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2011 International Symposium on Advanced Packaging Materials (APM)最新文献

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The research of relationship between the void of DBC and the temperature distribution DBC空穴与温度分布关系的研究
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105692
Xiaofei Lv, Libing Zheng, Xiangdong Kong, Pengyun Jin, Han Li
DBC (Direct bonding Copper) is the most common substrate of IGBT power module in recent years. The existence of voids between the copper and the ceramic is the main process defect. The temperature distribution is multiple because of the differences in the ratio and location of the voids. In this paper, the integration of the test and numerical simulation is used to research the temperature distribution of DBC with different ratios of voids and loads. The results show that the location of the voids between the copper and the ceramic influence the temperature distribution of DBC clearly.
DBC (Direct bonding Copper)是近年来最常用的IGBT功率模块衬底。铜与陶瓷之间存在空隙是主要的工艺缺陷。由于空洞的比例和位置的不同,温度分布是多重的。本文采用试验与数值模拟相结合的方法,研究了不同空隙比和载荷下DBC的温度分布。结果表明,铜与陶瓷之间空隙的位置对DBC的温度分布有明显的影响。
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引用次数: 2
Nano copper conductive ink for RFID application 用于RFID应用的纳米铜导电油墨
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105678
Jian Li, B. An, Jian Qin, Yiping Wu
A novel nano copper conductive ink, composed of anti-oxidation nano copper particles and chemical additives, had been successfully developed and employed for RFID application. A pattern of UHF RFID antenna was chosen to print on polyimide (PI) film by ink-jet printing, and then cured by UV light to form the copper wire. The adhesion of the nano copper ink film on PI was checked by cross cut tape test, and the results showed 100% film remained. As the RFID antennas and RF chips were packaged by anisotropic conductive adhesive to form the RFID inlays, the reading distance of the inlays can reach 3 meters. This proved that nano copper conductive ink had a potential for RFID application.
成功研制了一种新型纳米铜导电油墨,该油墨由抗氧化纳米铜颗粒和化学添加剂组成,并应用于RFID。采用喷墨打印的方法将超高频RFID天线的图案打印在聚酰亚胺(PI)薄膜上,然后用紫外光固化形成铜线。通过横切胶带测试检测纳米铜墨膜在PI上的附着力,结果显示薄膜保留率为100%。RFID天线和射频芯片采用各向异性导电胶封装形成RFID嵌体,嵌体的读取距离可达3米。这证明纳米铜导电油墨具有RFID应用的潜力。
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引用次数: 4
Effect of hygro-thermo-mechanical stress on reliability of stacked die package 湿-热-机械应力对叠片封装可靠性的影响
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105700
W. Zhu, P. Lai, Shaohua Yang
Mechanical reliability of epoxy molding compounds in plastic packages of integrated circuits (IC) is greatly affected by the compound ability to absorb moisture. In this paper, the hygro-thermal effect of a 2-layer stacked die package was investigated which emphasized on the hygroscopic stress and thermal mismatch stress. By finite element analysis (FEA), the distribution of moisture diffusion, thermo-mechanical stress, hygro-mechanical stress and hygro-thermo-mechanical stress under hygro-thermal environment were simulated and calculated. The simulation results showed that the bottom die-attach endured higher thermal stress after the moisture preconditioning under 85°C /85% RH. By simulation of hygroscopic swelling stress during reflow process, it was indicated that the critical position for the package reliability located at the corner of the bottom die and the interface between the bottom die-attach and die. Therefore, the reliability of the bottom layers is relatively low under hygro-thermal environment.
集成电路(IC)塑料封装中环氧成型化合物的吸湿性能对其机械可靠性有很大影响。本文研究了两层叠合模封装的湿热效应,重点研究了吸湿应力和热失配应力。通过有限元分析,模拟计算了湿热环境下的水分扩散、热-机械应力、热-机械应力和热-机械应力的分布。模拟结果表明,在85°C /85% RH条件下进行水分预处理后,底部模贴承受较高的热应力。通过对回流过程中吸湿膨胀应力的模拟,指出封装可靠性的关键位置位于底模的转角和底模与模具的连接处。因此,在湿热环境下,底层的可靠性相对较低。
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引用次数: 5
Analysis of reconfigurable antenna with K and Ku wave bands based on RF switch 基于射频开关的K、Ku波段可重构天线分析
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105682
Tian Wen-chao, Cao Yanrong, Wang Hongming
A MEMS (Micro-Electro-Mechanical Systems) RF (Radio Frequency) switch with the low loss and high isolation is presented. The model of a reconfigurable patch antenna with K and Ku wave bands is set up. The reconfigurable antenna has two work frequencies by changing the topology structure with the RF switch. The bandwidth is expanded from 1.16% to 7.71% by adding two parasitic patches. The resonance frequencies are 20.1GHz and 12.5GHz, respectively. The gains of K and Ku wave bands are obtained.
提出了一种低损耗、高隔离的微机电系统射频开关。建立了K和Ku波段可重构贴片天线的模型。通过射频开关改变拓扑结构,可重构天线具有两个工作频率。通过增加两个寄生补丁,将带宽从1.16%扩展到7.71%。共振频率分别为20.1GHz和12.5GHz。得到了K和Ku波段的增益。
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引用次数: 0
A new package structure with power stacked-die multi-row lead and process flow 一种新的封装结构,采用功率叠层多排引线和工艺流程
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105755
Shunan Qiu, F. Zong, Tian Jiang
SIP (System in Package), enhanced power capability and high I/O count are three technological trends of semiconductor packaging. Power Stacked-die Multi-row Lead package could synthesize these three advanced features into one single package by utilizing the stacked-die structure, Al wires and multi-row leads. The manufacturing process flow consists of twice die bonding, wire bonding, molding and lead trimming and forming processes. This paper will also analyze the potential issues of manufacturing process and propose the corresponding solutions.
SIP (System in Package)、增强功率和高I/O数是半导体封装的三大技术趋势。功率堆芯多排引线封装利用堆芯结构、铝线和多排引线,将以上三个先进特性综合到一个封装中。制造工艺流程包括两次模具粘接,焊丝粘接,成型和引线修整和成型工艺。本文还将分析制造过程中可能存在的问题,并提出相应的解决方案。
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引用次数: 0
Stress simulation for 2N gold wires and evaluation on the stitch bond shapes 2N金丝的应力模拟及缝键形状评价
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105722
Weidong Huang, D. Bai, Andy Luo
Finite Element (FE) simulation is an effective approach to investigate the thermal stress status and the reliability trend when qualifying a new packaging material going through the reliability test. However, simulation of thermal stresses in gold wires was rarely reported in previous days due to the hardness in FE model building. This study performs 3D modeling to evaluate the thermal stresses in 2N gold wires with the full package model to identify which wires to peel for process control setup. The results from this modeling will be used to verify the second bond to file the process specification of wire peel test. The FE model in this paper describes a PBGA package with 2N gold wires surrounded by mold compound and other parts of the package. Stress evaluation is done through discussing the Von Mises stress, the equivalent plastic strain and the peeling stress. TC (temperature cycle) condition is applied in the modeling. The simulation results indicate that shorter wire(s) has higher stress than longer wire(s) and shorter corner wire(s) has the highest propensity to fail in TC. Different from the other wires, the highest peeling stress on bonding interface for the shorter center wire(s) is at the wire heel location instead of the tail end of the stitch bond. The wire heel location is usually regarded as the sensitive region related with the initial crack leading to the stitch bond failure. Thus, the shorter corner and center wire(s) should be regarded as high priority to be wire peeled and filed into wire peel specification. Besides, the relationship between stress status (reliability propensity) of stitch bond and the stitch bond shape is discussed. According to the measurement data of various stitch shapes, three typical stitch bond shapes (marked as A, B and C) are proposed and modeled. The modeling data show that the shortest stitch length (shape A) has the highest stress and plastic strain in the stitch bond comparing with the other shapes, and produces the highest peeling stress at bond interface. It might imply that the shortest stitch length could cause the higher propensity leading to bond lift in stress test. It could become a guideline for wire bond process that engineers should avoid forming the short stitch length when bonding 2N gold wires.
有限元模拟是研究新型包装材料在可靠性试验中热应力状态和可靠性趋势的有效方法。然而,由于金丝在有限元模型构建中的硬度问题,以往对金丝的热应力模拟很少报道。本研究使用全封装模型进行3D建模,以评估2N金线的热应力,以确定哪些线需要剥离以进行过程控制设置。该模型的结果将用于验证第二次粘结,以提交电线剥离试验的工艺规范。本文的有限元模型描述了一种2N金线被模具化合物和封装的其他部分包围的PBGA封装。通过讨论Von Mises应力、等效塑性应变和剥离应力进行了应力评估。模型采用温度循环(TC)条件。仿真结果表明,短线比长线具有更高的应力,短角线的失效倾向最高。与其他焊丝不同的是,较短的中心焊丝在焊接界面上最大的剥离应力出现在焊丝的后跟位置,而不是焊接的尾端。钢丝后跟位置通常被认为是与初始裂纹有关的敏感区域,从而导致针接失效。因此,较短的角线和中心线应优先考虑去皮,并纳入去皮规范。此外,还讨论了针键的应力状态(可靠性倾向)与针键形状之间的关系。根据各种针型的测量数据,提出了三种典型的针型(标记为A、B、C),并建立了模型。建模数据表明,与其他形状相比,最短的针长(形状A)在针键中具有最大的应力和塑性应变,并且在键界面处产生最大的剥离应力。这可能暗示,在应力测试中,较短的针长可能导致较高的倾向,从而导致粘结提升。工程师在焊2N金线时应避免形成短针长,这可能成为焊线工艺的指导方针。
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引用次数: 4
Synthesis and low-temperature sintering of tin-doped silver nanoparticles 锡掺杂纳米银的合成与低温烧结
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105702
Yujun Zhang, Hui Yu, Liangliang Li
Ag nanoparticles have been widely used in electronic packaging due to their low-temperature sintering properties. It is important to lower the melting point of Ag nanoparticles to achieve a better electrical/thermal conduction and mechanical strength. In this paper, a large amount of Sn-doped Ag nanoparticles with a size less than 10 nm were synthesized and the EDS and XRD data showed that the Sn atoms entered the Ag lattice. The sintering properties of the nanoparticles baked at different temperatures was investigated by SEM and a larger coalescence was observed for the Sn-doped Ag nanoparticles compared to the pure Ag nanoparticles, indicating that Sn helped the sintering of the nanoparticles. TGA and DSC experiments were also carried out to study the sintering process in detail.
银纳米颗粒由于其低温烧结的特性,在电子封装中得到了广泛的应用。降低银纳米颗粒的熔点对获得更好的导电/热传导和机械强度具有重要意义。本文合成了大量尺寸小于10 nm的掺锡银纳米颗粒,EDS和XRD数据表明Sn原子进入Ag晶格。通过扫描电镜研究了不同温度下纳米颗粒的烧结性能,与纯银纳米颗粒相比,掺锡银纳米颗粒的聚结更大,表明锡有助于纳米颗粒的烧结。通过TGA和DSC实验对烧结过程进行了详细的研究。
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引用次数: 0
Processing technology of embedded thin-film resistor materials 嵌入式薄膜电阻材料的加工技术
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105671
Lifei Lai, R. Sun, T. Zhao, Xiaoliang Zeng, Shuhui Yu
It is relatively rare for us to research Embedded Thin-Film Resistor (ETFR) Materials in domestic. This paper describes the development history and present situation of the ETFR, the whole process technology is told, the urgency of domestic products is revealed, the thermal stability and microscopic characteristics of the Ni-Cr (80/20 wt.%) ETFR material that we have researched are introduced, the possible development and application is also tentatively discussed.
嵌入式薄膜电阻器(ETFR)材料的研究在国内还比较少见。本文叙述了ETFR的发展历史和现状,叙述了整个工艺技术,揭示了国内产品的迫切性,介绍了我们所研究的Ni-Cr (80/ 20wt .%) ETFR材料的热稳定性和微观特性,并对可能的开发应用进行了初步探讨。
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引用次数: 7
Evaluations of low temperature bonding using Au sub-micron particles for wafer level MEMS packaging 晶圆级MEMS封装中使用金亚微米粒子低温键合的评估
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105749
S. Ito, T. Ogashiwa, Y. Kanehira, H. Ishida, S. Shoji, J. Mizuno
This paper describes wafer level vacuum packaging with sub-micron Au particles for MEMS (micro electro mechanical systems) applications. Low temperature bonding is indispensable for relevant MEMS packaging, and use of sub-micron Au particles are suitable for hermetic seal bonding. For the fabrication of hermetically sealed wafer level packaging, a base silicon wafer and a cap glass wafer were bonded at around 200°C. Before bonding, the surface of seal rings was observed with a laser microscope to investigate the effect of surface roughness for hermeticity. After bonding, bonded wafers were dipped in the hydrofluoroether for 30 min. As a result, surface flatness of Au particles contributed to achieve hermetic sealing. Double seal rings structures were also useful to realize hermetic sealing.
本文介绍了用于MEMS(微电子机械系统)应用的亚微米金颗粒晶圆级真空封装。低温键合对于相关的MEMS封装是必不可少的,而使用亚微米的Au颗粒适合于密封键合。为了制造密封的晶圆级封装,一个基础硅晶圆和一个盖玻璃晶圆在200°C左右粘合。在胶合前,用激光显微镜观察密封环的表面,研究表面粗糙度对密封环密封性的影响。键合完成后,将键合后的晶片浸在氢氟醚中30min。因此,金颗粒的表面平整度有助于实现密封。双密封圈结构也有助于实现密封。
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引用次数: 3
The re-evaluation of mechanical properties of wire bonding 金属丝粘接力学性能的再评价
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105705
A. Jalar, M. Zulkifli, N. Othman, S. Abdullah
Wire bonding is the most popular interconnection technique that has been used in microelectronics packaging due to its maturity and cost effectiveness. The technology advances in the era of miniaturization and multifunction have urges the need for the smaller wire bond size to cope with the decrease of bond pad pitches. Ultimately, this will introduces al lot of technology challenges in the characterization and performance of wire bonding micromechanical properties. The conventional tests such as wire pull and ball shear tests provide inadequate information in respect of bonding and metallurgical response of the interconnection. This is because the evaluations of wire bond performance based on conventional tests are more into qualitative results or failure modes rather than detailed quantitative results. Furthermore, the results obtained through wire pull and ball shear tests will change and introduce a lot of variations as the ball bond diameter become smaller. In the present analysis, nanoindentation test was introduced in order to provide more adequate information about the quality of wire bond. Nanoindentation test provides the micromechanical properties in terms of hardness and reduced modulus value in the small length scale. This will facilitate the micromechanical properties measurement of the wire bond. In addition, the continuous measurement of stiffness provided from nanoindentation test realizes the qualitative results of materials such as deformation, strain hardening effect and creep behaviour. Wire bonding process was prepared using thermosonic wire bonding technology using 25 μm diameter of gold wire on the Aluminium bond pad. The nanoindentation test was conducted at various locations on the ball bond that has been cross-sectioned diagonally prior to the indentation process. To further investigate the micromechanical properties, the location of indentations was divided into two zones namely Zone 1 and Zone 2. Zone 1 is located at the area near to the intermetallic layer of Au and Al, while Zone 2 is located at deformed ball bond created from the inner chamfer of capillary. The results show that the micromechanical properties of ball bond vary throughout the location of indentations. The hardness and the reduced modulus for the indentations that located at the Zone 1 have higher average values compared to that of the indentations that located at the Zone 2. The average value of hardness and reduced modulus for the indentations at the Zone 1 are 1.011 GPa and 88.652 GPa, respectively. While the average value of hardness and reduced modulus for the indentations at the Zone 2 are 0.853 GPa and 70.652 GPa, respectively. In addition, indentation 1 of Zone 1 that located perpendicular to the effect of deformation created from the end of capillary has the highest value of hardness with value of 1.156 GPa. The value of hardness for the indentations 3 and 4 of Zone 1 has the lowest value of hardness with value of 0.928 GPa and 0.834 GPa, re
线键合是微电子封装中最常用的互连技术,由于其成熟和成本效益。微型化和多功能化时代的技术进步促使人们需要更小的线键尺寸来应对键垫间距的减小。最终,这将引入许多技术挑战,在表征和性能的线键合微机械性能。传统的试验,如拉线和球剪试验,在连接和冶金响应方面提供的信息不足。这是因为基于常规试验的钢丝粘结性能评价更多地是定性结果或失效模式,而不是详细的定量结果。此外,随着球黏结直径的减小,拉丝和球剪切试验的结果也会发生变化,产生很大的变化。在分析中引入纳米压痕测试是为了提供更充分的信息来了解焊丝结合的质量。纳米压痕测试在小长度尺度上提供了硬度和降低模量的微观力学性能。这将有利于线键微观力学性能的测量。此外,纳米压痕试验提供的连续刚度测量实现了材料变形、应变硬化效应和蠕变行为等定性结果。采用热超声焊线技术,在铝焊盘上制备了直径为25 μm的金丝焊线。纳米压痕测试是在压痕处理前对角线横截面的球键上的不同位置进行的。为了进一步研究压痕的微观力学性能,将压痕的位置划分为1区和2区。1区位于Au和Al金属间层附近区域,2区位于毛细管内倒角形成的变形球键处。结果表明,随着压痕位置的不同,球粘结剂的微观力学性能有所不同。区1的压痕硬度和降低模量的平均值高于区2的压痕。1区压痕的硬度平均值为1.011 GPa,降低模量平均值为88.652 GPa。2区压痕的硬度平均值为0.853 GPa,降低模量平均值为70.652 GPa。另外,1区压痕1位于毛细末端产生的变形效应垂直方向,硬度最高,为1.156 GPa。区1的压痕3和压痕4的硬度值最低,分别为0.928 GPa和0.834 GPa。硬度和折减模量与材料的屈服强度和扩散系数有关。因此,至少从冶金学的角度来看,纳米压痕试验的结果有助于解释球键的强化和粘合性。因此,在常规试验的基础上,采用纳米压痕试验对金属丝键合材料的力学性能进行重新评价是一种合适的方法。
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引用次数: 4
期刊
2011 International Symposium on Advanced Packaging Materials (APM)
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