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2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)最新文献

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Performance of shrouded pin-fin and plate-fin heat sinks with a concentrated heat source 带集中热源的冠状翅片和板翅片散热器的性能
Jin‐Cherng Shyu, Ying-Hui Lai
In order to investigate the heat transfer of different types of heat sinks under non-uniform heating condition, both plate-fin heat sinks and pin-fin heat sinks were tested with a square heat source having length of 45 mm, 10 mm and 4 mm at various frontal air velocities in this study. The results showed that heat sinks with larger heater size yielded higher heat transfer coefficient for both heat sinks. Besides, the increase of heat transfer coefficient was more rapid for heat sink with a larger heater size as the frontal velocity increased.
为了研究不同类型的散热器在非均匀受热条件下的换热特性,本文采用45 mm、10 mm和4 mm的方形热源对板翅片散热器和针翅片散热器进行了不同锋面风速下的换热实验。结果表明,加热器尺寸越大,两种散热器的换热系数越高。此外,随着锋面速度的增加,加热器尺寸越大的散热器换热系数的增加越快。
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引用次数: 0
Influence of IMC surface geometry and material properties on micro-bump reliability of 3D Chip-on-Chip interconnect technology IMC表面几何形状和材料性能对三维片上互连技术微碰撞可靠性的影响
Ching-Feng Yu, Hsien-Chie Cheng, Y. Tsai, Su-Tsai Lu, Wen-Hwa Chen
This study aims at investigating the growth reaction of the Ni3Sn4 IMC during thermocompression bonding process, the anisotropic elastic constants of the IMC, and the effects of the material properties and surface geometry or morphology on the interconnect reliability of a three-dimensional (3D) Chip-on-Chip (CoC) interconnect technology with Cu/Ni/SnAg micro-bumps subject to accelerated thermal cycling (ATC) loading. The research starts from the investigation of the growth reaction of the Ni3Sn4 IMC during thermocompression bonding process through experiment and classical diffusion theory. The relationship between the Ni3Sn4 IMC thickness and bonding temperature/time is derived based on the predicted activation energy of the chemical reaction of the IMC layer by experiment. Next, the elastic stiffness coefficients of single crystal monoclinic Ni3Sn4 are calculated through molecular dynamics (MD) simulation using the polymer consistent force field (PCFF). The degree of anisotropy in the Ni3Sn4 crystal system is also confirmed by the electronic structure of single crystal Ni3Sn4 using first-principles calculation based on density function theory (DFT). For comparison with the published experimental data and also use in the subsequent reliability analysis, the effective elastic properties of polycrystalline Ni3Sn4 are derived using the Voigt-Reuss bound and Voigt-Reuss Hill average based on the calculated elastic stiffness coefficients. At last, 2D plane strain finite element (FE) analysis together with an empirical Coffin-Manson fatigue life prediction model are performed to predict the interconnect reliability of the 3D CoC interconnect technology. The computed results are compared with the ATC experimental data to demonstrate the effectiveness of these two FE models. The dependence of the interconnect reliability on the thickness, material properties and surface geometry or morphology of the Ni3Sn4 IMC is addressed.
本研究旨在研究Ni3Sn4 IMC在热压键合过程中的生长反应,IMC的各向异性弹性常数,以及加速热循环(ATC)加载下具有Cu/Ni/SnAg微凸点的三维(3D) Chip-on-Chip (CoC)互连技术中材料性能和表面几何或形貌对互连可靠性的影响。本研究从热压键合过程中Ni3Sn4 IMC的生长反应入手,通过实验和经典扩散理论进行了研究。根据实验预测的IMC层化学反应活化能,导出了Ni3Sn4 IMC厚度与键合温度/时间的关系。其次,利用聚合物一致力场(PCFF)进行分子动力学(MD)模拟,计算单晶单斜Ni3Sn4的弹性刚度系数。利用基于密度泛函理论(DFT)的第一性原理计算,通过单晶Ni3Sn4的电子结构证实了Ni3Sn4晶体体系的各向异性程度。为了与已发表的实验数据进行比较,并用于后续的可靠性分析,基于计算得到的弹性刚度系数,采用Voigt-Reuss界和Voigt-Reuss Hill平均值推导了多晶Ni3Sn4的有效弹性性能。最后,通过二维平面应变有限元分析,结合Coffin-Manson疲劳寿命预测模型,对三维CoC互连技术的互连可靠性进行了预测。将计算结果与ATC实验数据进行了比较,验证了两种有限元模型的有效性。讨论了互连可靠性与Ni3Sn4 IMC的厚度、材料性能和表面几何或形貌的关系。
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引用次数: 0
Nonlinearities in thin-silicon die strength tests 薄硅模强度试验中的非线性
P. Huang, M. Tsai
While the semiconductor packages are evolving toward smaller package size and higher performance, the 3D IC or stacked-die packages are gaining popular. For these applications, IC wafers have to be ground to be relatively thin and the dies cut from these wafers have to possess sufficient strength against high stresses resulting from process handling, reliability testing, and operation. Hence, the strength of the dies, especially for the thin dies, has to be determined to ensure good reliability of the packages. Three-point bending test is widely used for measuring die strength; however the feasibility of the test is still questionable for determining strength of relatively thin dies. Meanwhile, the pin-on-elastic-foundation (PoEF) test [1] with special feature of bi-axial stress mode and elimination of the die edge effect has been proved more simple and reliable, but not for thin dies. In this study, the three-point bending test (under un-axial stress state) and the PoEF test (under bi-axial stress state) are evaluated for aiming at the thin-die strength determination which may features geometrical and contact nonlinearities. The feasibility of both test methods with their linear theories is evaluated by a nonlinear finite element method (NFEM) with taking into account geometrical and contact nonlinearities. The results show that these nonlinearities would cause an error of strength prediction by the linear beam theory for thin dies. For three-point bending test, the concept of moment equilibrium associated with the fitting equation for Fx extracted from the NFEM simulation is proposed and proved workable with good accuracy. The similar problem is faced in the PoEF test. The fitting equations based on the NFEM results are also proposed for calculating the strength of thin dies with better accuracy than theoretical formulation. Therefore, the nonlinearities has to be taken into account for both tests when the thin silicon dies are tested for strength.
随着半导体封装向着更小的封装尺寸和更高的性能发展,3D集成电路或堆叠芯片封装越来越受欢迎。对于这些应用,IC晶圆必须磨得相对较薄,并且从这些晶圆上切割的模具必须具有足够的强度,以抵抗工艺处理,可靠性测试和操作产生的高应力。因此,必须确定模具的强度,特别是薄模具,以确保封装的良好可靠性。三点弯曲试验被广泛用于测试模具强度;然而,该试验在确定相对较薄的模具强度方面的可行性仍然值得怀疑。同时,具有双轴应力模态和消除模具边缘效应的特殊特性的弹基销(PoEF)试验[1]已被证明更简单可靠,但对于薄模具则不适用。针对可能存在几何非线性和接触非线性的薄型模具强度确定问题,对三点弯曲试验(非轴向应力状态下)和PoEF试验(双轴应力状态下)进行了评价。考虑几何非线性和接触非线性,采用非线性有限元法对两种试验方法的线性理论可行性进行了评价。结果表明,这些非线性会导致用线性梁理论对薄模具进行强度预测时出现误差。对于三点弯曲试验,提出了力矩平衡的概念,并将其与NFEM模拟中提取的Fx拟合方程相结合,证明了其可行性和准确性。PoEF测试也面临着类似的问题。并提出了基于有限元结果的薄型模具强度计算拟合方程,其精度优于理论计算公式。因此,在对薄硅模具进行强度测试时,必须考虑到这两种测试的非线性。
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引用次数: 6
Improving thermal management of multi-finger InGaP collector-up HBTs with a highly compact heat-spreading structure by GA 采用遗传算法改进高紧凑散热结构的多指InGaP集热器热管理
H. Tseng, Wen-Young Li, Tze-Wei Chen
A variety of complex configurations have been attempted to enhance the thermal stability of modern heterojunction bipolar transistors (HBTs). Existing structures for improving thermal management of power HBTs, nevertheless, are not small enough to realize miniaturized power amplifiers in high-efficiency cellular phones. A highly compact heat-spreading structure (HSS) simulated by the genetic algorithm (GA) is proposed, and the demonstration on multi-finger InGaP/GaAs collector-up HBTs, which show noticeable power performance, is presented. Comparatively, the improved results indicate that the thermal resistance can be substantially decreased by 50%, and a power-added efficiency (PAE) more than 55% is achieved from this novel design
为了提高现代异质结双极晶体管(hbt)的热稳定性,人们尝试了多种复杂的结构。然而,现有的用于改善功率HBTs热管理的结构还不够小,不足以实现高效手机中的小型化功率放大器。提出了一种用遗传算法(GA)模拟的高度紧凑的散热结构(HSS),并在多指InGaP/GaAs集热器HBTs上进行了演示,获得了显著的功耗性能。相比之下,改进后的结果表明,这种新型设计可以大幅降低50%的热阻,并实现55%以上的功率附加效率(PAE)
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引用次数: 1
Direct plated copper technology for high brightness LED packaging 用于高亮度LED封装的直接镀铜技术
H. Ru, V. Wei, T. Jiang, M. Chiu
Direct Plated Copper (DPC) on ceramic substrate is a patented process by Tong Hsing that has been utilized as an outstanding solution for high brightness LED (HBLED) assembly for over ten years. DPC substrate offers several key attributes such as good TCE match to semiconductor materials, high thermal conductivity, low electrical resistance conductor traces, good reliable at high temperatures (>340°C), precise features, and ease of large format assembly. In additions, this ceramic solution also achieves fine line resolution allowing high density of devices and circuitry, proven reliability, mechanically rugged ceramic construction, and reasonable cost. DPC is implanted with seed layers on aluminum nitride (AlN) or alumina (Al2O3) by sputtering. Then photolithographic procedures are utilized to develop the circuit pattern. Then Cu and Ni layers are plated on top of seed layers to form a solid structure for circuitry. Based on ceramic and thick copper construction, the DPC substrate provides outstanding thermal and electrical performance for applications in high power or high current devices.
陶瓷基板上直接镀铜(DPC)是通兴公司的专利工艺,十多年来一直被用作高亮度LED (HBLED)组装的杰出解决方案。DPC基板具有几个关键属性,例如与半导体材料良好的TCE匹配,高导热性,低电阻导体走线,在高温(>340°C)下良好的可靠性,精确的功能以及易于大规模组装。此外,该陶瓷解决方案还实现了精细的线分辨率,允许高密度的器件和电路,经过验证的可靠性,机械坚固的陶瓷结构和合理的成本。采用溅射法在氮化铝(AlN)或氧化铝(Al2O3)表面植入DPC种子层。然后利用光刻程序来开发电路图案。然后将Cu和Ni层镀在种子层的顶部,形成电路的固体结构。基于陶瓷和厚铜结构,DPC基板为高功率或大电流器件的应用提供了出色的热学和电学性能。
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引用次数: 21
Spectrum response analysis for PCB with heating ICs in different heating conditions 加热集成电路PCB在不同加热条件下的频谱响应分析
Bor-Tsuen Wang, Yau-Chang Lee, Y. Lai, Chang-Lin Yeh, Ying-Chih Lee
Coupling effects of both thermal and vibration loadings on printed circuit board (PCB) are of interest. This paper aims to study the random vibration excitation of PCB with four heating ICs that are used to emulate the temperature elevation during operations. Two levels of heating conditions as well as without heating are considered in this work. The vibration tests according to JESD22-B103-B are carried out to measure the random vibration response of PCB under the conditions of both with and without heating. The finite element (FE) model of PCB with heating ICs is constructed and performed spectrum response analysis with and without thermal effects. The temperature distributions on PCB are first verified and shown good agreement between finite element analysis (FEA) and experiments. The power spectral density (PSD) functions of the acceleration on the PCB in heating are also obtained and compared for both FEA and experiments. The RMS accelerations on the PCB can be calculated and matched well between the analytical and experimental results. The fatigue evaluation due to coupling loadings from thermal and vibration effects on the PCB is also addressed. This work presents the systematic approaches in studying spectrum response analysis of PCB with both thermal and vibration coupling loads and shows a very good agreement results between FEA and experiments.
热载荷和振动载荷对印刷电路板(PCB)的耦合效应令人感兴趣。本文的目的是研究用四个加热集成电路模拟PCB运行过程中温度升高的随机振动激励。在这项工作中考虑了两种加热条件以及不加热条件。根据JESD22-B103-B进行了振动测试,测量了PCB在加热和不加热条件下的随机振动响应。建立了带加热集成电路的PCB的有限元模型,并进行了有热效应和无热效应的谱响应分析。首先对PCB板上的温度分布进行了验证,有限元分析结果与实验结果吻合较好。得到了加热过程中加速度对PCB的功率谱密度(PSD)函数,并进行了有限元分析和实验比较。分析结果与实验结果吻合较好,可以计算出PCB上的均方根加速度。由于热和振动耦合载荷对PCB的疲劳评估也被解决。本文提出了一种系统的方法来研究PCB在热耦合和振动耦合载荷下的频谱响应分析,并表明有限元分析结果与实验结果吻合得很好。
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引用次数: 0
Evaluate breaking strength of thin silicon die by ball-on-ring microforce tests and finite element analysis 通过球环微力试验和有限元分析对薄硅模的断裂强度进行评价
De-Shin Liu, Zi-Hau Chen, Chung-Yu Lee
Through Silicon Via Multi-Chip Packaging (TSV MCP) is the current important direction for advance packaging technique. TSV/MCP need to support with thin wafer so that the stacking dies could maintain the spacing limitation, however one failure die could cause whole packaging failure that could lead to lower the yield rate and increasing the manufacturing cost. To realize the relationship between the manufacturing condition and the thin wafer strength, specialized experimental methods and tools must be developed to carry out thin wafer breaking strain/stress. In this paper, newly developed Ball-On-Ring test were set up and carried out to measure the force-displacement relation of various wafer thickness. The results from the testing then coupled with finite element analysis to reverse finding the breaking stress/strain as a function of wafer thickness. The die strength limit from this research can further support the engineer to evaluate reliability performance of the TSV MCP.
通硅多芯片封装(TSV MCP)是当前先进封装技术的重要发展方向。TSV/MCP需要支持薄晶圆,以便堆叠模具可以保持间距限制,但是一个失效的模具可能导致整个封装失效,从而导致成品率降低并增加制造成本。为了实现制造条件与薄晶片强度之间的关系,必须开发专门的实验方法和工具来进行薄晶片断裂应变/应力测试。本文建立并实施了新开发的球环试验,以测量不同晶圆厚度的力-位移关系。然后将测试结果与有限元分析相结合,以反向发现断裂应力/应变作为晶圆厚度的函数。研究所得的模具强度极限可以进一步支持工程师对TSV MCP的可靠性性能进行评估。
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引用次数: 7
Investigation of ultrasonic palladium coated copper wire wedge bonding on different surface finish 不同表面光洁度下超声镀钯铜丝楔焊的研究
L. Hung, Y. Pai, Men Yeh Chiang, K. Hung, D. Jiang, C. Huang
In semiconductor packaging, wire bonding is the main technology for electrical connections between chip and leadframe or substrate. Gold wire bonding has the advantages of a fast bonding process, excellent electrical property, and stable chemical property. It has been widely used in various electronic packages, such as chip scale package (CSP) and ball grid array (BGA). Gold prices have risen significantly over the last few years. Many manufactures have been investigating ways to replace the conventional gold wire various new material. Copper wire bonding is an alternative interconnection technology. Compared with gold wire, Cu wire is better than gold with respect to electrical conductivity. The inherent stiffness of the copper wire also makes long wire with small diameters more resistant to wire sweep during molding. There are also some problems with Cu bonding process: (1) Copper easily oxidizes in air. The application of copper wire coated with palladium is a solution to prevent copper oxidation during the bonding process. (2) The higher hardness of wire generally requires higher ultrasonic power and bond force to bond on metal. It also lead to high risk of cratering for ball bonding and tearing for wedge bond. This paper reports a study on the influence wire material, surface finish hardness and bonding machine parameter. In this study, 0.7mil Pd coated Cu wire was bonded on two kinds of surface finish, as electro-plating Nickel and Gold, and Electroless Nickel, Electroless Palladium and Immersion Gold (ENEPIG). Its purity is 4N. The thickness of Pd coating was less than 0.2um. The surface finish characteristics were examined using a scanning electron microscope (SEM). The noncontact optical profiler was used to measure surface finish roughness. Hardness was measured, using microhardness test. Thermosonic Pd coated Cu wire wedge bonding was preformed on a wedge bonder equipped with a kit to forming gas. The wire bonding process window for each surface finish was established using various combination of bond force and power. Bonder machine alarm rate, wire pull test and wedge bonding appearance were performed to measure the quality for Pd coated Cu wire bonded on three kinds of surface finish. Cross section sample was prepared Focused Ion Beam (FIB). Then, it was observed using scanning electron microscope to discuss wedge bonding mechanism.
在半导体封装中,线键合是芯片与引线框架或基板之间电气连接的主要技术。金线键合具有键合速度快、电性能优异、化学性能稳定等优点。广泛应用于芯片级封装(CSP)、球栅阵列(BGA)等各种电子封装中。黄金价格在过去几年里大幅上涨。许多制造商一直在研究各种新材料替代传统金丝的方法。铜线键合是另一种互连技术。与金丝相比,铜丝的导电性比金丝好。铜线固有的刚度也使得直径小的长线材在成型过程中更能抵抗线材扫线。铜键合工艺也存在一些问题:(1)铜在空气中容易氧化。镀钯铜线的应用是防止铜在焊接过程中氧化的一种解决方案。(2)线材硬度越高,一般需要较高的超声功率和粘结力才能在金属上粘结。它也导致高风险的弹坑球粘合和撕裂的楔形粘合。研究了焊丝材料、表面光洁度和粘接机参数对焊丝性能的影响。在本研究中,将0.7mil Pd包覆的铜丝进行了电镀镍和镀金以及化学镀镍、化学镀钯和浸金(ENEPIG)两种表面处理。它的纯度是4N。Pd涂层厚度小于0.2um。用扫描电子显微镜(SEM)检测了表面光洁度特征。采用非接触式光学轮廓仪测量表面光洁度。采用显微硬度试验测定硬度。热超声镀钯铜丝楔形键合是在一个楔形键合机上进行的,楔形键合机配备了一个形成气体的工具包。利用不同的粘接力和粘接功率组合,建立了各种表面处理的金属丝粘接工艺窗口。采用焊机报警率、拉丝试验和楔焊外观试验来衡量三种表面处理方式下镀钯铜丝的焊接质量。用聚焦离子束(FIB)制备截面样品。然后利用扫描电镜对其进行观察,探讨楔形键合机理。
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引用次数: 1
PI under fill effect study for gold migration improvement in the high voltage COF assembly application 在高压COF装配中改善金迁移的填充效应下的PI研究
J. Chyi, William Wang, Vivi Chung, G. Shen
As the trend in electronic devices keeps striding towards minimization, high speed, high resolution, and multi-functions, the electromigration problem in chip packages becomes unavoidable, which creates an unintended electrical connection between terminals and causes electrical short, especially for high voltage products with COF package application. The aim of this study is to find a solution to prevent the phenomena from occurring. Therefore, we introduce the methodology of “PI under fill” in the gold bumped wafers to prevent the Au-migration-induced short-circuit failure in the COF packages since the defect mode of “Au migration” is now seriously affecting the advance of the consumer product development. However, it is difficult to detect the defect mode during the whole packaging process line since only an extremely low content of the migrating ions exists in the meanwhile. Currently, some fine pitch cases have redesigned the bonding pads/bumps from linear to stagger layout in order to enlarge the bump spaces. However, this kind of design has its limitation due to higher pin count and reduced chip size requirements for the next generation devices. In this study, two lots of bumped wafers were taken for experiment by coating PI in the bump spaces to form electrical insulation between bumps. The results show that the PI appearance meets our expectation and with the application of the PI under fill in the bump spaces the COF packages can still maintain normal performance.
随着电子器件向小型化、高速化、高分辨率、多功能化方向发展,芯片封装中的电迁移问题不可避免地会造成端子间的意外电气连接,导致电气短路,特别是对于采用COF封装的高压产品。这项研究的目的是找到一个解决方案,以防止这种现象的发生。因此,由于“Au迁移”的缺陷模式严重影响了消费产品的发展,我们在金碰撞晶圆中引入了“填充下PI”的方法,以防止金迁移引起的COF封装短路故障。然而,在整个封装过程中,由于迁移离子的含量极低,因此很难检测到缺陷模式。目前,一些精细的案例已经重新设计了键合垫/凸点,从线性布局到交错布局,以扩大凸点空间。然而,由于更高的引脚数和下一代设备对芯片尺寸的要求降低,这种设计有其局限性。在本研究中,我们选取了两批凹凸的晶圆进行实验,在凹凸空间涂覆PI,形成凹凸之间的电绝缘。结果表明,PI的外观符合我们的预期,并且在凹凸空间下填充PI后,COF封装仍能保持正常的性能。
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引用次数: 0
Warpage measurement of various substrates based on white light shadow moiré technology 基于白光阴影成像技术的各种基材翘曲测量
Shao Song, F. Zhu, Wei Zhang, Sheng Liu
In this paper, warpage of various substrates are measured with a noncontact shadow moiré technology. Meanwhile, phase-shifting technology is applied to the analysis of fringe pattern images of substrates obtained by shadow moiré. Sensitivity of the fringe pattern analysis is demonstrated to be significantly increased. Two types of samples, QFN (Quad Flat No-lead Package) metal substrates, BGA (Ball Grid Array) substrates are measured by the system. This paper will show that the presented system is a powerful tool for measuring the warpage of various substrates.
本文采用非接触式阴影测量技术测量了各种基材的翘曲量。同时,将移相技术应用于阴影成像所获得的基片条纹图像的分析。条纹图分析的灵敏度得到了显著提高。该系统测量了QFN (Quad Flat No-lead Package)金属基板和BGA (Ball Grid Array)基板两种样品。本文将表明,所提出的系统是一个强大的工具,测量各种基底翘曲。
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引用次数: 6
期刊
2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)
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