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2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)最新文献

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Wafer level hermetic packaging with IMC-less Cu-Cu bonding for 3D microsystems (invited) 面向3D微系统的无imc Cu-Cu键合晶圆级密封封装(特邀)
C. S. Tan, J. Fan
Metallic copper-copper (Cu-Cu) thermo-compression bonding is investigated for potential application as hermetic seal in 3D microsystem packaging. Cavities are etched to a volume of 1.4×10−3 cm3 in accordance with the MIL-STD-883E standard prescribed for microelectronics packaging. In the case of metal bonding, clean Cu layer with a thickness of 300 nm and an underlying 50 nm of Ti barrier layer are used. The wafer pair is bonded at 300 °C under the application of a bonding force of 5500 N for 1 hr. The bonded cavities are stored in a helium bomb chamber and leak rate is measured with a mass spectrometer. Excellent helium leak rate below 5 × 10−9 atm.cm3/s is detected for all cases and this is at least 10X better than the reject limit. Based on these results, Cu-Cu thermo-compression bonding is particularly attractive for wafer-level hermetic packaging of 3D microsystems (IC/IC, non-IC/IC, etc) as the same bonding medium can provide for hermetic seal, electrical connection, and mechanical bond. Since Cu-Cu bond is a single metal system, no inter-metallic compound (IMC) is formed hence resulting in excellent electrical, thermal, and mechanical properties of the bond compared with solder-based or eutectic bonding. Cu-Cu bonding is also a low cost solution in comparison with Au-Au bonding.
研究了金属铜-铜(Cu-Cu)热压缩键合作为三维微系统封装密封的潜在应用。根据微电子封装规定的MIL-STD-883E标准,空腔蚀刻到1.4×10−3 cm3的体积。在金属结合的情况下,使用厚度为300 nm的清洁Cu层和下面50 nm的Ti阻挡层。晶圆对在300°C下,在5500牛的结合力下粘合1小时。结合腔储存在氦气弹室中,用质谱仪测量泄漏率。极好的氦气泄漏率低于5 × 10−9 atm。在所有情况下都能检测到cm3/s,这至少比拒收限制好10倍。基于这些结果,Cu-Cu热压缩键合对于3D微系统(IC/IC,非IC/IC等)的晶圆级密封封装特别有吸引力,因为相同的键合介质可以提供密封,电气连接和机械键合。由于Cu-Cu键是单一金属体系,因此不会形成金属间化合物(IMC),因此与基于焊料或共晶键合相比,该键具有优异的电学、热学和机械性能。与Au-Au键合相比,Cu-Cu键合也是一种低成本的解决方案。
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引用次数: 1
Modeling of stacked-coil inductor from silicon integrated passive device technology 基于硅集成无源器件技术的叠圈电感建模
Boxiang Fang, Ming-fan Tsai, Sam Lin, Min-Han Chuang, D. Lee
Stacked-coil inductor could be realized on multilevel thin-film structure with the configuration of two or more coils placed in different levels but shared the same magnetic flux. The configuration results mutual inductance to increase total inductance per unit area, it could make inductor compact to meet requirement of circuit on novel consumer electronic terminators. The metal coils of inductor on different levels are isolated by polymers which is an important component of IPD technology. Mechanical properties of polymers have strong influence on electric characteristic, which should be considered in model and will present in this paper. The scalable parameters of model are also extracted to implement process design kit (PDK) with parameterized inductors which could be used in system in package (SiP) or 3D IC interposer for RF applications.
叠层线圈电感器可以在多层薄膜结构上实现,其结构是两个或多个线圈在不同的层位上,但具有相同的磁通。该结构产生互感,增加了单位面积总电感,使电感结构紧凑,满足新型消费电子终端的电路要求。不同层次电感器的金属线圈采用聚合物隔离,是IPD技术的重要组成部分。聚合物的力学性能对其电特性有很大的影响,这是在模型中应该考虑的,本文也将讨论。模型的可扩展参数也被提取出来,以实现带有参数化电感的工艺设计套件(PDK),该套件可用于系统级封装(SiP)或射频应用的3D IC中介器。
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引用次数: 0
Semiconductor packages for automotive applications 汽车应用的半导体封装
H. Nakajima
Automotive Electronics Revolutions in automotive technology have been driven by two motivations; maximizing comfort and fun, and “zeronizing” accidents and eco-hazards.[1] Recent resource-conservation move has promoted applications of electronic technology for better gas utilization. Many mechanical parts have been replaced by semiconductor devices, microelectromechanical systems (MEMS) and electric motors to make vehicles safer, more comfortable and eco-friendly. Numbers of electronic control units (ECUs), MEMS and electric motors used in a vehicle have reached 100 to 130 pieces now. Downward trend of MEMS costs has also boosted the adoption of MEMS for vehicles.
汽车技术的革命受到两个动机的推动;最大化舒适和乐趣,“零化”事故和生态危害。[1]最近的资源节约行动促进了电子技术的应用,以更好地利用天然气。许多机械部件已被半导体器件、微机电系统(MEMS)和电动机取代,使车辆更安全、更舒适、更环保。目前,汽车上使用的电子控制单元(ecu)、微机电系统(MEMS)和电动机的数量已达到100 ~ 130个。MEMS成本的下降趋势也推动了MEMS在汽车上的采用。
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引用次数: 0
Detection of cold joint defect in copper pillar bumps aided by underfill filler segregation phenomenon 利用下填料偏析现象检测铜柱凸点冷接头缺陷
Chien-Chen Lee, Li Chiun Hung, Pai-Yuan Li, M. Hsieh, Harry Perng, V. Wang
Cold-joint defect has been critically discussed in flip chip interconnections, especially for lead-free solder and Cu pillar bumps in fcFBGA (flip chip fine-pitch BGA). In the case of Cu pillar bump, the only known effective method for cold-joint detection is package Open/Short Test. This study introduces an effective alternative method of Cold-joint detection while during assembly setup stage, which employs the moderate filler segregation phenomenon among Cu pillar bumps, especially for Cu pillar bump without solder cap. For joint connections with Cu-pillar bumps, a voltage separates the underfill material's filler and resin due to the electrode potential difference between Cu and Sn. The filler migrates towards the Sn, and given this behavior of the underfill material, we can easily detect the cold-joint through SAT (Scanning Acoustic Tomography) because of the difference of color distribution reflected in the C-SAM (C-mode scanning acoustic microscopy) image. If the joint interconnection is good, there is filler segregation — a moderate level filler segregation, which can be reflected as grayish-colored area in C-SAM images. In the contrary, the whiter area signifies the absence of filler segregation, and further considered to be due to no contact of Cu pillar and the substrate's pre-solder; thus, signifying Cold-joint defect in this area. With the use of this method, the cold-joint defect can now be detected by SAT during assembly process. However, the separation of resin and filler potentially affects the local properties of the underfill material and may cause the uneven stress distribution. Therefore, temperature cycling test was also performed to confirm that the moderate filler segregation does not have any concern during reliability test.
在倒装芯片互连中,冷接头缺陷已被广泛讨论,特别是在fcFBGA(倒装芯片细间距BGA)中无铅焊料和铜柱凸起。在铜柱碰撞的情况下,已知的唯一有效的冷接头检测方法是封装开/短测试。本研究介绍了一种有效的冷接头检测替代方法,该方法利用了铜柱凸点之间适度的填充物偏析现象,特别是对于没有焊帽的铜柱凸点。对于带有铜柱凸点的接头连接,由于铜和锡之间的电极电位差,电压将下填充材料的填充物和树脂分开。填充物向Sn方向迁移,考虑到下填材料的这种行为,由于C-SAM (C-mode扫描声学显微镜)图像中反映的颜色分布的差异,我们可以很容易地通过SAT(扫描声学断层扫描)检测冷接头。如果接缝互连良好,则存在填料偏析——中等程度的填料偏析,在C-SAM图像中表现为灰色区域。相反,白色区域表示没有填料偏析,进一步认为是由于铜柱与衬底预焊料没有接触;因此,表示该区域存在冷接头缺陷。利用该方法,可以在装配过程中通过SAT检测冷接头缺陷。然而,树脂与填料的分离可能会影响下填料的局部性能,并可能导致应力分布不均匀。因此,还进行了温度循环试验,以证实适度的填料偏析在可靠性试验中没有任何问题。
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引用次数: 1
Drop test for Sn96.7-Ag3.7 polymer core solder ball in BGA package BGA封装中Sn96.7-Ag3.7聚合物芯焊料球的跌落试验
Tien-Tsorng Shih, Binghua Chen, Win-Der Lee, Mu-Chun Wang
Using polymer core solder ball in ball-grid-array (BGA) package instead of solid solder ball in cost consideration is a feasible choice. Besides the consideration for inter-metallic compound (IMC) between solder ball and carrier substrate, the reliability test for drop test is necessary. Following the commercial specification test conditions, this candidate demonstrates an impressive performance. The uniformity for the test results is also better than that with the control group. The slope value and scale parameter of Weibull distribution adopted in this statistic calculation illustrated the polymer core solder ball in BGA package owned the wonderful bombardment endurance capability, incorporated with the ENEPIG processing recipe for substrate metal finish.
从成本考虑,在球栅阵列(BGA)封装中使用聚合物芯焊锡球代替固体焊锡球是一种可行的选择。除了考虑焊料球与载体衬底之间的金属间化合物(IMC)外,还需要进行跌落试验的可靠性试验。在商业规范测试条件下,这个候选程序展示了令人印象深刻的性能。试验结果的均匀性也优于对照组。采用Weibull分布的斜率值和尺度参数进行统计计算,说明BGA封装的聚合物芯焊料球具有良好的耐轰击性能,并结合ENEPIG基材表面处理配方。
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引用次数: 1
High thermal dissipation of light emitting diodes by integrating thin film process and packaging technology 集成薄膜工艺和封装技术的高散热发光二极管
Y. Tsai, C. Hsu, K. F. Lin, Y. Chang, H. Hu, T. Chen, C. Chu, M. Chu
We report a brand new technique which is merged thin film fabrication process and packaging technology together to form the shortest thermal dissipation path of LED structure. The effective thermal resistance of the proposed LED was 3.54K/W, which is much better than that of the conventional one 10.8K/W and the operating current can be driven from original 230mA up to 800mA. These results indicate that the LED structure based on our work is useful in improving the performance by enabling great heat dissipation and have higher application potential than conventional one.
我们报道了一种全新的技术,将薄膜制造工艺和封装技术结合在一起,形成LED结构的最短散热路径。该LED的有效热阻为3.54K/W,大大优于传统LED的10.8K/W,工作电流可从原来的230mA驱动到800mA。这些结果表明,基于我们的工作的LED结构有助于通过实现良好的散热来提高性能,并且比传统结构具有更高的应用潜力。
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引用次数: 0
Models for physics of failures analysis during printed circuit board bending 印刷电路板弯曲失效分析的物理模型
Jan L. Yang, Mei-Ling Wu
This paper summarizes the force calculation at each pitch position for the structure, where a component (overmold, die, and BT) is attached to a PCB (printed circuit board) through an array of solder joints with an external bending moment applied at the ends of PCB. In this paper, the results from the model proposed by E. Suhir [1] are summarized with corrections in the derivation of the equations. Details of the new model will be described including the methodology, the formulation and the simulated results. Comparisons between the two models will be made with discussions. In this new model, each solder joint between the component and the PCB is replaced by a spring with spring constant. Benefiting from the symmetry of the structure, only half of the structure needs to be considered which simplifies the formulation of the problem and saves the computation time dramatically. The variables (unknowns) to be solved are the forces exerted on each spring due to applied external bending moment. In the subsections to come, detailed derivations will be given followed by numerical results. The setup of the new model and it is essentially the same as the Cantilever-intermediate load problem. The forces exerted on each spring will be solved through a system of linearly independent equations governed by the following conditions. All the listed formulas above are for the case when the number of leads is odd. Basically, similar formulas will be used for the case when the number of leads is even. The goal in this paper will be as follows: (a) Suhir's model deals with continuous case. It is clearly seen from the simulation results of Suhir's model that all the curves are smooth no matter how many number of solder joints are involved. The only parameter that is related to the number of joints as defined by Suhir is the spring constant of the elastic attachment. In the new model, we will solve for the force at each position in a discrete sense. That is why the curves are not that smooth when the number of solder joints is small. As the number of the solder joints becomes large (or in other words, the pitch size is small), the two models yield exactly the same results. (b) Mathematically, the new model is simpler and straightforward. The only math involved is solving the linearly independent system of equations. In Suhir's model, however, the solution process starts from solving the 4th order differential equations. Although analytical solutions can be obtained, special attention has to be paid in imposing proper boundary conditions, which might not be trivial.
本文总结了在结构的每个节距位置的力计算,其中组件(覆盖模具,模具和BT)通过在PCB末端施加外部弯矩的一系列焊点连接到PCB(印刷电路板)上。本文总结了E. Suhir[1]提出的模型的结果,并对方程的推导进行了修正。详细的新模型将被描述,包括方法论,公式和模拟结果。两种模式的比较将在讨论中进行。在这个新模型中,元件和PCB之间的每个焊点都用弹簧常数代替。得益于结构的对称性,只需考虑一半的结构,大大简化了问题的表述,节省了计算时间。要解决的变量(未知数)是由于施加外部弯矩而施加在每个弹簧上的力。在接下来的小节中,将给出详细的推导,然后给出数值结果。新模型的建立与悬臂-中间荷载问题本质上是相同的。施加在每个弹簧上的力将通过由以下条件控制的线性无关方程系统来求解。上面列出的所有公式都适用于引线数为奇数的情况。基本上,类似的公式将用于引线数量为偶数的情况。本文的目标如下:(a) Suhir的模型处理连续情况。从Suhir模型的仿真结果可以清楚地看到,无论焊点个数多少,曲线都是光滑的。根据Suhir的定义,与关节数量相关的唯一参数是弹性附件的弹簧常数。在新模型中,我们将在离散意义上求解每个位置的力。这就是为什么当焊点数量少时,曲线不那么光滑的原因。当焊点的数量变大(或者换句话说,间距变小)时,两种模型产生完全相同的结果。(b)在数学上,新模型更简单和直接。唯一涉及的数学问题是解线性无关方程组。然而,在Suhir的模型中,求解过程从求解四阶微分方程开始。虽然可以得到解析解,但必须特别注意施加适当的边界条件,这可能不是微不足道的。
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引用次数: 0
Advanced LED wafer level packaging technologies 先进的LED晶圆级封装技术
S. W. R. Lee
Currently most LED components are made with individual chip packaging technology. The main manufacturing processes follow conventional chip-based IC packaging. In the past several years, there is an uprising trend in the IC industry to migrate from chip-based packaging to wafer level packaging. Therefore, there is a need for LEDs to catch up. This presentation will introduce advanced LED wafer level packaging technologies. The contents will cover key enabling processes such as preparation of silicon sub-mount wafer, implementation of interconnection, deposition of phosphor, wafer level encapsulation, and their integration. The emphasis will be placed on how to achieve high throughput, low cost manufacturing through wafer level packaging.
目前大多数LED元件都是采用单独的芯片封装技术制造的。主要的制造工艺遵循传统的基于芯片的集成电路封装。在过去的几年里,集成电路行业出现了从芯片级封装向晶圆级封装迁移的趋势。因此,需要led迎头赶上。本演讲将介绍先进的LED晶圆级封装技术。内容将涵盖关键的使能工艺,如硅亚贴装晶圆的制备,互连的实施,荧光粉的沉积,晶圆级封装及其集成。重点将放在如何通过晶圆级封装实现高吞吐量,低成本制造。
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引用次数: 4
Leadless IC package with a substrate produced by copper/nickel/copper-3-layer-clad material 采用铜/镍/铜-3层包覆材料制作基板的无铅IC封装
H. Okayama, K. Nanbu, T. Kurokawa, Takashi Koushiro
Terminal units such as mobile phones, portable game systems and electronic books, have spread all over the world and advanced to be smaller, more lightweight and thinner every moment. Simultaneously, the inner electronic parts such as batteries, IC packages and connectors were also smaller and thinner. For example, in order to reduce the occupied area and space on the printed circuit board (PCB), some lead flame type IC packages such as SOP(Small Outline Package) and QFP(Quad Flat Package) have changed to leadless type ones such as SON(Small Outline Non-lead), QFN(Quad Flat Non-lead) and LGA. (Land Grid Array) The substrates of such leadless IC packages are usually made of a single metal plate such as a copper, a copper alloy and a nickel and conventionally produced through etching process or plating process. So the designs for the package like the size, the number of terminal and the total thickness are limited. In order to solve such problems, we developed a new manufacturing method, using clad materials which rolled copper (Cu) foil and nickel (Ni) plating layer on electrolysis Cu foil were laminated. In detail, the components were consisting of 18μm to 35μm thickness Cu foil with about 1 um thickness Ni plating layer and around 100μm thickness rolled Cu sheet (Cu/Ni/Cu material). These materials are characterized by the cladding interface between the rolled Cu foil and the Ni plating layer on the electrolysis Cu foil, which is bonded by the surface activated bonding (SAB) method [1, 2, 3]. Namely, the interface is so flat that it is suitable to use for selective etching work [4, 5]. In this paper, we would like to introduce the new IC package manufacturing process with the Cu/Ni/Cu material. This method makes some new package designs possible and achieves high productivity when comparing to the conventional method. We produced various leadless IC packages with the total thickness of 0.25mm to 0.5mm, with the number of 3 to 460 terminals at 1 row to 4 rows for terminals by means of this new method. In addition, in order to evaluate the package performance, we made the package with the total thickness of 0.43mm, with 164 terminals of diameter of 0.25mm at 3 rows and the terminal pitch of 0.5mm. In this sample, heat-tolerance by the solder reflow test with the pre-condition of JEDEC (Joint Electron Device Engineering Council) standard of level 3 was estimated and the package warpage in the range of 25 to 260 degrees Celsius was measured. As the results, the package sample could pass the reflow test of the JEDEC level 3 and the warp of the package was less than 50μm.
终端设备,如手机、便携式游戏系统和电子书,已经遍布世界各地,每一刻都在向更小、更轻、更薄的方向发展。同时,电池、IC封装、连接器等内部电子部件也变得更小、更薄。例如,为了减少印刷电路板(PCB)上的占地面积和空间,一些铅火焰型IC封装如SOP(Small Outline Package)和QFP(Quad Flat Package)已改为SON(Small Outline Non-lead)、QFN(Quad Flat Non-lead)和LGA等无铅型IC封装。这种无引线IC封装的基板通常由铜、铜合金和镍等单一金属板制成,通常通过蚀刻工艺或电镀工艺生产。因此,封装的尺寸、端子数量和总厚度等设计都受到限制。为了解决这些问题,我们开发了一种新的制造方法,采用复合材料将轧制铜(Cu)箔和镀镍(Ni)层在电解铜箔上进行层合。该组件由厚度为18μm ~ 35μm的铜箔和厚度约为1 μm的镀镍层以及厚度约为100μm的轧制铜片(Cu/Ni/Cu材料)组成。这些材料的特点是轧制后的Cu箔与电解后的Cu箔上镀镍层之间存在包覆界面,采用表面活化键合(SAB)方法进行键合[1,2,3]。也就是说,界面非常平坦,适合用于选择性蚀刻工作[4,5]。在本文中,我们将介绍用Cu/Ni/Cu材料制造集成电路封装的新工艺。该方法使一些新的封装设计成为可能,并且与传统方法相比,实现了更高的生产率。利用这种新方法,我们生产了各种总厚度为0.25mm至0.5mm, 1排至4排端子数为3至460个的无引线IC封装。此外,为了评估封装性能,我们制作了总厚度为0.43mm的封装,采用164根直径为0.25mm的3排端子,端子间距为0.5mm。本样品在JEDEC(联合电子器件工程委员会)3级标准的前提条件下,通过焊料回流试验估计了耐热性,并测量了25至260摄氏度范围内的封装翘曲。结果表明,该封装样品能够通过JEDEC 3级回流测试,且封装的翘曲度小于50μm。
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引用次数: 0
Failure of lead-free solder joint under thermal cycling 热循环下无铅焊点失效
Yung-Wen Wang, Mei-Ling Wu
Microelectronic devices are often subjected to environmental and power cycling thermal loads. Thermal cycling and the shear forces lead to many failures in microelectronic devices. The most common failure is an open in one or more of the input/output (I/O). The open is the result of a cracked or damaged interconnects, whether it is a lead-free solder joint. Thermal cycling can occur for a device being turned on and off, a system containing the device being turned on and off, an environmental load, and so on. The most important issue that must be addressed in order to the critical issue is the magnitude of the shear force on the lead-free solder joint under thermal loading, in other words, how many cycles can a microelectronic device survive before a failure occurs. The shear forces are often caused by the global coefficient of thermal expansion (CTE) mismatch between the component and the printed circuit board (PCB). This can be a cyclic load when the microelectronic device is repeatedly subjected to a range of temperatures. Shear forces in the lead-free solder joints are an important aspect of the microelectronic package failure problem because the shear force is directly related to the microelectronic device life. A failure model can be used to predict the fatigue life of a microelectronic device in terms of cycles to failure. The Vandevelde analytic model [1] for determining shear forces in the lead-free solder joints of electronic devices, which is based on elastic strength of materials principles, is critiqued in this paper. This analytic model is then used to gain insightful information regarding interconnect shear force behavior. The results from this new model were compared to finite element model results to assure the analytic model was accurately capturing the behavior of the forces in the lead-free solder joints. The results from the investigations must be qualified by stating that the assumptions of constant pitch, homogeneous component, and linear elastic materials were utilized. The completion of this new model leads to a more comprehensive solution to the problem of accurately and efficiently characterizing shear forces in the lead-free solder joint of microelectronic packages and ultimately predicting the life of the packages. Conclusions are made concerning the influence of the number of the lead-free solder joints, device geometry, and material properties on the resulting shear forces. Rapid assessment methodologies for efficiently designing a successful microelectronic package are presented in this paper, which can save both time and money in the design process.
微电子器件经常受到环境和功率循环热负荷的影响。热循环和剪切力是导致微电子器件失效的主要原因。最常见的故障是一个或多个输入/输出(I/O)打开。不论是无铅焊点,开口都是由于连接处破裂或损坏造成的。热循环可能发生在打开和关闭的设备、包含正在打开和关闭的设备的系统、环境负载等等。为了解决这个关键问题,必须解决的最重要的问题是在热载荷下无铅焊点上剪切力的大小,换句话说,微电子设备在发生故障之前可以存活多少次循环。剪切力通常是由元件与印刷电路板(PCB)之间的整体热膨胀系数(CTE)不匹配引起的。当微电子器件反复承受一定温度时,这可能是一个循环负载。无铅焊点的剪切力是微电子封装失效问题的一个重要方面,因为剪切力直接关系到微电子器件的寿命。一个失效模型可以用来预测微电子器件的疲劳寿命,以循环失效。本文对基于材料弹性强度原理确定电子器件无铅焊点剪切力的Vandevelde解析模型[1]进行了批判。然后使用该分析模型来获得有关互连剪切力行为的深刻信息。将该模型的结果与有限元模型的结果进行了比较,以确保分析模型能够准确地捕捉无铅焊点的受力行为。研究结果必须通过陈述恒定节距,均匀成分和线弹性材料的假设来确定。这一新模型的完成将更全面地解决准确有效地表征微电子封装无铅焊点剪切力的问题,并最终预测封装的寿命。研究了无铅焊点数量、器件几何形状和材料性能对剪切力的影响。本文提出了一种快速评估方法,可以有效地设计成功的微电子封装,从而节省设计过程中的时间和金钱。
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引用次数: 1
期刊
2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)
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