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2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)最新文献

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Deep understanding of random telegraph noise (RTN) effects on SRAM stability 深入了解随机电报噪声对SRAM稳定性的影响
Pub Date : 2016-04-25 DOI: 10.1109/VLSI-TSA.2016.7480513
Dongyuan Mao, Shaofeng Guo, Runsheng Wang, Mulong Luo, Ru Huang
In this paper, multi-phonon transition model of RTN in FinFETs with statistical distribution is integrated into industry-standard BSIM-CMG, and read stability of SRAM is thoroughly examined. Different tendencies of SRAM failure probability plateau caused by RTN are found, which reflect real circuit operation situations. The impacts of RTN amplitude, bitline capacity, operation frequency on Vmin are investigated in detail. Statistical results with impacts of RTN and process variations are also presented, which can be helpful for stability design and guard band prediction for SRAM.
本文将统计分布finfet中RTN的多声子跃迁模型集成到工业标准BSIM-CMG中,并对SRAM的读取稳定性进行了深入研究。发现RTN引起的SRAM失效概率平台的不同趋势,反映了实际电路运行情况。详细研究了RTN幅值、位线容量、工作频率对Vmin的影响。并给出了考虑RTN和工艺变化影响的统计结果,为SRAM的稳定性设计和保护带预测提供了依据。
{"title":"Deep understanding of random telegraph noise (RTN) effects on SRAM stability","authors":"Dongyuan Mao, Shaofeng Guo, Runsheng Wang, Mulong Luo, Ru Huang","doi":"10.1109/VLSI-TSA.2016.7480513","DOIUrl":"https://doi.org/10.1109/VLSI-TSA.2016.7480513","url":null,"abstract":"In this paper, multi-phonon transition model of RTN in FinFETs with statistical distribution is integrated into industry-standard BSIM-CMG, and read stability of SRAM is thoroughly examined. Different tendencies of SRAM failure probability plateau caused by RTN are found, which reflect real circuit operation situations. The impacts of RTN amplitude, bitline capacity, operation frequency on Vmin are investigated in detail. Statistical results with impacts of RTN and process variations are also presented, which can be helpful for stability design and guard band prediction for SRAM.","PeriodicalId":441941,"journal":{"name":"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)","volume":"103 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116407006","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
In0.53Ga0.47As(001)−(2x4) and Si0.5Ge0.5(110) surface passivation by self-limiting deposition of silicon containing control layers 通过自限沉积含硅控制层实现In0.53Ga0.47As(001)−(2x4)和Si0.5Ge0.5(110)表面钝化
Pub Date : 2016-04-25 DOI: 10.1109/VLSI-TSA.2016.7480528
M. Edmonds, T. Kent, S. Wolf, K. Sardashti, M. Chang, J. Kachian, R. Droopad, E. Chagarov, A. Kummel
Metal oxide semiconductor field effect transistors (MOSFETs) are diverging from the exclusive use of silicon and germanium to the employment of compound semiconductors such as SiGe and InGaAs to further increase transistor performance. A broader range of channel materials allowing better carrier confinement and higher mobility could be employed if a universal control monolayer (UCM) could be ALD or self-limiting CVD deposited on multiple materials and crystallographic faces. Silicon uniquely bonds strongly to all crystallographic faces of InGa1-xAs, InxGa1-xSb, InxGa1-xN, SiGe, and Ge enabling transfer of substrate dangling bonds to silicon, which may subsequently be passivated by atomic hydrogen. Subsequently, the surface may be functionalized with an oxidant such as HOOH(g) in order to create a UCM terminating Si-OH layer, or a nitriding agent such as N2H4(g) in order to create an Si-Nx diffusion barrier and surface protection layer. This study focuses on depositing saturated Si-Hx, and Si-OH seed layers via two separate self-limiting CVD processes on InGaAs(001)-(2x4), and depositing a Si-Nx seed layer on Si0.5Ge0.5(110) via an ALD process. XPS in combination with STS/STM were employed to characterize the electrical and surface properties of these silicon containing control layers on InGaAs(001)-(2x4) and Si0.5Ge0.5(110) surfaces. MOSCAP device fabrication was performed on n-type InGaAs(001) substrates with and without a Si-Hx passivation control layer deposited by self-limiting CVD in order to determine the effects on Cmax, frequency dispersion, and midgap trap states.
金属氧化物半导体场效应晶体管(mosfet)正从仅使用硅和锗转向使用SiGe和InGaAs等化合物半导体,以进一步提高晶体管性能。如果通用控制单层(UCM)可以ALD或自限制CVD沉积在多种材料和晶体表面上,则可以采用更广泛的通道材料,从而实现更好的载流子约束和更高的迁移率。硅独特地与InGa1-xAs、InxGa1-xSb、InxGa1-xN、SiGe和Ge的所有晶面紧密结合,使衬底悬空键转移到硅上,随后可能被原子氢钝化。随后,表面可以用氧化剂(如HOOH(g))功能化以形成UCM终止Si-OH层,或用氮化剂(如N2H4(g))功能化以形成Si-Nx扩散屏障和表面保护层。本研究的重点是通过两个独立的自限CVD工艺在InGaAs(001)-(2x4)上沉积饱和Si-Hx和Si-OH种子层,并通过ALD工艺在Si0.5Ge0.5(110)上沉积Si-Nx种子层。在InGaAs(001)-(2x4)和Si0.5Ge0.5(110)表面上,利用XPS结合STS/STM表征了这些含硅控制层的电学和表面性能。在n型InGaAs(001)衬底上进行了MOSCAP器件的制备,并通过自限CVD沉积了Si-Hx钝化控制层,以确定对Cmax,频率色散和中隙阱态的影响。
{"title":"In0.53Ga0.47As(001)−(2x4) and Si0.5Ge0.5(110) surface passivation by self-limiting deposition of silicon containing control layers","authors":"M. Edmonds, T. Kent, S. Wolf, K. Sardashti, M. Chang, J. Kachian, R. Droopad, E. Chagarov, A. Kummel","doi":"10.1109/VLSI-TSA.2016.7480528","DOIUrl":"https://doi.org/10.1109/VLSI-TSA.2016.7480528","url":null,"abstract":"Metal oxide semiconductor field effect transistors (MOSFETs) are diverging from the exclusive use of silicon and germanium to the employment of compound semiconductors such as SiGe and InGaAs to further increase transistor performance. A broader range of channel materials allowing better carrier confinement and higher mobility could be employed if a universal control monolayer (UCM) could be ALD or self-limiting CVD deposited on multiple materials and crystallographic faces. Silicon uniquely bonds strongly to all crystallographic faces of InGa1-xAs, InxGa1-xSb, InxGa1-xN, SiGe, and Ge enabling transfer of substrate dangling bonds to silicon, which may subsequently be passivated by atomic hydrogen. Subsequently, the surface may be functionalized with an oxidant such as HOOH(g) in order to create a UCM terminating Si-OH layer, or a nitriding agent such as N2H4(g) in order to create an Si-Nx diffusion barrier and surface protection layer. This study focuses on depositing saturated Si-Hx, and Si-OH seed layers via two separate self-limiting CVD processes on InGaAs(001)-(2x4), and depositing a Si-Nx seed layer on Si0.5Ge0.5(110) via an ALD process. XPS in combination with STS/STM were employed to characterize the electrical and surface properties of these silicon containing control layers on InGaAs(001)-(2x4) and Si0.5Ge0.5(110) surfaces. MOSCAP device fabrication was performed on n-type InGaAs(001) substrates with and without a Si-Hx passivation control layer deposited by self-limiting CVD in order to determine the effects on Cmax, frequency dispersion, and midgap trap states.","PeriodicalId":441941,"journal":{"name":"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124497606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Functionality and reliability of resistive RAM (RRAM) for non-volatile memory applications 用于非易失性存储器应用的电阻性RAM (RRAM)的功能和可靠性
Pub Date : 2016-04-25 DOI: 10.1109/VLSI-TSA.2016.7480520
G. Molas, G. Piccolboni, M. Barci, B. Traoré, J. Guy, G. Palma, E. Vianello, P. Blaise, J. Portal, M. Bocquet, A. Levisse, B. Giraud, J. Noel, M. Harrand, M. Bernard, A. Roule, B. De Salvo, L. Perniola
Various RRAM concepts are currently being investigated (Oxide based RAM, Conductive Bridge RAM), all showing pros and cons depending on the architecture and memory stack. As the specifications are strongly application-dependent, it is likely that the RRAM technology will be bound to a specific market segment. In this paper, we discuss the potential of RRAM for non-volatile memory applications, among them: storage class memory, embedded memory, programmable logic, mass storage and neuromorphic applications. By means of experimental studies and simulations, we analyze the role of the integrated materials on the memory performances and reliability and try to propose optimized stacks suitable for each targeted application.
各种RRAM概念目前正在研究中(基于氧化物的RAM,导电桥式RAM),所有这些概念都显示出基于架构和内存堆栈的优点和缺点。由于规范与应用程序密切相关,因此RRAM技术很可能会绑定到特定的细分市场。在本文中,我们讨论了RRAM在非易失性存储器应用中的潜力,其中包括:存储类存储器,嵌入式存储器,可编程逻辑,大容量存储器和神经形态应用。通过实验研究和仿真,我们分析了集成材料对存储器性能和可靠性的影响,并尝试提出适合每种目标应用的优化堆栈。
{"title":"Functionality and reliability of resistive RAM (RRAM) for non-volatile memory applications","authors":"G. Molas, G. Piccolboni, M. Barci, B. Traoré, J. Guy, G. Palma, E. Vianello, P. Blaise, J. Portal, M. Bocquet, A. Levisse, B. Giraud, J. Noel, M. Harrand, M. Bernard, A. Roule, B. De Salvo, L. Perniola","doi":"10.1109/VLSI-TSA.2016.7480520","DOIUrl":"https://doi.org/10.1109/VLSI-TSA.2016.7480520","url":null,"abstract":"Various RRAM concepts are currently being investigated (Oxide based RAM, Conductive Bridge RAM), all showing pros and cons depending on the architecture and memory stack. As the specifications are strongly application-dependent, it is likely that the RRAM technology will be bound to a specific market segment. In this paper, we discuss the potential of RRAM for non-volatile memory applications, among them: storage class memory, embedded memory, programmable logic, mass storage and neuromorphic applications. By means of experimental studies and simulations, we analyze the role of the integrated materials on the memory performances and reliability and try to propose optimized stacks suitable for each targeted application.","PeriodicalId":441941,"journal":{"name":"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121135619","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
High-gain, low-voltage BEOL logic gate inverter built with film profile engineered IGZO transistors 高增益,低电压BEOL逻辑门逆变器与薄膜轮廓工程IGZO晶体管
Pub Date : 2016-04-25 DOI: 10.1109/VLSI-TSA.2016.7480534
R. Lyu, Yun-Hsuan Chiu, Horng-Chih Lin, Pei-Wen Li, Tiao-Yuan Huang
We demonstrate InGaZnO (IGZO) TFTs with channel-length (L) tunable Vth for high-gain BEOL logic gate inverters in a unique film-profile engineering (FPE) approach. In this FPE scheme the thickness and film profile of gate oxide and IGZO active layer are directly tailored by L (0.4-0.8 μm) in a single step, leading to a wide-ranging tunability in Vth of -0.2-+1.6V at no expense of additional masks and process steps. This provides an effective degree of freedom in the layout design for the realization of area-saving, high-gain unipolar logic inverters with load-transistors. Record-high voltage gain of 112 is demonstrated from the unipolar logic inverter with depletion-load 0.4 μm IGZO TFT and 0.7μm IGZO drive-transistor, respectively, at operation voltage (Vdd) of 9V.
我们以独特的薄膜结构工程(FPE)方法展示了具有通道长度(L)可调Vth的InGaZnO (IGZO) tft用于高增益BEOL逻辑门逆变器。在该FPE方案中,栅极氧化物和IGZO活性层的厚度和薄膜轮廓直接由L (0.4-0.8 μm)在一个步骤中定制,从而在-0.2-+1.6V的Vth范围内实现广泛的可调性,而无需额外的掩膜和工艺步骤。这为实现具有负载晶体管的省面积高增益单极逻辑逆变器的布局设计提供了有效的自由度。在工作电压(Vdd)为9V的情况下,采用0.4 μm IGZO TFT和0.7μm IGZO驱动晶体管的单极逻辑逆变器实现了创纪录的电压增益112。
{"title":"High-gain, low-voltage BEOL logic gate inverter built with film profile engineered IGZO transistors","authors":"R. Lyu, Yun-Hsuan Chiu, Horng-Chih Lin, Pei-Wen Li, Tiao-Yuan Huang","doi":"10.1109/VLSI-TSA.2016.7480534","DOIUrl":"https://doi.org/10.1109/VLSI-TSA.2016.7480534","url":null,"abstract":"We demonstrate InGaZnO (IGZO) TFTs with channel-length (L) tunable Vth for high-gain BEOL logic gate inverters in a unique film-profile engineering (FPE) approach. In this FPE scheme the thickness and film profile of gate oxide and IGZO active layer are directly tailored by L (0.4-0.8 μm) in a single step, leading to a wide-ranging tunability in Vth of -0.2-+1.6V at no expense of additional masks and process steps. This provides an effective degree of freedom in the layout design for the realization of area-saving, high-gain unipolar logic inverters with load-transistors. Record-high voltage gain of 112 is demonstrated from the unipolar logic inverter with depletion-load 0.4 μm IGZO TFT and 0.7μm IGZO drive-transistor, respectively, at operation voltage (Vdd) of 9V.","PeriodicalId":441941,"journal":{"name":"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115481237","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Advanced metrology and inspection solutions for a 3D world 面向3D世界的先进计量和检测解决方案
Pub Date : 2016-04-25 DOI: 10.1109/VLSI-TSA.2016.7480508
I. Schulmeyer, L. Lechner, A. Gu, R. Estrada, D. Stewart, L. Stern, S. McVey, B. Goetze, U. Mantz, R. Jammy
Semiconductor devices and packages have firmly moved in to an era where scaling is driven by 3D architectures. However, most of the metrology and inspection technologies in use today were developed for 2D devices and are inadequate to deal with 3D structures. An additional complication is the need for specific structural and defect information that may be buried deep within a 3D structure. We present concepts and technologies that allow for 3D imaging as well as tomography, enabling engineers to view structural information with unprecedented clarity, detail and speed.
半导体器件和封装已经坚定地进入了一个由3D架构驱动的扩展时代。然而,目前使用的大多数计量和检测技术都是为2D设备开发的,不足以处理3D结构。另一个复杂的问题是需要特定的结构和缺陷信息,这些信息可能深埋在3D结构中。我们提出的概念和技术允许3D成像和断层扫描,使工程师能够以前所未有的清晰度、细节和速度查看结构信息。
{"title":"Advanced metrology and inspection solutions for a 3D world","authors":"I. Schulmeyer, L. Lechner, A. Gu, R. Estrada, D. Stewart, L. Stern, S. McVey, B. Goetze, U. Mantz, R. Jammy","doi":"10.1109/VLSI-TSA.2016.7480508","DOIUrl":"https://doi.org/10.1109/VLSI-TSA.2016.7480508","url":null,"abstract":"Semiconductor devices and packages have firmly moved in to an era where scaling is driven by 3D architectures. However, most of the metrology and inspection technologies in use today were developed for 2D devices and are inadequate to deal with 3D structures. An additional complication is the need for specific structural and defect information that may be buried deep within a 3D structure. We present concepts and technologies that allow for 3D imaging as well as tomography, enabling engineers to view structural information with unprecedented clarity, detail and speed.","PeriodicalId":441941,"journal":{"name":"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)","volume":"170 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115176843","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A compact model for the SET parameter variations of oxide RRAM array 氧化物RRAM阵列SET参数变化的紧凑模型
Pub Date : 2016-04-25 DOI: 10.1109/VLSI-TSA.2016.7480503
Lingjun Dai, Huaqiang Wu, B. Gao, H. Qian
A physics-based compact model is developed to describe the parameter variations of oxide RRAM devices. The stochastic generation of oxygen vacancies and the variation of generation energy are considered in the model for the main reasons of the parameter fluctuation during SET process. The model is verified based on the measured data from 1kb 1T-1R RRAM array. Cycle-to-cycle variation and device-to-device variations of SET voltage and ON resistance are simulated by the model and compared with the experimental data. The model can be used for the simulation of large-scale memory arrays and logic or security circuits based on RRAM devices.
建立了一个基于物理的紧凑模型来描述氧化物RRAM器件的参数变化。该模型考虑了氧空位的随机产生和生成能量的变化,是造成SET过程参数波动的主要原因。基于1kb 1T-1R RRAM阵列的实测数据对模型进行了验证。利用该模型模拟了SET电压和ON电阻的周期变化和器件之间的变化,并与实验数据进行了比较。该模型可用于基于RRAM器件的大规模存储阵列和逻辑或安全电路的仿真。
{"title":"A compact model for the SET parameter variations of oxide RRAM array","authors":"Lingjun Dai, Huaqiang Wu, B. Gao, H. Qian","doi":"10.1109/VLSI-TSA.2016.7480503","DOIUrl":"https://doi.org/10.1109/VLSI-TSA.2016.7480503","url":null,"abstract":"A physics-based compact model is developed to describe the parameter variations of oxide RRAM devices. The stochastic generation of oxygen vacancies and the variation of generation energy are considered in the model for the main reasons of the parameter fluctuation during SET process. The model is verified based on the measured data from 1kb 1T-1R RRAM array. Cycle-to-cycle variation and device-to-device variations of SET voltage and ON resistance are simulated by the model and compared with the experimental data. The model can be used for the simulation of large-scale memory arrays and logic or security circuits based on RRAM devices.","PeriodicalId":441941,"journal":{"name":"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129557465","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Doping technology for RRAM — Opportunities and challenges RRAM掺杂技术——机遇与挑战
Pub Date : 2016-04-25 DOI: 10.1109/VLSI-TSA.2016.7480494
B. Magyari-Kope, Dan Duncan, Liang Zhao, Y. Nishi
Resistive random-access memory (RRAM), one of the most promising candidates for next generation non-volatile memory technology, nowadays still faces a series of challenges including switching-parameter variability, cycling endurance, and data retention. In order to cope with these challenges, ionic doping techniques have been widely explored to achieve better performance and reliability, through fine-tuning the switching material properties. The major factors that potentially affect the forming characteristics of doped transition metal oxides were systematically evaluated with density functional theory (DFT) calculations in conjunction with experimental observations to address the opportunities and challenges in achieving tunable RRAM characteristics.
电阻式随机存取存储器(RRAM)是下一代非易失性存储器技术最有前途的候选者之一,目前仍面临着一系列挑战,包括开关参数可变性、循环耐久性和数据保留。为了应对这些挑战,离子掺杂技术已被广泛探索,以获得更好的性能和可靠性,通过微调开关材料的性质。通过密度泛函理论(DFT)计算结合实验观察,系统地评估了可能影响掺杂过渡金属氧化物形成特性的主要因素,以解决实现可调RRAM特性的机遇和挑战。
{"title":"Doping technology for RRAM — Opportunities and challenges","authors":"B. Magyari-Kope, Dan Duncan, Liang Zhao, Y. Nishi","doi":"10.1109/VLSI-TSA.2016.7480494","DOIUrl":"https://doi.org/10.1109/VLSI-TSA.2016.7480494","url":null,"abstract":"Resistive random-access memory (RRAM), one of the most promising candidates for next generation non-volatile memory technology, nowadays still faces a series of challenges including switching-parameter variability, cycling endurance, and data retention. In order to cope with these challenges, ionic doping techniques have been widely explored to achieve better performance and reliability, through fine-tuning the switching material properties. The major factors that potentially affect the forming characteristics of doped transition metal oxides were systematically evaluated with density functional theory (DFT) calculations in conjunction with experimental observations to address the opportunities and challenges in achieving tunable RRAM characteristics.","PeriodicalId":441941,"journal":{"name":"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122467243","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Investigation of local heating effect for 14nm Ge pFinFETs based on Monte Carlo method 基于蒙特卡罗方法的14nm Ge pfinfet局部热效应研究
Pub Date : 2016-04-25 DOI: 10.1109/VLSI-TSA.2016.7480514
L. Yin, Hai Jiang, Lei Shen, Juncheng Wang, G. Du, Xiaoyan Liu
FinFET is regarded as one of the most promising device structure for future scaling-down demands. However, heat dispassion is a severe problem for the device performance and reliability in nano-scale FinFETs. Germanium (Ge) is a novel channel material with its high carrier mobility, especially for PMOSFET. However, the bulk thermal conductivity of Ge (52.98Wm-1K-1) is almost 3 times smaller than that of Si (148.6Wm-1K-1)[1], which will lead to more serious heat dispassion problems in Ge devices. What's more, the phonon mean free path is largely decreased in nano-device structure due to increased surface scatterings, which leads to a largely reduced thermal conductivity. Hence, heat dissipation problems will have a large impact on the performance of Ge FinFETs. In this paper, we use 3D Full Band Self-consistent Ensemble Monte Carlo Simulator and 3D Fourier Heat Conduction Solver to study the local heating effects (LHE) and its impact on 14nm Ge SOI pFinFETs. The heat dissipation path is also evaluated. From the simulation results, we find that 14nm Ge SOI FinFETs will experience severe heating problems and heat effects will seriously affect the device performance.
FinFET被认为是未来小型化需求中最有前途的器件结构之一。然而,散热是影响器件性能和可靠性的一个严重问题。锗(Ge)是一种新型的沟道材料,具有很高的载流子迁移率,尤其适用于PMOSFET。然而,Ge的体热导率(52.98Wm-1K-1)比Si的体热导率(148.6Wm-1K-1)几乎小3倍[1],这将导致Ge器件更严重的散热问题。此外,由于表面散射的增加,声子平均自由程在纳米器件结构中大大降低,从而导致热导率大大降低。因此,散热问题将对Ge finfet的性能产生很大的影响。本文利用三维全波段自一致集成蒙特卡罗模拟器和三维傅立叶热传导求解器研究了14nm Ge SOI pfinfet的局部加热效应(LHE)及其影响。并对散热路径进行了评估。从仿真结果来看,我们发现14nm Ge SOI finfet会遇到严重的发热问题,热效应会严重影响器件性能。
{"title":"Investigation of local heating effect for 14nm Ge pFinFETs based on Monte Carlo method","authors":"L. Yin, Hai Jiang, Lei Shen, Juncheng Wang, G. Du, Xiaoyan Liu","doi":"10.1109/VLSI-TSA.2016.7480514","DOIUrl":"https://doi.org/10.1109/VLSI-TSA.2016.7480514","url":null,"abstract":"FinFET is regarded as one of the most promising device structure for future scaling-down demands. However, heat dispassion is a severe problem for the device performance and reliability in nano-scale FinFETs. Germanium (Ge) is a novel channel material with its high carrier mobility, especially for PMOSFET. However, the bulk thermal conductivity of Ge (52.98Wm-1K-1) is almost 3 times smaller than that of Si (148.6Wm-1K-1)[1], which will lead to more serious heat dispassion problems in Ge devices. What's more, the phonon mean free path is largely decreased in nano-device structure due to increased surface scatterings, which leads to a largely reduced thermal conductivity. Hence, heat dissipation problems will have a large impact on the performance of Ge FinFETs. In this paper, we use 3D Full Band Self-consistent Ensemble Monte Carlo Simulator and 3D Fourier Heat Conduction Solver to study the local heating effects (LHE) and its impact on 14nm Ge SOI pFinFETs. The heat dissipation path is also evaluated. From the simulation results, we find that 14nm Ge SOI FinFETs will experience severe heating problems and heat effects will seriously affect the device performance.","PeriodicalId":441941,"journal":{"name":"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126805274","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Doherty techniques for 5G RF and mm-wave power amplifiers 5G射频和毫米波功率放大器的多尔蒂技术
Pub Date : 1900-01-01 DOI: 10.1109/vlsi-dat.2016.7482588
P. Reynaert, Yuhe Cao, M. Vigilante, P. Indirayanti
5G poses severe challenges to PA design. In the first place, output power and efficiency are of prime importance because of battery lifetime. The tradeoff between linear output power and efficiency is typically challenged by the high PAPR due to QAM modulation and/or OFDM techniques. But this important trade-off is challenged even more in 5G due to the high bandwidth requirements. Furthermore, the shift to higher frequencies, where more unused spectrum is available, also puts a burden on the overall PA architecture.
5G对PA设计提出了严峻的挑战。首先,由于电池的寿命,输出功率和效率是最重要的。由于QAM调制和/或OFDM技术,线性输出功率和效率之间的权衡通常受到高PAPR的挑战。但由于带宽要求高,这种重要的权衡在5G中受到了更大的挑战。此外,向更高频率的转换,其中更多的未使用频谱可用,也给整个PA架构带来负担。
{"title":"Doherty techniques for 5G RF and mm-wave power amplifiers","authors":"P. Reynaert, Yuhe Cao, M. Vigilante, P. Indirayanti","doi":"10.1109/vlsi-dat.2016.7482588","DOIUrl":"https://doi.org/10.1109/vlsi-dat.2016.7482588","url":null,"abstract":"5G poses severe challenges to PA design. In the first place, output power and efficiency are of prime importance because of battery lifetime. The tradeoff between linear output power and efficiency is typically challenged by the high PAPR due to QAM modulation and/or OFDM techniques. But this important trade-off is challenged even more in 5G due to the high bandwidth requirements. Furthermore, the shift to higher frequencies, where more unused spectrum is available, also puts a burden on the overall PA architecture.","PeriodicalId":441941,"journal":{"name":"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134296021","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Trend, technology and architecture of small cell in 5G era 5G时代小蜂窝的趋势、技术和架构
Pub Date : 1900-01-01 DOI: 10.1109/vlsi-tsa.2016.7480474
Chun-Nan Liu
With the mobile data traffic increasing, network operators are urgently looking for new technologies for improving capacity, user data-rates, spectrum reuse and latency to fulfill user experience and variant new applications. Small cells will play an important role in the high capacity, densely deployed networks for future 5G networks and the three major use cases: include enhanced mobile broadband, massive machine type communications and ultra-reliable and low latency communications. This work presents the trend, technologies and architecture of small cells in 5G and highlights key techniques such as carrier aggregation, licensed and un-licensed band, mmWave, new waveform, coding and modulation, multi-cell cooperation and advanced MIMO.
随着移动数据流量的不断增加,网络运营商迫切需要新的技术来提高容量、用户数据速率、频谱复用和延迟,以满足用户体验和多样化的新应用。小型蜂窝将在未来5G网络的高容量、密集部署网络和三个主要用例中发挥重要作用:包括增强型移动宽带、大规模机器类型通信以及超可靠和低延迟通信。介绍了5G小蜂窝的发展趋势、技术和架构,重点介绍了载波聚合、授权和非授权频段、毫米波、新波形、编码和调制、多蜂窝合作和先进MIMO等关键技术。
{"title":"Trend, technology and architecture of small cell in 5G era","authors":"Chun-Nan Liu","doi":"10.1109/vlsi-tsa.2016.7480474","DOIUrl":"https://doi.org/10.1109/vlsi-tsa.2016.7480474","url":null,"abstract":"With the mobile data traffic increasing, network operators are urgently looking for new technologies for improving capacity, user data-rates, spectrum reuse and latency to fulfill user experience and variant new applications. Small cells will play an important role in the high capacity, densely deployed networks for future 5G networks and the three major use cases: include enhanced mobile broadband, massive machine type communications and ultra-reliable and low latency communications. This work presents the trend, technologies and architecture of small cells in 5G and highlights key techniques such as carrier aggregation, licensed and un-licensed band, mmWave, new waveform, coding and modulation, multi-cell cooperation and advanced MIMO.","PeriodicalId":441941,"journal":{"name":"2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121725229","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2016 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA)
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