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3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology 利用红外测量技术测量 3D NAND 氧化物/氮化物层叠厚度和区域分布
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-06-03 DOI: 10.1109/TSM.2024.3404475
Youcheng Wang;Zhuo Chen;Cong Wang;Nick Keller;G. Andrew Antonelli;Zhuan Liu;Troy Ribaudo;Rostislav Grynko
Three dimensional Not-And (3D NAND) flash memory devices are scaling in the vertical direction to more than 200 oxide/sacrificial wordline nitride layers to further increase storage capacity and enhance energy efficiency. The accurate measurement of the thicknesses of these layers is critical to controlling stress-induced wafer warping and pattern distortion. While traditional optical metrology in the UV-vis-NIR range offers a non-destructive inline solution for high volume manufacturing, we demonstrate in this paper, that mid-IR metrology has advantages in de-correlating oxide and nitride thicknesses owing to their unique absorption signatures. Furthermore, because of the depths sensitivity of oxide and nitride absorptions, the simulated measurement results show the ability to differentiate thickness variations in the vertical zones. Good blind test results were obtained with a machine learning model trained on pseudo-references and pseudo spectra with added skew.
三维非并行(3D NAND)闪存设备正在垂直方向上扩展到 200 多层氧化物/人工字线氮化层,以进一步提高存储容量和能效。准确测量这些层的厚度对于控制应力引起的晶片翘曲和图案变形至关重要。传统的紫外-可见-近红外光学测量为大批量生产提供了无损的在线解决方案,而我们在本文中证明,中红外测量由于其独特的吸收特征,在去相关氧化物和氮化物厚度方面具有优势。此外,由于氧化物和氮化物吸收的深度敏感性,模拟测量结果显示了区分垂直区域厚度变化的能力。利用在伪参考和添加了倾斜度的伪光谱上训练的机器学习模型,获得了良好的盲测结果。
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引用次数: 0
Observation and Suppression of Growth Pits Formed on 4H-SiC Epitaxial Films Grown Using Halide Chemical Vapor Deposition Process 观察和抑制使用卤化物化学气相沉积工艺生长的 4H-SiC 外延薄膜上形成的生长坑
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-30 DOI: 10.1109/TSM.2024.3395361
Yoshiaki Daigo;Keisuke Kurashima;Shigeaki Ishii;Ichiro Mizushima
In this study, the origin of growth pits on the surface of 4H-silicon carbide epitaxial films grown using a chemical vapor deposition reactor was clarified by evaluating the surface morphology of substrates immediately before the epitaxial growth and of epitaxial films. When the film was grown under non-optimized conditions, we found that numerous Si particles were formed on the surface of the substrate before the epitaxial growth and that the numerous growth pits on the subsequently grown epitaxial film were originated from Si particles. We observed that, by increasing the HCl flow rate through the outer nozzles in the gas inlet, which has a double-pipe structure consisting of inner and outer nozzles, the growth pit density was successfully decreased.
本研究通过评估外延生长前基底和外延薄膜的表面形态,阐明了使用化学气相沉积反应器生长的 4H 碳化硅外延薄膜表面生长坑的起源。当薄膜在非优化条件下生长时,我们发现基底表面在外延生长前形成了大量的硅颗粒,而随后生长的外延薄膜上的大量生长凹坑则源于硅颗粒。我们观察到,通过增加气体入口外喷嘴(由内外喷嘴组成的双管结构)中的盐酸流速,成功地降低了生长坑密度。
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引用次数: 0
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process 通过压力控制调节过程最大限度地减少真空室压力变化在晶片上造成的颗粒沉积
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-26 DOI: 10.1109/TSM.2024.3394008
Ching-Ming Ku;Wen Yea Jang;Stone Cheng
In wafer etching, regular cleaning and maintenance of process chambers are necessary to reduce particle contamination of etched wafers during the wafer transfer process. Investigating alternative cleaning and maintenance is imperative. This study analyzed the number of particles falling onto a silicon wafer when the pressure difference within the process chamber was manipulated. We observed that rapid opening of the pressure control valve, which regulates the chamber’s pressure, caused contamination during wafer transport. This was particularly true when the change in the pressure ratio was considerable. The by-products near the side of the chamber’s pressure control valve were activated and transported. We verified this finding by adjusting the opening ratio of the pressure control valve (i.e., its degree of opening). We proposed that during the transition step of the etching process, this opening ratio can be controlled by regulating the process pressure through gas flow settings. This method could suppress the deposition of reflected particles originating from the turbomolecular pump’s pumping line on wafers, thereby minimizing the contamination of wafers.
在晶片蚀刻过程中,必须定期清洁和维护制程室,以减少晶片传送过程中蚀刻晶片的颗粒污染。研究清洁和维护的替代方法势在必行。本研究分析了当工艺腔内的压力差被操纵时,落在硅晶片上的颗粒数量。我们观察到,在硅片传输过程中,快速打开用于调节腔室压力的压力控制阀会造成污染。当压力比变化很大时,情况尤其如此。靠近腔室压力控制阀一侧的副产品被激活并传送。我们通过调整压力控制阀的开启率(即开启程度)验证了这一发现。我们提出,在蚀刻过程的过渡步骤中,可以通过气体流量设置来调节工艺压力,从而控制压力控制阀的打开比例。这种方法可以抑制来自涡轮分子泵抽气管路的反射粒子在晶片上的沉积,从而最大限度地减少对晶片的污染。
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引用次数: 0
Virtual Metrology for Multistage Processes Using Variational Inference Gaussian Mixture Model and Extreme Learning Machine 利用变量推理高斯混合模型和极限学习机实现多级过程虚拟计量
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-24 DOI: 10.1109/TSM.2024.3392898
Tianhong Pan;Lu Liu;Menghu Li
Virtual metrology (VM) is crucial for improving process capability and production yield during semiconductor manufacturing processes. However, the performance of VM deteriorates owing to the variable operating regime and the nonlinear characteristics of the process. Herein, Variational inference Gaussian mixture model (VIGMM) and extreme learning machine (ELM) are combined to solve these issues. First, variational inference is conducted on a Gaussian mixture model to determine the number of Gaussian components automatically and the corresponding operating regimes are identified. Subsequently, an extreme learning machine is developed for each operating regime to investigate the nonlinear relationship between process inputs and outputs. Finally, VM is implemented using the corresponding local ELM, which is determined based on the responsibility of the Gaussian components. The feasibility and effectiveness of the proposed methods are validated based on a numerical case and the plasma sputtering process for fabricating thin-film transistor liquid-crystal displays. The proposed VIGMM-ELM can serve as a VM algorithm for manufacturing processes with multiple stages.
在半导体制造过程中,虚拟计量(VM)对于提高工艺能力和产量至关重要。然而,由于操作制度多变和工艺的非线性特征,虚拟计量的性能会下降。在此,变异推理高斯混合模型(VIGMM)和极端学习机(ELM)相结合来解决这些问题。首先,对高斯混合物模型进行变分推理,自动确定高斯成分的数量,并确定相应的运行状态。随后,针对每种运行机制开发极端学习机,以研究流程输入和输出之间的非线性关系。最后,使用相应的局部 ELM 实现虚拟机管理,该局部 ELM 是根据高斯成分的责任确定的。基于一个数值案例和用于制造薄膜晶体管液晶显示器的等离子溅射工艺,验证了所提方法的可行性和有效性。提出的 VIGMM-ELM 可以作为多阶段制造过程的 VM 算法。
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引用次数: 0
Predicting Temperature-Dependent Aging Effects and Permanent Set of Vacuum Sealing Systems in Semiconductor Manufacturing Processes 预测半导体制造工艺中与温度有关的老化效应和真空密封系统的永久集
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-23 DOI: 10.1109/TSM.2024.3392712
Christoph Wehmann;Ambarish Kulkarni;Feyzan Durn;Murat Gulcur;Alan Astbury
Maintaining vacuum integrity for the semiconductor manufacturing processes is extremely important to improve semiconductor fab productivity. The expensive machinery and the enormous costs of production downtime require reliable sealing systems which are designed to operate the longest possible preventative maintenance (PM) cycles. Being able to predict the lifetime of the sealing systems can help determine the optimum maintenance periods and hence increase profitability in costly wafer processing. The present contribution describes a finite element method to predict the lifetime of vacuum sealing systems limited by aging effects of the elastomer. Several different applications are considered including isothermal and non-isothermal conditions. Furthermore, homogeneous and inhomogeneous temperature fields are analyzed. Finally, the model predictions are compared to experimental data.
保持半导体制造过程的真空完整性对于提高半导体工厂的生产率极为重要。昂贵的机器和巨大的生产停机成本要求密封系统具有可靠的设计,能够在尽可能长的预防性维护(PM)周期内运行。预测密封系统的使用寿命有助于确定最佳维护周期,从而提高成本高昂的晶片加工的盈利能力。本文介绍了一种有限元方法,用于预测受弹性体老化效应限制的真空密封系统的使用寿命。文中考虑了几种不同的应用,包括等温和非等温条件。此外,还分析了均质和非均质温度场。最后,将模型预测与实验数据进行了比较。
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引用次数: 0
A Threshold Voltage Deviation Monitoring Scheme of Bit Transistors in 6T SRAM for Manufacturing Defects Detection 用于检测制造缺陷的 6T SRAM 中位晶体管阈值电压偏差监控方案
IF 2.7 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-11 DOI: 10.1109/TSM.2024.3387050
Rui Liu;Hao Li;Zhao Yang;Guantao Wang;Zefu Chen;Peiyong Zhang
Transistor random threshold voltage variations due to process fluctuations seriously affects the stability of Static Random Access Memory (SRAM). In this paper, a SRAM bit transistors threshold voltage $({Vth})$ deviation monitoring scheme and system is proposed. This scheme ingeniously achieves on-chip measurement of all transistors threshold voltages without altering compact SRAM bit array layout. Control signal strategies and Transistor ${Vth}$ Determination Circuit (TVDC) for different types of Devices Under Test (DUTs) have been proposed. The system is implemented using a 65 nm CMOS process with a core area of 0.01875mm2. Through Monte Carlo analysis, the Weighted Average (WA) difference of the proposed scheme and the direct measurement method is not more than 10mV, and the Root Mean Square Error (RMSE) difference is not more than 3mV. This system can also effectively detect the cell position of the transistor threshold voltage mismatch simulated by modifying the substrate voltage. For SRAM arrays of different scales, the method proposed in this paper has area efficiency and flexible reconfigurability.
工艺波动导致的晶体管随机阈值电压变化严重影响了静态随机存取存储器(SRAM)的稳定性。本文提出了一种 SRAM 位晶体管阈值电压 $({Vth})$ 偏差监控方案和系统。该方案巧妙地实现了对所有晶体管阈值电压的片上测量,而无需改变紧凑的 SRAM 位阵列布局。针对不同类型的被测器件(DUT),提出了控制信号策略和晶体管{Vth}$确定电路(TVDC)。系统采用 65 纳米 CMOS 工艺实现,核心面积为 0.01875 平方毫米。通过蒙特卡罗分析,所提方案与直接测量方法的加权平均(WA)差值不超过 10mV,均方根误差(RMSE)差值不超过 3mV。该系统还能通过修改基板电压有效检测晶体管阈值电压失配模拟的单元位置。对于不同规模的 SRAM 阵列,本文提出的方法具有面积效率和灵活的可重构性。
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引用次数: 0
Improving the Reliability of Through Silicon Vias: Reducing Copper Protrusion by Artificial Defect Manipulation and Annealing 提高硅通孔的可靠性:通过人工缺陷处理和退火减少铜突起
IF 2.7 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-02 DOI: 10.1109/TSM.2024.3378160
Won-Jun Choi;Myong Jae Yoo;Joonho Bae;Ji-Hun Seo;Churl Seung Lee
Through silicon vias (TSVs) are a critical technology for manufacturing three-dimensional stacked structure of semiconductor packages by forming holes that penetrate silicon wafers and vertically interconnect multiple wafers. Typically, TSVs are created by drilling via holes in wafers and filling their interiors using copper electroplating processes. Subsequently, the wafers are exposed to high-temperature environments during the back-end-of-line (BEOL) process. However, improper copper electroplating conditions can form defects, such as voids and seams, within TSVs, while the high temperature of the BEOL process induces copper protrusion phenomena. These defects and copper protrusion degrade the reliability of TSV. In this brief, copper protrusion behavior, which is a direct cause of reliability degradation in TSVs, was mitigated by experimentally exploring the seam defects that can occur during the TSV filling process. Subsequent annealing processes were applied to remove the seam defects based on the copper-grain growth. The copper protrusion height was analyzed based on the size of the seam defects and annealing temperature. From the proposed process in this brief, the copper protrusion heights of TSVs without and with seam defects were confirmed to be 1.531 and $1.289~mu text{m}$ , respectively, representing an improvement of approximately 15.81%.
硅通孔(TSV)是制造三维堆叠结构半导体封装的一项关键技术,它可以形成穿透硅晶片的孔洞,实现多个晶片的垂直互连。通常情况下,TSV 是通过在硅片上钻通孔并使用电镀铜工艺填充其内部而形成的。随后,在后端线 (BEOL) 过程中,晶片会暴露在高温环境中。然而,不适当的电镀铜条件会在 TSV 内形成空洞和接缝等缺陷,而 BEOL 工艺的高温则会诱发铜突起现象。这些缺陷和铜突起会降低 TSV 的可靠性。在本简介中,通过实验探索了 TSV 填充过程中可能出现的接缝缺陷,从而减轻了直接导致 TSV 可靠性下降的铜突起行为。随后采用退火工艺,根据铜晶粒的生长情况消除接缝缺陷。根据接缝缺陷的大小和退火温度分析了铜突起的高度。根据本文提出的工艺,确认无接缝缺陷和有接缝缺陷的 TSV 的铜突起高度分别为 1.531 和 1.289~mu text{m}$,提高了约 15.81%。
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引用次数: 0
Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications 用于电子应用的单晶金刚石外延层的化学机械抛光
IF 2.7 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-03-29 DOI: 10.1109/TSM.2024.3383287
Aaron Hardy;Matthias Muehle;Cristian Herrera-Rodriguez;Michael Becker;Edward Drown;Nina Baule;Mark Tompkins;Timothy Grotjohn;John D. Albrecht
For single crystal diamond (SCD) to gain practical use in technical applications including solid state electronics, thin (< $1 ~mu text{m}$ ), doped epitaxial SCD layers with very low (<1> $4.5 mm^{2}$ area. A subsequent 8-hour oxidative CMP process utilizing potassium permanganate and a novel self-leveling holder design decreased the average surface roughness from 3.83 nm and 1.57 nm to 0.20 nm and 0.16 nm for the two samples, respectively. MRRs were determined by evaluating five circular wear monitor structures in each sample by atomic force microscopy before and after the CMP process. The average MRRs were found to be 38.6 nm/hr and 37.3 nm/hr for the two samples. The purpose of this study is to demonstrate a CMP process suitable for polishing thin SCD epilayers to meet the needs of solid-state electronics applications.
单晶金刚石(SCD)要想在包括固态电子学在内的技术应用中得到实际应用,就需要薄(1 ~mu text{m}$)、掺杂、面积极低(4.5 mm^{2}$)的外延 SCD 层。随后利用高锰酸钾和新型自流平支架设计进行了 8 小时的氧化 CMP 处理,使两个样品的平均表面粗糙度分别从 3.83 nm 和 1.57 nm 降至 0.20 nm 和 0.16 nm。通过原子力显微镜评估每个样品在 CMP 工艺前后的五个圆形磨损监测器结构,确定了 MRR。结果发现,两个样品的平均 MRR 分别为 38.6 nm/hr 和 37.3 nm/hr。本研究的目的是展示一种适用于抛光薄 SCD 表层的 CMP 工艺,以满足固态电子应用的需要。
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引用次数: 0
Identifying Good-Dice-in-Bad-Neighborhoods Using Artificial Neural Networks 利用人工神经网络识别 "坏邻居 "中的 "好伙伴
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-03-28 DOI: 10.1109/TSM.2024.3406395
Chia-Heng Yen;Ting-Rui Wang;Ching-Min Liu;Cheng-Hao Yang;Chun-Teng Chen;Ying-Yen Chen;Jih-Nung Lee;Shu-Yi Kao;Kai-Chiang Wu;Mango Chia-Tso Chao
It is known that the determination of the good-dice-in-bad-neighborhoods (GDBNs) has been regarded as an effective technique to reduce the value of the defect parts per million (DPPM) by identifying and rejecting the suspicious dice even though they are good in testing. Instead of examining eight immediate neighbors in a small-sized $3times 3$ window or exploiting simple linear regression, a large-sized window can be used to recognize the broad-sighted neighborhoods and accurately infer the suspiciousness level for any given die. In this paper, the artificial neural networks (ANN)-based method can be proposed to solve the GDBN identification. Furthermore, two enhanced techniques can be further presented to improve the inference accuracy of the original ANN-based method by considering the variation of the time-dependent wafer patterns and the wafer-to-wafer relationship between two adjacent wafers. After applying the two enhanced techniques, the business profits can be improved in the new ANN-based method. Various experiments on two datasets clearly reveal the superiority of the proposed ANN-based method over the other existing methods. In addition to the reduction of the DPPM value, the new ANN-based method can achieve the 1.5X–2X better reduction in the cost of the return merchandise authorization (RMA). On the other hand, the experimental results show that the similar result can also be obtained in the other lower-yield products. By using the new ANN-based method, the relationships on bad dice cross wafers can be captured and the highly-accurate inference results can be simultaneously maintained.
众所周知,确定 "好骰子在坏邻居中"(GDBNs)一直被认为是通过识别和剔除可疑骰子(即使这些骰子在测试中是好的)来降低百万分之缺陷率(DPPM)值的有效技术。与在一个 3/3 乘 3$ 的小窗口中检查八个近邻或利用简单的线性回归不同,可以使用一个大窗口来识别广视角邻域,并准确推断任何给定骰子的可疑程度。本文提出了基于人工神经网络(ANN)的方法来解决 GDBN 识别问题。此外,本文还进一步提出了两种增强技术,通过考虑随时间变化的晶圆图案和相邻两个晶圆之间的晶圆与晶圆关系的变化,来提高基于人工神经网络的原始方法的推断精度。应用这两项增强技术后,基于 ANN 的新方法可以提高商业利润。在两个数据集上进行的各种实验清楚地揭示了所提出的基于 ANN 的方法优于其他现有方法。除了降低 DPPM 值,基于 ANN 的新方法还能使退货授权(RMA)成本降低 1.5 倍至 2 倍。另一方面,实验结果表明,其他低收益产品也能获得类似的结果。通过使用基于 ANN 的新方法,可以捕捉到坏骰子交叉晶圆的关系,并同时保持高精度的推理结果。
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引用次数: 0
Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics 实现 InP 膜光子学与 InP 电子学晶圆级 3D 集成的研究
IF 2.3 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-03-27 DOI: 10.1109/TSM.2024.3382511
S. Abdi;V. Nodjiadjim;R. Hersent;M. Riet;C. Mismer;T. de Vries;K. A. Williams;Y. Jiao
In this study, we focus on the development of key processes towards wafer-scale 3-dimentional/vertical (3D) integration of Indium-Phosphide (InP) photonic membranes on InP electronics via adhesive bonding. First, we identified the most critical steps and optimized them to achieve high thermal and mechanical compatibility of components for the co-integration process. Next, we developed a strategy for InP-to-InP wafer bonding with high topology tolerance, and introduced hard benzocyclobutene (BCB) anchors to preserve the alignment and BCB thickness uniformity after bonding. The resulting bond layer is homogeneous in terms of physical and mechanical properties. Finally, we developed a novel method to selectively remove the InP substrate from the photonics side via wet etching while protecting the electronics carrier wafer with hermetic multi-layer coatings. The investigation of these key steps is essential for scalable 3D integration of photonics and electronics at ultra short distances (< $15 ~mu text{m}$ ).
在本研究中,我们重点研究了通过粘合剂粘接实现晶圆级磷化铟(InP)光子膜与 InP 电子器件三维(3D)集成的关键工艺开发。首先,我们确定了最关键的步骤,并对其进行了优化,以实现共同集成过程中组件的高度热兼容性和机械兼容性。接着,我们开发了一种具有高拓扑容差的 InP 到 InP 晶圆键合策略,并引入了硬苯并环丁烯(BCB)锚,以保持键合后的对准和 BCB 厚度均匀性。所形成的键合层在物理和机械性能方面是均匀的。最后,我们开发了一种新方法,通过湿法蚀刻选择性地从光子侧移除 InP 衬底,同时用多层密封涂层保护电子载体晶片。这些关键步骤的研究对于在超短距离($15 ~mu text{m}$)内实现光子学和电子学的可扩展三维集成至关重要。
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引用次数: 0
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IEEE Transactions on Semiconductor Manufacturing
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