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Anisotropic Material Removal Mechanisms and Chemical Mechanical Polishing Performance of Gallium Arsenide Single Crystal Wafers 砷化镓单晶片各向异性材料去除机理及化学机械抛光性能
IF 1.5 4区 材料科学 Q3 Chemistry Pub Date : 2025-04-30 DOI: 10.1002/crat.202400262
Jianguo Cao, Jiashun Yang

Gallium arsenide single crystals are integral to a multitude of applications across aerospace, industrial manufacturing, medical technology, and telecommunications due to their unique anisotropic structural and mechanical properties. Understanding the material removal mechanism of GaAs single crystal wafers is essential for the efficient and reliable processing of these materials. This study delves into the intricacies of the material removal process by conducting a series of gallium arsenide single-crystal scratch experiments using a nanomechanics testing system. The experiments scrutinized different crystal surfaces across various specimens, meticulously documenting the formation of micro/macro scale scratches, the nature of the groove material removal, the depth of the scratches, and the patterns and distribution of cracks. Additionally, the study employs Raman spectrometry to analyze the deformation and phase transition processes of the GaAs crystals. To complement these findings, chemical and mechanical polishing experiments are conducted on GaAs wafers to further explore the material's properties and the behavior of material removal. These comprehensive analyses contribute to a deeper understanding of the processing dynamics of gallium arsenide single crystals, paving the way for advancements in material engineering and device fabrication.

砷化镓单晶由于其独特的各向异性结构和机械性能,在航空航天、工业制造、医疗技术和电信等众多应用中是不可或缺的。了解砷化镓单晶片的材料去除机理对于高效可靠地加工这些材料至关重要。本研究利用纳米力学测试系统进行了一系列砷化镓单晶划伤实验,深入研究了材料去除过程的复杂性。实验仔细检查了不同样品的不同晶体表面,仔细记录了微观/宏观尺度划痕的形成,沟槽材料去除的性质,划痕的深度以及裂纹的模式和分布。此外,采用拉曼光谱法分析了GaAs晶体的变形和相变过程。为了补充这些发现,在GaAs晶圆上进行了化学和机械抛光实验,以进一步探索材料的性能和材料去除行为。这些综合分析有助于更深入地了解砷化镓单晶的加工动力学,为材料工程和器件制造的进步铺平道路。
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引用次数: 0
Effect of Acidic Polymers and Impurity Microparticles on CuSO4 Nucleation via Nonphotochemical Laser Induced Nucleation 酸性聚合物和杂质微粒对非光化学激光诱导CuSO4成核的影响
IF 1.5 4区 材料科学 Q3 Chemistry Pub Date : 2025-04-29 DOI: 10.1002/crat.202400219
Yuhao Cheng, Xiongfei Xie, Shuai Li, Qingqing Qiu, Yao Liu

Crystal morphology in supersaturated copper sulfate (CuSO4) solutions in the presence of acidic polymers is investigated using the non-photochemical laser-induced nucleation (NPLIN) technique. The solubility of copper sulfate in different solvents is measured using the continuous addition method, which is detailed in the Supporting Information. The optimum range of laser power is selected based on a suitable nucleation probability and desirable crystalline morphology. Two different forms of copper sulfate crystals are obtained by a nanosecond pulsed laser with the wavelength of 532 nm. The experimental results show that the addition of impurities increases the probability of nucleation of copper sulfate crystals during nanosecond laser pulse irradiation, which is consistent with the nanoparticle heating mechanism for NPLIN; the addition of acidic polymer can control crystal growth rate of each crystal surface. All CuSO4 crystals obtained from the technique of NPLIN are revealed as copper sulfate pentahydrate (CuSO4·5H2O) through powder X-ray diffraction analysis. After the sample solution is added with polyacrylic acid, the crystalline morphology changes from polyhedral 3D morphology to long rod morphology. Based on this, different kinds of impurities and acidic polymers are applied in order to achieve a controllable approach on nucleation probability and crystalline morphology of CuSO4·5H2O crystals. The effects of impurities and acidic polymers on crystals are analyzed to study the underlying mechanism of NPLIN and morphological differences.

采用非光化学激光诱导成核(NPLIN)技术研究了酸性聚合物存在下过饱和硫酸铜(CuSO4)溶液中的晶体形态。用连续加成法测定了硫酸铜在不同溶剂中的溶解度,具体方法见辅助资料。根据合适的成核概率和理想的晶体形态选择最佳的激光功率范围。利用波长为532 nm的纳秒脉冲激光,获得了两种不同形式的硫酸铜晶体。实验结果表明:在纳秒激光脉冲照射下,杂质的加入增加了硫酸铜晶体成核的概率,这与纳米粒子加热NPLIN的机理一致;酸性聚合物的加入可以控制各个晶体表面的晶体生长速度。通过粉末x射线衍射分析,NPLIN技术得到的CuSO4晶体均为五水硫酸铜(CuSO4·5H2O)。在样品溶液中加入聚丙烯酸后,晶体形态由多面体三维形态转变为长棒状形态。在此基础上,应用不同种类的杂质和酸性聚合物,以实现对CuSO4·5H2O晶体成核概率和晶体形态的可控方法。分析了杂质和酸性聚合物对晶体的影响,研究了NPLIN的潜在机理和形态差异。
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引用次数: 0
The Effects of the Interstitial Cai on the Electronic Structure and Laser Damage for KDP Crystals: A First-Principles Study 间隙Cai对KDP晶体电子结构和激光损伤影响的第一性原理研究
IF 1.5 4区 材料科学 Q3 Chemistry Pub Date : 2025-04-26 DOI: 10.1002/crat.202400243
Longfeng Zhao, Wei Hong, Tingyu Liu, Hao Hu, Jiachen Zhu

The study investigates the impact of interstitial calcium defects on KDP crystals. Formation energies of +1, +2, and neutral Ca interstitial defects are calculated using the FNV method, confirming the stability of the +2 charged state. Neutral defects are rare, suggesting that optical properties are mainly influenced by +1 and +2 charged defects. The density of states analysis indicates a reduction in the conduction band minimum due to Ca-3d and O-2p orbital hybridization. Optical absorption spectra show new peaks at 2.67 and 4.95 eV, implying lowered laser damage thresholds and affecting practical KDP crystal applications.

研究了间质钙缺陷对KDP晶体的影响。利用FNV方法计算了+1、+2和中性Ca间隙缺陷的形成能,证实了+2带电态的稳定性。中性缺陷是罕见的,这表明光学性质主要受+1和+2带电缺陷的影响。态密度分析表明,由于Ca-3d和O-2p轨道杂化,导带最小值减小。光吸收光谱在2.67和4.95 eV处出现新峰,表明激光损伤阈值降低,影响了KDP晶体的实际应用。
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引用次数: 0
Novel Cocrystal of Palmatine Chloride with Improved Hygroscopic Stability and Antimicrobial Potency: Experimental and Theoretical Studies 具有较好吸湿稳定性和抗菌效能的新型氯化巴马汀共晶:实验和理论研究
IF 1.5 4区 材料科学 Q3 Chemistry Pub Date : 2025-04-26 DOI: 10.1002/crat.202400268
Xiao-Chen Sun, Xiao-Xue Wang, Yu-Wei Song, Xin-Ru Zhu, Roudaina Elmidaoui, Zhi-Long Zhao, Meng-Xuan Dai, Xiang Xu, Fu-Bo Tian, Ze Li, Yan-Jiao Xu

To highlight the benefits of the cocrystallization technique in enhancing the pharmaceutical characteristics and antimicrobial effect of palmatine chloride (PCl), a novel cocrystal of PCl with 4-aminobenzoic acid (AMA), abbreviated as PCl-AMA, is prepared to employ the combination of water-assisted grinding and solvent evaporation method. Single-crystal X-ray diffraction analysis displays that the formation of the PCl-AMA cocrystal results in the replacement of two water molecules in the crystal structure of PCl·3H2O by 4-aminobenzoic acid. The two chloride ions and two water molecules derive from palmatine chloride constituted an R44(8) ring structure. Furthermore, two AMA chains are interconnected through the four-membered ring, continuously extending to form a parallel modular framework. The palmatine cations are arranged perpendicularly between the parallel modules, serving as a filling structure. This altered crystal structure imparted improved physicochemical properties to PCl, exhibiting enhanced moisture stability and reduced solubility. More intriguingly, the antimicrobial potency of the PCl-AMA cocrystal is enhanced owing to the auxiliary antibacterial effect of 4-aminobenzoic acid.

为了突出共晶技术在提高氯化巴马汀(PCl)的药物特性和抗菌效果方面的优势,采用水助磨和溶剂蒸发相结合的方法制备了一种新型氯化巴马汀与4-氨基苯甲酸(AMA)共晶,简称PCl-AMA。单晶x射线衍射分析表明,PCl- ama共晶的形成导致PCl·3H2O晶体结构中的两个水分子被4-氨基苯甲酸取代。由氯化巴马汀衍生的两个氯离子和两个水分子构成R44(8)环结构。此外,两条AMA链通过四元环相互连接,不断延伸形成平行的模块化框架。棕榈碱阳离子垂直排列在平行模块之间,作为填充结构。这种改变的晶体结构赋予PCl改善的物理化学性质,表现出增强的水分稳定性和降低的溶解度。更有趣的是,由于4-氨基苯甲酸的辅助抗菌作用,PCl-AMA共晶的抗菌效力增强。
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引用次数: 0
Structural, Optical and Photocatalytic Properties of Bi2O3/Mn3O4 Nanocomposites Bi2O3/Mn3O4纳米复合材料的结构、光学和光催化性能
IF 1.5 4区 材料科学 Q3 Chemistry Pub Date : 2025-04-25 DOI: 10.1002/crat.202400278
Ejaz Muhammad, Tariq Jan, Arslan Bashir, Zahid Farooq

This research aims to develop binary Bi2O3/Mn3O4 heterostructures for the mineralization of pollutants in water. For this purpose, pure Bi2O3, Mn3O4, and Bi2O3/Mn3O4 nanocomposite samples are synthesized. Structural analysis exhibits the formation of a mixed-phase solid oxide solution. This is verified via FTIR spectroscopy where an additional peak observed at 723 cm−1 indicating Bi─O─Mn stretching vibration. The binary Bi2O3/Mn3O4 nanocomposite has increased visible light absorption and narrow bandgap when compared to pure Bi2O3. The synthesized Bi2O3/Mn3O4 nanocomposite exhibits 76.4% degradation of methylene Blue (MB) under solar light irradiation with a pseudo-first-order rate constant of 0.00572 min−1 superior to pure Bi2O3 and Mn3O4 nanoparticles. This significant increase in the photocatalytic activity of Bi2O3/Mn3O4 nanocomposite is due to the direct z-scheme mechanism of charge transfer between Bi2O3 and Mn3O4 through greater redox potential and generation of surface defects that induce additional active sites for the adsorption of organic dye which trap photoinduced electrons and holes resulting a reduction in electron–hole recombination rate.

本研究旨在开发用于矿化水中污染物的Bi2O3/Mn3O4二元异质结构。为此,制备了纯Bi2O3、Mn3O4和Bi2O3/Mn3O4纳米复合材料样品。结构分析表明形成了一种混合相固体氧化物溶液。通过FTIR光谱验证了这一点,其中在723 cm−1处观察到一个附加峰,表明Bi─O─Mn拉伸振动。与纯Bi2O3相比,二元Bi2O3/Mn3O4纳米复合材料的可见光吸收增加,带隙窄。合成的Bi2O3/Mn3O4纳米复合材料在太阳光照下对亚甲基蓝(MB)的降解率为76.4%,伪一阶速率常数为0.00572 min−1,优于纯Bi2O3和Mn3O4纳米颗粒。Bi2O3/Mn3O4纳米复合材料光催化活性的显著提高是由于Bi2O3和Mn3O4之间电荷转移的直接z-scheme机制,通过更大的氧化还原电位和表面缺陷的产生,诱导了有机染料吸附的额外活性位点,这些活性位点捕获了光诱导电子和空穴,从而降低了电子-空穴复合速率。
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引用次数: 0
Supramolecular Isomerism in Cu(II) Pyrazinecarboxylate Coordination Polymers 铜(II)吡嗪甲酸酯配位聚合物的超分子异构体
IF 1.5 4区 材料科学 Q3 Chemistry Pub Date : 2025-04-25 DOI: 10.1002/crat.202500032
Olga Capbătut, Victor Ch. Kravtsov, Yurii Chumakov, Svetlana G. Baca

A new coordination polymer based on Cu(II) and pyrazinecarboxylic acid (pycaH), namely [Cu(pyca)2]n (), has been obtained by a two-step synthesis and structurally characterized by single-crystal X-ray diffraction analysis. In the crystal, the planar [Cu(pyca)2] monomeric units are extended into a 2D coordination polymer structure due to the coordination of the oxygen atom of the carboxylic group of two adjacent monomeric units in apical positions resulting in square-bipyramidal coordination surrounding of the copper atom. Compound represents a novel supramolecular isomer compared to another one documented in the Cambridge Structural Database under the refcodes BEYPUQ (), where the same monomeric units are linked to a 1D coordination polymer. Hirschfeld surface analysis is performed to gain additional insight into the interactions responsible for crystal packing in both supramolecular isomers. The examination of 2D fingerprint plots has elucidated the most significant intermolecular interactions involved in the stabilization of the crystal network resulting from C─H…O, C─H…N, and C─H…C interactions. DFT calculations of the lattice energies demonstrate a higher degree of stability for supramolecular isomer relative to .

采用两步法合成了一种新型铜(II)与吡嗪甲酸(pycaH)配位聚合物[Cu(pyca)2]n (1β),并用单晶x射线衍射分析对其结构进行了表征。在晶体中,平面的[Cu(pyca)2]单体单元被扩展成二维配位聚合物结构,这是由于两个相邻单体单元的羧基氧原子在顶端位置的配位导致铜原子周围的方双锥体配位。化合物1β代表了一种新的超分子异构体,与剑桥结构数据库中记录的另一种异构体相比,其编码为BEYPUQ (1α),其中相同的单体单元连接到一维配位聚合物上。赫希菲尔德表面分析进行,以获得额外的洞察相互作用负责晶体填料在两个超分子异构体。通过对二维指纹图谱的研究,揭示了C─H…O、C─H…N和C─H…C相互作用对晶体网络稳定性的影响。晶格能的DFT计算表明,超分子异构体1β相对于1α具有更高的稳定性。
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引用次数: 0
Impact of Inhomogeneous Offcut Angles of GaN Native Substrates on Lateral Current Modulation in AlGaN Barrier Layers 氮化镓原生衬底非均匀边切角对氮化镓势垒层横向电流调制的影响
IF 1.5 4区 材料科学 Q3 Chemistry Pub Date : 2025-04-24 DOI: 10.1002/crat.202400245
Sepideh Faraji, Elke Meissner, Sven Besendörfer, Christian Miersch, Roland Weingärtner, Franziska C. Beyer, Jochen Friedrich

A comprehensive investigation on the uniformity of offcut angles on vicinal GaN substrate surfaces and their impact on both epitaxial growth and electrical characteristics of AlGaN/GaN heteroepitaxial structures is presented. A nearly inverse linear correlation is noted between the substrate's offcut angle and the Al mole fraction in the AlGaN layer. T During AlGaN growth, Ga atoms are obviously incorporated more to smaller atomic terraces as the Al atoms. Localized, non-uniform current conduction channels along the edges of bunched steps were observed. A larger substrate offcut results in higher occurrence of stripes with higher current flow. This affects the Schottky barrier height of diodes that contain different densities of such regions. Ni/Au/AlGaN/GaN Schottky barrier diodes showed a decrease in the average Schottky barrier height on such places. An offcut angle difference from 0.29° to 0.42° yields an approximately 13 meV reduction in average Schottky barrier height. This highlights the significant impact that the transition in surface morphology even at the initial stages could exert on the electrical characteristics of the Schottky barrier diodes. Consequently, it becomes crucial to accurately assess the offcut angle variations over the whole wafer to align epitaxy with the specific performance requirements of the target device.

全面研究了相邻GaN衬底表面边缘角的均匀性及其对AlGaN/GaN异质外延结构外延生长和电学特性的影响。衬底的边切角与AlGaN层中的Al摩尔分数呈近似反比的线性关系。在AlGaN生长过程中,Ga原子明显比Al原子更多地结合到更小的原子梯田中。在束状台阶边缘观察到局部的、不均匀的电流传导通道。基片截距越大,电流越大,条纹的出现率就越高。这影响了含有不同密度这类区域的二极管的肖特基势垒高度。Ni/Au/AlGaN/GaN肖特基势垒二极管在这些地方的平均肖特基势垒高度下降。截断角在0.29°到0.42°之间的差异会使平均肖特基势垒高度降低约13 meV。这突出表明,即使在初始阶段,表面形态的转变也可能对肖特基势垒二极管的电特性产生重大影响。因此,准确评估整个晶圆上的截角变化以使外延与目标器件的特定性能要求保持一致变得至关重要。
{"title":"Impact of Inhomogeneous Offcut Angles of GaN Native Substrates on Lateral Current Modulation in AlGaN Barrier Layers","authors":"Sepideh Faraji,&nbsp;Elke Meissner,&nbsp;Sven Besendörfer,&nbsp;Christian Miersch,&nbsp;Roland Weingärtner,&nbsp;Franziska C. Beyer,&nbsp;Jochen Friedrich","doi":"10.1002/crat.202400245","DOIUrl":"https://doi.org/10.1002/crat.202400245","url":null,"abstract":"<p>A comprehensive investigation on the uniformity of offcut angles on vicinal GaN substrate surfaces and their impact on both epitaxial growth and electrical characteristics of AlGaN/GaN heteroepitaxial structures is presented. A nearly inverse linear correlation is noted between the substrate's offcut angle and the Al mole fraction in the AlGaN layer. T During AlGaN growth, Ga atoms are obviously incorporated more to smaller atomic terraces as the Al atoms. Localized, non-uniform current conduction channels along the edges of bunched steps were observed. A larger substrate offcut results in higher occurrence of stripes with higher current flow. This affects the Schottky barrier height of diodes that contain different densities of such regions. Ni/Au/AlGaN/GaN Schottky barrier diodes showed a decrease in the average Schottky barrier height on such places. An offcut angle difference from 0.29° to 0.42° yields an approximately 13 meV reduction in average Schottky barrier height. This highlights the significant impact that the transition in surface morphology even at the initial stages could exert on the electrical characteristics of the Schottky barrier diodes. Consequently, it becomes crucial to accurately assess the offcut angle variations over the whole wafer to align epitaxy with the specific performance requirements of the target device.</p>","PeriodicalId":48935,"journal":{"name":"Crystal Research and Technology","volume":"60 6","pages":""},"PeriodicalIF":1.5,"publicationDate":"2025-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/crat.202400245","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144256583","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An Investigation on Structure, AC Conductivity, and Dielectric Characteristics of Ni0.6Cu0.2Zn0.2Pd3xFe2-2xO4 (x ≤ 0.1) Nanospinel Ferrites Ni0.6Cu0.2Zn0.2Pd3xFe2-2xO4 (x≤0.1)纳米尖晶石铁氧体的结构、交流电导率和介电特性研究
IF 1.5 4区 材料科学 Q3 Chemistry Pub Date : 2025-04-23 DOI: 10.1002/crat.202500008
M.A. Almessiere, A. Baykal, Sagar E. Shirsath, A.V. Trukhanov, A. Demir Korkmaz, A. Mihmanli

Partially palladium (Pd) substituted Ni0.6Cu0.2Zn0.2Pd3xFe2-2xO4 (x ≤ 0.1) nano-spinel ferrites (NCZPdx (x ≤ 0.1) NSFs) have been manufactured via sol–gel combustion route. The phase of all samples has been endorsed by XRD diffraction analysis. Their crystallite size (DXRD) were estimated within 36–72 nm range. Morphology and the chemical composition have been confirmed by EDX (Energy Dispersive X-ray) and SEM-TEM (Scanning-Transmission Emission Microscopy) respectively. Complex impedance spectroscopy (CIS) was utilized to explore the dielectric characteristics within 20 to 120 ºC temperature and from 1 to 106 Hz frequency ranges. The two-dimentional frequency and temperature dependencies of the real and imaginary components of permittivity (ε/ and ε//), the dielectric loss tangent (tan(δ)), the real and imaginary parts of dielectric modulus (M/ real and M//), σ ac-conductivity (s), the real and imaginary components of impedance (Z/ and Z//), along with the experimental Nyquist diagrams Z//(Z/), were constructed and illustrated for all samples. The main feature of the frequencybehavior of the tan(δ) dielectric loss tangent is the presence of pronounced maxima depending on both frequency and temperature. The maximum value of the tan(δ) observed for the significantly doped x = 0.06-0.10 samples. The Pd substitution changes the electron relaxation and microwave absorption resonance.

采用溶胶-凝胶燃烧法制备了部分钯(Pd)取代Ni0.6Cu0.2Zn0.2Pd3xFe2-2xO4 (x≤0.1)纳米尖晶石铁氧体(NCZPdx (x≤0.1)NSFs)。所有样品的物相均经XRD衍射分析证实。在36 ~ 72 nm范围内进行了DXRD分析。用EDX(能量色散x射线)和SEM-TEM(扫描透射发射显微镜)分别对其形貌和化学成分进行了表征。利用复阻抗谱(CIS)研究了20 ~ 120ºC温度和1 ~ 106 Hz频率范围内的介电特性。构造了各样品介电常数实虚分量(ε/和ε//)、介电损耗正切分量(tan(δ))、介电模量实虚分量(M/ real和M//)、σ交流电导率(s)、阻抗实虚分量(Z/和Z//)的二维频率和温度依赖关系,并给出了实验Nyquist图Z//(Z/)。tan(δ)介电损耗正切的频率特性的主要特征是存在明显的最大值,这取决于频率和温度。在显著掺杂x = 0.06-0.10的样品中,观察到tan(δ)的最大值。Pd取代改变了电子弛豫和微波吸收共振。
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引用次数: 0
Enhanced Optical, Electrical and Dielectric Properties of WO3 Stacks Via Indium Nanosheets 铟纳米片增强WO3堆叠的光学、电学和介电性能
IF 1.5 4区 材料科学 Q3 Chemistry Pub Date : 2025-04-22 DOI: 10.1002/crat.202400276
Najla. M. Khusayfan, A.F. Qasrawi, Hazem K. Khanfar, Seham R. Alharbi

This study investigates the effect of inserting 50 nm and 100 nm indium nanosheets between tungsten oxide layers to create WO3/In/WO3 (WIW) films. Fabricated by vacuum evaporation, these amorphous WIW films showed a 62% reduction in average surface roughness. Indium nanosheets enhanced optical properties, increasing visible and infrared light absorption by 256% at 3.0 eV and 224% at 1.76 eV, while reducing the energy bandgap from 2.94 to 2.11 eV with thicker nanosheets. WIW films exhibited enhanced dielectric and optical conductivity responses leading to an improved terahertz cutoff frequencies values of 1.6–9.6 THz in the light range of 1.13–3.0 eV. Electrical resistivity dropped by two and four orders of magnitude for 50 and 100 nm layers, respectively. These combined improvements make WIW films promising for electro-optical applications.

本研究考察了在氧化钨层之间插入50 nm和100 nm铟纳米片制备WO3/In/WO3 (WIW)薄膜的效果。通过真空蒸发法制备的无定形WIW薄膜平均表面粗糙度降低了62%。在3.0 eV和1.76 eV下,铟纳米片的可见光和红外光吸收率分别提高了256%和224%,同时将能带隙从2.94减小到2.11 eV。在1.13-3.0 eV的光范围内,WIW薄膜的介电和光电导率响应增强,导致太赫兹截止频率值提高到1.6-9.6 THz。50 nm和100 nm层的电阻率分别下降了2个和4个数量级。这些综合的改进使得WIW薄膜在光电应用方面前景广阔。
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引用次数: 0
Elimination of Edge Defects in SiC Crystals Grown Through Physical Vapor Transport Method 物理气相输运法生长SiC晶体边缘缺陷的消除
IF 1.5 4区 材料科学 Q3 Chemistry Pub Date : 2025-04-21 DOI: 10.1002/crat.202500028
Jingcheng Feng, Hao Xue, Gang Dong, Yujian Wang, Chengyuan Sun, Yunfei Shang, Zuotao Lei, Dalei Meng, Chunhui Yang, Yingmin Wang

Silicon carbide (SiC) has important application prospects in power and radio frequency devices. Obtaining SiC crystals with large diameters and high quality is still a challenge. In this work, the temperature field during SiC crystal growth is investigated through the physical vapor transport (PVT) method. Based on the numerical simulated results, an improved growing system is designed and perfect SiC crystals without any edge defects are successfully obtained. Furthermore, the X-ray rocking curve, electrical resistivity, and dislocation density of the obtaining SiC crystals are evaluated.

碳化硅在功率器件和射频器件中具有重要的应用前景。获得大直径、高质量的碳化硅晶体仍然是一个挑战。本文采用物理气相输运(PVT)方法研究了碳化硅晶体生长过程中的温度场。基于数值模拟结果,设计了一种改进的生长系统,成功地获得了无边缘缺陷的完美SiC晶体。此外,还评估了所得SiC晶体的x射线摇摆曲线、电阻率和位错密度。
{"title":"Elimination of Edge Defects in SiC Crystals Grown Through Physical Vapor Transport Method","authors":"Jingcheng Feng,&nbsp;Hao Xue,&nbsp;Gang Dong,&nbsp;Yujian Wang,&nbsp;Chengyuan Sun,&nbsp;Yunfei Shang,&nbsp;Zuotao Lei,&nbsp;Dalei Meng,&nbsp;Chunhui Yang,&nbsp;Yingmin Wang","doi":"10.1002/crat.202500028","DOIUrl":"https://doi.org/10.1002/crat.202500028","url":null,"abstract":"<p>Silicon carbide (SiC) has important application prospects in power and radio frequency devices. Obtaining SiC crystals with large diameters and high quality is still a challenge. In this work, the temperature field during SiC crystal growth is investigated through the physical vapor transport (PVT) method. Based on the numerical simulated results, an improved growing system is designed and perfect SiC crystals without any edge defects are successfully obtained. Furthermore, the X-ray rocking curve, electrical resistivity, and dislocation density of the obtaining SiC crystals are evaluated.</p>","PeriodicalId":48935,"journal":{"name":"Crystal Research and Technology","volume":"60 6","pages":""},"PeriodicalIF":1.5,"publicationDate":"2025-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144256447","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Crystal Research and Technology
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