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Optical and electrical evaluation methods of plasma-induced damage in InP substrates InP 衬底中等离子体诱发损伤的光学和电学评估方法
Pub Date : 2024-05-13 DOI: 10.35848/1347-4065/ad4a7e
Takahiro Goya, Keiichiro Urabe, Koji Eriguchi
Indium phosphide (InP) has been focused on as one of emerging materials that can be implemented in advanced semiconductor devices. We proposed optical and electrical characterization methods to evaluate plasma-induced physical damage (PPD)—ion bombardment damage—to InP substrates. By introducing a native oxide phase in an interfacial layer, we proposed an optical model of the damaged structure applicable for an in-line monitoring by spectroscopic ellipsometry. Gas species dependence was obtained, which suggested that the H2 plasma exposure formed a thicker damaged layer than Ar. An impedance spectroscopy (IS) under various biases (V b) was implemented to reveal the nature of damaged structures. Capacitive and conductive components assigned by the IS were confirmed to depend on incident species from plasma, indicating the difference of the energy profile of created defects. The presented methods are useful to characterize and control PPD in designing future high-performance InP-based devices.
磷化铟(InP)是可用于先进半导体器件的新兴材料之一,一直备受关注。我们提出了光学和电学表征方法来评估等离子体诱导的物理损伤(PPD)--离子轰击对 InP 衬底的损伤。通过在界面层中引入原生氧化物相,我们提出了适用于光谱椭偏仪在线监测的受损结构光学模型。我们获得了气体种类依赖性,这表明 H2 等离子体暴露比 Ar 等离子体暴露形成的损坏层更厚。在各种偏压(V b)下实施阻抗光谱(IS),以揭示受损结构的性质。IS 所分配的电容和导电成分被证实取决于等离子体中的入射物种,这表明了所产生缺陷的能量曲线的差异。所介绍的方法有助于在设计未来高性能 InP 基器件时表征和控制 PPD。
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引用次数: 0
3.2 GHz first shear horizontal mode plate wave resonator on 175°YX LiNbO3 thin plate showed 24.6% bandwidth 175°YX LiNbO3 薄板上的 3.2 GHz 第一剪切水平模板式波谐振器显示出 24.6% 的带宽
Pub Date : 2024-05-10 DOI: 10.35848/1347-4065/ad49f2
Ferriady Setiawan, M. Kadota, Shuji Tanaka
In this study, a first shear horizontal (SH1) mode plate wave resonator for high-frequency and wide-band filters was investigated. From FEM simulation, SH1 mode plate wave exhibited a high phase velocity of 23 km/s and a high electro-mechanical coupling factor (k2) of 37% on (0°, 85°, 0°) LiNbO3 (LN) with a thickness of 0.1λ (λ: wavelength). The SH1 mode resonator was fabricated on a 0.5-0.57 µm thick LN film. An 80 nm Al IDT electrode was formed with λ varied from 4-16 μm. Finally, 50 nm thick Al was deposited to form an electrically short bottom plane, which was required to generate an SH1 mode wave. The fabricated device exhibited a resonance frequency (fr) of 2.24 GHz, an anti-resonance frequency (fa) of 2.8 GHz, a wide fractional bandwidth (FBW) of 20%, an impedance (Z) ratio of 35.4 dB, and TCF of -90.8 ppm/°C at fr and -74.8 ppm/°C at fa.
本研究对用于高频和宽带滤波器的第一剪切水平(SH1)模式板波谐振器进行了研究。通过有限元模拟,SH1 模式板波在厚度为 0.1λ (λ:波长)的(0°, 85°, 0°)铌酸锂(LN)上表现出 23 km/s 的高相位速度和 37% 的高机电耦合系数(k2)。SH1 模式谐振器是在 0.5-0.57 µm 厚的 LN 薄膜上制作的。形成了一个 80 nm 的 Al IDT 电极,λ 在 4-16 μm 之间变化。最后,沉积了 50 nm 厚的铝,以形成一个电性短底面,这是产生 SH1 模式波所必需的。制造出的器件共振频率 (fr) 为 2.24 GHz,反共振频率 (fa) 为 2.8 GHz,宽分数带宽 (FBW) 为 20%,阻抗 (Z) 比为 35.4 dB,在 fr 和 fa 处的 TCF 分别为 -90.8 ppm/°C和 -74.8 ppm/°C。
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引用次数: 0
Thin-film memristor using an amorphous metal-oxide semiconductor with a gradient composition of conducting components 使用具有梯度导电成分的非晶态金属氧化物半导体的薄膜忆阻器
Pub Date : 2024-05-10 DOI: 10.35848/1347-4065/ad49f3
Kenta Yachida, T. Matsuda, Hidenori Kawanishi, Mutsumi Kimura
A thin-film memristor using an amorphous metal-oxide semiconductor (AOS) with a gradient composition of conducting components has been developed, which is another way to achieve memristive properties. The advantages are that conductivity distribution is already obtained as fabricated without forming operation, and an analog characteristic is obtained by optimizing the component composition in AOS. As the binary characteristic, the set operation induces the transition from a low conductance state (LCS) to a high conductance state (HCS), whereas the reset operation does vice-versa. The switching ratio (SR) is high, 448. As the analog characteristic, the SR becomes greater rapidly as the Vset increases, namely, the dynamic range is outstanding.
使用具有梯度导电成分的非晶金属氧化物半导体(AOS)开发出了一种薄膜忆阻器,这是实现忆阻器特性的另一种方法。其优点是在制造过程中无需成型操作即可获得导电率分布,并通过优化 AOS 中的成分组成获得模拟特性。作为二进制特性,设定操作会导致从低电导状态(LCS)过渡到高电导状态(HCS),而复位操作则相反。开关比(SR)很高,为 448。与模拟特性一样,随着 Vset 的增大,SR 会迅速变大,即动态范围非常突出。
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引用次数: 0
Highly stable Brillouin laser with controllable tuning based on fiber ring resonator 基于光纤环形谐振器的可控调谐高稳定布里渊激光器
Pub Date : 2024-05-09 DOI: 10.35848/1347-4065/ad493a
Min Liang, Wenyao Liu, Ziwen Pan, Rong Wang, Enbo Xing, Yanru Zhou, Jun Tang, Jun Liu
The design and fabrication processes of stimulated Brillouin laser (SBL) is complex, and it is affected by many factors such as temperature and resonance shift. In this study, we have fabricated a Brillouin laser using fiber ring resonator (FRR), with Q factor=7.1×10^8, resonance depth (h)=96%, and the free spectral range (FSR) automatic feedback control technology is proposed to realize the accurate matching of the resonant mode and the Stokes mode. The influence of temperature on the SBL frequency shift is suppressed. The fluctuation range of SBL’s frequency decreases by 5 times. The maximum steady state output of SBL at the best matching position is realized, and output power fluctuation range decreases by 15 times. The power stability of SBL reaches 4.85×10^(-6), which is improved by two orders of magnitude. This simple scheme provides convenience for the application of SBL, such as sensing and other applications.
受激布里渊激光器(SBL)的设计和制造工艺复杂,受温度和共振偏移等多种因素的影响。本研究利用光纤环谐振器(FRR)制作了布里渊激光器,Q因子=7.1×10^8,谐振深度(h)=96%,并提出了自由光谱范围(FSR)自动反馈控制技术,实现了谐振模式与斯托克斯模式的精确匹配。抑制了温度对 SBL 频移的影响。SBL 频率的波动范围缩小了 5 倍。实现了 SBL 在最佳匹配位置的最大稳态输出,输出功率波动范围减少了 15 倍。SBL 的功率稳定性达到 4.85×10^(-6),提高了两个数量级。这种简单的方案为 SBL 的传感等应用提供了便利。
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引用次数: 0
Estimation of red blood cell aggregation size using power spectrum considering density of red blood cells in focal region 利用功率谱(考虑病灶区域红细胞密度)估算红细胞聚集规模
Pub Date : 2024-05-07 DOI: 10.35848/1347-4065/ad47fe
Rina Takeyama, Shohei Mori, Nobuo Masauzi, M. Arakawa, S. Yashiro, Yasushi Ishigaki, H. Kanai
We have studied a noninvasive and quantitative method for measuring the aggregate size of red blood cells (RBCs). In our previous study, the scattering power spectrum obtained from the vascular lumen was fitted to the reference scattering spectra calculated from the scattering spectrum of a single-sphere scatterer. In this paper, we propose a method for calculating the reference scattering spectra by summing the scattering spectra for numerous scatterers in the ultrasound focal region. By applying this method to the size estimation of microparticles simulating RBC aggregates, the estimated sizes are found to be close to the true values. In in vivo measurements, the estimated sizes at rest are equivalent to the size of a single sphere with the same volume as an RBC, and those during avascularization are larger than those at rest, which is reasonable. The proposed method has the potential to accurately estimate the size of RBC aggregates.
我们研究了一种测量红细胞(RBC)聚集大小的无创定量方法。在我们之前的研究中,从血管腔内获得的散射功率谱与从单球散射体散射谱计算出的参考散射谱相拟合。在本文中,我们提出了一种计算参考散射谱的方法,即对超声波焦点区域内众多散射体的散射谱进行求和。将这种方法应用于模拟 RBC 聚集的微颗粒的尺寸估计,发现估计的尺寸接近真实值。在活体测量中,静止时的估计尺寸相当于与 RBC 体积相同的单个球体的尺寸,而血管形成过程中的估计尺寸大于静止时的估计尺寸,这是合理的。所提出的方法有望准确估计 RBC 聚集体的大小。
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引用次数: 0
Synthesis of core-shell nanoparticles with liquid core using magnetron sputtering and capacitively coupled dusty plasmas 利用磁控溅射和电容耦合尘埃等离子体合成具有液态核心的核壳纳米粒子
Pub Date : 2024-05-07 DOI: 10.35848/1347-4065/ad483d
Munaswamy Murugesh, Koichi Sasaki
We succeeded in depositing amorphous carbon films around tin nanodroplets retained in a capacitively coupled plasma (CCP). High-pressure magnetron sputtering was used for synthesizing tin nanoparticles at the top of a vacuum chamber. Tin nanoparticles were transported to CCP at the bottom of the chamber, and they were trapped in the sheath above an rf electrode. Tin nanoparticles were heated above the melting point by ion bombardment in CCP. We introduced methane into CCP to deposit amorphous carbon films around melted tin nanoparticles. The transmission electron microscope (TEM) images of core-shell nanoparticles showed completely spherical cores. We observed the melting of cores at the melting point of metal tin when we heated core-shell nanoparticles in TEM, suggesting that the amorphous carbon films protected cores from the oxidation. In addition, the amorphous carbon films were robust against the volume expansion of the cores due to melting.
我们成功地在电容耦合等离子体(CCP)中保留的锡纳米液滴周围沉积了无定形碳薄膜。高压磁控溅射用于在真空室顶部合成纳米锡粒子。纳米锡颗粒被输送到真空室底部的电容耦合等离子体中,并被截留在射频电极上方的护套中。在 CCP 中,通过离子轰击将纳米锡粒子加热到熔点以上。我们将甲烷引入 CCP,在熔化的纳米锡粒子周围沉积无定形碳薄膜。核壳纳米粒子的透射电子显微镜(TEM)图像显示出完全球形的核。在 TEM 中加热核壳纳米粒子时,我们观察到核在金属锡的熔点处熔化,这表明无定形碳薄膜保护了核免受氧化。此外,无定形碳薄膜还能防止芯核因熔化而导致的体积膨胀。
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引用次数: 0
Prototyping of microelectrode devices applied by transfer printing 用转移印花技术制作微电极装置原型
Pub Date : 2024-05-02 DOI: 10.35848/1347-4065/ad4656
Kazuki Komiya, Yoshikazu Teranishi, Hidehiko Yamaoka, Shuichi Date, Ming Yang
In this study, ion implantation was adopted to treat surface of the mold for improving detachability in the nanoimprinting. A nanoimprinting was performed successfully for fabrication a micro-electrode pattern with a smallest dimension of 100 nm by using the treated mold with proper condition. It is found that both of the wettability and roughness of the mold surface affect the detachability and it is important to decrease the wettability and keep the surface roughness lower. An optimal dose volume exists for the detachability
本研究采用离子注入法处理模具表面,以提高纳米压印的可分离性。利用经过适当处理的模具,成功地进行了纳米压印,制造出了最小尺寸为 100 nm 的微电极图案。研究发现,模具表面的润湿性和粗糙度都会影响脱模性,因此必须降低润湿性并保持较低的表面粗糙度。对于脱模性而言,存在一个最佳剂量体积
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引用次数: 0
Emulation of optical and electrical synaptic functions in MoS2/SnSe2 van der Waals heterojunction memtransistors 在 MoS2/SnSe2 范德华异质结忆晶体管中模拟光电突触功能
Pub Date : 2024-05-02 DOI: 10.35848/1347-4065/ad46b3
Xiaoli Li, Fengxiang Chen, Xiaodong Wang, Lisheng Wang
The simulation of advanced synaptic functions of the human brain by electrical devices could be an effective strategy towards constructing high-efficiency neuromorphic systems. Two-dimensional (2D) materials are promising candidates in fabrication of optoelectronic devices due to their excellent photoelectric performances. Herein, opto-electronic synapses based on layered MoS2/SnSe2 van der Waals heterojunction (vdWH) memtransistors have been investigated. It can be observed that the typical synaptic functions, such as excitatory/inhibitory postsynaptic current (EPSC/IPSC), long-term potentiation/depression (LTP/LTD), paired-pulse facilitation/depression (PPF/PPD), as well as the transition from short-term memory (STM) to long-term memory (LTM) are realized using both electrical and optical pulses as input signals. In addition, the time constant for PPF under optical pulses was 3.91 s, which was comparable with the response times of biological neural synapses. So the MoS2/SnSe2 memtransistor could work as an electronic synapse in future artificial neural networks, inspiring the implementation of 2D materials for neuromorphic computation.
用电子设备模拟人脑的高级突触功能可能是构建高效神经形态系统的有效策略。二维(2D)材料具有优异的光电性能,是制造光电器件的理想候选材料。本文研究了基于层状 MoS2/SnSe2 范德华异质结(vdWH)忆阻器的光电突触。研究发现,典型的突触功能,如兴奋/抑制性突触后电流(EPSC/IPSC)、长期延时/抑制(LTP/LTD)、成对脉冲促进/抑制(PPF/PPD),以及从短期记忆(STM)到长期记忆(LTM)的过渡,都是通过电脉冲和光脉冲作为输入信号来实现的。此外,光脉冲下 PPF 的时间常数为 3.91 秒,与生物神经突触的反应时间相当。因此,MoS2/SnSe2 Memtransistor 可以在未来的人工神经网络中作为电子突触发挥作用,从而激发二维材料在神经形态计算中的应用。
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引用次数: 0
The deposition and the optical characteristics of Cu-based metal halide Cs3Cu2I5 thin film via mist deposition 雾沉积铜基金属卤化物 Cs3Cu2I5 薄膜的沉积和光学特性
Pub Date : 2024-05-02 DOI: 10.35848/1347-4065/ad46ad
Keisuke Watanabe, H. Nishinaka, Yuuya Nishioka, Kousuke Imai, K. Kanegae, M. Yoshimoto
Cu-based metal halides, such as Cs3Cu2I5, are promising materials for light-emitting diodes, photodetectors, and scintillators because of their excellent optical properties, nontoxicity, and high air stability. In this study, we demonstrated the deposition of high-coverage Cs3Cu2I5 thin films using solution-based mist deposition. By adjusting the substrate temperature appropriately, continuous Cs3Cu2I5 thin films were formed. The Cs3Cu2I5 thin films exhibited blue emission under ultraviolet irradiation, with a large Stokes shift of 1.40 eV. Furthermore, they exhibited a high photoluminescence quantum yield of over 80%.
铜基金属卤化物(如 Cs3Cu2I5)具有优异的光学性能、无毒性和高空气稳定性,是发光二极管、光电探测器和闪烁体的理想材料。在这项研究中,我们展示了利用溶液雾沉积法沉积高覆盖率 Cs3Cu2I5 薄膜的方法。通过适当调节基底温度,形成了连续的 Cs3Cu2I5 薄膜。在紫外线照射下,Cs3Cu2I5 薄膜发出蓝色光,其斯托克斯位移高达 1.40 eV。此外,它们的光致发光量子产率高达 80% 以上。
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引用次数: 0
Modified El-Hoshy−Gibbons model for electronic stopping cross sections in Si and SiC for low-velocity ions with atomic numbers between 5 and 15 原子序数在 5 至 15 之间的低速离子在硅和碳化硅中的电子停止截面的修正 El-Hoshy-Gibbons 模型
Pub Date : 2024-05-02 DOI: 10.35848/1347-4065/ad46ac
Kazuhiro Mochizuki, Tomoaki Nishimura, T. Mishima
The El-Hoshy−Gibbons model, which reduces not only the atomic numbers of projectiles (Z1) and targets but also the impact parameter for small-angle collisions (R0) in the Firsov model, was modified based on the relation between R0 and the Kohn−Sham radii of projectiles (rKS); namely, the reduction factor y of R0 was chosen to be 10 when R0 was larger rKS and 5 in the case R0 ≤ rKS. This modification improved the reproducibility of the periodic dependences of the electronic stopping cross sections in Si, as well as those in SiC, for low-velocity ions with 5 ≤ Z1 ≤ 15.
El-Hoshy-Gibbons 模型不仅减少了射弹(Z1)和目标的原子序数,而且减少了菲尔索夫模型中小角碰撞的碰撞参数(R0)。这一修改提高了硅以及碳化硅中低速离子的电子停止截面周期依赖性的可重复性,即 5 ≤ Z1 ≤ 15。
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引用次数: 0
期刊
Japanese Journal of Applied Physics
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