Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334672
Huibin Zhao, Q. Ren, Yunsheng Lin, Yansheng Zuo, Li Han
A new type of bio-chemical sensor based on SPM was designed and fabricated in this paper. The bio-chemical sensor uses the SPM head as the probe part, which can convert the physical variation quantity on the micro-cantilever to electrical signals, and finally change it into image. In the experiment, the bio-chemical sensor based on SPM is used to detect two kinds of ssDNA molecules in PBS solution. By comparing the data in our experiment with that in other experiment, it can be seen that detecting unknown DNA molecules and other chemical or biological molecules in solution by this type of bio-chemical sensor is efficient and practical
{"title":"A New Type of Bio-Chemical Sensor Based on SPM","authors":"Huibin Zhao, Q. Ren, Yunsheng Lin, Yansheng Zuo, Li Han","doi":"10.1109/NEMS.2006.334672","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334672","url":null,"abstract":"A new type of bio-chemical sensor based on SPM was designed and fabricated in this paper. The bio-chemical sensor uses the SPM head as the probe part, which can convert the physical variation quantity on the micro-cantilever to electrical signals, and finally change it into image. In the experiment, the bio-chemical sensor based on SPM is used to detect two kinds of ssDNA molecules in PBS solution. By comparing the data in our experiment with that in other experiment, it can be seen that detecting unknown DNA molecules and other chemical or biological molecules in solution by this type of bio-chemical sensor is efficient and practical","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"117 1","pages":"1165-1168"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73379388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334744
D. Tang, Y. Qiao, L. Qiang, L. C. Zhao
A series of polyurethane/vinyl ester resin(PU/VER) simultaneous and gradient IPNs curing at room temperature are successfully synthesized by changing the component ratios of PU or VER in IPNs and casting the mixtures of different component ratios in a mold at various times. The dynamic mechanical analysis(DMA) detection results indicated that, the component ratios of IPNs have great effect to damping of simultaneous IPNs. The tandelta values of 70/30~90/10(wt.%) IPNs both are higher than 0.3 for a temperature range of nearly 80 degC. And the temperature ranges are further broadened by controlling the techniques of gradient IPNs by varying the time interval of coating and component sequence. The tandelta values of 70/30~80/20~90/10 gradient IPNs with 3.5h interval are higher than 0.3 for a temperature range of near 100 degC . This opens up broad possibilities for manufacture of promising noise and vibration damping materials by gradient techniques
{"title":"Preparation and Damping Property of Polyurethane/vinyl Ester Resin IPNs and Gradient IPNs","authors":"D. Tang, Y. Qiao, L. Qiang, L. C. Zhao","doi":"10.1109/NEMS.2006.334744","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334744","url":null,"abstract":"A series of polyurethane/vinyl ester resin(PU/VER) simultaneous and gradient IPNs curing at room temperature are successfully synthesized by changing the component ratios of PU or VER in IPNs and casting the mixtures of different component ratios in a mold at various times. The dynamic mechanical analysis(DMA) detection results indicated that, the component ratios of IPNs have great effect to damping of simultaneous IPNs. The tandelta values of 70/30~90/10(wt.%) IPNs both are higher than 0.3 for a temperature range of nearly 80 degC. And the temperature ranges are further broadened by controlling the techniques of gradient IPNs by varying the time interval of coating and component sequence. The tandelta values of 70/30~80/20~90/10 gradient IPNs with 3.5h interval are higher than 0.3 for a temperature range of near 100 degC . This opens up broad possibilities for manufacture of promising noise and vibration damping materials by gradient techniques","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"127 1","pages":"1339-1342"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73307143","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334910
Z. Deng, Jing Liu
Advancement of the recent micro/nano technology has stimulated the renaissance of using magnetic micro/nano particles embedded in biological tissues for the target tumor hyperthermia. As is well known, mathematical solutions of bioheat transfer involved in hyperthermia treatment are indispensable for computerized optimization of hyperthermia parameters. However, estimating the level of uncertainties associated with tissue temperature and thermal ablation area remains a major challenge. In this article, the uncertainties for the predicted temperatures of tissues due to approximate parameters were studied, based on numerical simulation of three-dimensional (3-D) quasi-steady state electromagnetic (EM) field and transient temperature response in biological tissues induced by the external EM field. Contributions of uncertainty from the tissue area permeated with micro/nano particles, the concentration and size of micro/nano particles, and the frequency and strength of the external alternating EM field were analyzed, and the uncertainty limits for temperature distributions in these cases were also estimated. The uncertainty analysis presented in this article is expected to serve as a significant guide for performing a highly efficient and also completely safe tumor hyperthermia using magnetic micro/nano particles.
{"title":"Uncertainties in the Micro/nano-Particles Induced Hyperthermia Treatment on Tumor Subject to External EM Field","authors":"Z. Deng, Jing Liu","doi":"10.1109/NEMS.2006.334910","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334910","url":null,"abstract":"Advancement of the recent micro/nano technology has stimulated the renaissance of using magnetic micro/nano particles embedded in biological tissues for the target tumor hyperthermia. As is well known, mathematical solutions of bioheat transfer involved in hyperthermia treatment are indispensable for computerized optimization of hyperthermia parameters. However, estimating the level of uncertainties associated with tissue temperature and thermal ablation area remains a major challenge. In this article, the uncertainties for the predicted temperatures of tissues due to approximate parameters were studied, based on numerical simulation of three-dimensional (3-D) quasi-steady state electromagnetic (EM) field and transient temperature response in biological tissues induced by the external EM field. Contributions of uncertainty from the tissue area permeated with micro/nano particles, the concentration and size of micro/nano particles, and the frequency and strength of the external alternating EM field were analyzed, and the uncertainty limits for temperature distributions in these cases were also estimated. The uncertainty analysis presented in this article is expected to serve as a significant guide for performing a highly efficient and also completely safe tumor hyperthermia using magnetic micro/nano particles.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"29 1","pages":"851-855"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73522586","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334683
Yung-Kang Shen, Y. Shen
This paper reports a simple and novel procedure for mass production of microlens arrays. In this paper, a microlens array master is formed by room temperature imprint lithography and thermal reflow process. Next, electroforming is carried out to fabricate the metal mold insert from the microlens array master. Finally, micro-hot embossing is used to replicate microlens arrays. In this paper, a L9 experimental matrix design based on the Taguchi method is constructed to optimize the replication quality of molded microlens arrays. The results of the statistical analysis indicated that the processing temperature is the principal parameter affecting the sag height of the molded microlens array. The optimal processing parameters are processing temperature of 150degC, embossing pressure of 5.21MPa, processing time of 90s and de-molding temperature of 70degC. The 200times200 arrays of molded microlens, with a diameter of 150mum, a pitch of 200mum and a sag height of 31.51mum have been successfully fabricated. The average surface roughness of the molded microlens array is 4.31nm
{"title":"The Novel Fabrication Method and Optimum Tooling Design Used for Microlens Arrays","authors":"Yung-Kang Shen, Y. Shen","doi":"10.1109/NEMS.2006.334683","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334683","url":null,"abstract":"This paper reports a simple and novel procedure for mass production of microlens arrays. In this paper, a microlens array master is formed by room temperature imprint lithography and thermal reflow process. Next, electroforming is carried out to fabricate the metal mold insert from the microlens array master. Finally, micro-hot embossing is used to replicate microlens arrays. In this paper, a L9 experimental matrix design based on the Taguchi method is constructed to optimize the replication quality of molded microlens arrays. The results of the statistical analysis indicated that the processing temperature is the principal parameter affecting the sag height of the molded microlens array. The optimal processing parameters are processing temperature of 150degC, embossing pressure of 5.21MPa, processing time of 90s and de-molding temperature of 70degC. The 200times200 arrays of molded microlens, with a diameter of 150mum, a pitch of 200mum and a sag height of 31.51mum have been successfully fabricated. The average surface roughness of the molded microlens array is 4.31nm","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"17 1","pages":"187-191"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74291497","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334619
H.-H. Wang, P. Yang, W. Liao, L.-J. Yang
This paper proposes a novel wafer-level packaging (WLP) method at room temperature for piezoresistive pressure sensors. We use a polydimethylsiloxane (PDMS) sheet as a candidate for replacing a Pyrex glass wafer, to seal the backside V-grooved chambers of the pressure sensor chips. PDMS is a well-known material in MEMS technology recently. It is not only cheap but also has a merit of a simple process. We also fabricated piezoresistive pressure sensors, made by the same batch, with different packaging materials of Pyrex glass and PDMS sheet in the paper, respectively. The spin-coating approach is accessed to control the thickness of PDMS by applying the silicon and Teflon disks, as the supporting substrates during the formation of PDMS sheets. The sensors packaged by the PDMS room temperature bonding herein almost have the same performance as the ones packaged by the conventional anodic bonding through the real verification of pressure testing
{"title":"A New Packaging Method for Pressure Sensors by PDMS MEMS Technology","authors":"H.-H. Wang, P. Yang, W. Liao, L.-J. Yang","doi":"10.1109/NEMS.2006.334619","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334619","url":null,"abstract":"This paper proposes a novel wafer-level packaging (WLP) method at room temperature for piezoresistive pressure sensors. We use a polydimethylsiloxane (PDMS) sheet as a candidate for replacing a Pyrex glass wafer, to seal the backside V-grooved chambers of the pressure sensor chips. PDMS is a well-known material in MEMS technology recently. It is not only cheap but also has a merit of a simple process. We also fabricated piezoresistive pressure sensors, made by the same batch, with different packaging materials of Pyrex glass and PDMS sheet in the paper, respectively. The spin-coating approach is accessed to control the thickness of PDMS by applying the silicon and Teflon disks, as the supporting substrates during the formation of PDMS sheets. The sensors packaged by the PDMS room temperature bonding herein almost have the same performance as the ones packaged by the conventional anodic bonding through the real verification of pressure testing","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"15 1","pages":"47-51"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75122200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334900
Hui Guo, Y. Wang, Sheng-mei Chen, Guobing Zhang, Haixia Zhang, Zhihong Li
Silicon carbide (SiC) is a promising material for the device operating in hash environment, such as high temperature, high pressure or erodent environment, owning to its excellent electrical, mechanical, and chemical properties. The PECVD process allows deposition of SiC at low temperature (200degC-400degC), which makes SiC has better compatibility in Post-CMOS processes. In this paper, PECVD SiC has been investigated as a chemical resistant material in MEMS systematically. SiC was utilized as a coating layer to protect micromachined polysilicon devices from erosive environment and as a wet-etch mask to pattern silicon and glass. SiC was also used to construct microstructures taking the merit of SiC's chemical stability.
{"title":"PECVD SiC as a Chemical Resistant Material in MEMS","authors":"Hui Guo, Y. Wang, Sheng-mei Chen, Guobing Zhang, Haixia Zhang, Zhihong Li","doi":"10.1109/NEMS.2006.334900","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334900","url":null,"abstract":"Silicon carbide (SiC) is a promising material for the device operating in hash environment, such as high temperature, high pressure or erodent environment, owning to its excellent electrical, mechanical, and chemical properties. The PECVD process allows deposition of SiC at low temperature (200degC-400degC), which makes SiC has better compatibility in Post-CMOS processes. In this paper, PECVD SiC has been investigated as a chemical resistant material in MEMS systematically. SiC was utilized as a coating layer to protect micromachined polysilicon devices from erosive environment and as a wet-etch mask to pattern silicon and glass. SiC was also used to construct microstructures taking the merit of SiC's chemical stability.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"148 1","pages":"805-808"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75372855","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334618
W. Jin, Hongwei Duan, Yujun Zhang, Feng-fu Li
Electrospinning is a straightforward and effective technique to produce nanofiber nonwovens. In this paper, a comb ionomer of poly(ethylene covinyl alcohol) end-capped with sulfonic acid (EVOH-g-SO 3H) was synthesized by two-step synthesis process and electrospun into nonwoven membranes. The effect of processing parameters on the fibrous and beads morphology was investigated by scanning electron microscopy (SEM). The result indicated that the morphology of EVOH-g-SO3H membrane was heavily dependent on the electrospinning process as the electrospinning voltage (v), the concentration of polymer solution (c), the surface tension of polymer solution (sigma), the solution flow-rate (upsi), and the deposition distance between the syringe needle and the collecting drum (1). A 'beads-on-string' morphology could be seen from SEM image when the solution was electrospun in DMAc/water while decreasing the surface tension is a good way towards the formation of fibers without beads. When the solution concentration reaches 35wt%, a melded twist-ribbon structure could appear. There is an optimum range of solution concentration (5.0~20.0wt%) for a stable electrospinning and nonwoven formation. A higher applied voltage could result in a higher electric charge density on the surface of polymer solution jet during the electrospinning, they cause the higher splitting to the polymer jet and result in higher density and smaller diameter of round beads, as well as they also produce the thinner diameters fibers
{"title":"Nonafiber Membrane of EVOH-Based Ionomer by Electrospinning","authors":"W. Jin, Hongwei Duan, Yujun Zhang, Feng-fu Li","doi":"10.1109/NEMS.2006.334618","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334618","url":null,"abstract":"Electrospinning is a straightforward and effective technique to produce nanofiber nonwovens. In this paper, a comb ionomer of poly(ethylene covinyl alcohol) end-capped with sulfonic acid (EVOH-g-SO 3H) was synthesized by two-step synthesis process and electrospun into nonwoven membranes. The effect of processing parameters on the fibrous and beads morphology was investigated by scanning electron microscopy (SEM). The result indicated that the morphology of EVOH-g-SO3H membrane was heavily dependent on the electrospinning process as the electrospinning voltage (v), the concentration of polymer solution (c), the surface tension of polymer solution (sigma), the solution flow-rate (upsi), and the deposition distance between the syringe needle and the collecting drum (1). A 'beads-on-string' morphology could be seen from SEM image when the solution was electrospun in DMAc/water while decreasing the surface tension is a good way towards the formation of fibers without beads. When the solution concentration reaches 35wt%, a melded twist-ribbon structure could appear. There is an optimum range of solution concentration (5.0~20.0wt%) for a stable electrospinning and nonwoven formation. A higher applied voltage could result in a higher electric charge density on the surface of polymer solution jet during the electrospinning, they cause the higher splitting to the polymer jet and result in higher density and smaller diameter of round beads, as well as they also produce the thinner diameters fibers","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"130 1","pages":"42-46"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77611297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334636
Wenli Zhou, G. Chow, W.J. Li, P. Leong
Development and preliminary characterization on the performance of a micro-bubble generator using carbon nanotubes (CNTs) as heating elements are presented. Dielectrophoretic force was used to align CNTs between fabricated micro-electrodes. The contacts between the CNTs and electrodes were fixed by patterned SiO2 thin film. Localized high temperature due to Joule-heating generated by an AC current of a few hundred muA (in general les100 Hz) in the carbon nanotubes vaporized surrounding water and generated micron sized bubbles (with diameter of 5 mum detectable under normal optical microscope). These experimental evidence indicate that exposed CNTs may function as a single nucleation site for bubble generation. The power required to generate these bubbles can be as small as 337 muW, which is with 1-2 order of magnitude smaller than that of typical metal or polysilicon based MEMS heaters. Precisely controlled micro bubble generation may find promising applications in ink-jet printing, micro-fluidic visualization, or micro-fluidic based bio-manipulation
{"title":"Carbon Nanotubes as Heating Elements for Micro-Bubble Generation","authors":"Wenli Zhou, G. Chow, W.J. Li, P. Leong","doi":"10.1109/NEMS.2006.334636","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334636","url":null,"abstract":"Development and preliminary characterization on the performance of a micro-bubble generator using carbon nanotubes (CNTs) as heating elements are presented. Dielectrophoretic force was used to align CNTs between fabricated micro-electrodes. The contacts between the CNTs and electrodes were fixed by patterned SiO2 thin film. Localized high temperature due to Joule-heating generated by an AC current of a few hundred muA (in general les100 Hz) in the carbon nanotubes vaporized surrounding water and generated micron sized bubbles (with diameter of 5 mum detectable under normal optical microscope). These experimental evidence indicate that exposed CNTs may function as a single nucleation site for bubble generation. The power required to generate these bubbles can be as small as 337 muW, which is with 1-2 order of magnitude smaller than that of typical metal or polysilicon based MEMS heaters. Precisely controlled micro bubble generation may find promising applications in ink-jet printing, micro-fluidic visualization, or micro-fluidic based bio-manipulation","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"15 1","pages":"1084-1087"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74427651","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334776
D.J. Vasquez, J. Judy
Ferromagnetic sensors and actuators have been extensively studied on the microscale and have led to the development of optical switches [Judy, JW & Muller, RS, 1997], magnetically-tunable frequency-selective surfaces [Zendejas, J, et al., 2002], magnetic assembly of out-of-plane-MEMS devices [Chen, J, et al., 2001], and low-power to zero-power magnetometers [Yang, HH, et al., 2002; Vasquez, DJ & Judy, JW, 2004]. For many devices and applications there exist advantages in reducing the size of the system. The authors of this paper are studying the benefits and limitations of decreasing the scale of magnetic actuators. We have designed, fabricated, and tested torsional magnetic actuators that consist of a 1250-nm-long, 85-nm-wide, and 30-nm-thick magnetic element that is attached to a pair of 50-nm-thick, 100-nm-wide, and 2000-nm-long torsion beams
铁磁传感器和执行器在微尺度上得到了广泛的研究，并导致了光开关的发展[Judy, JW和Muller, RS, 1997]，磁可调谐频率选择表面[Zendejas, J, et al.， 2002]，面外mems器件的磁组装[Chen, J, et al.， 2001]，以及低功率到零功率磁强计[Yang, HH, et al.， 2002;Vasquez, DJ & Judy, JW, 2004]。对于许多设备和应用来说，减小系统尺寸是有好处的。本文的作者正在研究减小磁性执行器的规模的好处和局限性。我们已经设计、制造和测试了由1250纳米长、85纳米宽和30纳米厚的磁性元件组成的扭转磁致动器，该磁力元件连接到一对50纳米厚、100纳米宽和2000纳米长的扭转梁上
{"title":"Scaling Magnetic Actuators Beyond the Single-Domain Limit","authors":"D.J. Vasquez, J. Judy","doi":"10.1109/NEMS.2006.334776","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334776","url":null,"abstract":"Ferromagnetic sensors and actuators have been extensively studied on the microscale and have led to the development of optical switches [Judy, JW & Muller, RS, 1997], magnetically-tunable frequency-selective surfaces [Zendejas, J, et al., 2002], magnetic assembly of out-of-plane-MEMS devices [Chen, J, et al., 2001], and low-power to zero-power magnetometers [Yang, HH, et al., 2002; Vasquez, DJ & Judy, JW, 2004]. For many devices and applications there exist advantages in reducing the size of the system. The authors of this paper are studying the benefits and limitations of decreasing the scale of magnetic actuators. We have designed, fabricated, and tested torsional magnetic actuators that consist of a 1250-nm-long, 85-nm-wide, and 30-nm-thick magnetic element that is attached to a pair of 50-nm-thick, 100-nm-wide, and 2000-nm-long torsion beams","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"30 1","pages":"1404-1409"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76472273","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Topology optimization method is a novel design method for MEMS actuators. In this paper, a multi-objective design method is introduced into topology optimization for MEMS actuators. Some important factors for multi-objective design of MEMS actuators are deeply researched. A multi-objective topology optimization method based on minimal structural compliance and maximal structural output displacement of MEMS actuators is proposed and the corresponding governing equation for topology optimization is established. A sensitivity analysis of adjoint method is proposed to analyze topology optimization design of multi-objective MEMS actuators. Meanwhile, GCMMA (globally convergent version of the method of moving asymptotes) algorithm is used in optimization. Two numerical examples of MEMS actuators verified the effectiveness of above theory and algorithm
{"title":"Design MEMS Actuators with Topology Optimization Method","authors":"Kongtian Zuo, Yudong Zhao, Yong-gao Xie, Liping Chen","doi":"10.1109/NEMS.2006.334820","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334820","url":null,"abstract":"Topology optimization method is a novel design method for MEMS actuators. In this paper, a multi-objective design method is introduced into topology optimization for MEMS actuators. Some important factors for multi-objective design of MEMS actuators are deeply researched. A multi-objective topology optimization method based on minimal structural compliance and maximal structural output displacement of MEMS actuators is proposed and the corresponding governing equation for topology optimization is established. A sensitivity analysis of adjoint method is proposed to analyze topology optimization design of multi-objective MEMS actuators. Meanwhile, GCMMA (globally convergent version of the method of moving asymptotes) algorithm is used in optimization. Two numerical examples of MEMS actuators verified the effectiveness of above theory and algorithm","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"42 1","pages":"1517-1522"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77339324","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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