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2011 International Symposium on Advanced Packaging Materials (APM)最新文献

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Static thermal resistance test and simulation analysis technology for hybrid microcircuit 混合微电路静态热阻测试及仿真分析技术
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105738
Bin Zhou, Xueli Qi
The miniaturization of packaging volume for hybrid microcircuit and the increasing of dissipated power for chip make its junction case thermal resistance parameters become the focus of people's study and attention. The thermal resistance sample was designed based on a new embedded copper enhance case and static measurement was used, transient temperature response curve of internal die was showed by testing, thermal resistance — heat capacity network model was obtained through numerical deconvolution, the thermal resistance of internal structures were analyzed, which was compared with the theory calculation result of 45° method, and the effect of each layer structure on overall junction case thermal resistance was analyzed. In addition, heat dissipation performance was studied by comparative analysis between new case and original cold rolled steel case. Finally, temperature distribution and junction case thermal resistance of new hybrid circuit module were studied by finite element simulation. The results showed that the thermal resistance value of new embedded copper packaging case decreased about 50% in contrast to cold rolled steel case. Decreasing overall internal resistance of microcircuit need improves the heat dissipation performance of case, meanwhile, the effect of each layer structure on whole internal thermal resistance should be decreased as much as possible.
混合微电路封装体积的小型化和芯片耗散功率的增大,使其结壳热阻参数成为人们研究和关注的焦点。基于一种新型嵌入式铜增强盒设计了热阻样品,并采用静态测量方法,通过测试得到了内模的瞬态温度响应曲线,热阻-通过数值反褶积得到热容量网络模型,分析了内部结构的热阻,并与45°法的理论计算结果进行了比较,分析了各层结构对整体结壳热阻的影响。另外,通过对比分析新壳体与原冷轧钢板壳体的散热性能。最后,通过有限元仿真研究了新型混合电路模块的温度分布和结壳热阻。结果表明,新型预埋铜包装箱的热阻值比冷轧钢包装箱降低了50%左右。降低微电路的整体内阻需要提高机箱的散热性能,同时应尽量降低各层结构对整体内阻的影响。
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引用次数: 3
Low alpha green compound development for CMOS 90 LQFP automotive product CMOS 90 LQFP汽车产品低α绿色化合物开发
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105675
Jinmei Liu, Yuan Yuan, Junhua Luo, Jinzhong Yao
CMOS 90 wafers had been applied to BGA (Ball Grid Array) packages for many years. However, the application to lead package is not much. This paper introduced one application for CMOS 90 wafers to LQFP (Low profile Quad Flat Package). Simultaneously, it is for automotive application and need meet AEC Grade 1 reliability requirements [1]. Low alpha green compound is required for this package to reduce the SER (soft error rate) for electrical robustness. The package is 64 lead LQFP and silver is ring plated for the lead tips. At the beginning, the lead tip delamination was observed after TC (Temperature Cycle) through cross section analysis and SEM check. Pre mold plasma evaluation with Ar/H2 was also tried, but it couldn't remove the delamination. Then mechanical simulation was performed and confirmed that stresses are focused on the tips of the lead which will greatly affect the EMC adhesion. Finally, the compound was optimized by using the high adhesion type of coupling agent to improve the compound adhesion with silver and the lead tip delamination was successfully removed. As a result, the CMOS 90 LQFP package achieved the AEC Grade 1 reliability requirements and passed qualification for production.
CMOS 90晶圆已应用于BGA(球栅阵列)封装多年。然而,应用于铅封装的并不多。本文介绍了CMOS 90晶圆在LQFP (Low profile Quad Flat Package)中的一种应用。同时,它是汽车应用,需要满足AEC 1级可靠性要求[1]。该封装需要低α绿色化合物来降低SER(软错误率),以实现电稳健性。该包装是64铅LQFP和银是环镀铅尖端。首先,通过截面分析和SEM检查,在TC (Temperature Cycle)后观察到铅尖的分层现象。还尝试了用Ar/H2对模前血浆进行评估,但无法消除分层。然后进行力学模拟,证实应力集中在引线尖端,这对电磁兼容附着力有很大影响。最后,采用高粘附型偶联剂对复合材料进行了优化,提高了复合材料与银的粘附性,成功地去除了铅尖的分层现象。因此,CMOS 90 LQFP封装达到了AEC 1级可靠性要求,并通过了生产资格。
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引用次数: 0
Static analysis of a large-displacement low-voltage micro actuator 大位移低压微动器的静力学分析
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105691
Tian Wen-chao, Wang Hongming
The large-displacement, low-voltage and fast response are the research direction of the micro actuator. The micro actuator of the electrostatic transverse loading exist problems of the oversized voltage or undersized displacement. The model of a large-displacement low-voltage micro actuator is presented based on the principle of the vertically-horizontally bending. The elastic force is transformed from the restoring force to the driving force. The deflection equation of the micro beam is derived. The simulation shows that the displacement is as big as 145μm; the driving voltage is as low as 5V. The displacement and driving voltage are superior to the current micro actuator performance.
大位移、低电压、快速响应是微作动器的研究方向。静电横向加载微致动器存在电压过大或位移过小的问题。基于纵横弯曲原理,建立了大位移低压微动器的模型。弹性力由恢复力转化为驱动力。推导了微梁的挠度方程。仿真结果表明,位移可达145μm;驱动电压低至5V。位移和驱动电压均优于当前微动器的性能。
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引用次数: 0
Investigations of fluxless flip-chip bonding using vacuum ultraviolet and formic acid vapor surface treatment 真空紫外和甲酸蒸气表面处理无焊剂倒装片键合的研究
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105704
N. Unami, H. Noma, K. Sakuma, A. Shigetou, S. Shoji, J. Mizuno
We studied the effects of surface treatment using vacuum ultraviolet (VUV) and formic acid vapor for SnCu-Au flip-chip bonding. Sn-rich solder bumps are widely used for flip-chip interconnections because of low melting temperature and high mechanical strength. For fine pitch interconnections, surface modification is needed before the bonding process. X-ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES) were used to investigate Sn surfaces. The results showed how the VUV/O3 surface treatment removes the carbon-based organic contaminants from the Sn surfaces and the formic acid treatment reduces the metal oxides of Sn. Combination of VUV/O3 and formic acid treatments improved shear strength of a bonded sample. The average shear strength of each bump with VUV/O3 and/or formic acid treatment is about twice that of a bump with no treatment.
研究了真空紫外(VUV)和甲酸蒸气表面处理对SnCu-Au倒装片键合的影响。富锡焊点因其熔点温度低、机械强度高而广泛应用于倒装芯片互连。对于小间距互连,需要在粘合前进行表面改性。利用x射线光电子能谱(XPS)和俄歇电子能谱(AES)对锡表面进行了研究。结果表明,VUV/O3表面处理可以去除锡表面的碳基有机污染物,甲酸处理可以减少锡的金属氧化物。VUV/O3和甲酸处理的组合提高了粘合样品的剪切强度。VUV/O3和/或甲酸处理后,每个凸起的平均抗剪强度约为未处理凸起的两倍。
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引用次数: 4
Shear creep behavior of Sn-3Ag-0.5Cu solder bumps in ball grid array Sn-3Ag-0.5Cu钎料凸点在球栅阵列中的剪切蠕变行为
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105711
B. An, G. Gu, Wenfei Zhang, Yiping Wu
A precise creep tester was established to in situ measure the micro strain of the solder under different temperatures and certain loads. The ball grid array samples with the diameter of 0.76 mm Sn-3Ag-0.5Cu (SAC305) solder bumps were tested under the shear strength ranged from 7 MPa up to 14 MPa and the heating temperatures from 24°C up to 100°C. Creep constitutive equation of the steady-state creep, together with its stress exponent n, creep activation energy Q and structure constant A were determined by employing the power law creep. The coarsening Ag3Sn particles were observed with the temperature rising up under a certain load.
建立了精密蠕变试验装置,用于现场测量不同温度和一定载荷下焊料的微应变。对直径为0.76 mm的Sn-3Ag-0.5Cu (SAC305)焊点球栅阵列样品在7 ~ 14 MPa的剪切强度范围和24 ~ 100℃的加热温度下进行了测试。采用幂律蠕变法确定了稳态蠕变的蠕变本构方程及其应力指数n、蠕变活化能Q和结构常数A。在一定载荷下,随着温度的升高,Ag3Sn颗粒逐渐粗化。
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引用次数: 2
An optical glucose biosensor fabricated by encapsulating glucose oxidase in silica gel via sol-gel method 用溶胶-凝胶法将葡萄糖氧化酶包封在硅胶中制成光学葡萄糖生物传感器
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105687
Shuxian Chen, Z. Xiong, Helan Ye, Xiaopeng Dong
An optical glucose biosensor was fabricated by encapsulating glucose oxidase in TEOS-derived gel film along with Ru(bpy)3Cl2 as an luminescent oxygen transducer, for determining the concentration of glucose in the blood and urine samples. When the oxidation reaction of glucose by glucose oxidase occurred, an increase in the fluorescence intensity of Ru(bpy)3Cl2 was observed due to the oxygen consumption. A good response performance to glucose was exhibited for the biosensor with a wide linear range from 2.0 to 18.0mM, R=0.997. The detection limit of the biosensor was estimated to be 0.368mM, with response time < 50s. There was no apparent interference for the biosensor with fructose, urea and ascorbic acid. In addition, the enzymatic activity and long-term stability were also discussed in details.
将葡萄糖氧化酶与Ru(bpy)3Cl2作为发光氧传感器包封在teos衍生的凝胶膜中,制成光学葡萄糖生物传感器,用于测定血液和尿液样品中的葡萄糖浓度。葡萄糖氧化酶氧化葡萄糖时,Ru(bpy)3Cl2的荧光强度因耗氧而增加。该传感器对葡萄糖具有良好的响应性能,线性范围为2.0 ~ 18.0mM, R=0.997。估计该生物传感器的检出限为0.368mM,响应时间< 50s。果糖、尿素和抗坏血酸对生物传感器无明显干扰。此外,还详细讨论了其酶活性和长期稳定性。
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引用次数: 1
An investigation of the influence of intermetallic compounds on compressivecreep of SAC305/copper solder joints by modeling 通过模拟研究了金属间化合物对SAC305/铜焊点压缩蠕变的影响
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105726
Zhiwen Chen, B. An, Yiping Wu, Changqing Liu, R. Parkin
The compressive creep deformation of SAC305/copper solder joints is tested at 12.739MPa and different temperatures ranging from 343K to 463K. The experimental results were analyzedby curve fitting with time hardening model incorporated in Abaqus™. The influence of intermetallic compounds on compressive creep deformation was also studied by modeling with the parameters of time hardening model which were derived from curve fitting. The modeling results show that deformability of the solders descends sharply at all temperatures, from 343K to 463K, as the volume ratio of intermetallic compounds layer increases. But the distribution of deformation is much more homogeneous, and the deformability of solders becomes similar at different temperatures when the ratio of IMCs is relatively higher.
对SAC305/铜焊点在12.739MPa和343K ~ 463K不同温度下的压缩蠕变变形进行了试验。采用Abaqus™软件中的时间硬化模型对实验结果进行曲线拟合分析。利用曲线拟合得到的时间硬化模型参数,研究了金属间化合物对压缩蠕变变形的影响。模拟结果表明,随着金属间化合物层体积比的增大,钎料的变形能力在343K ~ 463K范围内急剧下降。当IMCs含量较高时,钎料的变形分布更为均匀,且在不同温度下,钎料的变形能力趋于相似。
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引用次数: 1
Characteristics of a new non-rosin, lead-free solder paste activity system 一种新型无松香、无铅锡膏活性体系的特点
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105710
Cuiping Wang, Jian Wang, Juan Wang, Liang Chen, Xingjun Liu
In this work, an activator system used for no-rosin lead-free solder paste was prepared by compounding with 5-Sulposalicylic acid dehydrate and an organic which restrains the over-quick release of the activator. The composition of the active system was studied by thermal gravimetric analysis. Additional, characterizations of the solder paste with various formula such as viscosity, wettability and shelf life have been evaluated. The solder paste performs the best wettability, the lowest residue, and improved shelf life when the weight percentage of 5-Sulposalicylic acid dehydrate to activity control agent is 20 to 47 in the activity system,.
本文采用5-磺苯杨酸脱水剂与抑制活化剂过快释放的有机化合物复配,制备了无松香无铅锡膏用活化剂体系。通过热重分析研究了活性体系的组成。此外,还对不同配方的锡膏的特性,如粘度、润湿性和保质期进行了评估。当活性体系中5-磺苯杨酸脱水与活性控制剂的质量百分比为20 ~ 47时,锡膏的润湿性最佳,残留最少,保质期延长。
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引用次数: 0
Geometrical size effect on interfacial diffusion of solder joint 几何尺寸对焊点界面扩散的影响
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105708
Xiaomei Sun, F. Sun, Yang Liu
In this study, two kinds of microscale solder joints, Sn-0.3Cu/Cu and Sn-0.5Cu/Cu, were studied. The element diffusion behavior at the soldering interface was investigated as the bulk solder size various from 5μm to 100μm during HTS (High Temperature Storage) aging. Experimental results indicated that the size and shape of solder joints have a significant effect on the element concentrations at the interface and the growth rate of interfacial IMC. With the decrease of the geometrical size of the bulk solder in Sn-Cu/Cu microscale solder joint, the concentration of interface element changed obviously until the bulk solder have been exhausted. Cu concentration in the solder near interface decrease when the volume of bulk solder increased. Therefore, at the the microscale concentration distribution of diffusion elements were influenced by the geometric size of microscale solder joints, which should be considered in reliability design of microscale solder joints.
本研究对Sn-0.3Cu/Cu和Sn-0.5Cu/Cu两种微尺度焊点进行了研究。在HTS(高温储存)时效过程中,研究了钎料尺寸在5μm ~ 100μm范围内的扩散行为。实验结果表明,焊点的尺寸和形状对界面元素浓度和界面IMC的生长速率有显著影响。随着Sn-Cu/Cu微尺度焊点钎料几何尺寸的减小,界面元素浓度发生明显变化,直至钎料耗尽。随着钎料体积的增大,界面附近钎料中的Cu浓度降低。因此,在微尺度下,扩散元素的浓度分布受到微尺度焊点几何尺寸的影响,在微尺度焊点可靠性设计中应予以考虑。
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引用次数: 2
Electromagnetic induced heating for rapid thermal cycling of single SnAgCu solder joint in double substrates 双衬底单SnAgCu焊点快速热循环的电磁感应加热
Pub Date : 2011-12-19 DOI: 10.1109/ISAPM.2011.6105712
Jibing Chen, B. An, Cong Li, Wei Guo, Yiping Wu
The thermal fatigue behavior of the solder joint treated by electromagnetic induced heating is investigated in the present study. The microstructures and compositions of solder joints were observed and analyzed by scanning electron microscopy (SEM) and energy dispersive X-ray system (EDXS) respectively. An approach to rapid thermal cycles by high-frequency electromagnetic induction heating was also presented in terms of numerical simulation. It was found that rapid thermal cycle has an evident influence on the microstructure and IMC between SAC305 solder and Cu substrate. The results showed that there is a rimous cracks phenomenon in the microstructure of the solder balls after rapid thermal cycle. The results indicate that this method by local induction heating is feasible to investigate the thermal fatigue behaviors of solder joint. This method can also effectively improve the reliability of the electronic packaging devices.
本文研究了经电磁感应加热处理的焊点的热疲劳行为。采用扫描电子显微镜(SEM)和能量色散x射线系统(EDXS)分别对焊点的组织和成分进行了观察和分析。提出了高频电磁感应加热快速热循环的数值模拟方法。研究发现,快速热循环对SAC305钎料与Cu衬底之间的显微组织和IMC有明显的影响。结果表明:快速热循环后,钎料球的显微组织出现了明显的裂纹现象。结果表明,采用局部感应加热的方法研究焊点的热疲劳行为是可行的。该方法还可以有效地提高电子封装器件的可靠性。
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引用次数: 10
期刊
2011 International Symposium on Advanced Packaging Materials (APM)
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