首页 > 最新文献

2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)最新文献

英文 中文
Electroless nickel/Immersion gold process on Aluminum alloy electrodes 铝合金电极的化学镀镍/浸金工艺
S. Kawashima
Electronic equipment has changed to have higher performance with minimized in size. This trend required to electronic devices minimization also. Numerous packaging techniques have developed using metal flame, PWB material and plastic tape to mount semiconductor devices on PWB1). To achieve further high mounting density, the semiconductor device directly solder mounted on package after forming metal bumps on electrode of semiconductor devices. Aluminum alloy is common material for electrode of semiconductor devices, since it has relatively high conductivity, chemically stable and less reaction in semiconductor manufacturing process. However, it needs other meal layer for soldering to form bump on it. Sputtered Ti/Cu layer and electrolytic solder plating is widely used to form solder bump. However, this process requires longer and costly process such as multiple vacuum process, photo image process, etc.
电子设备已经改变为具有更高的性能和最小的尺寸。这种趋势也要求电子设备最小化。使用金属火焰、PWB材料和塑料胶带在PWB1上安装半导体器件的封装技术已经发展了许多。为了实现更高的安装密度,半导体器件在半导体器件的电极上形成金属凸起后直接焊接安装在封装上。铝合金具有导电性高、化学性质稳定、在半导体制造过程中反应少等优点,是半导体器件常用的电极材料。然而,它需要另一个粉层焊接,以形成凹凸。溅射Ti/Cu层和电解镀锡被广泛用于形成凸点。然而,这种工艺需要更长的时间和昂贵的工艺,如多次真空工艺,照片图像工艺等。
{"title":"Electroless nickel/Immersion gold process on Aluminum alloy electrodes","authors":"S. Kawashima","doi":"10.1109/IMPACT.2011.6117175","DOIUrl":"https://doi.org/10.1109/IMPACT.2011.6117175","url":null,"abstract":"Electronic equipment has changed to have higher performance with minimized in size. This trend required to electronic devices minimization also. Numerous packaging techniques have developed using metal flame, PWB material and plastic tape to mount semiconductor devices on PWB1). To achieve further high mounting density, the semiconductor device directly solder mounted on package after forming metal bumps on electrode of semiconductor devices. Aluminum alloy is common material for electrode of semiconductor devices, since it has relatively high conductivity, chemically stable and less reaction in semiconductor manufacturing process. However, it needs other meal layer for soldering to form bump on it. Sputtered Ti/Cu layer and electrolytic solder plating is widely used to form solder bump. However, this process requires longer and costly process such as multiple vacuum process, photo image process, etc.","PeriodicalId":6360,"journal":{"name":"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)","volume":"36 1","pages":"381-384"},"PeriodicalIF":0.0,"publicationDate":"2011-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85465008","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fault-tolerant mesh for 3D network on chip 片上三维网络的容错网格
Kai-Yang Hsieh, Bo-Chuan Cheng, Ruei-Ting Gu, Katherine Shu-Min Li
3D Mesh NoCs (Network on Chips) are one of the best approaches to solve the complexity of interconnect structures in SoCs (System on Chips) which leads to lower yield. In this paper, we present a Mesh-based scheme for 3D NoCs with fault-tolerance that helps increasing chips' reliability and yield. There are several phases for this scheme. The phase I transforms a 2D NoC into an optimized 3D NoC under the constraints of area, routing length, temperature, performance and etc. Then, we optimize the I/O placement to get the best routing between I/O pads and all cores by clustering the placement of each core and reassign the tier sequence to minimize the number of TSVs. Finally, we build up the Mesh topology for each tier with squaring the maximum number of cores. For example, we need a 4×4 Mesh if the maximum cores in each tier are 15. Once the 3D Mesh topology is ready, we are going to set up the routing scheme that provides the minimum number of routers and the minimum routing latency in phase II. We also have a routing scheme to control the data flow and distribute the communication overhead. Phase III is to search the replacement routing paths. There will be at least 2 paths for each connection. The more replacement paths we found, the more faults can be tolerated and more computing time will be needed. We verify the fault-tolerant 3D Mesh NoC in phase IV. First, we randomly insert some faults to verify if the NoC is still working. We can get the maximum number of faults to be tolerated by increasing the number of faults until the system crash in the second step. The verification may need hundreds of times to get the approximate maximum faults. If the fault toleration is not good enough, we can go back to phase III to search more replacements. Experimental results show to this verified fault-tolerant 3D Mesh scheme to be effective and efficient. This scheme can efficiently transform a complex 2D NoC into 3D fault-tolerant Mesh NoC according to the user-defined constraints and also provides the tradeoff analysis between the tolerance and the search time of the effective replacement paths.
3D Mesh noc(片上网络)是解决片上系统互连结构复杂性导致成品率降低的最佳方法之一。在本文中,我们提出了一种基于网格的三维noc容错方案,有助于提高芯片的可靠性和良率。这个方案有几个阶段。在面积、布线长度、温度、性能等因素的约束下,将2D NoC转换为优化的3D NoC。然后,我们优化I/O布局,通过对每个内核的布局进行聚类,并重新分配层序列以最小化tsv的数量,从而获得I/O垫和所有内核之间的最佳路由。最后,我们为每个层构建网格拓扑,并将最大核数平方。例如,如果每层的最大核数是15,我们需要一个4×4 Mesh。一旦3D Mesh拓扑准备好了,我们将在第二阶段设置路由方案,提供最小数量的路由器和最小的路由延迟。我们还有一个路由方案来控制数据流和分配通信开销。第三阶段是搜索替换路由路径。每个连接至少有2条路径。我们发现的替换路径越多,可以容忍的故障就越多,所需的计算时间也就越多。我们在第四阶段验证了容错3D Mesh NoC。首先,我们随机插入一些故障来验证NoC是否仍在工作。在第二步中,我们可以通过增加故障数量,直到系统崩溃,从而获得可容忍的最大故障数量。验证可能需要数百次才能得到近似的最大故障。如果容错性不够好,我们可以回到第三阶段寻找更多的替代品。实验结果表明,该方案是有效的、高效的。该方案可以根据用户定义的约束条件,将复杂的二维网格NoC有效地转换为三维容错网格NoC,并提供容错度与有效替换路径搜索时间之间的权衡分析。
{"title":"Fault-tolerant mesh for 3D network on chip","authors":"Kai-Yang Hsieh, Bo-Chuan Cheng, Ruei-Ting Gu, Katherine Shu-Min Li","doi":"10.1109/IMPACT.2011.6117292","DOIUrl":"https://doi.org/10.1109/IMPACT.2011.6117292","url":null,"abstract":"3D Mesh NoCs (Network on Chips) are one of the best approaches to solve the complexity of interconnect structures in SoCs (System on Chips) which leads to lower yield. In this paper, we present a Mesh-based scheme for 3D NoCs with fault-tolerance that helps increasing chips' reliability and yield. There are several phases for this scheme. The phase I transforms a 2D NoC into an optimized 3D NoC under the constraints of area, routing length, temperature, performance and etc. Then, we optimize the I/O placement to get the best routing between I/O pads and all cores by clustering the placement of each core and reassign the tier sequence to minimize the number of TSVs. Finally, we build up the Mesh topology for each tier with squaring the maximum number of cores. For example, we need a 4×4 Mesh if the maximum cores in each tier are 15. Once the 3D Mesh topology is ready, we are going to set up the routing scheme that provides the minimum number of routers and the minimum routing latency in phase II. We also have a routing scheme to control the data flow and distribute the communication overhead. Phase III is to search the replacement routing paths. There will be at least 2 paths for each connection. The more replacement paths we found, the more faults can be tolerated and more computing time will be needed. We verify the fault-tolerant 3D Mesh NoC in phase IV. First, we randomly insert some faults to verify if the NoC is still working. We can get the maximum number of faults to be tolerated by increasing the number of faults until the system crash in the second step. The verification may need hundreds of times to get the approximate maximum faults. If the fault toleration is not good enough, we can go back to phase III to search more replacements. Experimental results show to this verified fault-tolerant 3D Mesh scheme to be effective and efficient. This scheme can efficiently transform a complex 2D NoC into 3D fault-tolerant Mesh NoC according to the user-defined constraints and also provides the tradeoff analysis between the tolerance and the search time of the effective replacement paths.","PeriodicalId":6360,"journal":{"name":"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)","volume":"1 1","pages":"202-205"},"PeriodicalIF":0.0,"publicationDate":"2011-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82809550","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
New PC board structure for power supply technology over GHz frequency verificated with 32bit SSN driver system 采用32位SSN驱动系统验证了用于GHz频率以上供电技术的新型PC板结构
Norifumi Sasaoka, Takafumi Ochi, Y. Akiyama, K. Kono, C. Ueda, K. Otsuka
Power integrity (pi) for recent electronics circuits and systems is the most emergent technology in the GHz clock field and has been addressed in important papers through several approaches[1][2]. The latest concept of the best pi condition is recognized as maintaining lower impedance between power and ground lines or planes without any clock frequency dependency, even in the GHz region. We found this concept in a relatively old book [3] from the 1980s; thus, it is not the latest idea. However, it cannot be completely realized by the several previously proposed approaches, including many involving the use of low-inductance capacitances. We are aware that plane power and ground resonance are induced electromagnetic interference (emi) problems due to resonance caused by eddy currents or multiple reflections of voltage fluctuations. a novel technology was used in our previous study only using a conductive layer of dispersed metal particles [4]. The structure is consisted of a conventional fr-4 printed circuit board in which the copper ground plane was replaced with a metal particle conductive layer [4]. This structure improved the pi for any clock frequency especially in GHz region with an impedance of less than 1 Ω. This improvement is verified by an actual 16bit (two set) 3 Gbps/pin i/o interface board in this study. Even though the simultaneous switching of 32 drivers gave a fairly high current slew-rate of (8 mA × 32) / 60 ps = 4.27 × 109 A/s, the pi status was kept at an excellent value within 10% of the Vdd fluctuation.
当前电子电路和系统的功率完整性(pi)是GHz时钟领域中最新兴的技术,已经在一些重要的论文中通过几种方法进行了讨论。最佳pi条件的最新概念被认为是在没有任何时钟频率依赖的情况下保持电源和地线或平面之间的较低阻抗,即使在GHz区域。我们在20世纪80年代的一本相对较老的书b[3]中发现了这个概念;因此,这不是最新的想法。然而,它不能完全实现的几个先前提出的方法,包括许多涉及使用低电感电容。我们知道,平面电源和地面共振是由于涡流或电压波动的多重反射引起的共振而引起的感应电磁干扰(emi)问题。我们在之前的研究中使用了一种新技术,仅使用分散金属颗粒[4]的导电层。该结构由传统的fr-4印刷电路板组成,其中铜接地面被金属颗粒导电层[4]取代。这种结构改善了任何时钟频率的pi,特别是在GHz区域阻抗小于1 Ω。本研究通过实际的16位(两组)3 Gbps/pin i/o接口板验证了这一改进。尽管32个驱动器的同时开关产生了相当高的电流变化率(8 mA × 32) / 60 ps = 4.27 × 109 a /s,但pi状态在Vdd波动的10%以内保持在一个很好的值。
{"title":"New PC board structure for power supply technology over GHz frequency verificated with 32bit SSN driver system","authors":"Norifumi Sasaoka, Takafumi Ochi, Y. Akiyama, K. Kono, C. Ueda, K. Otsuka","doi":"10.1109/IMPACT.2011.6117167","DOIUrl":"https://doi.org/10.1109/IMPACT.2011.6117167","url":null,"abstract":"Power integrity (pi) for recent electronics circuits and systems is the most emergent technology in the GHz clock field and has been addressed in important papers through several approaches[1][2]. The latest concept of the best pi condition is recognized as maintaining lower impedance between power and ground lines or planes without any clock frequency dependency, even in the GHz region. We found this concept in a relatively old book [3] from the 1980s; thus, it is not the latest idea. However, it cannot be completely realized by the several previously proposed approaches, including many involving the use of low-inductance capacitances. We are aware that plane power and ground resonance are induced electromagnetic interference (emi) problems due to resonance caused by eddy currents or multiple reflections of voltage fluctuations. a novel technology was used in our previous study only using a conductive layer of dispersed metal particles [4]. The structure is consisted of a conventional fr-4 printed circuit board in which the copper ground plane was replaced with a metal particle conductive layer [4]. This structure improved the pi for any clock frequency especially in GHz region with an impedance of less than 1 Ω. This improvement is verified by an actual 16bit (two set) 3 Gbps/pin i/o interface board in this study. Even though the simultaneous switching of 32 drivers gave a fairly high current slew-rate of (8 mA × 32) / 60 ps = 4.27 × 109 A/s, the pi status was kept at an excellent value within 10% of the Vdd fluctuation.","PeriodicalId":6360,"journal":{"name":"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)","volume":"2013 1","pages":"55-58"},"PeriodicalIF":0.0,"publicationDate":"2011-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87995363","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Ratcheting and creep responses of SAC solder joints under cyclic loading 循环载荷下SAC焊点的棘轮和蠕变响应
Li-Ying Hsieh, H. Yang, T. Chiu
To investigate the fatigue response of Pb-free Sn3.8Ag0.7Cu (SAC3807) solder, cyclic double lap shear tests consisting both loading ramp and dwell periods under isothermal conditions were performed on ball grid array (BGA) SAC3807 solder joints. Factors including test temperature, shear load amplitude and load dwell time were considered in the experiment for determining the damage acceleration effects. From the experiment it was observed that, during the cyclic shear load ramping stages, ratcheting still occurs even though the peak load is below the yielding point of solder. Transient and steady-state creep responses were also observed during the dwell stages of the cycling profile. Both ratcheting and creep responses become more significant as temperature and peak load increases. An important finding of the study is that the contribution of creep to the overall load-displacement hysteresis is more significant than the contribution of ratcheting. The corresponding inelastic energy dissipation under the cyclic double lap shear experiments were compared numerically to that of a typical wafer-level package under board-level temperature cycling (T/C). The comparison can be used for developing acceleration factors between the cyclic shear and board-level T/C tests.
为了研究无铅Sn3.8Ag0.7Cu (SAC3807)焊料的疲劳响应,在等温条件下对球栅阵列(BGA) SAC3807焊点进行了循环双搭接剪切试验,包括加载斜坡和停留时间。实验中考虑了试验温度、剪切载荷幅值和载荷停留时间等因素来确定损伤加速效应。从实验中可以观察到,在循环剪切载荷斜坡阶段,即使峰值载荷低于焊料的屈服点,棘轮仍然发生。在循环剖面的停留阶段也观察到瞬态和稳态蠕变响应。随着温度和峰值荷载的增加,棘轮和蠕变响应变得更加显著。研究的一个重要发现是,蠕变对整体荷载-位移滞后的贡献比棘轮的贡献更显著。将双搭接剪切实验下的非弹性能量耗散与典型晶圆级封装在板级温度循环下的非弹性能量耗散进行了数值比较。该比较可用于开发循环剪切试验与板级T/C试验之间的加速因子。
{"title":"Ratcheting and creep responses of SAC solder joints under cyclic loading","authors":"Li-Ying Hsieh, H. Yang, T. Chiu","doi":"10.1109/IMPACT.2011.6117276","DOIUrl":"https://doi.org/10.1109/IMPACT.2011.6117276","url":null,"abstract":"To investigate the fatigue response of Pb-free Sn3.8Ag0.7Cu (SAC3807) solder, cyclic double lap shear tests consisting both loading ramp and dwell periods under isothermal conditions were performed on ball grid array (BGA) SAC3807 solder joints. Factors including test temperature, shear load amplitude and load dwell time were considered in the experiment for determining the damage acceleration effects. From the experiment it was observed that, during the cyclic shear load ramping stages, ratcheting still occurs even though the peak load is below the yielding point of solder. Transient and steady-state creep responses were also observed during the dwell stages of the cycling profile. Both ratcheting and creep responses become more significant as temperature and peak load increases. An important finding of the study is that the contribution of creep to the overall load-displacement hysteresis is more significant than the contribution of ratcheting. The corresponding inelastic energy dissipation under the cyclic double lap shear experiments were compared numerically to that of a typical wafer-level package under board-level temperature cycling (T/C). The comparison can be used for developing acceleration factors between the cyclic shear and board-level T/C tests.","PeriodicalId":6360,"journal":{"name":"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)","volume":"56 1","pages":"96-99"},"PeriodicalIF":0.0,"publicationDate":"2011-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76050856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A novel FR-4 material for embedded substrate 一种新型嵌入式衬底FR-4材料
C. Hong, Ming C. Lee
Two processes of components embedding, both active dies and passive components, have been demonstrated so far — one is the embedding of chip by ABF/RCC material, and the other is the embedding by multiple plies of prepreg with machined cavity of placing component. ABF/RCC materials appear to the most straight forward way to embed components into PCB. The drawback is that the components to be embedded have to be thinned to 50μm but this is not practical for all types of components, and also the cost is very high. Multiple-ply prepreg with machined cavity can accommodate die of various thickness and thus offer more choice of different component thickness. However they do not get wide acceptance because of the low throughput and the concerns over the yield. To address the problem component embedding and offer the solution, Atotech has developed a novel process of manufacturing FR-4 material. This novel process, named “Advanced Dielectric Epoxy Powder Technology (ADEPT)”, is a solvent-free production technology. The dielectric is made of powder and is later coated on the copper foil. The final form is a resin-coated copper foil (RCC.) Moreover, the glass fabric can be laminated into the RCC, making it a Reinforced Resin-Coated Copper foil (RRCC.) The materials have passed reliability tests required in PCB and assembly industry, which include lead-free assembly, MSL, HAST, CAF, and TCT. By ADEPT, a multi-layer material, in sheet form, can be produced for the embedded substrate. First, a reinforced dielectric layer with glass fabric will offer good dimension control. Second, an additional resin layer, with high filler content to reduce CTE, will be used for component embedding. With the multi-layer material, the process of component embedding can be done in one go, without having the drawbacks of the large warpage by ABF, or the step of the cavity formation required by multiple-ply prepreg. After component embedding, the reinforced layer effectively minimizes the warpage so the panel can be laser drilled and processed. Finally an ultra thin, low profile copper foil will be ideal for modified Semi-Additive Process (mSAP), a way of fine line structuring at relatively low cost. Since by ADEPT the dielectric is made of powder, it soon lends itself easily to the molding process in assembly. Its advantages over molding compounds are the capabilities of form small (50μm) laser vias due to the selection of sub-micron filler (Max./Mean filler size=1.0/0.3μm) and it is compatible with e'less copper deposition. As close partners, Atotech and ASE Global are exploring the applications of this dielectric powder as a molding compound for component embedding process.
目前,已有两种元件的埋置工艺,一种是采用ABF/RCC材料对芯片进行埋置,另一种是采用多层预浸料与放置元件的加工腔体进行埋置。ABF/RCC材料似乎是将组件嵌入PCB的最直接的方式。缺点是要嵌入的组件必须薄到50μm,但这并不适用于所有类型的组件,而且成本非常高。带加工型腔的多层预浸料可以容纳各种厚度的模具,从而提供了更多不同零件厚度的选择。然而,由于低通量和对成品率的担忧,它们并没有得到广泛的接受。为了解决组件嵌入问题并提供解决方案,安美特开发了一种制造FR-4材料的新工艺。这种新工艺被称为“先进介电环氧粉末技术(ADEPT)”,是一种无溶剂生产技术。电介质由粉末制成,然后涂在铜箔上。最后的形式是树脂涂层铜箔(RCC)。此外,玻璃织物可以层压入RCC,使其成为增强树脂涂层铜箔(RRCC)。材料已通过PCB和组装行业所需的可靠性测试,包括无铅组装,MSL, HAST, CAF和TCT。通过ADEPT,可以为嵌入基板生产片状的多层材料。首先,用玻璃织物增强介电层将提供良好的尺寸控制。其次,一个额外的树脂层,具有高填充物含量,以减少CTE,将用于组件嵌入。使用多层材料,构件嵌入过程可以一次完成,没有ABF的大翘曲的缺点,也没有多层预浸料所需的空腔形成步骤。在构件嵌入后,增强层有效地减少了翘曲,从而可以对面板进行激光钻孔和加工。最后,超薄,低轮廓铜箔将是理想的改进半增材工艺(mSAP),以相对较低的成本细线结构的方式。由于ADEPT电介质是由粉末制成的,它很快就可以在组装过程中很容易地成型。与成型化合物相比,它的优点是由于选择了亚微米填料(Max。/平均填料尺寸=1.0/0.3μm),与e'less铜沉积相兼容。作为密切的合作伙伴,安美特和日月光正在探索这种介电粉末作为组件嵌入工艺的成型化合物的应用。
{"title":"A novel FR-4 material for embedded substrate","authors":"C. Hong, Ming C. Lee","doi":"10.1109/IMPACT.2011.6117237","DOIUrl":"https://doi.org/10.1109/IMPACT.2011.6117237","url":null,"abstract":"Two processes of components embedding, both active dies and passive components, have been demonstrated so far — one is the embedding of chip by ABF/RCC material, and the other is the embedding by multiple plies of prepreg with machined cavity of placing component. ABF/RCC materials appear to the most straight forward way to embed components into PCB. The drawback is that the components to be embedded have to be thinned to 50μm but this is not practical for all types of components, and also the cost is very high. Multiple-ply prepreg with machined cavity can accommodate die of various thickness and thus offer more choice of different component thickness. However they do not get wide acceptance because of the low throughput and the concerns over the yield. To address the problem component embedding and offer the solution, Atotech has developed a novel process of manufacturing FR-4 material. This novel process, named “Advanced Dielectric Epoxy Powder Technology (ADEPT)”, is a solvent-free production technology. The dielectric is made of powder and is later coated on the copper foil. The final form is a resin-coated copper foil (RCC.) Moreover, the glass fabric can be laminated into the RCC, making it a Reinforced Resin-Coated Copper foil (RRCC.) The materials have passed reliability tests required in PCB and assembly industry, which include lead-free assembly, MSL, HAST, CAF, and TCT. By ADEPT, a multi-layer material, in sheet form, can be produced for the embedded substrate. First, a reinforced dielectric layer with glass fabric will offer good dimension control. Second, an additional resin layer, with high filler content to reduce CTE, will be used for component embedding. With the multi-layer material, the process of component embedding can be done in one go, without having the drawbacks of the large warpage by ABF, or the step of the cavity formation required by multiple-ply prepreg. After component embedding, the reinforced layer effectively minimizes the warpage so the panel can be laser drilled and processed. Finally an ultra thin, low profile copper foil will be ideal for modified Semi-Additive Process (mSAP), a way of fine line structuring at relatively low cost. Since by ADEPT the dielectric is made of powder, it soon lends itself easily to the molding process in assembly. Its advantages over molding compounds are the capabilities of form small (50μm) laser vias due to the selection of sub-micron filler (Max./Mean filler size=1.0/0.3μm) and it is compatible with e'less copper deposition. As close partners, Atotech and ASE Global are exploring the applications of this dielectric powder as a molding compound for component embedding process.","PeriodicalId":6360,"journal":{"name":"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)","volume":"2 1","pages":"177-178"},"PeriodicalIF":0.0,"publicationDate":"2011-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74913773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Palladium surface finishes for copper wire bonding (Part I: The selection of surface finishes) 铜线焊用钯表面处理剂(第1部分:表面处理剂的选择)
M. Ozkok, Bill Kao, H. Clauberg
During the past two years, fine pitch copper wire bonding has finally entered high volume production. It is estimated that nearly 15% of all wire bonders used in production are now equipped for copper wire bonding. Most of these are used exclusively for copper wire bonding. In terms of pitch, copper wire is only barely lagging behind the most advanced gold applications. The most commonly used copper wire is 20um in diameter and 18um copper wire is entering final qualification. Evaluations with even finer wire are underway. Although some technical challenges remain, many years of research have now resolved most of the problems associated with copper wire bonding and attention is beginning to shift from merely ensuring reliable manufacturing processes to optimizing processes for efficiency and throughput. The most advanced wire bonders now have pre-configured processes specifically designed for copper. In addition to throughput optimization, further cost reductions are being sought. Among these is the desire to eliminate the high-cost gold not just from the wire, but also from the substrate. On the substrate side the electronics packaging industry still works with electrolytic nickel / electrolytic (soft) gold (Ni/Au) for copper wire bond applications. This surface finish works with copper wire bonding but includes some disadvantages, such as: — Thick expensive Au layers of 0.1 to 0.4μm — Electrically connected pads (bussing for the plating) which require added space on the substrate. — Pd-coated copper wire often delivers better results on gold covered finishes, but is two to three times more expensive as pure copper wire. Furthermore electrolytic Ni/Au was not chosen as a result of in-depth investigations for the most effective surface finish. The selection was made because it was the surface finish with the highest distribution in the market for wire bond packages. This paper is offering the results of a two company joint work regarding an alternative copper wire bondable surface finish for substrates mainly with palladium as the final copper wire bondable layer. This offers further cost reduction possibilities. Furthermore, copper palladium intermetallics are regarded as very reliable.
在过去的两年里,细间距铜线键合终于进入了大批量生产。据估计,目前生产中使用的所有焊丝机中有近15%配备了铜线焊丝。其中大多数是专门用于铜线粘接。就螺距而言,铜线仅略落后于最先进的黄金应用。最常用的铜线直径为20um, 18um铜线进入最终鉴定。使用更细导线的评估正在进行中。尽管仍然存在一些技术挑战,但多年的研究已经解决了与铜线键合相关的大部分问题,人们的注意力开始从仅仅确保可靠的制造工艺转向优化工艺以提高效率和产量。目前最先进的焊丝机都有专门为铜设计的预配置工艺。除了吞吐量优化之外,还在寻求进一步降低成本。其中之一是希望不仅从电线中,而且从衬底中消除高成本的金。在衬底方面,电子封装行业仍然使用电解镍/电解(软)金(Ni/Au)用于铜线粘合应用。这种表面处理与铜线结合使用,但存在一些缺点,例如:- 0.1至0.4μm的昂贵的厚金层-电连接焊盘(用于电镀的母线)需要在基板上增加空间。-镀钯铜线通常在镀金表面上效果更好,但价格是纯铜线的两到三倍。此外,由于深入研究,没有选择电解Ni/Au来获得最有效的表面光洁度。之所以进行选择,是因为它是在线键合包装市场上分布最高的表面光洁度。本文提供了两家公司联合工作的结果,关于主要以钯作为最终铜线可粘合层的基材的替代铜线可粘合表面处理。这提供了进一步降低成本的可能性。此外,铜钯金属间化合物被认为是非常可靠的。
{"title":"Palladium surface finishes for copper wire bonding (Part I: The selection of surface finishes)","authors":"M. Ozkok, Bill Kao, H. Clauberg","doi":"10.1109/IMPACT.2011.6117179","DOIUrl":"https://doi.org/10.1109/IMPACT.2011.6117179","url":null,"abstract":"During the past two years, fine pitch copper wire bonding has finally entered high volume production. It is estimated that nearly 15% of all wire bonders used in production are now equipped for copper wire bonding. Most of these are used exclusively for copper wire bonding. In terms of pitch, copper wire is only barely lagging behind the most advanced gold applications. The most commonly used copper wire is 20um in diameter and 18um copper wire is entering final qualification. Evaluations with even finer wire are underway. Although some technical challenges remain, many years of research have now resolved most of the problems associated with copper wire bonding and attention is beginning to shift from merely ensuring reliable manufacturing processes to optimizing processes for efficiency and throughput. The most advanced wire bonders now have pre-configured processes specifically designed for copper. In addition to throughput optimization, further cost reductions are being sought. Among these is the desire to eliminate the high-cost gold not just from the wire, but also from the substrate. On the substrate side the electronics packaging industry still works with electrolytic nickel / electrolytic (soft) gold (Ni/Au) for copper wire bond applications. This surface finish works with copper wire bonding but includes some disadvantages, such as: — Thick expensive Au layers of 0.1 to 0.4μm — Electrically connected pads (bussing for the plating) which require added space on the substrate. — Pd-coated copper wire often delivers better results on gold covered finishes, but is two to three times more expensive as pure copper wire. Furthermore electrolytic Ni/Au was not chosen as a result of in-depth investigations for the most effective surface finish. The selection was made because it was the surface finish with the highest distribution in the market for wire bond packages. This paper is offering the results of a two company joint work regarding an alternative copper wire bondable surface finish for substrates mainly with palladium as the final copper wire bondable layer. This offers further cost reduction possibilities. Furthermore, copper palladium intermetallics are regarded as very reliable.","PeriodicalId":6360,"journal":{"name":"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)","volume":"1 1","pages":"37-41"},"PeriodicalIF":0.0,"publicationDate":"2011-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89629057","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A study on Nano-mechanical properties and nano-tribology for ultra-thin Pt-coated 4N copper wire 超薄pt包覆4N铜线的纳米力学性能和纳米摩擦学研究
H. Hsu, J. Chien, S. Fu
Electronic Submission Nano-mechanical properties of ultra-thin copper wire (ψ =0.6mil) and nano-tribology along the interfacial between free air ball (FAB) and aluminum bond pad were carefully investigated in this paper. For comparison, commercial product Pt-coated 99.99% (4N) Cu wire and pure 4N Cu wire are selected as test materials. Bonding temperature effects were taken into account for all case studies. Tensile mechanical properties were conducted through self-designed wire pull test fixture. Nono-indentation instrument was applied to obtained thin surface elastic modulus on FAB. Nanotribology and interfacial frictional behavior along smashed FAB and bond pad were measured by Atomic Force Microscopy (AFM). AFM force-displacement curve is utilized to determine the nanotribology properties. The interfacial coefficient of frictional force can be derived from a serial of calculations. A well-defined contact area is measured to study the frictional force and friction stress. The roughness of contact surface influences the contact between friction and surface forces. The study of roughness parameters corresponds to evaluate the friction and the interfacial strengths. Local variation in micro/nano tribology is also measured.
本文研究了超细铜线(ψ =0.6mil)的纳米力学性能和自由空气球(FAB)与铝键垫界面的纳米摩擦学。为了比较,我们选择商用pt包覆99.99% (4N)铜线和纯4N铜线作为测试材料。所有的案例研究都考虑了键合温度的影响。通过自行设计的拉丝夹具进行拉伸力学性能测试。采用无压痕仪测量FAB薄表面弹性模量。利用原子力显微镜(AFM)对粉碎后的FAB和键合垫的纳米摩擦学和界面摩擦行为进行了测量。利用AFM力-位移曲线来确定纳米摩擦学性能。界面摩擦力系数可以通过一系列的计算得到。测量了一个定义明确的接触区域,以研究摩擦力和摩擦应力。接触面的粗糙度影响摩擦力与表面力之间的接触。粗糙度参数的研究对应于摩擦强度和界面强度的评估。微/纳米摩擦学的局部变化也被测量。
{"title":"A study on Nano-mechanical properties and nano-tribology for ultra-thin Pt-coated 4N copper wire","authors":"H. Hsu, J. Chien, S. Fu","doi":"10.1109/IMPACT.2011.6117291","DOIUrl":"https://doi.org/10.1109/IMPACT.2011.6117291","url":null,"abstract":"Electronic Submission Nano-mechanical properties of ultra-thin copper wire (ψ =0.6mil) and nano-tribology along the interfacial between free air ball (FAB) and aluminum bond pad were carefully investigated in this paper. For comparison, commercial product Pt-coated 99.99% (4N) Cu wire and pure 4N Cu wire are selected as test materials. Bonding temperature effects were taken into account for all case studies. Tensile mechanical properties were conducted through self-designed wire pull test fixture. Nono-indentation instrument was applied to obtained thin surface elastic modulus on FAB. Nanotribology and interfacial frictional behavior along smashed FAB and bond pad were measured by Atomic Force Microscopy (AFM). AFM force-displacement curve is utilized to determine the nanotribology properties. The interfacial coefficient of frictional force can be derived from a serial of calculations. A well-defined contact area is measured to study the frictional force and friction stress. The roughness of contact surface influences the contact between friction and surface forces. The study of roughness parameters corresponds to evaluate the friction and the interfacial strengths. Local variation in micro/nano tribology is also measured.","PeriodicalId":6360,"journal":{"name":"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)","volume":"14 1","pages":"488-491"},"PeriodicalIF":0.0,"publicationDate":"2011-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80042549","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Modeling of moisture diffusion in heterogeneous epoxy resin containing multiple randomly distributed particles using finite element method 含多个随机分布颗粒的非均相环氧树脂中水分扩散的有限元模拟
De-Shin Liu, I. Lin
The moisture diffusion phenomenon of UV-curable adhesive apply to the packaging of organic light-emitting devices (OLEDs) were investigated. Owing to the sensitivity of moisture ingress into OLEDs package, how to against the moisture permeation will be one of the key design issue. As regards to improve the moisture-resistant capability of the materials for encapsulating, one possible way is to add particles into UV-curable sealing adhesive. In this study, a numerical simulation model that contained randomly distributed particles into heterogeneous epoxy resin has been developed. The commercial software MATLAB is employed to generate the location of randomly distributed particles and the commercial software ANSYS based on the finite element method is employed to analyze moisture diffusion in containing multiple randomly distributed particles. Furthermore, this model is then employed to investigate the relationship between the volume fraction of the particles in the resin composite and the rate of moisture diffusion. The simulation results show that moisture diffusion is retarded significantly as the volume fraction of particles increases. Moreover, the adhesive with high volume fraction of particle exhibits superior moisture-resistant capability. However, excessively add particles makes inferior penetrability. Therefore, adding proper volume percentage of particle into UV-curable adhesive could be expected better using in engineering applications.
研究了用于有机发光器件(oled)封装的光固化胶粘剂的水分扩散现象。由于oled封装中水分渗透的敏感性,如何防止水分渗透将是关键设计问题之一。为了提高封装材料的防潮性能,一种可能的方法是在光固化密封胶中添加颗粒。在本研究中,建立了一个包含随机分布的颗粒进入非均相环氧树脂的数值模拟模型。利用商业软件MATLAB生成随机分布颗粒的位置,利用基于有限元法的商业软件ANSYS分析含有多个随机分布颗粒的水分扩散。此外,该模型还用于研究树脂复合材料中颗粒的体积分数与水分扩散速率之间的关系。模拟结果表明,随着颗粒体积分数的增加,水分的扩散速度明显减慢。颗粒体积分数高的胶粘剂具有较好的防潮性能。然而,过量添加颗粒会使渗透性能降低。因此,在光固化胶粘剂中加入适当体积百分比的颗粒可以更好地用于工程应用。
{"title":"Modeling of moisture diffusion in heterogeneous epoxy resin containing multiple randomly distributed particles using finite element method","authors":"De-Shin Liu, I. Lin","doi":"10.1109/IMPACT.2011.6117269","DOIUrl":"https://doi.org/10.1109/IMPACT.2011.6117269","url":null,"abstract":"The moisture diffusion phenomenon of UV-curable adhesive apply to the packaging of organic light-emitting devices (OLEDs) were investigated. Owing to the sensitivity of moisture ingress into OLEDs package, how to against the moisture permeation will be one of the key design issue. As regards to improve the moisture-resistant capability of the materials for encapsulating, one possible way is to add particles into UV-curable sealing adhesive. In this study, a numerical simulation model that contained randomly distributed particles into heterogeneous epoxy resin has been developed. The commercial software MATLAB is employed to generate the location of randomly distributed particles and the commercial software ANSYS based on the finite element method is employed to analyze moisture diffusion in containing multiple randomly distributed particles. Furthermore, this model is then employed to investigate the relationship between the volume fraction of the particles in the resin composite and the rate of moisture diffusion. The simulation results show that moisture diffusion is retarded significantly as the volume fraction of particles increases. Moreover, the adhesive with high volume fraction of particle exhibits superior moisture-resistant capability. However, excessively add particles makes inferior penetrability. Therefore, adding proper volume percentage of particle into UV-curable adhesive could be expected better using in engineering applications.","PeriodicalId":6360,"journal":{"name":"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)","volume":"167 1","pages":"79-82"},"PeriodicalIF":0.0,"publicationDate":"2011-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87059826","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Thermal analysis of extruded aluminum fin heat sink for LED cooling application LED散热用挤压铝翅片散热器的热分析
Christian Alvin, W. Chu, Ching-hung Cheng, J. Teng
Light Emitting Diode or LED now is becoming a popular lighting used at many types of applications. LED becomes more favorable to use than other types of lighting such as fluorescent or even light bulb. This is because LED can provide high lumens with low power electricity and does not contain any toxic material, such as fluorescent lights having mercury inside which is not good towards the environment. Advantages of using LED are high luminosity, more energy saving, high lifetime hours, and applicable in many applications. However, LED operating temperature should be considered. LEDs with high power, such as 10 Watts or more, can generate bright lighting, but also will have high operating temperature. This high operating temperature of LED should be lowered, since high operating temperature will lead to reductions of the luminosity and the lifetime of LED. Many cooling systems can be used to reduce the operating temperature of LED; a simple one is to use the extruded-fin heat sink. Heat sink is easy to manufacture, relatively low in cost, light in weight, and can become an adequate cooling means with good reliability. The choice of an optimal heat sink dimension depends on the power of heat source. In this work, 10-Watt LED with the 58 °C operating temperature was used. The aim for this study was to add extruded-fin heat sink to dissipate heat generated by the LED, with target temperature of LED decreased down to 50°C. Initial experiment was done to check the LED operating temperature and then ANSYS ICEPAK was used for numerical simulation; ANSYS ICEPAK is computational software for the study of thermal management of electronic devices and systems. For the present study, the numerical simulation of LED using extruded-fin as heat sink was performed. Through numerical simulation accounting for the variations in fin heights, fin thicknesses, fin pitches, and base heights, the optimal dimension of the heat sink was determined to achieve the target temperature of 50°C. Subsequently, prototype of aluminum fin heat sink was build to carry out the experiments for the purpose of validating the results obtained from numerical simulations. In the experiment, two kinds of thermal conductive pastes — a heat transfer compound and silver paste — were used to assemble the heat sink and LED. The effect of thermal conductive pastes on the overall thermal management of LED was investigated. Through the experiments, silver paste was proven to enhance the thermal conductivity, measured by the heat sink thermal resistance, reducing 0.02 °C/W compared with those using heat transfer compound. Both experimental tests and numerical simulations were done. Results obtained from the experiments and those obtained from the simulations were in good agreement, having percentage of differences less than 12%. From this study, it was shown that heat sinks with a good thermal conductive paste have proven to be an effective solution for the LED heat dissipation. Using ANSYS ICEPAK a
发光二极管或LED现在正在成为一种流行的照明,用于许多类型的应用。LED比其他类型的照明(如荧光灯甚至灯泡)更有利于使用。这是因为LED可以以低功率提供高流明,并且不含任何有毒物质,例如荧光灯中含有对环境不利的汞。使用LED的优点是亮度高,更节能,使用寿命长,适用于许多应用场合。但是,LED的工作温度应该考虑。高功率的led,如10瓦或更高,可以产生明亮的照明,但也会有很高的工作温度。应该降低LED的高工作温度,因为高工作温度会导致LED的亮度和寿命降低。许多冷却系统可以用来降低LED的工作温度;一个简单的方法是使用挤压翅片散热器。散热器易于制造,成本相对较低,重量轻,可以成为一种足够的冷却手段,可靠性好。最佳散热片尺寸的选择取决于热源的功率。在本工作中,使用的是工作温度为58℃的10瓦LED。本研究的目的是增加挤压翅片散热器来散热LED产生的热量,将LED的目标温度降低到50°C。通过初步实验验证LED工作温度,然后利用ANSYS ICEPAK软件进行数值模拟;ANSYS ICEPAK是用于研究电子设备和系统热管理的计算软件。本文对采用挤压翅片作为散热片的LED进行了数值模拟。通过数值模拟计算了翅片高度、翅片厚度、翅片间距和基底高度的变化,确定了散热器的最佳尺寸,以达到50℃的目标温度。随后,建立了铝翅片散热器样机进行了实验,验证了数值模拟的结果。在实验中,两种导热糊——传热化合物和银糊——被用来组装散热器和LED。研究了导热糊对LED整体热管理的影响。通过实验证明,银浆提高了导热系数,通过散热器热阻测量,与使用换热化合物相比,降低了0.02°C/W。进行了实验测试和数值模拟。实验结果与模拟结果吻合较好,差异百分比小于12%。研究结果表明,采用导热性好的导热膏体的散热片是解决LED散热问题的有效方法。使用ANSYS ICEPAK也已被证明能够节省电子冷却应用中热管理设计的时间和成本。
{"title":"Thermal analysis of extruded aluminum fin heat sink for LED cooling application","authors":"Christian Alvin, W. Chu, Ching-hung Cheng, J. Teng","doi":"10.1109/IMPACT.2011.6117207","DOIUrl":"https://doi.org/10.1109/IMPACT.2011.6117207","url":null,"abstract":"Light Emitting Diode or LED now is becoming a popular lighting used at many types of applications. LED becomes more favorable to use than other types of lighting such as fluorescent or even light bulb. This is because LED can provide high lumens with low power electricity and does not contain any toxic material, such as fluorescent lights having mercury inside which is not good towards the environment. Advantages of using LED are high luminosity, more energy saving, high lifetime hours, and applicable in many applications. However, LED operating temperature should be considered. LEDs with high power, such as 10 Watts or more, can generate bright lighting, but also will have high operating temperature. This high operating temperature of LED should be lowered, since high operating temperature will lead to reductions of the luminosity and the lifetime of LED. Many cooling systems can be used to reduce the operating temperature of LED; a simple one is to use the extruded-fin heat sink. Heat sink is easy to manufacture, relatively low in cost, light in weight, and can become an adequate cooling means with good reliability. The choice of an optimal heat sink dimension depends on the power of heat source. In this work, 10-Watt LED with the 58 °C operating temperature was used. The aim for this study was to add extruded-fin heat sink to dissipate heat generated by the LED, with target temperature of LED decreased down to 50°C. Initial experiment was done to check the LED operating temperature and then ANSYS ICEPAK was used for numerical simulation; ANSYS ICEPAK is computational software for the study of thermal management of electronic devices and systems. For the present study, the numerical simulation of LED using extruded-fin as heat sink was performed. Through numerical simulation accounting for the variations in fin heights, fin thicknesses, fin pitches, and base heights, the optimal dimension of the heat sink was determined to achieve the target temperature of 50°C. Subsequently, prototype of aluminum fin heat sink was build to carry out the experiments for the purpose of validating the results obtained from numerical simulations. In the experiment, two kinds of thermal conductive pastes — a heat transfer compound and silver paste — were used to assemble the heat sink and LED. The effect of thermal conductive pastes on the overall thermal management of LED was investigated. Through the experiments, silver paste was proven to enhance the thermal conductivity, measured by the heat sink thermal resistance, reducing 0.02 °C/W compared with those using heat transfer compound. Both experimental tests and numerical simulations were done. Results obtained from the experiments and those obtained from the simulations were in good agreement, having percentage of differences less than 12%. From this study, it was shown that heat sinks with a good thermal conductive paste have proven to be an effective solution for the LED heat dissipation. Using ANSYS ICEPAK a","PeriodicalId":6360,"journal":{"name":"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)","volume":"14 1","pages":"397-400"},"PeriodicalIF":0.0,"publicationDate":"2011-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87029916","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 19
Investigations of adhesion between Cu and Benzocyclobutene (BCB) polymer dielectric for 3D integration applications 三维集成应用中Cu与苯并环丁烯(BCB)聚合物介电体的粘附研究
W. C. Huang, C. Ko, S. Hu, J. Leu, K. N. Chen
In this paper, the adhesion strength between Cu metal and Benzocyclobutene (BCB) polymer dielectric was investigated and reported. The relation between the adhesion strength and thickness of metal layer and the relation between the adhesion strength and stacking order of copper and BCB polymer layer are discussed as well. Finally, the concept of an extra layer between Cu metal and BCB polymer layer to improve the adhesion strength was evaluated. The results of this research can provide important guidelines of hybrid bonding and underfill for 3D integration applications.
本文研究了铜金属与苯并环丁烯(Benzocyclobutene, BCB)聚合物介电体的粘附强度。讨论了金属层厚度与粘结强度的关系以及铜与BCB聚合物层堆积顺序与粘结强度的关系。最后,对在Cu金属和BCB聚合物层之间增加一层以提高粘接强度的概念进行了评价。研究结果可为三维集成应用的杂化键合和下填提供重要的指导。
{"title":"Investigations of adhesion between Cu and Benzocyclobutene (BCB) polymer dielectric for 3D integration applications","authors":"W. C. Huang, C. Ko, S. Hu, J. Leu, K. N. Chen","doi":"10.1109/IMPACT.2011.6117239","DOIUrl":"https://doi.org/10.1109/IMPACT.2011.6117239","url":null,"abstract":"In this paper, the adhesion strength between Cu metal and Benzocyclobutene (BCB) polymer dielectric was investigated and reported. The relation between the adhesion strength and thickness of metal layer and the relation between the adhesion strength and stacking order of copper and BCB polymer layer are discussed as well. Finally, the concept of an extra layer between Cu metal and BCB polymer layer to improve the adhesion strength was evaluated. The results of this research can provide important guidelines of hybrid bonding and underfill for 3D integration applications.","PeriodicalId":6360,"journal":{"name":"2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)","volume":"56 1","pages":"363-365"},"PeriodicalIF":0.0,"publicationDate":"2011-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83947748","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
期刊
2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1