光学仿真。实验结果表明,所提出的模拟方法可以很好地预测封装GaN基蓝色LED芯片的光强分布。
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引用次数: 0
Experimental and numerical investigation of fatigue damage development under multiaxial loads in a lead-free Sn-based solder alloy 无铅锡基钎料合金在多轴载荷下疲劳损伤发展的实验与数值研究
B. Métais, M. Kuezynska, A. Kabakchiev, S. Wolfangel, P. Buhl, S. Weihe
Electronic devices for automotive applications undergo substantial thermo-mechanical cyclic loads during their operation. Within the phase of assembly, a large variety of passive and active electronic components are electrically connected by solder joints of complex geometrical shapes. As a consequence, external thermomechanical loads result in local multiaxial stress states in the solder material during their operation. In the past years, significant efforts were made in the characterization of solder materials and the accurate FE-modeling of their viscoplastic deformation behavior as well as the modeling of their damage behavior. However, material testing and numerical model calibration were focused on uniaxial tests, which result in a homogeneous stress state and a fixed ratio between its hydrostatic and deviatoric parts. Therefore, the correlation between varying multiaxial loads and cyclic damage evolution in solder alloys is still not understood. Here, we report on the experimental investigation of Low Cycle Fatigue (LCF) on bulk samples under uniaxial and multiaxial stress states realized by means of a pure tension-compression and superimposed tension-torsion loads. In order to describe the observed cyclic degradation behavior, a phenomenological fatigue damage model is modified incorporating the influence of multiaxial stresses in the damage development. The new damage model is implemented as a user-subroutine for Finite Element (FE) calculation supported by the commercial FE-package ansysTM. Uniaxial and multiaxial loads are simulated on the meshed specimen-geometry. The material model is able to describe the mechanical properties in the initial state of deformation. Besides, it shows numerical stability which enables the simulation of large number of cyclic loads. Based on the damage mechanic approach enhanced by multiaxial effects, this study contributes to the framework of solder joints modeling.
汽车电子设备在运行过程中承受大量的热-机械循环载荷。在装配阶段,各种各样的无源和有源电子元件通过复杂几何形状的焊点电连接。因此,外部热机械载荷导致焊接材料在其操作过程中的局部多轴应力状态。在过去的几年里,人们在焊接材料的表征和其粘塑性变形行为的精确有限元建模以及损伤行为的建模方面做了大量的工作。然而,材料测试和数值模型校准主要集中在单轴试验上,导致其应力状态均匀,流体静力和偏力部分之间的比例固定。因此,不同的多轴载荷与钎料合金的循环损伤演变之间的关系尚不清楚。在此,我们报告了在单轴和多轴应力状态下,通过纯拉伸-压缩和叠加拉伸-扭转载荷实现的体试样的低周疲劳(LCF)的实验研究。为了描述观察到的循环退化行为,将多轴应力在损伤发展中的影响纳入到现象学疲劳损伤模型中。在商用有限元软件包ansysTM的支持下,将新的损伤模型作为有限元计算的用户子程序实现。在网格化的试样几何上模拟了单轴和多轴载荷。该材料模型能较好地描述材料在初始变形状态下的力学性能。此外,该方法具有数值稳定性,可以模拟大量的循环荷载。基于多轴效应增强的损伤力学方法,建立了焊点模型的框架。
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引用次数: 5
Thermo-mechanical simulation to optimize the integration of a BST stacked MIMIM capacitor 热机械模拟优化BST堆叠式mimm电容器的集成
P. Gardes, F. Roqueta, M. Diatta, P. Martinez, F. Lauron, E. Bouyssou, P. Poveda
For the last decade, paraelectric BaxSr1-xTiO3 (BST) thin films have been especially studied to fabricate MIM capacitor for capacitance tuning applications. This paper describes the mechanisms of cracks apparition under BST stacked MIMIM capacitors (Metal Insulator Metal Insulator Metal) built on silicon substrate. The methodology used in this study to have a further understanding of this phenomenon is to investigate 2D process simulations, based on an elastic model. Hence, it could be evidenced that the gap between the extreme stress levels induced by an annealing performed at the end of the capacitor manufacturing is the main contributor in the crack formation. Then, the change from silicon to a sapphire substrate was implemented to avoid cracks in the real process integration. Finally, the capacitor devices could be tested and were demonstrated to exhibit better electrical specifications.
在过去的十年中,对准电BaxSr1-xTiO3 (BST)薄膜进行了专门的研究,以制造用于电容调谐应用的MIM电容器。本文研究了基于硅衬底的BST叠置电容(Metal Insulator Metal Insulator Metal)产生裂纹的机理。为了进一步理解这一现象,本研究采用了基于弹性模型的二维过程模拟方法。因此,可以证明,在电容器制造结束时进行的退火引起的极端应力水平之间的差距是裂纹形成的主要原因。然后,实现了从硅衬底到蓝宝石衬底的变化,以避免在实际的工艺集成中出现裂缝。最后,电容器器件可以进行测试,并被证明具有更好的电气规格。
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引用次数: 1
期刊
2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
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