Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659113
Yu‐Sheng Lin, F. Ma, Chengkuo Lee
We have demonstrated a MEMS based tunable filter with reconfigurable electric split-ring resonators (eSRR) at THz frequencies. This is accomplished by making planar arrays of eSRR with stress curved beams (eSRR-SCBs) which are actuated out-of-plane by electrostatic force. Our results have demonstrated that the eSRR-SCBs possess blue shifting capabilities and polarization dependent state at THz frequencies, while such adaptive metamaterials offer significant potential in realizing novel electromagnetic functionality with diversified applications such as sensors, switches, and filters.
{"title":"A 3-D movable THz filter using surface micromachining process","authors":"Yu‐Sheng Lin, F. Ma, Chengkuo Lee","doi":"10.1109/OMN.2013.6659113","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659113","url":null,"abstract":"We have demonstrated a MEMS based tunable filter with reconfigurable electric split-ring resonators (eSRR) at THz frequencies. This is accomplished by making planar arrays of eSRR with stress curved beams (eSRR-SCBs) which are actuated out-of-plane by electrostatic force. Our results have demonstrated that the eSRR-SCBs possess blue shifting capabilities and polarization dependent state at THz frequencies, while such adaptive metamaterials offer significant potential in realizing novel electromagnetic functionality with diversified applications such as sensors, switches, and filters.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80520045","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659101
A. Takeda, T. Aihara, M. Fukuhara, Y. Ishii, M. Fukuda
We propose an optimal structure for an Au/Si Schottky-type photodetector with a multi-slit grating that excites surface plasmon polaritons (SPPs). The intensity of the SPPs excited by the grating is simulated using the finite-difference time-domain method. The calculation results show that the optimum Au film thickness and slit pitch were determined by the resonance effects of SPPs inside the slit and the in-phase interference of the SPPs generated by each slit, respectively. Using these results, we fabricate and evaluate an optimal photodetector with the grating. We also confirm the operation of metal-oxide-semiconductor field-effect transistors by the SPP-enhanced photocurrent.
{"title":"Optimal design of photodetector with multi-slit grating","authors":"A. Takeda, T. Aihara, M. Fukuhara, Y. Ishii, M. Fukuda","doi":"10.1109/OMN.2013.6659101","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659101","url":null,"abstract":"We propose an optimal structure for an Au/Si Schottky-type photodetector with a multi-slit grating that excites surface plasmon polaritons (SPPs). The intensity of the SPPs excited by the grating is simulated using the finite-difference time-domain method. The calculation results show that the optimum Au film thickness and slit pitch were determined by the resonance effects of SPPs inside the slit and the in-phase interference of the SPPs generated by each slit, respectively. Using these results, we fabricate and evaluate an optimal photodetector with the grating. We also confirm the operation of metal-oxide-semiconductor field-effect transistors by the SPP-enhanced photocurrent.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81046563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659030
Hyung Choi, M. Choi, D. Shim, Sunghyun Nam
We introduce recent research activities on optical MEMS (micro-electro-mechanical systems) and nanophotonics in Samsung Electronics. Several key optical devices for commercial applications such as lenses, shutters, switches, and absorbers are discussed. The developed optical MEMS devices are based on various tuning mechanisms by electro active polymer, electrostatic, and micro-electro-fluidic actuation. Also, we discuss applicability of nanophotonic components to infrared imaging applications.
{"title":"Optical MEMS and nanophotonics in Samsung Electronics","authors":"Hyung Choi, M. Choi, D. Shim, Sunghyun Nam","doi":"10.1109/OMN.2013.6659030","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659030","url":null,"abstract":"We introduce recent research activities on optical MEMS (micro-electro-mechanical systems) and nanophotonics in Samsung Electronics. Several key optical devices for commercial applications such as lenses, shutters, switches, and absorbers are discussed. The developed optical MEMS devices are based on various tuning mechanisms by electro active polymer, electrostatic, and micro-electro-fluidic actuation. Also, we discuss applicability of nanophotonic components to infrared imaging applications.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85136866","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659050
R. Sato, D. Yasumatsu, S. Kumagai, M. Hori, M. Sasaki
A chip device of generating atmospheric pressure microplasma was fabricated and characterized for light source in a radical monitoring system. The chip consisted of a Si substrate with channels and a lid of MgF2 glass plate with a floating electrode. The chip (20mm × 3mm) generated microplasma of φ200mm under the conditions of 20-40W VHF power and He gas flow of 500sccm. The microplasma emitted clear atomic spectral lines and molecular band spectra, which can be used as a light source in adsorption spectroscopy.
{"title":"A microplasma chip for radical monitor","authors":"R. Sato, D. Yasumatsu, S. Kumagai, M. Hori, M. Sasaki","doi":"10.1109/OMN.2013.6659050","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659050","url":null,"abstract":"A chip device of generating atmospheric pressure microplasma was fabricated and characterized for light source in a radical monitoring system. The chip consisted of a Si substrate with channels and a lid of MgF2 glass plate with a floating electrode. The chip (20mm × 3mm) generated microplasma of φ200mm under the conditions of 20-40W VHF power and He gas flow of 500sccm. The microplasma emitted clear atomic spectral lines and molecular band spectra, which can be used as a light source in adsorption spectroscopy.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91546737","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659046
C. Hsieh, Jun Xu, Hanhong Gao, N. Fang, G. Barbastathis
A thin-film nanostructured Lüneburg lens with guidance condition correction has been fabricated by patterning a slab of silicon-rods on silicon-on-insulator wafer, and has been characterized using a near-field scanning optical microscope.
{"title":"Fabrication and characterization of thin-film nanostructured Lüneburg lens","authors":"C. Hsieh, Jun Xu, Hanhong Gao, N. Fang, G. Barbastathis","doi":"10.1109/OMN.2013.6659046","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659046","url":null,"abstract":"A thin-film nanostructured Lüneburg lens with guidance condition correction has been fabricated by patterning a slab of silicon-rods on silicon-on-insulator wafer, and has been characterized using a near-field scanning optical microscope.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91273088","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659058
J. Antila, A. Rissanen, R. Mannila, J. Makynen, I. Nakki, M. Tuohiniemi
VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.
{"title":"Miniaturized MOEMS spectrometer technology for gas sensing","authors":"J. Antila, A. Rissanen, R. Mannila, J. Makynen, I. Nakki, M. Tuohiniemi","doi":"10.1109/OMN.2013.6659058","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659058","url":null,"abstract":"VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87556974","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659065
U. Arad, Yossi Corem, Boris Frenkel, V. Deich, J. Dunayevsky, R. Harel, Peter Janosik, G. Cohen, D. Marom
We present the technological merits of combining a high fill factor, one-dimensional, MEMS micro-mirror array for switching and liquid crystal shutters for amplitude control within a wavelength-selective switch (WSS). The combination allows for simplified MEMS actuator design, support for high port counts, high attenuation accuracy, high natural frequency, mechanical robustness against shock & vibrations, and fast switching times. The complexity associated with dual modulating elements at the focal plane is addressed by design choices and optimization of the depth of focus. The WSS is fully Telcordia qualified and carrying live traffic in deployed networks.
{"title":"MEMS wavelength-selective switch incorporating liquid crystal shutters for attenuation and hitless operation","authors":"U. Arad, Yossi Corem, Boris Frenkel, V. Deich, J. Dunayevsky, R. Harel, Peter Janosik, G. Cohen, D. Marom","doi":"10.1109/OMN.2013.6659065","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659065","url":null,"abstract":"We present the technological merits of combining a high fill factor, one-dimensional, MEMS micro-mirror array for switching and liquid crystal shutters for amplitude control within a wavelength-selective switch (WSS). The combination allows for simplified MEMS actuator design, support for high port counts, high attenuation accuracy, high natural frequency, mechanical robustness against shock & vibrations, and fast switching times. The complexity associated with dual modulating elements at the focal plane is addressed by design choices and optimization of the depth of focus. The WSS is fully Telcordia qualified and carrying live traffic in deployed networks.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87567860","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659056
M. Mah, Philip R. Armstrong, J. Talghader
The thermoluminescence characteristics of a thin film of terbium-doped yttrium oxide change upon repeated stress application through electrostatic actuation. A maximum 42% decrease in the intensity of two thermoluminescent peaks is seen when voltage is applied in 5V increments to 25V, translating to 0.15 μm of center deflection. While the overall intensity decreases, the higher temperature peak - corresponding to deeper traps - is affected more than the lower temperature one. Two possible physical explanations for the behavior are mechanical stress and dielectric charging.
{"title":"Alteration by repeated electrostatic MEMS actuation of the thermoluminescence of thin films","authors":"M. Mah, Philip R. Armstrong, J. Talghader","doi":"10.1109/OMN.2013.6659056","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659056","url":null,"abstract":"The thermoluminescence characteristics of a thin film of terbium-doped yttrium oxide change upon repeated stress application through electrostatic actuation. A maximum 42% decrease in the intensity of two thermoluminescent peaks is seen when voltage is applied in 5V increments to 25V, translating to 0.15 μm of center deflection. While the overall intensity decreases, the higher temperature peak - corresponding to deeper traps - is affected more than the lower temperature one. Two possible physical explanations for the behavior are mechanical stress and dielectric charging.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76702355","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-11-11DOI: 10.1109/OMN.2013.6659114
F. Tian, Guangya Zhou, Y. Du, F. Chau
Due to their high quality (Q) factors, resonance modes of cavities are capable of generating much larger optical gradient forces than waveguide modes. Here we experimentally demonstrate the use of resonance modes of double-coupled one-dimensional photonic crystal cavities to generate bipolar optical forces. Mechanical and thermal detunings of the probe resonance modes of the device are calibrated respectively with a nanoelectromechanical system (NEMS) actuator and a temperature-controlled testing platform. Detuning due to the optomechanical effect is hence decoupled from that of the thermo-optic effect. Pumped by third-order even (odd) mode, one cavity is pulled to (pushed away from) the other cavity by 37.1 nm (11.4 nm).
{"title":"Bipolar optical forces in coupled photonic crystal cavities","authors":"F. Tian, Guangya Zhou, Y. Du, F. Chau","doi":"10.1109/OMN.2013.6659114","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659114","url":null,"abstract":"Due to their high quality (Q) factors, resonance modes of cavities are capable of generating much larger optical gradient forces than waveguide modes. Here we experimentally demonstrate the use of resonance modes of double-coupled one-dimensional photonic crystal cavities to generate bipolar optical forces. Mechanical and thermal detunings of the probe resonance modes of the device are calibrated respectively with a nanoelectromechanical system (NEMS) actuator and a temperature-controlled testing platform. Detuning due to the optomechanical effect is hence decoupled from that of the thermo-optic effect. Pumped by third-order even (odd) mode, one cavity is pulled to (pushed away from) the other cavity by 37.1 nm (11.4 nm).","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86070016","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-09-12DOI: 10.1109/OMN.2013.6659108
M. Sturmer, M. Wapler, J. Brunne, U. Wallrabe
We present a new kind of varifocal mirror with independently adjustable curvatures in the major directions. For actuation we use two stacked piezo bending actuators with crossed in-plane polarization. This mirror can be used for example as an off-axis focusing device with tunable focal length and compensation for a variable angle of incidence or for coma correction. We demonstrate the prototype of such a mirror and characterize the mechanical deflection, as well as the focusing capabilities.
{"title":"Focusing mirror with tunable eccentricity","authors":"M. Sturmer, M. Wapler, J. Brunne, U. Wallrabe","doi":"10.1109/OMN.2013.6659108","DOIUrl":"https://doi.org/10.1109/OMN.2013.6659108","url":null,"abstract":"We present a new kind of varifocal mirror with independently adjustable curvatures in the major directions. For actuation we use two stacked piezo bending actuators with crossed in-plane polarization. This mirror can be used for example as an off-axis focusing device with tunable focal length and compensation for a variable angle of incidence or for coma correction. We demonstrate the prototype of such a mirror and characterize the mechanical deflection, as well as the focusing capabilities.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78948473","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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