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2022 IEEE International Integrated Reliability Workshop (IIRW)最新文献

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Gate-to-drain/source overlap and asymmetry effects on hot-carrier generation 栅极-漏极/源重叠和不对称对热载流子产生的影响
Pub Date : 2022-10-09 DOI: 10.1109/IIRW56459.2022.10032763
P. Devoge, H. Aziza, P. Lorenzini, P. Masson, F. Julien, A. Marzaki, A. Malherbe, J. Delalleau, T. Cabout, A. Régnier, S. Niel
An investigation of the effects of gate-to-drain/source overlap length and overlap asymmetry on the electrical and hot-carrier generation behavior is conducted on a medium-voltage (around 3 to 5 V) transistor in a 40 nm CMOS technology, using TCAD simulations calibrated with electrical measurements. The substrate current versus gate voltage is used to monitor the hot-carrier impact ionization rate. A novel numerical approach of decomposing the substrate current into its drain-side and source-side constituents is proposed, allowing to determine the junction where most of the impact ionization occurs depending on the geometrical and electrical parameters.
在采用40 nm CMOS技术的中压(约3 ~ 5 V)晶体管上,利用电学测量校准的TCAD模拟,研究了栅极-漏极/源极重叠长度和重叠不对称对电学和热载流子生成行为的影响。衬底电流与栅极电压的关系被用来监测热载子冲击电离率。提出了一种将衬底电流分解为漏极侧和源极侧成分的新颖数值方法,允许根据几何和电气参数确定大多数冲击电离发生的结。
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引用次数: 0
Degradation mapping of IGZO TFTs IGZO tft的退化映射
Pub Date : 2022-10-09 DOI: 10.1109/IIRW56459.2022.10032766
P. Rinaudo, A. Chasin, J. Franco, Z. Wu, N. Rassoul, R. Delhougne, B. Kaczer, I. Wolf, G. Kar
We studied the impact of gate and drain stress biases combination on IGZO based TFTs degradation targeting hot carrier regime. We show that typical signatures of this mechanism (e.g., saturation current degradation and SS increase) are not visible even at high drain biases, while a gate bias dependence only (BTI) is present in most of the degradation data.
我们研究了栅极和漏极应力偏差组合对基于IGZO的TFTs热载流子降解的影响。我们发现,即使在高漏极偏置下,这种机制的典型特征(例如,饱和电流退化和SS增加)也不可见,而大多数退化数据中仅存在栅极偏置依赖(BTI)。
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引用次数: 0
Plasma Processing Induced Charging Damage (PID) Discussion Group 等离子体处理诱导充电损伤(PID)讨论小组
Pub Date : 2022-10-09 DOI: 10.1109/iirw56459.2022.10032740
Andreas Martin
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引用次数: 0
Cf-252 neutron soft-error tolerance of an optoelectronic field programmable gate array VLSI 光电场可编程门阵列VLSI的Cf-252中子软误差容限
Pub Date : 2022-10-09 DOI: 10.1109/IIRW56459.2022.10032739
Minoru Watanabe
Recently, field programmable gate arrays (FPGAs) have come to be used widely for various applications. Nevertheless, the serial configuration function of FPGAs is well-known to be vulnerable to radiation in terms of total-ionizing-dose and soft-error tolerances. In order to increase the total-ionizing-dose tolerance of the configuration function of FPGAs, optically reconfigurable gate arrays that can support an optical parallel configuration have been developed. This paper presents an experiment to assess the soft-error tolerance of an optically reconfigurable gate array against neutron radiation.
近年来,现场可编程门阵列(fpga)得到了广泛的应用。然而,众所周知,fpga的串行配置功能在总电离剂量和软误差容限方面容易受到辐射的影响。为了提高fpga配置函数的总电离剂量容限,开发了支持光并行配置的光可重构门阵列。本文提出了一种评估光可重构门阵列对中子辐射软误差容忍度的实验。
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引用次数: 0
Discussion Group II – Circuit Reliability 讨论组II -电路可靠性
Pub Date : 2022-10-09 DOI: 10.1109/iirw56459.2022.10032754
B. Kaczer
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引用次数: 0
Identification of stress factors and degradation mechanisms inducing DCR drift in SPADs spad诱导DCR漂移的应力因素及降解机制的鉴定
Pub Date : 2022-10-09 DOI: 10.1109/IIRW56459.2022.10032759
Mathieu Sicre, X. Federspiel, D. Roy, Bastien Mamby, C. Coutier, F. Calmon
The reliability of Single-Photon Avalanche Diodes (SPADs) is addressed by measurement of Dark Count Rate (DCR) drift as a function of stress time (ΔDCR). The degradation mechanisms are analyzed performing stress-conditions at various temperatures, voltages, and irradiances. Measurement and simulation of current are performed to reinforce the degradation assumptions. Potential degradation locations are investigated by comparison of initial and post ageing DCR at different temperatures together with simulations covering defect position and number in the device. Different variations of manufacturing processes are also studied to further confirm defect positions. All the results have allowed identification of the plausible degradation mechanisms, including Hot-Carrier Degradation (HCD) and charge accumulation at the upper interface occurring in SPADs over a wide range of stress conditions.
单光子雪崩二极管(SPADs)的可靠性是通过测量暗计数率(DCR)漂移作为应力时间的函数来解决的(ΔDCR)。在不同温度、电压和辐照度的应力条件下,分析了降解机理。通过测量和模拟电流来加强退化假设。通过比较不同温度下初始和后老化DCR,并模拟器件中缺陷的位置和数量,研究了潜在的退化位置。还研究了制造工艺的不同变化,以进一步确定缺陷位置。所有的结果都可以识别出合理的降解机制,包括热载流子降解(HCD)和在广泛的应力条件下发生在spad上界面的电荷积累。
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引用次数: 2
In-Memory Computing Discussion Group
Pub Date : 2022-10-09 DOI: 10.1109/iirw56459.2022.10032738
F. Puglisi
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引用次数: 0
A Transistor Array for Extracting Total Ionizing Dose Threshold Voltage Shifts 一种用于提取总电离剂量阈值电压位移的晶体管阵列
Pub Date : 2022-10-09 DOI: 10.1109/IIRW56459.2022.10032746
L. Clark, Clifford Youngsciortino, Maximilian Siath, Leonardo Martinez, W. Brown, Shayena Khandker, Azad Derbedrosian, Sungho Kim, Ryan Melendez, S. Guertin, J. Yang-Scharlotta
Total ionizing dose (TID) has a significant effect on fully depleted silicon on insulator (FDSOI) transistors, which can be characterized the front gate threshold voltage (Vth) shift. We present transistor array test structure to characterize transistor TID. The resulting structure is one device under test (DUT) on a larger test integrated circuit (IC). The transistor array allows TID testing of a largenumber of devices in a packaged die that is amenable to gamma irradiation and other reliability studies, fabricated on a 22 nm FDSOI process. The approach is however, applicable to any fabrication process.
总电离剂量(TID)对完全耗尽绝缘体上硅(FDSOI)晶体管有显著影响,其特征为栅极阈值电压(Vth)偏移。我们提出了晶体管阵列测试结构来测试晶体管TID。由此产生的结构是一个被测器件(DUT)在一个更大的测试集成电路(IC)上。晶体管阵列允许在封装芯片中对大量器件进行TID测试,该封装芯片适用于伽马辐射和其他可靠性研究,采用22 nm FDSOI工艺制造。然而,该方法适用于任何制造过程。
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引用次数: 1
Summary of Tutorials 教程摘要
Pub Date : 2022-10-09 DOI: 10.1109/IIRW56459.2022.10032752
A. Belmonte, Asir Intisar Khan, B. Kaczer, M. Siddabathula
Tutorial 1: Memory Technology: Reliability Challenges and Future PerspectivesAbstract: Memory technologies occupy a huge share of the semiconductor market. Despite a large plethora of memory device concepts proposed over the years, only a restricted group of them has achieved large-scale production. Reliability is one of the main aspects limiting the adoption of a memory technology by the semiconductor industry. This tutorial aims at outlining the main reliability characteristics of memory devices and the characterization techniques to assess them. Representative case studies, namely RRAM and DRAM, are provided, to review the challenges to be overcome before a memory technology is widely accepted by the industry, and to describe how the causes of reliability failure are identified and mitigated. As the pursuit of innovative memory devices and architectures is relentless and fast-paced, this tutorial also provides future perspectives on memory technology and the related reliability challenges.Tutorial 2: Reliability of Energy-Efficient Phase Change Memory Based on Novel Superlattices and NanocompositesAbstract: Today’s computing systems are reaching fundamental limits with conventional materials like silicon, and with conventional layouts that separate memory and computing. To overcome these challenges, phase change memory (PCM) technology based on chalcogenides like Ge2Sb2Te5 (GST225) hold great promise for both data storage and neuromorphic computing. However, using conventional phase change materials, PCM operation requires large power consumption and suffers from resistance drift, limiting its potential for neuro-inspired and energy-efficient data storage. In this tutorial, we will address some of these challenges in PCM devices using novel phase change nanocomposite Ge4Sb6Te7 (GST467) and GST based phase-change superlattices. We will discuss the operation of energy-efficient and neuro-inspired PCM devices demonstrating gradual change of resistance states, low power switching, and multilevel operation with low resistance drift. We will also focus on the fundamental correlation between superlattice material characteristics and PCM device performance, important to ensure reliability and robustness of such technology for low power and brain-inspired computing.Tutorial 3: Brief Introduction to Device and Circuit ReliabilityAbstract: After a brief review of selected reliability basics, we discuss the main degradation mechanisms occurring in Field-Effect Transistors (FETs). These mechanisms include SILC (Stress Induced Leakage Current), TDDB (Time-Dependent Dielectric Breakdown), BTI (Bias Temperature Instability), RTN (Random Telegraph Noise), and HCD (Hot Carrier Degradation) with the accompanying Self-Heating (SHE) and are linked with the underlying properties of defects. The effects of Mechanical Stress are also briefly reviewed. We then show that these defects play the essential role in many emerging technologies and applications, including Cry
摘要:存储器技术在半导体市场中占有巨大的份额。尽管多年来提出了大量的存储设备概念,但其中只有一小部分实现了大规模生产。可靠性是限制半导体行业采用存储技术的主要方面之一。本教程旨在概述存储设备的主要可靠性特征以及评估它们的表征技术。本文提供了具有代表性的案例研究,即RRAM和DRAM,以回顾在存储器技术被行业广泛接受之前需要克服的挑战,并描述如何识别和减轻可靠性故障的原因。由于对创新存储设备和架构的追求是无情和快节奏的,本教程还提供了对存储技术和相关可靠性挑战的未来展望。摘要:当今的计算系统已经达到了传统材料(如硅)的基本极限,并且传统的布局将存储和计算分开。为了克服这些挑战,基于硫族化合物(如Ge2Sb2Te5 (GST225))的相变存储器(PCM)技术在数据存储和神经形态计算方面都有很大的前景。然而,使用传统的相变材料,PCM操作需要很大的功耗,并且受到电阻漂移的影响,限制了其在神经启发和节能数据存储方面的潜力。在本教程中,我们将使用新型相变纳米复合材料Ge4Sb6Te7 (GST467)和基于GST的相变超晶格来解决PCM器件中的一些挑战。我们将讨论节能和神经启发的PCM器件的操作,展示电阻状态的逐渐变化,低功率开关,以及低电阻漂移的多电平操作。我们还将关注超晶格材料特性与PCM器件性能之间的基本相关性,这对于确保这种技术在低功耗和脑启发计算中的可靠性和鲁棒性非常重要。摘要:在简要回顾了选定的可靠性基础知识之后,我们讨论了场效应晶体管(fet)中发生的主要退化机制。这些机制包括SILC(应力诱发泄漏电流)、TDDB(时变介质击穿)、BTI(偏置温度不稳定性)、RTN(随机电报噪声)和HCD(热载流子退化)以及伴随的自加热(SHE),并与缺陷的潜在特性相关联。对机械应力的影响也作了简要评述。然后,我们表明这些缺陷在许多新兴技术和应用中起着至关重要的作用,包括CryoCMOS和2D场效应管,并负责深度缩放器件的退化变异性。最后,我们展示了如何在电路模拟中考虑器件退化,并展示了如何深入了解缺陷特性,以帮助我们设计新的器件和应用。教程4:22FDX®射频/毫米波可靠性完全耗尽绝缘体上硅(FDSOI)技术已被证明是射频(RF)和毫米波(mmWave)应用的最佳候选技术之一,具有最低的功耗,最低的系统占用空间和有效的短信道静电控制效应。这些优势加上FDSOI技术提供的反向偏置调谐和可扩展性旋钮,使设计人员可以更自由地探索和增强其RF/毫米波设计。他们需要将设备推向极限,以优化和释放其ip /设计的最佳竞争力。它会对设备产生高电压/电流应力,挑战标准技术鉴定可靠性模型及其覆盖范围。本教程将提供有关22FDX®可靠性工作的概述,以支持RF/毫米波设计。它将包括非导电热载流子注入(NCHCI)研究、非状态TDDB建模、HCI低Vgs建模、基于TDDB和RF/毫米波波形分析的安全操作区域方法。波形分析为评估基于所有直流可靠性模型的RF工作提供了基础,并有助于确定关键RF/毫米波ip的尺寸,以确保安全的产品使用寿命,减少最终产品的设计迭代。
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引用次数: 0
From FEOL Buildups to IC Chip: A Full Correlation of Galvanic Micro-Pitting on AlCu Pads 从FEOL堆积到集成电路芯片:AlCu衬垫上电微点蚀的完全相关
Pub Date : 2022-10-09 DOI: 10.1109/IIRW56459.2022.10032767
L. Sheng, Wei Pan, Zdenek Axman
A full correlation of galvanic micro-pitting on AlCu pads has been for the first time revealed from FEOL buildups to IC chip. The presence of P-well was, in general, the primary factor of corrosion enhancement on specific pads. Therefore, the micro-pitting phenomenon should be more broadly examined well beyond the galvanic corrosion on individual pits. Furthermore, the electrons-limited electrochemical kinetics explain the pad-area dependence. This provides an excellent opportunity of design-for-reliability, where small pads can minimize the chance of micro-pitting occurrences.
本文首次揭示了从FEOL堆积到集成电路芯片的铝铜衬垫上电微点蚀的完全相关性。一般来说,p井的存在是特定垫层腐蚀增强的主要因素。因此,微点蚀现象应该更广泛地研究,而不仅仅是单个凹坑上的电蚀。此外,电子限制的电化学动力学解释了焊盘面积依赖性。这为可靠性设计提供了一个极好的机会,其中小垫可以最大限度地减少微点蚀发生的机会。
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引用次数: 0
期刊
2022 IEEE International Integrated Reliability Workshop (IIRW)
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