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Design and Performance Analysis of ISFET Using Various Oxide Materials for Biosensing Applications 使用各种氧化物材料的 ISFET 在生物传感应用中的设计和性能分析
IF 1.7 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-06-04 DOI: 10.1109/OJNANO.2024.3408845
Sankararao Majji;Asisa Kumar Panigrahy;Depuru Shobha Rani;Muralidhar Nayak Bhukya;Chandra Sekhar Dash
The healthcare industry is constantly changing because of technological breakthroughs that spur new methods of diagnosing and treating illnesses. This study investigates the development of Ion Sensitive Field Effect Transistor (ISFET) sensors for DNA-based blood cancer diagnosis. This work presents the design of a two-dimensional ion-sensitive field-effect transistor. Concentration fluctuations and transfer characteristics with different oxides are studied using blood from two electrolyte solutions. It is possible to evaluate how the modeled device can be utilized as a pH sensor or a biosensor in healthcare applications by looking at how the pH changes for different oxides. Additionally, several oxides were examined in the simulated ISFET devices' output characteristics. Blood is the electrolyte to study the device's sensitivity for different oxides. When pH 7.4 is considered, SiO2 oxide is significantly more sensitive than other oxides. The resulting 2D-ISFET exhibits remarkable blood electrolyte sensitivity and holds potential as a quick detection tool for blood cancer. The results show that the ISFET possesses drain-induced barrier lowering (DIBL), greater ON-current (ION) and switching ratio (ION/IOFF), and decreased subthreshold swing (SS). The pH sensor's sensitivity and the suggested equipment can detect up to 30 fg/mL of blood cancer biomarkers. An important development in technology-driven healthcare is the emergence of DNA-based blood cancer detection utilizing ISFET sensors. This opens up new avenues for improving cancer diagnosis and patient outcomes.
由于技术上的突破推动了新的疾病诊断和治疗方法的出现,医疗保健行业也在不断发生变化。本研究调查了用于基于 DNA 的血癌诊断的离子敏感场效应晶体管 (ISFET) 传感器的开发情况。这项工作介绍了一种二维离子敏感场效应晶体管的设计。利用两种电解质溶液中的血液研究了不同氧化物的浓度波动和转移特性。通过观察不同氧化物的 pH 值变化情况,可以评估如何将该模型器件用作医疗保健应用中的 pH 值传感器或生物传感器。此外,还研究了模拟 ISFET 器件输出特性中的几种氧化物。血液是研究器件对不同氧化物灵敏度的电解质。当 pH 值为 7.4 时,SiO2 氧化物的灵敏度明显高于其他氧化物。由此产生的二维 ISFET 对血液电解质的灵敏度非常高,有望成为血液癌症的快速检测工具。研究结果表明,这种 ISFET 具有漏极诱导势垒降低 (DIBL)、更大的导通电流 (ION) 和开关比 (ION/IOFF),以及更小的阈下摆动 (SS)。pH 传感器的灵敏度和所建议的设备可检测出高达 30 fg/mL 的血癌生物标记物。利用 ISFET 传感器进行基于 DNA 的血癌检测是技术驱动型医疗保健领域的一项重要发展。这为改善癌症诊断和患者预后开辟了新途径。
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引用次数: 0
Temperature-Dependent Hydrogen Modulations of Ultra-Scaled a-IGZO Thin Film Transistor Under Gate Bias Stress 栅极偏压应力下超标量 a-IGZO 薄膜晶体管的温度依赖性氢调制
IF 1.7 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-04-08 DOI: 10.1109/OJNANO.2024.3386123
Muhammad Aslam;Shu-Wei Chang;Min-Hui Chuang;Yi-Ho Chen;Yao-Jen Lee;Yiming Li
Recently, a-IGZO has advanced toward the next-generation electronics system because of its compatibility with complementary metal oxide semiconductor (CMOS) and back-end-of-line (BOEL) based systems. A systematic electrical characterization of a-IGZO TFT related to reliability issues, such as positive bias temperature stress (PBTS) and negative bias temperature stress (NBTS), would entitle its integration into novel electronics systems. Unexpectedly, PBTS is characterized by the transition of positive Vth shift to negative Vth shift (ΔVth, the positive shift followed by the stress and temperature activated negative shift). This transition is attributed to charge trapping/trap-site generations and hydrogen migration to the active layer. The ΔVth shift mechanism depends on the temperature and voltage stress. On the other hand, a negative ΔVth shift has been observed during the NBTS operation and could be attributed to the hole trapping at the interface of GI/IGZO. An effective suppression of the gate leakage current has also been observed during reliability tests. Simulation results reveal a pronounced potential at the edges of source and drain regions, and considered the origin of hydrogen migration into the IGZO layer. Thermal image results also reveal the strong temperature/potential distribution at the edges of the source/drain regions, indorsing the simulation results.
最近,a-IGZO 因其与基于互补金属氧化物半导体(CMOS)和后端线(BOEL)系统的兼容性而向下一代电子系统迈进。对 a-IGZO TFT 的可靠性问题(如正偏压温度应力 (PBTS) 和负偏压温度应力 (NBTS))进行系统的电气特性分析,有助于将其集成到新型电子系统中。令人意想不到的是,PBTS 的特点是正 Vth 值漂移向负 Vth 值漂移的转变(ΔVth,正漂移后的应力和温度激活负漂移)。这种转变归因于电荷捕获/捕获位点生成以及氢迁移到活性层。ΔVth转变机制取决于温度和电压应力。另一方面,在 NBTS 工作期间观察到负 ΔVth 漂移,这可能是由于 GI/IGZO 接口处的空穴捕获所致。在可靠性测试中也观察到栅极漏电流得到了有效抑制。模拟结果显示,源极和漏极区域的边缘存在明显的电位,并认为这是氢气迁移到 IGZO 层的原因。热图像结果也显示了源极/漏极区域边缘强烈的温度/电位分布,证明了仿真结果。
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引用次数: 0
Analysis and Design of FeFET Synapse With Stacked-Nanosheet Architecture Considering Cycle-to-Cycle Variations for Neuromorphic Applications 考虑到神经形态应用中周期间变化的叠层纳米片架构 FeFET 突触的分析与设计
IF 1.7 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-03-10 DOI: 10.1109/OJNANO.2024.3399559
Heng Li Lin;Pin Su
Using extensive Monte-Carlo simulations with a nucleation-limited-switching (NLS) ferroelectric model and considering cycle-to-cycle variations, this paper constructs and analyzes the intrinsic conductance (GDS) response of stacked-nanosheet FeFET synapses with emphasis on the challenging identical-pulse stimulation. Our study indicates that the interlayer oxide thickness of the FeFET and the saturation polarization of the ferroelectric are crucial to the linearity and symmetry of the intrinsic GDS response. With the stacked-nanosheet architecture, the maximum-to-minimum conductance ratio in the GDS response can be boosted by increasing the number of channel tiers without footprint penalty. For a stacked-nanosheet FeFET synapse with an area ratio effect, the GDS response can be further engineered by varying the tier number. In addition, the immunity to cycle-to-cycle variations and the noise margin for each state in the GDS response can also be improved by increasing the number of tiers. Our study may provide insights for future FeFET synapse design for analog computing.
本文利用成核限制开关(NLS)铁电模型进行了大量蒙特卡洛模拟,并考虑了周期之间的变化,构建并分析了叠层纳米片 FeFET 突触的本征电导(GDS)响应,重点研究了具有挑战性的相同脉冲刺激。我们的研究表明,FeFET 的层间氧化物厚度和铁电体的饱和极化对本征 GDS 响应的线性和对称性至关重要。采用叠层纳米片结构,可以通过增加沟道层数来提高 GDS 响应中的最大与最小电导比,而不会对基底面造成影响。对于具有面积比效应的叠层纳米片 FeFET 突触,可以通过改变层数进一步设计 GDS 响应。此外,GDS 响应中每个状态对周期变化的抗扰度和噪声裕度也可以通过增加层数来改善。我们的研究可为未来模拟计算的 FeFET 突触设计提供启示。
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引用次数: 0
IEEE Open Journal of Nanotechnology Information for Authors IEEE 纳米技术开放期刊 作者信息
IF 1.7 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-03-06 DOI: 10.1109/OJNANO.2024.3362551
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引用次数: 0
Analysis of GAA Junction Less NS FET Towards Analog and RF Applications at 30 nm Regime 分析 GAA 结较少的 NS FET 在 30 纳米工艺下的模拟和射频应用
IF 1.7 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-02-13 DOI: 10.1109/OJNANO.2024.3365173
Asisa Kumar Panigrahy;Sudheer Hanumanthakari;Shridhar B. Devamane;Shruti Bhargava Choubey;M. Prasad;D. Somasundaram;N. Kumareshan;N. Arun Vignesh;Gnanasaravanan Subramaniam;Durga Prakash M;Raghunandan Swain
This research focuses on a quantum model created using an entirely novel nanosheet FET. The standard model describes the performance of a Gate-all-around (GAA) Junction-less (JL) nanosheet device with a gate dielectric of SiO2 and HfO2, each having a thickness of 1 nm. The performance of both the classical and quantum models of the GAA nanosheet device is evaluated using the visual TCAD tool, which measures the ION, IOFF, ION/ IOFF, threshold voltage, DIBL, gain parameters (gm, gd, Av), gate capacitance, and cut-off frequency (fT). The device is suited for applications needing rapid switching since it has a low gate capacitance of the order of 10–18, according to the simulation results. A transconductance (gm) value of 21 µS and an impressive cut-off frequency of 9.03 GHz are displayed during device analysis. A detailed investigation has also been done into the P-type device response for the same device. Finally, the proposed GAA nanosheet device is used in the inverter model. The NSFET-based inverter, although having higher gate capacitance, has the shortest propagation latency.
这项研究的重点是利用一种全新的纳米片场效应晶体管创建量子模型。该标准模型描述了栅极介电质为二氧化硅和二氧化铪(厚度均为 1 纳米)的全栅(GAA)无结(JL)纳米片器件的性能。利用可视化 TCAD 工具评估了 GAA 纳米片器件的经典模型和量子模型的性能,测量了 ION、IOFF、ION/ IOFF、阈值电压、DIBL、增益参数(gm、gd、Av)、栅极电容和截止频率 (fT)。根据仿真结果,该器件的栅极电容较低,约为 10-18 左右,因此适合需要快速开关的应用。在器件分析过程中,显示出 21 µS 的跨导 (gm) 值和 9.03 GHz 的惊人截止频率。此外,还对同一器件的 P 型器件响应进行了详细研究。最后,在逆变器模型中使用了所提出的 GAA 纳米片器件。基于 NSFET 的逆变器虽然具有较高的栅极电容,但却具有最短的传播延迟。
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引用次数: 0
Electrical Characteristic and Power Fluctuations of GAA Si NS CFETs by Simultaneously Considering Six Process Variation Factors 同时考虑六个工艺变化因素的 GAA Si NS CFET 的电气特性和功率波动
IF 1.7 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2023-11-28 DOI: 10.1109/OJNANO.2023.3335942
Sekhar Reddy Kola;Yiming Li
Characteristic variability induced by process variation effect (PVE) is one of technological challenges in semiconductor industry. In this work, we computationally study electrical characteristic and power fluctuations induced by six factors of PVE of the gate-all-around (GAA) silicon (Si) nanosheet (NS) complementary field-effect-transistors (CFETs) which are formed by vertically stacking n-FET on top of p-FET. Among the six factors, NS thickness (TNS), NS width (WNS), and gate length (LG) are identified as crucial factors contributing to large variations in device characteristics. The p-FET exhibits substantial off-state current fluctuation (about 151%) due to the bottom parasitic channel leakages. Compared with the magnitudes of dynamic and short circuit powers, the static power is marginal, but it possesses the largest fluctuation (up to 148%). If we assume that each factor of PVE has the same probability distribution as the others and all are mutually independent, the statistical sum of their power fluctuations will exhibit more than 50% overestimations, compared with the results when all factors are considered simultaneously.
工艺变异效应(PVE)引起的特性变化是半导体行业面临的技术挑战之一。在这项工作中,我们通过计算研究了在 p 型场效应晶体管上垂直堆叠 n 型场效应晶体管而形成的全栅极(GAA)硅(Si)纳米片(NS)互补场效应晶体管(CFET)的六个 PVE 因素引起的电气特性和功率波动。在这六个因素中,NS 厚度 (TNS)、NS 宽度 (WNS) 和栅极长度 (LG) 被认为是导致器件特性发生巨大变化的关键因素。由于底部寄生沟道泄漏,p-场效应晶体管表现出很大的关态电流波动(约 151%)。与动态功率和短路功率的大小相比,静态功率微不足道,但波动却最大(高达 148%)。如果我们假设 PVE 的每个因素与其他因素具有相同的概率分布,并且所有因素都相互独立,那么与同时考虑所有因素时的结果相比,其功率波动的统计总和将高估 50%以上。
{"title":"Electrical Characteristic and Power Fluctuations of GAA Si NS CFETs by Simultaneously Considering Six Process Variation Factors","authors":"Sekhar Reddy Kola;Yiming Li","doi":"10.1109/OJNANO.2023.3335942","DOIUrl":"https://doi.org/10.1109/OJNANO.2023.3335942","url":null,"abstract":"Characteristic variability induced by process variation effect (PVE) is one of technological challenges in semiconductor industry. In this work, we computationally study electrical characteristic and power fluctuations induced by six factors of PVE of the gate-all-around (GAA) silicon (Si) nanosheet (NS) complementary field-effect-transistors (CFETs) which are formed by vertically stacking \u0000<italic>n</i>\u0000-FET on top of \u0000<italic>p</i>\u0000-FET. Among the six factors, NS thickness (\u0000<italic>T<sub>NS</sub></i>\u0000), NS width (\u0000<italic>W<sub>NS</sub></i>\u0000), and gate length (\u0000<italic>L<sub>G</sub></i>\u0000) are identified as crucial factors contributing to large variations in device characteristics. The \u0000<italic>p</i>\u0000-FET exhibits substantial off-state current fluctuation (about 151%) due to the bottom parasitic channel leakages. Compared with the magnitudes of dynamic and short circuit powers, the static power is marginal, but it possesses the largest fluctuation (up to 148%). If we assume that each factor of PVE has the same probability distribution as the others and all are mutually independent, the statistical sum of their power fluctuations will exhibit more than 50% overestimations, compared with the results when all factors are considered simultaneously.","PeriodicalId":446,"journal":{"name":"IEEE Open Journal of Nanotechnology","volume":"4 ","pages":"229-238"},"PeriodicalIF":1.7,"publicationDate":"2023-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10330087","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"138739547","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Impact of Specific PM2.5 Contaminant on Monolayer/Bilayer ArGNR 特定 PM2.5 污染物对单层/双层 ArGNR 的影响
IF 1.7 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2023-11-24 DOI: 10.1109/OJNANO.2023.3336366
Kamal Solanki;Swati Verma;Punya Prasanna Paltani;Manoj Kumar Majumder
Elevated Particular Matter (PM2.5) may increase the risk of acquiring hazardous health implications, and hence high-performance monitoring of minuscule contaminants might protect people's health. The adsorption behaviour of specific PM2.5 contaminants on doped/undoped monolayer/bilayer armchair graphene nanoribbon (ArGNR) is analyzed using a hydrogen-passivated layer. By using the first-principles density functional theory (DFT), the influence of doping on the ArGNR substrate is carefully examined. Due to the fragile surface atoms, monolayer ArGNR exhibits roughly twice the adsorption energy compared to the bilayer configuration. However, the specific PM2.5 contaminants, the CH4, NH3, and NO2 molecules demonstrate chemisorption of −2 eV,−2.95 eV, and −4 eV, with extremely less bandgap variation of −65% to −70% and −100% and a gigantic amount of charge transfer of +0.153 eV, +0.156 eV and +0.010 eV, and the DOS peaks at B site are $ pm 110,text{eV}, pm 65{rm{ eV}}, pm 80{rm{ eV}}$, and at the P site are $ pm 130$ eV, $ pm 300$ eV and $ pm 80$ eV on boron-phosphorus (BP) co-doped monolayer ArGNR, for CH4, NH3, and NO2, respectively.
高浓度的微粒物质(PM2.5)可能会增加人们获得有害健康影响的风险,因此对微小污染物的高性能监测可能会保护人们的健康。本研究利用氢钝化层分析了特定 PM2.5 污染物在掺杂/未掺杂单层/双层臂向石墨烯纳米带(ArGNR)上的吸附行为。通过使用第一原理密度泛函理论(DFT),仔细研究了掺杂对 ArGNR 衬底的影响。由于表面原子比较脆弱,单层 ArGNR 的吸附能大约是双层结构的两倍。然而,特定的 PM2.5 污染物、CH4、NH3 和 NO2 分子的化学吸附能分别为 -2 eV、-2.95 eV 和 -4 eV,带隙变化极小,分别为 -65% 至 -70% 和 -100%,电荷转移量极大,分别为 +0.153 eV、+0.156 eV 和 +0.010 eV,在硼磷(BP)共掺杂单层 ArGNR 上,CH4、NH3 和 NO2 在 B 位的 DOS 峰分别为 $pm 110,text{eV}, pm 65{rm{ eV}}, pm 80{rm{ eV}}$ ,在 P 位的 DOS 峰分别为 $pm 130$ eV, $pm 300$ eV 和 $pm 80$ eV。
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引用次数: 0
Observations of Aharonov-Bohm Conductance Oscillations in CVD-Grown Graphene Rings at 4K 4 K时cvd生长石墨烯环中Aharonov-Bohm电导振荡的观察
IF 1.7 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2023-11-10 DOI: 10.1109/OJNANO.2023.3331974
Zitao Tang;Siwei Chen;Cynthia I. Osuala;Abdus Salam Sarkar;Grzegorz Hader;Aron Cummings;Stefan Strauf;Chunlei Qu;Eui-Hyeok Yang
We present the observations of Aharonov-Bohm (AB) oscillations in chemical vapor deposition (CVD)-grown graphene rings via magnetotransport measurements at 4K under out-of-plane external magnetic fields up to +/−2.1 T. Incorporating a baseline subtraction of the original conductance data allowed us to observe two-terminal conductance oscillations with a spacing of ΔBAB of 3.66 to 32.9 mT from the ring with an inner radius of 200 nm and arm-width of 400 nm, and spacing of ΔBAB from 2.1 mT to 8.2 mT from the ring with an inner radius of 400 nm and an arm-width of 400 nm. The fast-Fourier transform (FFT) data showed AB oscillation periods, with the interval of the h/e fundamental mode given by 30/T to 273/T for the ring with the inner radius of 200 nm and arm-width of 400 nm, and 122/T to 488/T for the ring with the inner radius of 400 nm. The broad spreading of FFT peaks is due to the aspect ratio of the inner radius r1 and the width w of the ring, r/w ∼ 1. Systematic numerical simulations were performed to elucidate the relation between the AB oscillation frequency and the geometry of the ring. This work shows AB oscillations in CVD-grown graphene rings at an elevated temperature (4K).
我们展示了化学气相沉积(CVD)生长的石墨烯环中Aharonov-Bohm (AB)振荡的观测结果,在4 K的面外磁场高达+/-2.1 t下通过磁输运测量,结合原始电导数据的基线减去,我们可以观察到距离内半径为200 nm,臂宽为400 nm的环的间距为ΔB AB的3.66至32.9 mT的两端电导振荡。与内半径为400 nm、臂宽为400 nm的环之间的距离为2.1 ~ 8.2 mT的ΔB AB。快速傅里叶变换(FFT)数据显示AB振荡周期,对于内半径为200 nm、臂宽为400 nm的环,h/e基模的间隔为30/T ~ 273/T,对于内半径为400 nm的环,其间隔为122/T ~ 488/T。FFT峰的宽展是由于内半径r1和环的宽度w的纵横比r/w ~ 1。通过系统的数值模拟,阐明了AB振荡频率与环的几何形状之间的关系。这项工作显示了cvd生长的石墨烯环在高温(4 K)下的AB振荡。
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引用次数: 0
A Comprehensive Technique Based on Machine Learning for Device and Circuit Modeling of Gate-All-Around Nanosheet Transistors 基于机器学习的栅极全能非薄片晶体管器件和电路建模综合技术
IF 1.7 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2023-10-30 DOI: 10.1109/OJNANO.2023.3328425
Rajat Butola;Yiming Li;Sekhar Reddy Kola
Machine learning (ML) is poised to play an important part in advancing the predicting capability in semiconductor device compact modeling domain. One major advantage of ML-based compact modeling is its ability to capture complex relationships and patterns in large datasets. Therefore, in this paper a novel design scheme based on dynamically adaptive neural network (DANN) is proposed to develop fast and accurate compact model (CM). This framework constitutes a powerful yet computationally efficient methodology and exhibits emergent dynamic behaviors. This paper demonstrates that the compact model based on ML can be designed to replicate the performance of conventional compact model for nanodevices. For this work, gate-all-around (GAA) nanosheet (NS) device characteristics are comprehensively analyzed for process variability sources using the proposed model. The device geometry parameters such as channel length, nanosheet width and nanosheet thickness are fed as input features to the DANN model. The adaptive neural network learns dynamically by updating weights of the model in accordance with the input features and achieves accurate neural weight convergence. The proposed model predicted the electrical characteristics of NS devices with less than 1% error rate. The model is also implemented and validated for the simulations of digital circuit designs such as inverter, and logic gates.
机器学习(ML)在提高半导体器件紧凑建模领域的预测能力方面将发挥重要作用。基于ml的紧凑建模的一个主要优点是它能够捕获大型数据集中的复杂关系和模式。为此,本文提出了一种基于动态自适应神经网络(DANN)的新型设计方案,以快速、准确地建立紧凑模型(CM)。这个框架构成了一个强大而计算效率高的方法,并表现出紧急的动态行为。本文证明了基于机器学习的紧凑模型可以被设计成复制纳米器件传统紧凑模型的性能。在这项工作中,使用所提出的模型全面分析了栅极全能(GAA)纳米片(NS)器件的工艺变异性源。器件几何参数如通道长度、纳米片宽度和纳米片厚度作为输入特征馈送到DANN模型。自适应神经网络通过根据输入特征更新模型的权值进行动态学习,实现神经网络权值的精确收敛。该模型预测NS器件电特性的错误率小于1%。该模型还在数字电路设计(如逆变器和逻辑门)的仿真中得到了实现和验证。
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引用次数: 0
Sputtering Deposition With Low Cost Multi-Element Powder Targets 低成本多元素粉末靶的溅射沉积
IF 1.7 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2023-10-27 DOI: 10.1109/OJNANO.2023.3327997
Tamiko Ohshima
Compared to solid target, powder target is low cost and can be varied in wide range of elemental combinations. Transparent and conductive aluminum-doped zinc oxide (AZO) thin films were prepared by sputter deposition using a mixed powder target consisting of zinc oxide and aluminum oxide powders at 98:2 wt%. The bulk density of the powder target can be varied depending on the pressing pressure. Therefore, AZO thin films were prepared on Si and sapphire substrates using powder targets with different bulk densities (ρpowder) ranging from 0.898 to 3.00 g/cm3. The fabricated structural, electrical, and optical properties of the AZO thin films were examined, and the relationships between the target bulk density and film properties were investigated. X-ray diffraction measurements revealed c-axis ZnO (002) diffraction peaks, corresponding to crystallite growth oriented perpendicular to the substrate. Hall effect measurements showed n-type conductivity, with carrier density and Hall mobility increasing as the bulk density of the powder target increased. At ρpowder = 3.00 g/cm3, the AZO thin film on the Si substrate showed the lowest resistivity of 1.35 × 10−3 Ω·cm. UV-visible spectroscopy measurements showed that the average transmittance in the visible light region exceeded 80% for the AZO thin films on the sapphire substrates. The figure of merit was calculated as a measure of the potential application in optoelectronic devices, resulting in 6.37 × 10−3 Ω−1 for ρpowder = 3.00 g/cm3. This research contributes to Nagasaki University's goal of “planetary health”.
与固体靶相比,粉末靶具有成本低、元素组合范围广等优点。以质量分数为98:2 wt%的氧化锌和氧化铝粉为混合靶材,采用溅射沉积法制备了透明导电的掺铝氧化锌(AZO)薄膜。粉末靶材的堆积密度可以根据压制压力而变化。因此,采用体积密度为0.898 ~ 3.00 g/cm3的粉末靶材,在Si和蓝宝石衬底上制备了AZO薄膜。测试了制备的AZO薄膜的结构、电学和光学性能,并研究了目标体积密度与薄膜性能的关系。x射线衍射测量显示c轴ZnO(002)衍射峰,对应于垂直于衬底的晶体生长。霍尔效应测量结果显示,随着粉体靶体体积密度的增加,载流子密度和霍尔迁移率也随之增加。当ρpowder = 3.00 g/cm3时,Si衬底上的AZO薄膜的电阻率最低,为1.35 × 10−3 Ω·cm。紫外可见光谱测量表明,蓝宝石衬底上的AZO薄膜在可见光区的平均透过率超过80%。计算了其在光电器件中的潜在应用价值,得出ρ粉= 3.00 g/cm3时的值为6.37 × 10−3 Ω−1。这项研究有助于长崎大学实现“地球健康”的目标。
{"title":"Sputtering Deposition With Low Cost Multi-Element Powder Targets","authors":"Tamiko Ohshima","doi":"10.1109/OJNANO.2023.3327997","DOIUrl":"10.1109/OJNANO.2023.3327997","url":null,"abstract":"Compared to solid target, powder target is low cost and can be varied in wide range of elemental combinations. Transparent and conductive aluminum-doped zinc oxide (AZO) thin films were prepared by sputter deposition using a mixed powder target consisting of zinc oxide and aluminum oxide powders at 98:2 wt%. The bulk density of the powder target can be varied depending on the pressing pressure. Therefore, AZO thin films were prepared on Si and sapphire substrates using powder targets with different bulk densities (\u0000<italic>ρ<sub>p</sub><sub>owder</sub></i>\u0000) ranging from 0.898 to 3.00 g/cm\u0000<sup>3</sup>\u0000. The fabricated structural, electrical, and optical properties of the AZO thin films were examined, and the relationships between the target bulk density and film properties were investigated. X-ray diffraction measurements revealed c-axis ZnO (002) diffraction peaks, corresponding to crystallite growth oriented perpendicular to the substrate. Hall effect measurements showed n-type conductivity, with carrier density and Hall mobility increasing as the bulk density of the powder target increased. At \u0000<italic>ρ<sub>p</sub><sub>owder</sub></i>\u0000 = 3.00 g/cm\u0000<sup>3</sup>\u0000, the AZO thin film on the Si substrate showed the lowest resistivity of 1.35 × 10\u0000<sup>−3</sup>\u0000 Ω·cm. UV-visible spectroscopy measurements showed that the average transmittance in the visible light region exceeded 80% for the AZO thin films on the sapphire substrates. The figure of merit was calculated as a measure of the potential application in optoelectronic devices, resulting in 6.37 × 10\u0000<sup>−3</sup>\u0000 Ω\u0000<sup>−1</sup>\u0000 for \u0000<italic>ρ<sub>p</sub><sub>owder</sub></i>\u0000 = 3.00 g/cm\u0000<sup>3</sup>\u0000. This research contributes to Nagasaki University's goal of “planetary health”.","PeriodicalId":446,"journal":{"name":"IEEE Open Journal of Nanotechnology","volume":"4 ","pages":"172-180"},"PeriodicalIF":1.7,"publicationDate":"2023-10-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10298617","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135212984","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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IEEE Open Journal of Nanotechnology
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