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2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems最新文献

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Fabrication and Test of MEMS/NEMS based Polyimide Integrated Humidity, Temperature and Pressure Sensor 基于MEMS/NEMS的聚酰亚胺集成湿度、温度和压力传感器的制造和测试
H. Zeng, Z. Zhao, Haifeng Dong, Z. Fang, Peng Guo
MEMS/NEMS based integrated sensors for humidity, temperature and pressure used in environment monitoring are usually combined by separate devices for complicated technology and material compatibility. In order to lower cost, polyimide (PI) was introduced in to fabricate integrated sensors realizing IC compatible process. Different humidity electrodes have been investigated and a humidity sensor with a sensitivity of 2.375pF/RH% during 20~90%RH is fabricated. Performance in high humidity is compensated by temperature elements, which shows excellent linearity from -20degC to 100degC. Polyimide and nitride diaphragm was used to measure external pressure, which achieves a sensitivity of 1.1 mV/degC and an accuracy of 0.06 kPa.
用于环境监测的基于MEMS/NEMS的湿度、温度和压力集成传感器,由于技术复杂和材料兼容性的原因,通常由单独的器件组合而成。为了降低成本,引入聚酰亚胺(PI)制造集成传感器,实现集成电路兼容工艺。研究了不同的湿度电极,制成了在20~90%RH时灵敏度为2.375pF/RH%的湿度传感器。在高湿度下的性能由温度元件补偿,从-20°c到100°c显示出极好的线性。采用聚酰亚胺-氮化膜测量外压,灵敏度为1.1 mV/℃,精度为0.06 kPa。
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引用次数: 6
Optimal Design of a New Nanopositioner using Genetic Algorithm 基于遗传算法的新型纳米电极优化设计
Yangmin Li, Qingsong Xu
In this paper, a new parallel nanopositioner (PNP) employing a spatial compliant parallel manipulator has been proposed due to the excellent accuracy of parallel mechanisms and flexure hinges. The system is established by a proper selection of hardware and analyzed based upon the derived pseudo-rigid-body model. In view of the physical constraints imposed by both the piezoelectric actuators and flexure hinges, the PNP's reachable workspace is determined analytically, where a maximum cylinder defined as usable workspace can be inscribed. Moreover, the optimal design of the PNP with the consideration of the usable workspace size and global dexterity index simultaneously is carried out so as to make a compromise between the two separate performances by utilizing the efficient genetic algorithm. And the optimization results will be valuable in the design of a new nanopositioner
由于并联机构和柔性铰链具有优异的精度,本文提出了一种采用空间柔性并联机构的并联纳米逆位器。通过对硬件的合理选择建立了系统,并根据所建立的拟刚体模型对系统进行了分析。考虑到压电驱动器和柔性铰链所施加的物理约束,解析确定了PNP的可达工作空间,其中定义了可用工作空间的最大圆柱体。同时考虑可用工作空间大小和全局灵巧度指标,利用高效的遗传算法对PNP进行优化设计,在两者的独立性能之间做出折衷。优化结果对新型纳米离子的设计具有一定的参考价值
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引用次数: 2
Two-Phase Flow in Microchannel Heat Sink with Nearly Uniform Heat Flux Boundary Condition 近似均匀热流边界条件下微通道散热器的两相流
Man Lee, L. Cheung, Yi-Kuen Lee, Y. Zohar
A thermal microsystem, integrated with pressure and temperature microsensors, is fabricated to study convective boiling under nearly uniform heat flux boundary condition. The temperature and pressure distribution along the microchannel is measured correspondingly. The pressure increases with input power when two phase flow develops. A pressure peak appears at the location of liquid-vapor interface region. The transient temperature and pressure fluctuation is also measured. The dominant frequencies of the temperature and pressure fluctuation are the same values at the liquid-vapor interface region and this dominant frequencies increase with input power. Simultaneously, the qualitative visualizations of the evolving flow patterns have been correlated with the quantitative temperature and pressure measurements.
制作了一个集成了压力和温度微传感器的热微系统,用于研究近均匀热流密度边界条件下的对流沸腾。测量了沿微通道的温度和压力分布。当两相流发生时,压力随输入功率的增大而增大。在液-气界面区出现压力峰。还测量了瞬态温度和压力波动。温度波动和压力波动的主导频率在液汽界面区域是相同的,并且随着输入功率的增加而增加。同时,流型演变的定性可视化与温度和压力的定量测量相关联。
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引用次数: 2
Design Conceits and Testing of a Prototype Micro Thermophotovoltaic System 微型热光伏系统原型的设计构想与测试
J. Pan, Jianning Ding, Wenming Yang, Detao Li, H. Xue
The design and testing of micro thermophotovoltaic (micro-TPV) system is described in this paper. The system is made of a SiC emitter, a dielectric filter and a GaSb photovoltaic cell array. The open-circuit voltage and short-circuit current can be measured by a multimeter, and the output power can be calculated. The effect of mass flux and the distance between the PV cell and outer wall of the combustor on the output power is also analyzed. When the flow rate of hydrogen is 4.133 g/hr and the H2/O2 ratio is 1.8, the micro-TPV system is able to deliver an electrical power output of 1.355W in a micro combustor of 0.195 cm3 in volume. The open-circuit electrical voltage and short-circuit current are 1.85 V and 1.032 amp respectively. This work makes it possible for us to replace batteries with micro-TPV systems as the power of micro mechanical devices in near future
介绍了微型热光伏(micro- tpv)系统的设计与测试。该系统由SiC发射极、介电滤波器和GaSb光伏电池阵列组成。用万用表测量开路电压和短路电流,并计算输出功率。分析了质量通量和电池与燃烧室外壁的距离对输出功率的影响。当氢气流速为4.133 g/hr, H2/O2比为1.8时,微型tpv系统在0.195 cm3体积的微型燃烧室中能够提供1.355W的输出功率。开路电压为1.85 V,短路电流为1.032安培。这项工作使我们在不久的将来用微型tpv系统代替电池作为微型机械设备的动力成为可能
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引用次数: 0
A Study of the Functionalization on Multi-walled Carbon nanotubes 多壁碳纳米管的功能化研究
Chunwei Yang, Xin-guo Hu, Yong Zhang
A facile approach to the surface oxidation of multi-walled carbon nanotubes (MWCNTs) is presented using oxidation solution to decorating MWCNTs, sonication to promote this effect and increase the population density of surface oxide groups. The sonication short time for MWCNTs oxidation /functionalization is desirable for minimizing structural damage to the MWCNTs that could lead to changes in their properties. The measurement results of XPS, IR and Raman spectrum have verified that a great lot of functional groups had been decorated on MWCNTs. During the MWCNTs oxidation, the hydroxy, carbonyl and carboxy formed on the surface of MWCNTs. MWCNTs treated in the nitric and sulfuric acids had more functional groups than MWCNTs treated in hydrogen peroxide and sulfuric acids
提出了一种简便的多壁碳纳米管(MWCNTs)表面氧化的方法,使用氧化溶液修饰MWCNTs,超声促进这种效果并增加表面氧化基团的密度。超声短时间氧化/功能化是最小化MWCNTs结构损伤(可能导致其性能变化)的理想选择。XPS、IR和拉曼光谱的测量结果证实MWCNTs上修饰了大量官能团。在MWCNTs氧化过程中,在MWCNTs表面形成羟基、羰基和羧基。在硝酸和硫酸中处理的MWCNTs比在过氧化氢和硫酸中处理的MWCNTs具有更多的官能团
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引用次数: 4
Study on the Novel Nanometer Additive for Secondary Batteries 新型二次电池纳米添加剂的研究
Sen Zhang, C. Deng
This paper presents the effect of the nanometer additive on the performance of the electrodes in secondary nickel metal hydride battery. The influence of the nanometer additive on discharge storage capacity of the electrode is studied and the electrochemical property of hydride electrode is investigated. Galvanostatic tests indicate that the nanometer additive incorporated electrode exhibits better high rate discharge capability, superior charge acceptance ability and longer cycle life compared with the blank electrode. The nanometer additive greatly decreases the weight and volume of the secondary battery, and makes it better meet the requirement as power sources for electric and hybrid vehicles
研究了纳米添加剂对二次镍氢电池电极性能的影响。研究了纳米添加剂对氢化物电极放电容量的影响,并对氢化物电极的电化学性能进行了研究。恒流试验表明,与空白电极相比,纳米添加剂电极具有更好的高倍率放电能力、更强的电荷接受能力和更长的循环寿命。纳米添加剂大大降低了二次电池的重量和体积,使其更好地满足电动汽车和混合动力汽车的动力源要求
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引用次数: 0
Enhancement of Light Extraction Efficiency in OLED with Periodic Nano-Structure 周期纳米结构增强OLED光提取效率的研究
Rong-jin Yan, Qing-kang Wang
To improve the light-extraction-efficiency of organic light emitting diode (OLED), we introduced novel photonic crystal slab (PCS) structures with Taper unit cells into the interface of ITO layer and glass substrate. By optimizing the geometric parameters, we proved that the PCS with triangular lattice of Taper cells was more effective in reducing the energy of guided wave trapped in OLED than the traditional PCS structures. Light-extraction-efficiency of OLED based on this PCS increased by 95.26%. Physical mechanisms of light- extraction-efficiency enhancement in these structures are further discussed.
为了提高有机发光二极管(OLED)的光提取效率,我们在ITO层和玻璃基板的界面上引入了一种具有锥形单元胞的新型光子晶体板(PCS)结构。通过对几何参数的优化,我们证明了具有锥形单元三角形晶格的PCS结构比传统的PCS结构更有效地降低了OLED中的导波捕获能量。基于该PCS的OLED光提取效率提高了95.26%。进一步讨论了这些结构提高光萃取效率的物理机理。
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引用次数: 6
A Novel Passive Membrane Pumping Nano Fountain-Pen 一种新型被动膜泵纳米钢笔
Youngkwan Lee, Suk-Han Lee, Youn-J. Kim, Hunmo Kim
In this paper, flow control of nano fountain pen using active membrane pumping is investigated. DPN (Dip Pen Nano- Lithography) has a shortcoming in which is the need of frequent loading and unloading while coating for broadband patterning. This issue is caused by a limit in quantity of ink, which is tied on the tip surface. The control of fluid injection using active membrane pumping in chambers is the answer of the problem. The flow rates in channels with the presence of capillary force are analyzed including the cantilever deflection and the control of mass flow rates by deflection of membrane. Finally, in this paper, the membrane deflection using a nano indentation equipment has been experimentally examined.
本文研究了利用主动膜泵送技术控制纳米钢笔的流量。Dip - Pen纳米光刻技术有一个缺点,那就是在进行宽带图片化涂覆时需要频繁的加载和卸载。这个问题是由于墨量的限制引起的,墨量被束缚在墨头表面。利用主动膜泵在腔室中控制流体注入是解决这一问题的方法。分析了毛细管力作用下通道内的流量,包括悬臂挠度和膜挠度对质量流量的控制。最后,利用纳米压痕装置对膜的偏转进行了实验研究。
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引用次数: 6
Advanced Fabrication of Single Wall Carbon Nanotubes by Laser Ablation with Reduced Number of Parameters 激光烧蚀法制备单壁碳纳米管的研究
Xianfang Zhu, M.G. Gupta, G. Lu
Single wall carbon nanotubes are fabricated by a long pulse and high power Nd:YAG laser ablation from a solid composite target consisting of graphite and bimetallic catalyst at room temperature without any carrying gas flow. The results demonstrated that the technique could eliminate several processing parameters currently used for SWNT fabrication via laser ablation process. Most importantly, the new process can produce well-dispersed, straight, and clean SWNTs, rather than bundled and deformed SWNTs coated with bimetals and amorphous carbon nanoparticles. A mechanism is suggested for such an improved SWNT growth
采用长脉冲、高功率Nd:YAG激光烧蚀法制备了单壁碳纳米管,其材料为石墨和双金属催化剂组成的固体复合靶材,在室温下无任何载气流动。结果表明,该技术可以消除目前使用激光烧蚀法制造SWNT的几个工艺参数。最重要的是,新工艺可以生产出分散良好、笔直且干净的单壁碳纳米管,而不是被双金属和无定形碳纳米颗粒包裹的捆扎和变形的单壁碳纳米管。本文提出了一种改善SWNT生长的机制
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引用次数: 2
Optimized Surface Acoustic Wave-based Pressure Sensor Using Equivalent Circuit Model 基于等效电路模型的表面声波压力传感器优化
Wen Wang, Keekeun Lee, Sangsik Yang, Jungsoo Hwang, Geunyoung Kim
This paper presents an optimized design on surface acoustic wave (SAW)-based pressure sensor, which is composed of a broadband reflective delay line and a bond substrate underneath the diaphragm. Using the equivalent circuit model (ECM), the SAW device was simulated, and the effect of inter-digital transducer structure, acoustic aperture and number of finger pairs on the performance of the system was studied. To determine the geometry and configuration of the sensor, Finite Element Method (FEM) was used to calculate the diaphragm bending and stress/strain distribution. From the ECM simulation and FEM analysis, the optimal design parameters were determined, and a new 440 MHz reflective delay line on 41deg YX LiNbO3 was developed, the measured reflection coefficient S11 results in time domain shows a good agreement with simulated one, low loss, sharp reflected peaks and high dynamic separation between the peaks were observed. The SAW device was successfully applied to pressure measurement, and the experiment results approve it is working satisfactorily
本文提出了一种基于表面声波(SAW)的压力传感器的优化设计,该传感器由宽带反射延迟线和膜片下的键合基板组成。利用等效电路模型(ECM)对声表面波器件进行仿真,研究了数字间换能器结构、声孔径和指对数对系统性能的影响。为了确定传感器的几何形状和结构,采用有限元法计算膜片的弯曲和应力/应变分布。通过ECM仿真和有限元分析,确定了最优设计参数,并在41°YX LiNbO3上研制了440 MHz反射延迟线,反射系数S11在时域上的实测结果与仿真结果吻合较好,具有低损耗、反射峰尖锐、峰间动态间隔高的特点。该SAW装置成功地应用于压力测量,实验结果表明其工作效果令人满意
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引用次数: 2
期刊
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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