Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334623
Kaicheng Chang, Wen Yuan Liu
A second generation ITRI micro gyroscope design is designed, fabricated, and tested. Major improvements over the original design include using thin film metallization techniques to increase the proof mass to 9.32 times 10-7g for the 500 times 500 mum2 gyro structure, and demonstrating an integrated package with a CMOS ASIC die. The custom-built, capacitance-to-voltage converter ASIC has a calculated noise floor of 6.5times10-7 V/Hz-2 at 19 KHz, a full-scale range of 5 fF, and a target resolution of 5 aF. The gyroscope has a fundamental actuation frequency at 4.33 KHz, with a quality factor of 22.5 under atmospheric conditions
{"title":"Improved Dual-Axis Micro Gyroscope Using a Commercially Available Fabrication Processes","authors":"Kaicheng Chang, Wen Yuan Liu","doi":"10.1109/NEMS.2006.334623","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334623","url":null,"abstract":"A second generation ITRI micro gyroscope design is designed, fabricated, and tested. Major improvements over the original design include using thin film metallization techniques to increase the proof mass to 9.32 times 10-7g for the 500 times 500 mum2 gyro structure, and demonstrating an integrated package with a CMOS ASIC die. The custom-built, capacitance-to-voltage converter ASIC has a calculated noise floor of 6.5times10-7 V/Hz-2 at 19 KHz, a full-scale range of 5 fF, and a target resolution of 5 aF. The gyroscope has a fundamental actuation frequency at 4.33 KHz, with a quality factor of 22.5 under atmospheric conditions","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"10 1","pages":"66-69"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85875908","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334677
H. Chu, M. Weng, Chih-Cheng Nien, Cheng Lin, Kuan-I Hu
This study produces low-temperature poly-silicon (LTPS) film by aluminum induced crystallization (AIC) method on Corning Eagle2000 glass substrate. Through the control of different sputtering power in depositing aluminum film, five kinds of specimens with sputtering power of 100, 200, 400, 800 and 1600 Watts, respectively, are made. Crystal quality, surface morphology, roughness and film residual stress varying with aluminum film sputtering power are analyzed with XRD, Raman spectra, SEM, AFM and alpha-stepper. Results show that surface roughness increases proportional to sputtering power. More and more bulges and cracks are observed on the poly-Si thin film in SEM micrographs as the sputtering power increases. A broken poly-Si film is observed in SEM micrograph when Al sputtering power is 1600 Watts. The film stresses calculated are tensile when sputtering power are 100 and 200 W from the measurement results of alpha-stepper both before and after annealing process. However, if the sputtering power is further increased to 400 and 800 Watts, the film stresses will become compressive. This explained the reason why bulges and cracks increase with the sputtering power. The film stress cannot be calculated correctly because the film has already broken and the equation for calculating stress is no more applicable. Therefore, from the viewpoint of minimal film stress, a sputtering power of aluminum film of 200 to 400 Watts will be the optimal range in our study
{"title":"The Influence of Sputtering Power of Aluminum Film in Aluminum Induced Crystallization of Low Temperature Poly-Silicon Film","authors":"H. Chu, M. Weng, Chih-Cheng Nien, Cheng Lin, Kuan-I Hu","doi":"10.1109/NEMS.2006.334677","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334677","url":null,"abstract":"This study produces low-temperature poly-silicon (LTPS) film by aluminum induced crystallization (AIC) method on Corning Eagle2000 glass substrate. Through the control of different sputtering power in depositing aluminum film, five kinds of specimens with sputtering power of 100, 200, 400, 800 and 1600 Watts, respectively, are made. Crystal quality, surface morphology, roughness and film residual stress varying with aluminum film sputtering power are analyzed with XRD, Raman spectra, SEM, AFM and alpha-stepper. Results show that surface roughness increases proportional to sputtering power. More and more bulges and cracks are observed on the poly-Si thin film in SEM micrographs as the sputtering power increases. A broken poly-Si film is observed in SEM micrograph when Al sputtering power is 1600 Watts. The film stresses calculated are tensile when sputtering power are 100 and 200 W from the measurement results of alpha-stepper both before and after annealing process. However, if the sputtering power is further increased to 400 and 800 Watts, the film stresses will become compressive. This explained the reason why bulges and cracks increase with the sputtering power. The film stress cannot be calculated correctly because the film has already broken and the equation for calculating stress is no more applicable. Therefore, from the viewpoint of minimal film stress, a sputtering power of aluminum film of 200 to 400 Watts will be the optimal range in our study","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"10 1","pages":"1190-1193"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86001352","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334657
J. Pan, Jianning Ding, Wenming Yang, Detao Li, H. Xue
The design and testing of micro thermophotovoltaic (micro-TPV) system is described in this paper. The system is made of a SiC emitter, a dielectric filter and a GaSb photovoltaic cell array. The open-circuit voltage and short-circuit current can be measured by a multimeter, and the output power can be calculated. The effect of mass flux and the distance between the PV cell and outer wall of the combustor on the output power is also analyzed. When the flow rate of hydrogen is 4.133 g/hr and the H2/O2 ratio is 1.8, the micro-TPV system is able to deliver an electrical power output of 1.355W in a micro combustor of 0.195 cm3 in volume. The open-circuit electrical voltage and short-circuit current are 1.85 V and 1.032 amp respectively. This work makes it possible for us to replace batteries with micro-TPV systems as the power of micro mechanical devices in near future
{"title":"Design Conceits and Testing of a Prototype Micro Thermophotovoltaic System","authors":"J. Pan, Jianning Ding, Wenming Yang, Detao Li, H. Xue","doi":"10.1109/NEMS.2006.334657","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334657","url":null,"abstract":"The design and testing of micro thermophotovoltaic (micro-TPV) system is described in this paper. The system is made of a SiC emitter, a dielectric filter and a GaSb photovoltaic cell array. The open-circuit voltage and short-circuit current can be measured by a multimeter, and the output power can be calculated. The effect of mass flux and the distance between the PV cell and outer wall of the combustor on the output power is also analyzed. When the flow rate of hydrogen is 4.133 g/hr and the H2/O2 ratio is 1.8, the micro-TPV system is able to deliver an electrical power output of 1.355W in a micro combustor of 0.195 cm3 in volume. The open-circuit electrical voltage and short-circuit current are 1.85 V and 1.032 amp respectively. This work makes it possible for us to replace batteries with micro-TPV systems as the power of micro mechanical devices in near future","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"31 1","pages":"144-148"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81226033","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334624
Sen Zhang, C. Deng
This paper presents the effect of the nanometer additive on the performance of the electrodes in secondary nickel metal hydride battery. The influence of the nanometer additive on discharge storage capacity of the electrode is studied and the electrochemical property of hydride electrode is investigated. Galvanostatic tests indicate that the nanometer additive incorporated electrode exhibits better high rate discharge capability, superior charge acceptance ability and longer cycle life compared with the blank electrode. The nanometer additive greatly decreases the weight and volume of the secondary battery, and makes it better meet the requirement as power sources for electric and hybrid vehicles
{"title":"Study on the Novel Nanometer Additive for Secondary Batteries","authors":"Sen Zhang, C. Deng","doi":"10.1109/NEMS.2006.334624","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334624","url":null,"abstract":"This paper presents the effect of the nanometer additive on the performance of the electrodes in secondary nickel metal hydride battery. The influence of the nanometer additive on discharge storage capacity of the electrode is studied and the electrochemical property of hydride electrode is investigated. Galvanostatic tests indicate that the nanometer additive incorporated electrode exhibits better high rate discharge capability, superior charge acceptance ability and longer cycle life compared with the blank electrode. The nanometer additive greatly decreases the weight and volume of the secondary battery, and makes it better meet the requirement as power sources for electric and hybrid vehicles","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"40 1","pages":"70-73"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81480899","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334670
Yingchun Liang, J. Dou, Q. Bai, Shumei Wang, Mingjun Chen, Yan Zhao, S. Dong
In this study we predict the frequency modulation atomic force microscopy (FM-AFM) subatomic frequency shift images of a Si (001) surface using empirical potential molecular dynamic methods. We model carbon single-wall nanotube caped tip and Si (001) surface to investigate the tip-surface interaction. The simulation shows that the FM-AFM imaging force mainly comes from C-Si/C-C chemical covalent bonding forces; the long range nonbond van der Waals forces are slight and can be ignored
{"title":"Subatomic Imaging of Si (001) Surface by Molecular Dynamic Simulation","authors":"Yingchun Liang, J. Dou, Q. Bai, Shumei Wang, Mingjun Chen, Yan Zhao, S. Dong","doi":"10.1109/NEMS.2006.334670","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334670","url":null,"abstract":"In this study we predict the frequency modulation atomic force microscopy (FM-AFM) subatomic frequency shift images of a Si (001) surface using empirical potential molecular dynamic methods. We model carbon single-wall nanotube caped tip and Si (001) surface to investigate the tip-surface interaction. The simulation shows that the FM-AFM imaging force mainly comes from C-Si/C-C chemical covalent bonding forces; the long range nonbond van der Waals forces are slight and can be ignored","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"20 1","pages":"1156-1159"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84670101","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334599
Jian Yuan, Li Han, Yansheng Zuo, Lin-Sheng Yun
Ideally the atomic force microscope (AFM) provides three-dimensional structure of surfaces at high resolution. Nevertheless, there are some requirements for work with biological specimens which should be taken into consideration in the design of an AFM. And a key requirement is that the AFM should be capable of scanning over relatively large areas. In this paper we introduce an experimental AFM head which can scan as large as 200 mumtimes200 mum. It will be very useful for scanning biological specimens. Our design is an extension of a product NSPM 6800, which is manufactured in China. We use this experimental instrumentation to scan the surface of a calibration grating and red blood cells, and obtain the images successfully. The results show that this AFM head has the basic capability to scan large areas, as well as general biological specimens.
{"title":"An Improved AFM Head for Biological Specimen","authors":"Jian Yuan, Li Han, Yansheng Zuo, Lin-Sheng Yun","doi":"10.1109/NEMS.2006.334599","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334599","url":null,"abstract":"Ideally the atomic force microscope (AFM) provides three-dimensional structure of surfaces at high resolution. Nevertheless, there are some requirements for work with biological specimens which should be taken into consideration in the design of an AFM. And a key requirement is that the AFM should be capable of scanning over relatively large areas. In this paper we introduce an experimental AFM head which can scan as large as 200 mumtimes200 mum. It will be very useful for scanning biological specimens. Our design is an extension of a product NSPM 6800, which is manufactured in China. We use this experimental instrumentation to scan the surface of a calibration grating and red blood cells, and obtain the images successfully. The results show that this AFM head has the basic capability to scan large areas, as well as general biological specimens.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"15 1","pages":"1004-1007"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85005564","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334638
Wen Wang, Keekeun Lee, Sangsik Yang, Jungsoo Hwang, Geunyoung Kim
This paper presents an optimized design on surface acoustic wave (SAW)-based pressure sensor, which is composed of a broadband reflective delay line and a bond substrate underneath the diaphragm. Using the equivalent circuit model (ECM), the SAW device was simulated, and the effect of inter-digital transducer structure, acoustic aperture and number of finger pairs on the performance of the system was studied. To determine the geometry and configuration of the sensor, Finite Element Method (FEM) was used to calculate the diaphragm bending and stress/strain distribution. From the ECM simulation and FEM analysis, the optimal design parameters were determined, and a new 440 MHz reflective delay line on 41deg YX LiNbO3 was developed, the measured reflection coefficient S11 results in time domain shows a good agreement with simulated one, low loss, sharp reflected peaks and high dynamic separation between the peaks were observed. The SAW device was successfully applied to pressure measurement, and the experiment results approve it is working satisfactorily
{"title":"Optimized Surface Acoustic Wave-based Pressure Sensor Using Equivalent Circuit Model","authors":"Wen Wang, Keekeun Lee, Sangsik Yang, Jungsoo Hwang, Geunyoung Kim","doi":"10.1109/NEMS.2006.334638","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334638","url":null,"abstract":"This paper presents an optimized design on surface acoustic wave (SAW)-based pressure sensor, which is composed of a broadband reflective delay line and a bond substrate underneath the diaphragm. Using the equivalent circuit model (ECM), the SAW device was simulated, and the effect of inter-digital transducer structure, acoustic aperture and number of finger pairs on the performance of the system was studied. To determine the geometry and configuration of the sensor, Finite Element Method (FEM) was used to calculate the diaphragm bending and stress/strain distribution. From the ECM simulation and FEM analysis, the optimal design parameters were determined, and a new 440 MHz reflective delay line on 41deg YX LiNbO3 was developed, the measured reflection coefficient S11 results in time domain shows a good agreement with simulated one, low loss, sharp reflected peaks and high dynamic separation between the peaks were observed. The SAW device was successfully applied to pressure measurement, and the experiment results approve it is working satisfactorily","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"52 1","pages":"1092-1096"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87199128","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334840
X. Tao, Xiaobin Zhang, Junlian Wang, Jipeng Cheng, Fu Liu, Junhang Luo, Zhiqiang Luo
High yields of multi-walled carbon nanotubes are synthesized by chemical vapor deposition of acetylene on palladium nanoparticles supported on porous SiO2. HRTEM results reveal that the carbon nanotubes have novel conical inner structure. By changing the content of palladium in the catalyst, we obtained palladium nanoparticles with different diameter distribution. It was found that the apex angles of cones, the outer diameter and the length have a dependence on the diameter of the palladium nanoparticles. Due to the presence of open graphite layers, these novel carbon nanotubes have fascinating potential for energy storage, filed emission and composites
{"title":"Controllable Synthesis of CNTs Using Pd Catalyst","authors":"X. Tao, Xiaobin Zhang, Junlian Wang, Jipeng Cheng, Fu Liu, Junhang Luo, Zhiqiang Luo","doi":"10.1109/NEMS.2006.334840","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334840","url":null,"abstract":"High yields of multi-walled carbon nanotubes are synthesized by chemical vapor deposition of acetylene on palladium nanoparticles supported on porous SiO2. HRTEM results reveal that the carbon nanotubes have novel conical inner structure. By changing the content of palladium in the catalyst, we obtained palladium nanoparticles with different diameter distribution. It was found that the apex angles of cones, the outer diameter and the length have a dependence on the diameter of the palladium nanoparticles. Due to the presence of open graphite layers, these novel carbon nanotubes have fascinating potential for energy storage, filed emission and composites","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"74 1","pages":"559-562"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87085725","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334797
Xianfang Zhu, M.G. Gupta, G. Lu
Single wall carbon nanotubes are fabricated by a long pulse and high power Nd:YAG laser ablation from a solid composite target consisting of graphite and bimetallic catalyst at room temperature without any carrying gas flow. The results demonstrated that the technique could eliminate several processing parameters currently used for SWNT fabrication via laser ablation process. Most importantly, the new process can produce well-dispersed, straight, and clean SWNTs, rather than bundled and deformed SWNTs coated with bimetals and amorphous carbon nanoparticles. A mechanism is suggested for such an improved SWNT growth
{"title":"Advanced Fabrication of Single Wall Carbon Nanotubes by Laser Ablation with Reduced Number of Parameters","authors":"Xianfang Zhu, M.G. Gupta, G. Lu","doi":"10.1109/NEMS.2006.334797","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334797","url":null,"abstract":"Single wall carbon nanotubes are fabricated by a long pulse and high power Nd:YAG laser ablation from a solid composite target consisting of graphite and bimetallic catalyst at room temperature without any carrying gas flow. The results demonstrated that the technique could eliminate several processing parameters currently used for SWNT fabrication via laser ablation process. Most importantly, the new process can produce well-dispersed, straight, and clean SWNTs, rather than bundled and deformed SWNTs coated with bimetals and amorphous carbon nanoparticles. A mechanism is suggested for such an improved SWNT growth","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"35 1","pages":"450-454"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87110217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334879
Rong-jin Yan, Qing-kang Wang
To improve the light-extraction-efficiency of organic light emitting diode (OLED), we introduced novel photonic crystal slab (PCS) structures with Taper unit cells into the interface of ITO layer and glass substrate. By optimizing the geometric parameters, we proved that the PCS with triangular lattice of Taper cells was more effective in reducing the energy of guided wave trapped in OLED than the traditional PCS structures. Light-extraction-efficiency of OLED based on this PCS increased by 95.26%. Physical mechanisms of light- extraction-efficiency enhancement in these structures are further discussed.
{"title":"Enhancement of Light Extraction Efficiency in OLED with Periodic Nano-Structure","authors":"Rong-jin Yan, Qing-kang Wang","doi":"10.1109/NEMS.2006.334879","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334879","url":null,"abstract":"To improve the light-extraction-efficiency of organic light emitting diode (OLED), we introduced novel photonic crystal slab (PCS) structures with Taper unit cells into the interface of ITO layer and glass substrate. By optimizing the geometric parameters, we proved that the PCS with triangular lattice of Taper cells was more effective in reducing the energy of guided wave trapped in OLED than the traditional PCS structures. Light-extraction-efficiency of OLED based on this PCS increased by 95.26%. Physical mechanisms of light- extraction-efficiency enhancement in these structures are further discussed.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"64 1","pages":"713-716"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85743629","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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