The impact of TaOx interlayers prepared by thermal decomposition using different solvents (ethanol, n-butanol, ethylene glycol) on Ti/TaOx/IrO2-Ta2O5 electrodes has been investigated using analytical methods such as SEM, XRD, XPS, FIB-TEM, and electrochemical techniques. The results demonstrate that the synthesized TaOx interlayers are mainly composed of amorphous TaOx and a little of Ta2O5 crystallites with a thin TiOx sublayer on titanium substrate. The solvents affect the TaOx loadings and fractions of surface cracks due to the difference in viscosity. The Ti/TaOx/IrO2-Ta2O5 electrode with the interlayer prepared using ethylene glycol has the largest electrochemically active surface area and electrocatalytic activity for oxygen evolution reaction, while the electrode with the TaOx interlayer formed using n-butanol as solvent presents highest stability.