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Analytical solution for forced vibration of multilayer structures composed of plates with different geometric dimensions 由不同几何尺寸的板材组成的多层结构的受迫振动解析解
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-31 DOI: 10.1016/j.microrel.2024.115472
Bin Li , Xin Yao , Shuantao Li , Yongbin Ma

Multilayer system composed of parallel plate components with different geometric dimensions is frequently used to describe engineering objects, such as electronic assembly. In this work, an analytical method was proposed for forced vibration of this type of multilayer system. The proposed method overcomes the limitation that the traditional wave method is only applicable to all plate components must have the same in-plane dimensions. The proposed analytical method has an efficiency advantages in parameter analysis than element-based methods such as finite element method (FEM). The connection joints between two adjacent plate components, such as ball grid array (BGA) solder interconnect, are represented by elastic springs. The vibration of each component are described in terms of general and physical analytical waves, respectively, and the dynamic coupling between them are established by an equivalent dynamic flexibility matrix. The forced responses of the multilayer system are analytically calculated by solving the system equation in wave space. In the numerical examples, the effectiveness of the proposed method is validated by comparing the present results with the FEM results. The influence of number of the defective solder joints on vibration response is also investigated.

由具有不同几何尺寸的平行板组件组成的多层系统常用于描述工程对象,如电子组件。在这项工作中,我们提出了一种分析方法,用于分析这类多层系统的受迫振动。所提出的方法克服了传统波方法仅适用于所有板组件必须具有相同面内尺寸的限制。与有限元法(FEM)等基于元素的方法相比,所提出的分析方法在参数分析方面具有效率优势。相邻两个板状元件(如球栅阵列 (BGA) 焊料互连)之间的连接点用弹性弹簧表示。每个组件的振动分别用一般分析波和物理分析波描述,它们之间的动态耦合由等效动态弹性矩阵建立。多层系统的强迫响应是通过在波空间求解系统方程来分析计算的。在数值示例中,通过比较本结果与有限元结果,验证了所提方法的有效性。此外,还研究了缺陷焊点数量对振动响应的影响。
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引用次数: 0
Two-step sub-modeling framework for thermomechanical fatigue analysis of solder joints in DRAM module 用于 DRAM 模块焊点热机械疲劳分析的两步子建模框架
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-26 DOI: 10.1016/j.microrel.2024.115469
Hyun Suk Lee , Giseok Yun , Ju-Hwan Song , Do-Nyun Kim

The characteristics of thermomechanical fatigue life of complex electronic device system, micro-scaled design, is highly sensitive to changes in design factors. The solder ball, which acts as a linkage between the circuit board and the package, is a vital part to examine the performance of electronic device system. Repeated thermal loading causes the solder crack growth in models, eventually leads to the breakdown of devices. There have been lots of studies on investigating the fatigue life of solder joints employing well-established finite element procedure. However, generating a finite element model reflecting the whole device often requires unnecessarily large finite element matrices which may increase the computational cost and solder joint fatigue life can be highly dependent on the mesh resolutions. Recent studies suggest the sub-modeling method to handle the meshing process and alleviate the computational cost. In this paper, we delineate the methodology of two-step sub-modeling framework, aimed at improving the mesh fidelity of complex models while ensuring the efficiency of labor-intensive process of solder joint fatigue analysis. We employ the strain energy-based Darveaux's fatigue model to predict the fatigue life of solder joints. Through the investigation of the predicted fatigue life of solder joints across various sets of design parameters, it has been observed that the design factors of electronic devices exhibit a clear pattern in relation to the predicted fatigue life, even when only the second step of two-step sub-modeling framework is considered. Our findings suggest that it is efficient to utilize solely the second step of two-step sub-modeling framework to identify an appropriate reduced design space, where design parameters can be strategically selected for designing an optimal model.

复杂的电子设备系统、微尺度设计的热机械疲劳寿命特性对设计因素的变化高度敏感。焊球作为电路板和封装之间的纽带,是检验电子设备系统性能的重要部分。反复的热负荷会导致模型中焊料裂纹的增长,最终导致器件的损坏。很多研究都采用了成熟的有限元程序来研究焊点的疲劳寿命。然而,生成反映整个器件的有限元模型往往需要不必要的大有限元矩阵,这可能会增加计算成本,而且焊点疲劳寿命与网格分辨率有很大关系。最近的研究建议采用子建模方法来处理网格划分过程并降低计算成本。本文阐述了两步子建模框架方法,旨在提高复杂模型的网格保真度,同时确保焊点疲劳分析这一劳动密集型过程的效率。我们采用基于应变能的 Darveaux 疲劳模型来预测焊点的疲劳寿命。通过对不同设计参数集下焊点疲劳寿命预测的研究,我们发现,即使只考虑两步子建模框架的第二步,电子设备的设计因素与疲劳寿命预测也呈现出明显的相关性。我们的研究结果表明,仅利用两步子建模框架的第二步来确定一个适当的缩小设计空间是有效的,在这个空间中可以有策略地选择设计参数,从而设计出最佳模型。
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引用次数: 0
Fault-tolerant multiplier using self-healing technique 采用自愈技术的容错乘法器
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-26 DOI: 10.1016/j.microrel.2024.115458
Raghavendra Kumar Sakali , Noor Mahammad Sk

A Field Programmable Gate Array (FPGA) is a versatile device capable of reconfiguring the logic of circuits as required. FPGAs are widely utilized in developing critical systems for space applications, defence, and aviation due to their adaptability. To facilitate the operation of these systems, a multiplier circuit is often necessary. As mission-critical systems work in a radiation environment, which affects electronic devices, the FPGA is susceptible to radiation effects that may disrupt the functionality of the configured circuit. To address this, the multiplier needs a robust fault-tolerance mechanism. Evolvable-based hardware solutions hold promise for mitigating faults, but challenges related to scalability and error recovery time persist. To address these challenges, we introduce a novel approach: a self-healing multiplier equipped with a configuration bitstream generator (CBG). This innovation effectively mitigates scalability concerns through the use of an optimized Virtual Reconfigurable Circuit (VRC) multiplier design. Additionally, the proposed solution significantly improves error recovery time through CBG integration. Our primary focus in this work is on the intrinsic approach to achieving efficient performance. In the case of the 8 × 8 multiplier, the proposed work reduces 64.59% of LUT utilization and recovers the error in 29.25 ns using an intrinsic approach. In parallel, we employ a hybrid approach to provide a comparative analysis against the intrinsic approach, demonstrating its performance. We implemented the proposed methodology on the A3PE3000 FPGA platform and conducted a comparative analysis against the proposed hybrid approach and existing methods. The results validate the superior performance and efficiency of our work using the intrinsic approach.

现场可编程门阵列(FPGA)是一种多功能设备,能够根据需要重新配置电路逻辑。由于其适应性强,FPGA 被广泛用于开发空间应用、国防和航空领域的关键系统。为了促进这些系统的运行,通常需要使用乘法器电路。由于关键任务系统工作在辐射环境中,而辐射会影响电子设备,因此 FPGA 很容易受到辐射影响,从而破坏所配置电路的功能。为此,乘法器需要一个强大的容错机制。基于可进化硬件的解决方案有望缓解故障,但在可扩展性和错误恢复时间方面仍存在挑战。为了应对这些挑战,我们引入了一种新方法:配备配置比特流发生器(CBG)的自修复乘法器。这项创新通过使用优化的虚拟可重构电路(VRC)乘法器设计,有效缓解了可扩展性问题。此外,通过集成 CBG,所提出的解决方案还能显著缩短错误恢复时间。我们在这项工作中主要关注实现高效性能的内在方法。就 8 × 8 乘法器而言,所提出的工作减少了 64.59% 的 LUT 利用率,并利用内在方法在 29.25 ns 内恢复了错误。与此同时,我们还采用了一种混合方法,提供了与固有方法的比较分析,证明了其性能。我们在 A3PE3000 FPGA 平台上实现了建议的方法,并与建议的混合方法和现有方法进行了比较分析。结果验证了我们使用固有方法所做工作的卓越性能和效率。
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引用次数: 0
Synergistic effects of heating and biasing of AlGaN/GaN high electron mobility transistors: An in-situ transmission electron microscopy study 氮化铝/氮化镓高电子迁移率晶体管加热和偏压的协同效应:原位透射电子显微镜研究
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-26 DOI: 10.1016/j.microrel.2024.115470
Nahid Sultan Al-Mamun , Ahmad Islam , Nicholas Glavin , Aman Haque , Douglas E. Wolfe , Fan Ren , Stephen Pearton

High temperature adversely affects the reliability of AlGaN/GaN high electron mobility transistors (HEMTs). Degradation studies typically involve post-mortem visualization of the device cross-section to identify failure mechanisms. In this study, we present an in-situ technique by operating the transistor inside the transmission electron microscope (TEM) for real time observation of the defects and failure. A custom-made MEMS chip facilitates the simultaneous biasing and heating capability inside the TEM. The results indicate that the high temperature operation promotes nucleation of new defects in addition to the propagation of existing defects, which degrade the performance of the device even at low biasing conditions. The gate Schottky contact is found to be the most vulnerable region at elevated temperature. The diffusion of gate metals, especially the diffusion of Au at the metal-semiconductor interface initiates the gate degradation process, as confirmed by energy dispersive X-ray spectroscopy (EDS), followed by catastrophic failure with the increase of operation temperature and drain biasing voltage. The high-resolution TEM imaging along with geometric phase analysis reveals the evolution of defect clusters, such as dislocations networks, stacking faults, and amorphized regions, in the AlGaN and GaN layers, which increases the lattice strain leading to catastrophic failure at elevated temperature. The insights obtained from the in-situ study may be useful in improving high temperature HEMT reliability.

高温会对氮化铝/氮化镓高电子迁移率晶体管(HEMT)的可靠性产生不利影响。降解研究通常涉及器件横截面的死后可视化,以确定失效机制。在本研究中,我们提出了一种原位技术,在透射电子显微镜(TEM)内操作晶体管,实时观察缺陷和失效情况。定制的 MEMS 芯片有助于在 TEM 内同时进行偏压和加热。结果表明,除了现有缺陷的传播外,高温操作还促进了新缺陷的成核,即使在低偏压条件下也会降低器件的性能。在高温条件下,栅极肖特基触点是最脆弱的区域。能量色散 X 射线光谱(EDS)证实,栅极金属的扩散,特别是金属-半导体界面上金的扩散,启动了栅极降解过程,随后随着工作温度和漏极偏置电压的升高而发生灾难性故障。高分辨率 TEM 成像和几何相位分析揭示了 AlGaN 和 GaN 层中缺陷簇(如位错网络、堆叠断层和非晶化区域)的演化,这增加了晶格应变,导致高温下的灾难性失效。从原位研究中获得的启示可能有助于提高高温 HEMT 的可靠性。
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引用次数: 0
Revisiting row hammer: A deep dive into understanding and resolving the issue 重新审视排锤:深入了解并解决问题
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-24 DOI: 10.1016/j.microrel.2024.115467
Haibin Wang , Xiaoshuai Peng , Zhi Liu , Xiaofeng Huang , Lian'gen Qiu , Tan Li , Baoyao Yang , Yuzheng Chen

Row hammer is a vulnerability in Dynamic Random Access Memory (DRAM) chips, whereby repeatedly accessing a specific row in the DRAM chip may cause bit flips in memory cells. As the DRAM fabrication process scales down, DRAM chips are becoming more susceptible to row hammer. To gain a comprehensive understanding of the row hammer vulnerability, we investigate its mechanisms, attack patterns, simulation methodology and tools, as well as mitigation techniques. We also summarize several impact factors of row hammer, including timing parameters, temperature, DRAM fabrication process, radiation effects, voltage level, and data patterns. Finally, we point out future research directions, such as exploring how radiation effects and temperature impact row hammer, modeling and simulation methodology under advanced technology nodes, and deep-learning-based mitigation solutions.

行锤是动态随机存取存储器(DRAM)芯片中的一个漏洞,反复访问 DRAM 芯片中的特定行可能会导致内存单元的位翻转。随着 DRAM 制造工艺的缩减,DRAM 芯片越来越容易受到行锤的影响。为了全面了解行锤漏洞,我们研究了其机制、攻击模式、模拟方法和工具以及缓解技术。我们还总结了行锤的几个影响因素,包括时序参数、温度、DRAM 制造工艺、辐射效应、电压水平和数据模式。最后,我们指出了未来的研究方向,如探索辐射效应和温度如何影响行锤、先进技术节点下的建模和仿真方法,以及基于深度学习的缓解解决方案。
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引用次数: 0
The impact of paste alloy, paste volume, and surface finish on solder joint 锡膏合金、锡膏量和表面光洁度对焊点的影响
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-24 DOI: 10.1016/j.microrel.2024.115457
Abdallah Alakayleh , Sa'd Hamasha , Ali Alahmer

The reliability of solder joints is significantly influenced by the microstructure of SAC (Sn-Ag-Cu) solders, which is affected by various factors, including paste alloy, paste volume, and surface finish. This study explores the impact of these factors on the microstructure, thickness of the intermetallic compound (IMC) layer, hardness, and macro void presence in as-reflowed joints. Three lead-free solder alloys, namely SAC305 (Sn - 3.0Ag - 0.5Cu), SAC-Bi (Sn - 3.0Ag - 3.0Bi - 0.8Cu), and SAC-Bi-Sb (Sn - 3.4Ag - 3.2Bi - 3.0Sb - 0.7Cu), were tested with varying solder paste-to-sphere ratios with electroless nickel immersion gold (ENIG) and organic solderability preservative (OSP) surface finishes. ENIG involves applying a thin layer of gold over a layer of nickel on the copper surfaces. Whereas OSP is a thin organic coating designed to protect copper surfaces from oxidation. The evaluation incorporated the analysis of Ag3Sn particles, IMC thickness, and voids through scanning electron and optical microscopy and X-ray images. Additionally, microhardness was assessed by indenting seven solder joints using the Phase II Model 900–391,391 micro-Vickers hardness tester. The study revealed that the SAC305 exhibited a higher presence of Ag3Sn particles than SAC-Bi and SAC-Bi-Sb. A direct proportionality was observed between paste volume and the quantity of Ag3Sn particles. Conversely, an inverse relationship was identified between paste volume and IMC layer thickness, resulting in a thinner IMC layer with higher paste volume, regardless of the paste alloy used. Furthermore, the use of ENIG led to a reduction in IMC thickness, attributed to the inhibitory effect of the Ni barrier. Doped alloys, specifically SAC-Bi and SAC-Bi-Sb, displayed superior microhardness compared to SAC305, owing to the strengthening and hardening effects of Bi and Sb. Regarding solder voiding, a noteworthy observation indicated that an increase in the quantity of solder paste resulted in the formation of larger voids.

SAC(锡-银-铜)焊料的微观结构对焊点的可靠性有很大影响,而微观结构又受多种因素的影响,包括焊膏合金、焊膏量和表面光洁度。本研究探讨了这些因素对回流焊点的微观结构、金属间化合物(IMC)层厚度、硬度和宏观空隙存在的影响。测试了三种无铅焊料合金,即 SAC305(Sn - 3.0Ag - 0.5Cu)、SAC-Bi(Sn - 3.0Ag - 3.0Bi - 0.8Cu)和 SAC-Bi-Sb(Sn - 3.4Ag - 3.2Bi - 3.0Sb - 0.7Cu),测试时采用了不同的焊膏与球体比率,以及无电解镍浸金(ENIG)和有机可焊性防腐剂(OSP)表面处理。ENIG 是在铜表面的镍层上镀一薄层金。而 OSP 是一种薄薄的有机涂层,旨在保护铜表面免受氧化。评估包括通过扫描电子显微镜、光学显微镜和 X 射线图像分析 AgSn 颗粒、IMC 厚度和空隙。此外,还使用第二阶段 900-391,391 型显微维氏硬度计对七个焊点进行了压痕测试,以评估其显微硬度。研究显示,与 SAC-Bi 和 SAC-Bi-Sb 相比,SAC305 显示出更高的 AgSn 颗粒含量。浆料体积与 AgSn 颗粒数量之间呈正比关系。相反,浆料体积与 IMC 层厚度之间存在反比关系,无论使用何种浆料合金,浆料体积越大,IMC 层越薄。此外,ENIG 的使用导致 IMC 厚度减小,这归因于镍屏障的抑制作用。与 SAC305 相比,掺杂合金(特别是 SAC-Bi 和 SAC-Bi-Sb)显示出更高的显微硬度,这归因于 Bi 和 Sb 的强化和硬化效应。在焊料空洞方面,一个值得注意的观察结果表明,焊膏数量的增加会导致形成更大的空洞。
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引用次数: 0
Numerical modeling of total dose effects on CD4007 MOSFET during switched-bias irradiation 开关偏置辐照期间总剂量对 CD4007 MOSFET 影响的数值建模
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-23 DOI: 10.1016/j.microrel.2024.115468
L. Sambuco Salomone , M. Garcia-Inza , J. Lipovetzky , M.V. Cassani , E. Redin , A. Faigón , S. Carbonetto

The response of commercial-off-the-shelf CD4007 p-channel MOSFET exposed to 60Co radiation under switched-bias conditions is studied by real time monitoring the threshold voltage evolution with accumulated dose. The possibility to employ switched-bias techniques to recover threshold voltage is demonstrated. As reported for other devices, non-monotonic responses are observed. A physics-based numerical model that takes into account both charge buildup within the oxide and generation of interface traps is employed to reproduce the experimental results. The implications for dosimetry are discussed.

通过实时监测阈值电压随累积剂量的变化,研究了现成的 CD4007 p 沟道 MOSFET 在开关偏置条件下受到钴辐射的响应。研究证明了采用开关偏压技术恢复阈值电压的可能性。与其他设备的报告一样,观察到了非单调反应。为了再现实验结果,我们采用了一个基于物理的数值模型,该模型考虑到了氧化物内部的电荷积累和界面陷阱的产生。讨论了剂量测定的意义。
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引用次数: 0
Characteristics and avalanche investigation of SiC VDMOSFETs with enhanced P-Based implantation 增强型 P 基植入碳化硅 VDMOSFET 的特性和雪崩研究
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-18 DOI: 10.1016/j.microrel.2024.115451
Houcai Luo , Jingping Zhang , Huan Wu , Bofeng Zheng , Xiao Wang , Kai Zheng , Guo-Qi Zhang , Xianping Chen

Two P-Based depth of SiC VDMOSFETs (group A and B) are designed and manufactured by enhanced P-Based implantation. The group A with lower P-based depth has a better static properties, while group B has a higher high frequency switching performance. Further, the avalanche reliability and failure mechanism for two groups are investigated by UIS experiment and TCAD simulation. The results show that the high temperature is generated by energy dissipation during avalanche and it drives the parasitic BJT conduction, causing Ids out of control and instantaneous heat concentration in a very short time. Significantly, high P-Based depth exhibits higher UIS reliability due to smaller Rb and more difficult to active parasitic BJT.

通过增强型 P 基植入法设计和制造了两种 P 基深度的 SiC VDMOSFET(A 组和 B 组)。P 基深度较低的 A 组具有更好的静态性能,而 B 组则具有更高的高频开关性能。此外,还通过 UIS 实验和 TCAD 仿真研究了两组器件的雪崩可靠性和失效机制。结果表明,雪崩时的能量耗散会产生高温,并推动寄生 BJT 导通,导致 Ids 失控,并在极短的时间内瞬时发热。由于 Rb 较小,寄生 BJT 更难活跃,因此高 P 基底面深度的 UIS 可靠性更高。
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引用次数: 0
A trench beside field limiting rings terminal for improved 4H-SiC junction barrier Schottky diodes: Proposal and investigation 用于改进型 4H-SiC 结势垒肖特基二极管的场限制环终端旁的沟槽:建议与研究
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-17 DOI: 10.1016/j.microrel.2024.115459
Xiaofeng Ye , Huihuang Ke , Shubo Wei , Hongjin Weng , Xinwei Wang , Shen Yuong Wong , Weifeng Yang

A novel trench beside field limiting rings (TBFLR) terminal for 4H-SiC junction barrier Schottky (JBS) diodes is introduced and analyzed by technical computer-aided design (TCAD) simulation, addressing the electric field crowding challenge in high-voltage applications. The design parameters of the devices are optimized by striking a balance between forward and reverse electrical performances. Comparative analysis reveals that TBFLR significantly reduces the surface peak electric field, making it particularly advantageous for shallow-junction devices. Conversely, trench inside FLR (TFLR) is suited for deep-junction applications due to its deeper junction and higher breakdown voltage (BV). The TBFLR design excels with its low on-resistance and compact terminal length, especially in ultra-high voltage (>6500 V) scenarios, achieving target BV with fewer rings and reduced terminal area. Notably, the TBFLR has a terminal efficiency of at least 80 % while keeping trench depth within the 60 % range of the junction depth. Furthermore, an enhanced computational model is proposed, which introduces harmonic parameters to quantify the role of the trench in FLR, and this adaptable model can be effectively extended to the composite renewal of FLR structures. This work provides a distinct application strategy for trench-based FLR structures, significantly broadening the scope of terminal design possibilities.

介绍了一种用于 4H-SiC 结势垒肖特基(JBS)二极管的新型沟槽旁场限制环(TBFLR)端子,并通过技术计算机辅助设计(TCAD)仿真进行了分析,以解决高压应用中的电场拥挤难题。通过平衡正向和反向电气性能,优化了器件的设计参数。对比分析表明,TBFLR 能显著降低表面峰值电场,因此特别适用于浅结器件。相反,沟槽内 FLR (TFLR) 由于具有更深的结和更高的击穿电压 (BV),适合深结应用。TBFLR 设计具有低导通电阻和紧凑的端子长度等优点,尤其适用于超高电压(6500 V)应用,能以更少的环和更小的端子面积实现目标击穿电压。值得注意的是,TBFLR 的端子效率至少为 80%,同时沟槽深度保持在结深度的 60% 范围内。此外,我们还提出了一种增强型计算模型,该模型引入了谐波参数来量化沟槽在 FLR 中的作用,这种适应性强的模型可有效扩展到 FLR 结构的复合更新。这项工作为基于沟槽的 FLR 结构提供了一种独特的应用策略,大大拓宽了终端设计的可能性范围。
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引用次数: 0
A review on warpage measurement metrologies for advanced electronic packaging 先进电子封装翘曲测量计量学综述
IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-17 DOI: 10.1016/j.microrel.2024.115456
Guoli Sun , Shuye Zhang

In the post-Moore era, advanced electronic packaging technology emerges as a prominent direction for the future evolution of semiconductor industry. Nevertheless, warpage remains a prevalent issue in this domain, capable of significantly disrupting the precision and automation operation of subsequent processes, thereby precipitating various operational challenges. Consequently, the comprehensive examination of warpage assumes paramount important in enhancing packaging assembly yield and ensuring device reliability. The rigorous measurement of warpage through experimental methodologies assumes a pivotal role in investigating warpage-related concerns. Thus, this review has succinctly encapsulated established warpage measurement metrologies that are extensively employed in advanced semiconductor packages, shedding light on the measurement capabilities, advantages and limitations inherent of each technique. Typically, warpage measurement techniques can be broadly categorized into two main classes: contact and noncontact methods. Noteworthy examples of the former category encompass moiré interferometry, digital image correlation (DIC), laser scanning measurement and optical interferometry, while the later involves stylus-based technique and the use of ruler for warpage data acquisition. Furthermore, this study encompasses a comprehensive examination of all the aforementioned measurement methods and offers insights into their comparative analysis, as well as future prospects. Notably, empirical investigations suggest that moiré-based methodologies reign supreme. This discourse delineates the technical challenges and future development trends facing each warpage measurement method. In essence, the goal of this study is to furnish concise and coherent guidelines and support for engineers and researchers seeking to navigate the realm of warpage measurement within the sphere of advanced electronic packaging.

在后摩尔时代,先进的电子封装技术成为半导体行业未来发展的一个重要方向。然而,翘曲仍然是这一领域的一个普遍问题,能够严重破坏后续流程的精度和自动化操作,从而引发各种操作挑战。因此,全面检查翘曲对于提高封装组装产量和确保设备可靠性至关重要。通过实验方法对翘曲进行严格测量,在研究与翘曲相关的问题方面具有举足轻重的作用。因此,本综述简明扼要地概括了先进半导体封装中广泛使用的成熟翘曲测量计量学,阐明了每种技术固有的测量能力、优势和局限性。通常,翘曲测量技术可大致分为两大类:接触式和非接触式方法。前者包括莫埃里干涉测量法、数字图像相关法(DIC)、激光扫描测量法和光学干涉测量法,后者包括基于测针的技术和使用尺子获取翘曲数据。此外,本研究还对上述所有测量方法进行了全面检查,并对它们的比较分析和未来前景提出了见解。值得注意的是,经验调查表明,基于摩尔纹的方法是最重要的。本论文阐述了每种翘曲测量方法所面临的技术挑战和未来发展趋势。从本质上讲,本研究的目标是为工程师和研究人员提供简明、连贯的指导和支持,帮助他们在先进电子封装领域内探索翘曲测量方法。
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引用次数: 0
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Microelectronics Reliability
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