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Sputtering Deposition With Low Cost Multi-Element Powder Targets 低成本多元素粉末靶的溅射沉积
IF 1.7 Q3 Engineering Pub Date : 2023-10-27 DOI: 10.1109/OJNANO.2023.3327997
Tamiko Ohshima
Compared to solid target, powder target is low cost and can be varied in wide range of elemental combinations. Transparent and conductive aluminum-doped zinc oxide (AZO) thin films were prepared by sputter deposition using a mixed powder target consisting of zinc oxide and aluminum oxide powders at 98:2 wt%. The bulk density of the powder target can be varied depending on the pressing pressure. Therefore, AZO thin films were prepared on Si and sapphire substrates using powder targets with different bulk densities (ρpowder) ranging from 0.898 to 3.00 g/cm3. The fabricated structural, electrical, and optical properties of the AZO thin films were examined, and the relationships between the target bulk density and film properties were investigated. X-ray diffraction measurements revealed c-axis ZnO (002) diffraction peaks, corresponding to crystallite growth oriented perpendicular to the substrate. Hall effect measurements showed n-type conductivity, with carrier density and Hall mobility increasing as the bulk density of the powder target increased. At ρpowder = 3.00 g/cm3, the AZO thin film on the Si substrate showed the lowest resistivity of 1.35 × 10−3 Ω·cm. UV-visible spectroscopy measurements showed that the average transmittance in the visible light region exceeded 80% for the AZO thin films on the sapphire substrates. The figure of merit was calculated as a measure of the potential application in optoelectronic devices, resulting in 6.37 × 10−3 Ω−1 for ρpowder = 3.00 g/cm3. This research contributes to Nagasaki University's goal of “planetary health”.
与固体靶相比,粉末靶具有成本低、元素组合范围广等优点。以质量分数为98:2 wt%的氧化锌和氧化铝粉为混合靶材,采用溅射沉积法制备了透明导电的掺铝氧化锌(AZO)薄膜。粉末靶材的堆积密度可以根据压制压力而变化。因此,采用体积密度为0.898 ~ 3.00 g/cm3的粉末靶材,在Si和蓝宝石衬底上制备了AZO薄膜。测试了制备的AZO薄膜的结构、电学和光学性能,并研究了目标体积密度与薄膜性能的关系。x射线衍射测量显示c轴ZnO(002)衍射峰,对应于垂直于衬底的晶体生长。霍尔效应测量结果显示,随着粉体靶体体积密度的增加,载流子密度和霍尔迁移率也随之增加。当ρpowder = 3.00 g/cm3时,Si衬底上的AZO薄膜的电阻率最低,为1.35 × 10−3 Ω·cm。紫外可见光谱测量表明,蓝宝石衬底上的AZO薄膜在可见光区的平均透过率超过80%。计算了其在光电器件中的潜在应用价值,得出ρ粉= 3.00 g/cm3时的值为6.37 × 10−3 Ω−1。这项研究有助于长崎大学实现“地球健康”的目标。
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引用次数: 0
Design, Fabrication and Measurement of Radio Frequency Micro-Electro-Mechanical Systems 射频微机电系统的设计、制造与测量
IF 1.7 Q3 Engineering Pub Date : 2023-10-03 DOI: 10.1109/OJNANO.2023.3318236
Girija Sravani Kondavitee;Young Suh Song;Srinivasa Rao Karumuri;Koushik Guha;Brajesh Kumar Kaushik;Aimé Lay-Ekuakille
This article describes the fabrication and experimental results of a novel step structure Radio Frequency Microelectromechanical system (RF MEMS) switch integrated with a circular patch antenna. The RF MEMS switch is developed using surface micromachining technology and exhibits several desirable characteristics. The key findings and features of the proposed RF MEMS switch are as follows: The switch operates at a very low pull-in voltage of 4.4 V, which is advantageous as it requires low actuation voltage for switching operations. Low ON State Capacitance: The switch demonstrates a low ON state capacitance of 81.2 fF, indicating efficient switching performance. High Isolation: The switch exhibits high isolation of −60.68 dB at 23 GHz, which is the central frequency of the K-band. This high isolation ensures minimal interference and improved signal integrity. The RF MEMS switch is integrated with a circular patch antenna, enabling reconfigurability in the operating frequency of the antenna. The antenna's frequency can be adjusted by actuating the switches alternatively. The specific operating frequencies and return loss values are as follows: Both Switches ON: The antenna radiates the signal at a frequency of 19.2 GHz with a return loss of −26.7 dB. Only Switch A ON: The antenna radiates at a frequency of 21 GHz with a return loss of −17.6 dB. Only Switch B ON: The antenna radiates the signal at a frequency of 26.4 GHz with a return loss of −17.47 dB. The RF MEMS switch and antenna are optimized to transmit RF signals within the K-band frequency range. The integration of the step structured RF MEMS switches successfully enables reconfiguration of the antenna's operating frequency. The proposed antenna, integrated with the RF MEMS switches, has potential applications in various K-band systems, including surface movement radars, direct broadcast satellite, Direct-to-Home (DHT) television, and 5th Generation (5G) mobile communication. The reconfigurability of the antenna's frequency allows for flexibility and adaptability in different K-band applications.
本文介绍了一种新型带圆形贴片天线的阶跃结构射频微机电系统(RF MEMS)开关的制作和实验结果。射频MEMS开关是利用表面微加工技术开发的,具有几个理想的特性。所提出的RF MEMS开关的主要发现和特点如下:该开关在4.4 V的极低拉入电压下工作,这是有利的,因为它需要低的开关操作驱动电压。低ON状态电容:开关具有81.2 fF的低ON状态电容,显示了高效的开关性能。高隔离:该开关在23 GHz时具有-60.68 dB的高隔离度,这是k波段的中心频率。这种高隔离确保最小的干扰和改进的信号完整性。RF MEMS开关集成了圆形贴片天线,使天线的工作频率可重新配置。天线的频率可以通过交替驱动开关来调节。具体工作频率和回波损耗值如下:Both switch ON:天线以19.2 GHz的频率发射信号,回波损耗为-26.7 dB。仅开关A ON:天线辐射频率为21ghz,回波损耗为-17.6 dB。仅开关B ON:天线以26.4 GHz的频率辐射信号,回波损耗为-17.47 dB。射频MEMS开关和天线经过优化,可以在k波段频率范围内传输射频信号。阶跃结构RF MEMS开关的集成成功地实现了天线工作频率的重新配置。该天线与RF MEMS开关集成在一起,在各种k波段系统中具有潜在的应用,包括地面运动雷达、直接广播卫星、直接到户(DHT)电视和第五代(5G)移动通信。天线频率的可重构性允许在不同的k波段应用中具有灵活性和适应性。
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引用次数: 0
Magnetic Landau Quantization Effects on the Magnetic Moment and Specific Heat of a T-3 Dice Lattice 磁朗道量化对T-3格子磁矩和比热的影响
IF 1.7 Q3 Engineering Pub Date : 2023-09-27 DOI: 10.1109/OJNANO.2023.3316877
Norman J. M. Horing;M. L. Glasser
In this work we analyze the statistical thermodynamic functions and magnetic moment of a Dice lattice subject to a normal quantizing magnetic field. Our analysis addresses the Grand Potential and Helmholtz Free Energy, as well as the magnetic moment, entropy and specific heat at constant volume, explicitly determining their magnetic field dependencies in the degenerate statistical regime, replete with de Haas-van Alphen oscillatory phenomenology (and other magnetic field dependence); and also determining their temperature dependencies jointly with magnetic field features in the approach to the zero temperature limit. Furthermore, we evaluate the Grand Potential exactly, for arbitrary temperature and density. Our results are obtained with consideration of the presence of heat and particle baths with fixed chemical potential and they are discussed in relation to other pertinent work on the subject.
本文分析了骰子晶格在正常量子化磁场作用下的统计热力学函数和磁矩。我们的分析解决了大势和亥姆霍兹自由能,以及磁矩,熵和定容比热,明确确定了它们在退化统计体系中的磁场依赖关系,充满了德哈斯-范阿尔芬振荡现象学(和其他磁场依赖关系);并在接近零温度极限时,结合磁场特征确定了它们的温度依赖关系。此外,我们准确地计算了任意温度和密度下的大势。我们的结果是在考虑了具有固定化学势的热浴和粒子浴的存在的情况下得到的,并将它们与该主题的其他相关工作联系起来讨论。
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引用次数: 0
Enhancing the Performance of E-Mode AlGaN/GaN HEMTs With Recessed Gates Through Low-Damage Neutral Beam Etching and Post-Metallization Annealing 通过低损伤中性束蚀刻和后金属化退火提高带凹槽栅极的e型AlGaN/GaN hemt的性能
IF 1.7 Q3 Engineering Pub Date : 2023-08-17 DOI: 10.1109/OJNANO.2023.3306011
Yi-Ho Chen;Daisuke Ohori;Muhammad Aslam;Yao-Jen Lee;Yiming Li;Seiji Samukawa
This study investigated the electrical properties of AlGaN/GaN high-electron-mobility transistors (HEMTs) with varied recess depths under the gate electrode. We demonstrated a recess depth of approximately 6 nm, which was achieved through neutral beam etching (NBE) technique with a low etch rate of 1.8 nm/min, resulting in device enhancement-mode (E-mode) behavior with threshold voltage (Vth) of 0.49 V. The effects of post-metallization annealing (PMA) on the device performance were also examined. The results revealed that PMA treatment improves the DC characteristics of the devices, including maximum drain current (IDMAX), transconductance (gm), subthreshold swing (SS), on-off ratio, and off-state leakage current, with maximum enhancement percentage of 18.3% for IDMAX, 3758% for on-off ratio, and 54.3% for SS. Moreover, this study compared the recess depths of metal-insulator-semiconductor high-electron-mobility transistors (MIS-HEMTs) with the SiN dielectric layer. The results showed that MIS-HEMTs exhibit more negative Vth values, which can be attributed to the controlled surface states achieved through passivation.
本文研究了栅极下不同凹槽深度的AlGaN/GaN高电子迁移率晶体管(hemt)的电学性能。我们展示了大约6 nm的凹槽深度,这是通过中性束蚀刻(NBE)技术以1.8 nm/min的低蚀刻速率实现的,导致器件增强模式(e模式)行为,阈值电压(Vth)为0.49 V。研究了金属化后退火对器件性能的影响。结果表明,PMA处理改善了器件的直流特性,包括最大漏极电流(IDMAX)、跨导(gm)、亚阈值摆幅(SS)、通断比和关态漏电流,其中IDMAX的最大增强率为18.3%,通断比的最大增强率为3758%,SS的最大增强率为54.3%。此外,本研究还比较了金属-绝缘体-半导体高电子迁移率晶体管(MIS-HEMTs)与SiN介电层的隐孔深度。结果表明,miss - hemt表现出更多的负Vth值,这可以归因于通过钝化实现的表面状态控制。
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引用次数: 0
Tailoring by AgNPs of the Energetics of Charge Carriers in Electrically Insulating Polymers at the Electrode/Dielectric Contact AgNPs对电极/介电接触处电绝缘聚合物中载流子能量的裁剪
IF 1.7 Q3 Engineering Pub Date : 2023-06-08 DOI: 10.1109/OJNANO.2023.3284201
Kremena Makasheva;Christina Villeneuve-Faure;Adriana Scarangella;Luca Montanari;Laurent Boudou;Gilbert Teyssedre
The ever increasing field of application of nanodielectrics in electrical insulations calls for description of the mechanisms underlying the performance of these systems and for identification of the signs exposing their aging under high electric fields. Such approach is of particular interest to electrically insulating polymers because their chemical defects are of deleterious nature for their electrical properties and can largely degrade their performance at high electric fields. Although these defects usually leave spectroscopic signatures in terms of characteristic luminescence peaks, it is nontrivial to assign, in an unambiguous way, the identified peaks to specific chemical groups or defects because of the low intensity of the signal with the main reason being that the insulating polymers are weakly emitting materials under electric field. In this work, we go beyond the conventional electroluminescence technique to record spectroscopic features of insulating polymers. By introducing a single plane of silver nanoparticles (AgNPs) at the near-surface of thin polypropylene films, the electroluminescent signal is strongly enhanced by surface plasmons processes. The presence of AgNPs leads not only to a much higher electroluminescence intensity but also to a strong decrease of the electric field threshold for detection of light emission and to a phase-stabilization of the recorded spectra, thus improving the assignment of the characteristic luminescence peaks. Besides, the performed analyses bring evidence on the capability of AgNPs to trap and eject charges, and on the possibility to adjust the energetics of charge carriers in electrically insulating polymers at the electrode/dielectric contact via AgNPs.
纳米介电材料在电绝缘领域的应用越来越广泛,这就要求对这些系统性能的机制进行描述,并识别在高电场下暴露其老化的迹象。这种方法对电绝缘聚合物特别感兴趣,因为它们的化学缺陷对它们的电性能有害,并且在高电场下会大大降低它们的性能。虽然这些缺陷通常以特征发光峰的形式留下光谱特征,但由于信号强度低,主要原因是绝缘聚合物在电场下是弱发射材料,因此以明确的方式将识别的峰分配给特定的化学基团或缺陷是很重要的。在这项工作中,我们超越了传统的电致发光技术来记录绝缘聚合物的光谱特征。通过在聚丙烯薄膜近表面引入单平面的银纳米粒子(AgNPs),电致发光信号被表面等离子体过程强烈增强。AgNPs的存在不仅导致了更高的电致发光强度,而且大大降低了检测光发射的电场阈值,并使记录的光谱相位稳定,从而改善了特征发光峰的分配。此外,所进行的分析还证明了AgNPs捕获和喷射电荷的能力,以及通过AgNPs调节电极/介电接触处电绝缘聚合物中载流子的能量学的可能性。
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引用次数: 0
Energy Efficient Spin-Based Implementation of Neuromorphic Functions in CNNs cnn中基于能量高效自旋的神经形态函数实现
IF 1.7 Q3 Engineering Pub Date : 2023-03-27 DOI: 10.1109/OJNANO.2023.3261959
Sandeep Soni;Gaurav Verma;Hemkant Nehete;Brajesh Kumar Kaushik
Convolutional neural networks (CNNs) offer potentially a better accuracy alternative for conventional deep learning tasks. The hardware implementation of CNN functionalities with conventional CMOS based devices still lags in area and energy efficiency. This has necessitated the investigations of unconventional devices, circuits, and architectures to efficiently mimic the functionality of neurons and synapses for neuromorphic applications. Spin-orbit torque magnetic tunnel junction (SOT-MTJ) device is capable of achieving energy and area efficient rectified linear unit (ReLU) activation functionality. This work utilizes the SOT-MTJ based ReLU for activation and max-pooling in a single unit to eliminate the need of dedicated hardware for pooling layer. Moreover, 2 × 2 multiply-accumulate-activate-pool (MAAP) is implemented by using four activation pairs each of which is fed by the crossbar output. The presented approach has been used to implement various CNN architectures and evaluated for CIFAR-10 image classification. The number of read/write operations reduce significantly by 2X in MAAP based CNN architectures. The results show that the area and energy in MAAP based CNN is improved by at least 25% and 82.9%, respectively, when compared with conventional CNN designs.
卷积神经网络(cnn)为传统的深度学习任务提供了潜在的更好的准确性替代方案。基于传统CMOS器件的CNN功能的硬件实现在面积和能效方面仍然落后。这就有必要研究非常规的设备、电路和架构,以有效地模拟神经元和突触的功能,用于神经形态应用。自旋轨道转矩磁隧道结(SOT-MTJ)装置能够实现能量和面积高效的整流线性单元(ReLU)激活功能。这项工作利用基于SOT-MTJ的ReLU在单个单元中进行激活和最大池化,从而消除了池化层对专用硬件的需求。此外,通过使用四个激活对来实现2 × 2乘法-累积-激活-池(MAAP),每个激活对由交叉杆输出提供。该方法已用于实现各种CNN架构,并对CIFAR-10图像分类进行了评估。在基于MAAP的CNN架构中,读/写操作的数量显著减少了2倍。结果表明,与传统CNN设计相比,基于MAAP的CNN的面积和能量分别提高了至少25%和82.9%。
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引用次数: 1
Metallic CNT Tolerant Field Effect Transistor Using Dielectrophoresis 采用介质电泳技术的金属碳纳米管容容场效应晶体管
IF 1.7 Q3 Engineering Pub Date : 2023-03-13 DOI: 10.1109/OJNANO.2023.3256410
Shobhit Kareer;Jeongwon Park
The performance of silicon-based transistors is reaching its limit, and new materials like carbon nanotubes (CNTs) have started emerging to replace them in electronic products. However, the precise manipulation of CNTs requires complicated techniques, which increases process variation. These variations can lead to a decrease in the overall yield of the field-effect transistor (FET). This study shows how a low-frequency signal may regulate the number of CNTs on electrodes with a nanometer scale. We also demonstrate using an interdigitated electrode to reduce the shorts caused by metallic CNTs. The fabricated CNFETs were characterized using SEM, AFM, and I-V measurements. The study also demonstrates how the duration and amplitude of the applied signal impact the density of CNTs on the electrodes. Finally, finite element analysis was used to evaluate the electric field parameters during DEP. This technique will lead to precise CNTs per unit area, which can help fabricate transistors, sensors, and other electronic components.
硅基晶体管的性能已经达到极限,碳纳米管(CNTs)等新材料已经开始在电子产品中取代它们。然而,精确操作碳纳米管需要复杂的技术,这增加了工艺的变化。这些变化会导致场效应晶体管(FET)的总产率下降。这项研究显示了低频信号如何在纳米尺度上调节电极上碳纳米管的数量。我们还演示了使用交叉指状电极来减少由金属碳纳米管引起的短路。利用SEM, AFM和I-V测量对制备的cnfet进行了表征。该研究还展示了施加信号的持续时间和振幅如何影响电极上碳纳米管的密度。最后,使用有限元分析来评估DEP过程中的电场参数。该技术将导致每单位面积上精确的碳纳米管,这有助于制造晶体管、传感器和其他电子元件。
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引用次数: 0
Magnetic Nanoparticles Mediated Thrombolysis–A Review 磁性纳米颗粒介导的血栓溶解——综述
IF 1.7 Q3 Engineering Pub Date : 2023-03-08 DOI: 10.1109/OJNANO.2023.3273921
Bohua Zhang;Xiaoning Jiang
Nanoparticles containing thrombolytic medicines have been developed for thrombolysis applications in response to the increasing demand for effective, targeted treatment of thrombosis disease. In recent years, there has been a great deal of interest in nanoparticles that can be navigated and driven by a magnetic field. However, there are few review publications concerning the application of magnetic nanoparticles in thrombolysis. In this study, we examine the current state of magnetic nanoparticles in the application of in vitro and in vivo thrombolysis under a static or dynamic magnetic field, as well as the combination of magnetic nanoparticles with an acoustic field for dual-mode thrombolysis. We also discuss four primary processes of magnetic nanoparticles mediated thrombolysis, including magnetic nanoparticle targeting, magnetic nanoparticle trapping, magnetic drug release, and magnetic rupture of blood clot fibrin networks. This review will offer unique insights for the future study and clinical development of magnetic nanoparticles mediated thrombolysis approaches.
含有溶栓药物的纳米颗粒已被开发用于溶栓应用,以响应对血栓形成疾病的有效靶向治疗日益增长的需求。近年来,人们对可以通过磁场导航和驱动的纳米粒子产生了极大的兴趣。然而,关于磁性纳米颗粒在溶栓中的应用的综述文献很少。在本研究中,我们考察了磁性纳米颗粒在静态或动态磁场下体外和体内溶栓的应用现状,以及磁性纳米颗粒与声场结合进行双模溶栓的情况。我们还讨论了磁性纳米颗粒介导的溶栓的四个主要过程,包括磁性纳米颗粒靶向、磁性纳米颗粒捕获、磁性药物释放和血凝块纤维蛋白网络的磁性破裂。这一综述将为磁性纳米颗粒介导的溶栓方法的未来研究和临床发展提供独特的见解。
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引用次数: 0
Guest Editorial: Materials & Devices for Advanced Flexible Sensors 嘉宾评论:先进柔性传感器的材料与器件
IF 1.7 Q3 Engineering Pub Date : 2023-02-03 DOI: 10.1109/OJNANO.2023.3238959
Yu Xinge
The papers in this special section focus on materials and devices for flexible sensors. Presents recent advances in skin electronics, touch sensors for flexible display, near-infrared spectroscopy (NIRS) and organic electrochemical transistors (OECT), respectively. Three research article introduces new methods in flexible pressure sensing array, ammonia sensors and charge plasma junctionless tunnel field effect transistor (CP JLTFET), respectively.
这一特殊部分的论文主要关注柔性传感器的材料和器件。分别介绍了皮肤电子学、柔性显示触摸传感器、近红外光谱(NIRS)和有机电化学晶体管(OECT)的最新进展。三篇研究文章分别介绍了柔性压力传感阵列、氨传感器和电荷等离子体无结隧道场效应晶体管(CP JLTFET)的新方法。
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引用次数: 0
Dirac Materials and an Identity for the Grand Potential of the Nondegenerate Statistical Thermodynamic Regime 狄拉克材料与非简并统计热力学体系的大势恒等式
IF 1.7 Q3 Engineering Pub Date : 2023-01-10 DOI: 10.1109/OJNANO.2023.3234042
NORMAN J. M. HORING
We examine the question “Can Dirac materials exist in a nondegenerate statistical state?,” deriving and employing an identity for the thermodynamic Grand Potential $Omega$ (per unit volume/area) in the low density nondegenerate statistical regime, relating it to the density $n$ as $Omega = -beta ^{-1} n$ ($beta ^{-1} = kappa _{B} T$ is thermal energy, $kappa _{B}$ is the Boltzmann constant, and $T$ is Kelvin temperature). The implications of this identity for Dirac materials are explored. The identity is universally valid for all thermodynamic systems in equilibrium in the nondegenerate, low density statistical regime, irrespective of size, dimensionality or applied static fields. Phenomena that may contribute to the realization of such a nondegenerate statistical equilibrium state in Dirac materials are discussed.
我们考察了“狄拉克材料能否存在于非简并统计状态?”在低密度非简并统计体系中,推导并采用热力学大势$Omega$(每单位体积/面积)的恒等式,将其与密度$n$联系为$Omega = -beta ^{-1} n$ ($beta ^{-1} = kappa _{B} T$为热能,$kappa _{B}$为玻尔兹曼常数,$T$为开尔文温度)。对狄拉克材料的这种同一性的含义进行了探讨。这一恒等式对所有处于非简并、低密度统计体系平衡状态的热力学系统是普遍有效的,与大小、维数或施加的静态场无关。讨论了可能有助于在狄拉克材料中实现这种非简并统计平衡态的现象。
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引用次数: 0
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IEEE Open Journal of Nanotechnology
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