Pub Date : 2016-08-01DOI: 10.1109/NANO.2016.7751303
Akio Higo Member, C. Thomas, T. Kiba, J. Takayama, I. Yamashita, A. Murayama, S. Samukawa
Quantum dots optoelectronic devices such as laser diodes, light emitting diodes (LED), high-speed modulators, semiconductor optical amplifiers are much attention because of their low power consumption and temperature stability. We have developed a defect-less top-down dry process for 15-nm in-diameter and 8-nm in thickness GaAs quantum nanodisks (QNDs) LEDs by a bio-template, neutral beam etching and asymmetric AlGaAs/GaAs regrown by metalorganic vapor phase epitaxy (MOVPE). To operate at room temperature, different aluminum contents barrier matrix were used for deep band energy offset between GaAs QNDs and AlGaAs barriers. Their temperature dependence of optical properties measured by electroluminescence (E-L) characteristics. We confirmed that energies and the transient behavior of the E-L characteristics as various temperature are strongly affected by the band offset energies, therefore, QND LEDs with different aluminum contents barriers has successfully operated by top-down fusion dry process at room temperature.
{"title":"The effect of asymmetric barriers of GaAs quantum nanodisks light emitting diode","authors":"Akio Higo Member, C. Thomas, T. Kiba, J. Takayama, I. Yamashita, A. Murayama, S. Samukawa","doi":"10.1109/NANO.2016.7751303","DOIUrl":"https://doi.org/10.1109/NANO.2016.7751303","url":null,"abstract":"Quantum dots optoelectronic devices such as laser diodes, light emitting diodes (LED), high-speed modulators, semiconductor optical amplifiers are much attention because of their low power consumption and temperature stability. We have developed a defect-less top-down dry process for 15-nm in-diameter and 8-nm in thickness GaAs quantum nanodisks (QNDs) LEDs by a bio-template, neutral beam etching and asymmetric AlGaAs/GaAs regrown by metalorganic vapor phase epitaxy (MOVPE). To operate at room temperature, different aluminum contents barrier matrix were used for deep band energy offset between GaAs QNDs and AlGaAs barriers. Their temperature dependence of optical properties measured by electroluminescence (E-L) characteristics. We confirmed that energies and the transient behavior of the E-L characteristics as various temperature are strongly affected by the band offset energies, therefore, QND LEDs with different aluminum contents barriers has successfully operated by top-down fusion dry process at room temperature.","PeriodicalId":6646,"journal":{"name":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","volume":"90 1","pages":"45-46"},"PeriodicalIF":0.0,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84578666","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-08-01DOI: 10.1109/NANO.2016.7751344
Y. L. Yaphary, Shuhuan Hu, Denvid Lau, Raymond H. W. Lam
Improvements on functions of construction materials through modifications of material properties from the nano-scale are major concerns in modern civil buildings and infrastructures nowadays. Portland cement (PC) hydrates are the massively applied construction materials, whose new usages have caught the continuously growing interests of current researchers. Though mechanically very robust with feasibility for massive application, PC hydrates have relatively lower piezoelectricity, meaning that constructional mechanical characteristics, such as vibrations and crack locations, cannot be easily detected by the associated piezoelectric signals. The limited piezoelectricity and the difficulty of embedding sensor networks over the entire civil structures induce great technical hurdles for the functional building material applications. Here, we report a novel technique for improving the piezoelectricity of PC hydrates, by applying the polarization process throughout curing of hydrated PC under the influence of an electric field. This technique is based on regulating displacements and reorientations of molecules under the nano-scale interactions between different charged elements consisted in PC hydrates. Results from AFM investigation show the polarized PC hydrates have the relatively more aligned morphology orientation at nano-scale. PC hydrates cured under an electric field has shown with an improved sensitivity of the generated electrical potential under mechanical loading. Our results indicate that the polarized PC hydrates shows improved piezoelectric properties, enabling potential civil applications of the polarized PC hydrates such as structural health monitoring and mechanical energy recycling.
{"title":"Piezoelectricity of Portland cement hydrates cured under the influence of electric field","authors":"Y. L. Yaphary, Shuhuan Hu, Denvid Lau, Raymond H. W. Lam","doi":"10.1109/NANO.2016.7751344","DOIUrl":"https://doi.org/10.1109/NANO.2016.7751344","url":null,"abstract":"Improvements on functions of construction materials through modifications of material properties from the nano-scale are major concerns in modern civil buildings and infrastructures nowadays. Portland cement (PC) hydrates are the massively applied construction materials, whose new usages have caught the continuously growing interests of current researchers. Though mechanically very robust with feasibility for massive application, PC hydrates have relatively lower piezoelectricity, meaning that constructional mechanical characteristics, such as vibrations and crack locations, cannot be easily detected by the associated piezoelectric signals. The limited piezoelectricity and the difficulty of embedding sensor networks over the entire civil structures induce great technical hurdles for the functional building material applications. Here, we report a novel technique for improving the piezoelectricity of PC hydrates, by applying the polarization process throughout curing of hydrated PC under the influence of an electric field. This technique is based on regulating displacements and reorientations of molecules under the nano-scale interactions between different charged elements consisted in PC hydrates. Results from AFM investigation show the polarized PC hydrates have the relatively more aligned morphology orientation at nano-scale. PC hydrates cured under an electric field has shown with an improved sensitivity of the generated electrical potential under mechanical loading. Our results indicate that the polarized PC hydrates shows improved piezoelectric properties, enabling potential civil applications of the polarized PC hydrates such as structural health monitoring and mechanical energy recycling.","PeriodicalId":6646,"journal":{"name":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","volume":"32 1","pages":"911-914"},"PeriodicalIF":0.0,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77093963","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-08-01DOI: 10.1109/NANO.2016.7751498
R. Nishanthi, Perumal Palani
The present investigation reports a facile method for the biosynthesis of gold nanoparticles from the rind extract of Garcinia mangostana, a medicinal plant which acts as a reducing agent. It was observed that the aqueous gold ions, when exposed to the rind extract of G.mangostana were reduced in the solution, thereby leading to the formation of gold nanoparticles (GMREGNP). The structural characterization was performed using HR-TEM; the micrographs showed the well dispersed spherical nanoparticles ranged from 25 - 60 nm. The SAED diffraction rings suggested that the GMREGNP were polycrystalline in nature. The peaks in the XRD were in good agreement with the standard values of the spherical form of metallic gold and no peaks of impurities were detected. From the Fourier Transformed-Infrared Spectra (FT-IR) of the rind extract and phytosynthesised gold nanoparticles, the possible functional groups involved in the gold ions reduction and capping of the gold nanoparticles were identified. The particle size (DLS) and the electro kinetic measurement (zeta potential) of the GMREGNP was also evaluated. The nanoparticles were assessed for their increased antimicrobial activity with various antibiotics against potential human pathogens. Further the fabrication of the bio-inspired GMREGNP with the drug and the changes on the characteristics of the nanoparticles were studied using various techniques like UV-VIS spectroscopy and FT-IR. The minimal inhibitory concentration (MIC) of the GMREGNP and drug fabricated GMREGNP has been recorded. The topological changes stamped by the nanoparticles on the surface of the bacteria have been recorded by SEM images. Experiments are underway to prove the possible mechanism for the synergistic effect of the nanoparticles with antibiotics.
{"title":"Green synthesis of gold nanoparticles from the rind extract of Garcinia mangostana and its synergistic effect with antibiotics against human pathogenic bacteria","authors":"R. Nishanthi, Perumal Palani","doi":"10.1109/NANO.2016.7751498","DOIUrl":"https://doi.org/10.1109/NANO.2016.7751498","url":null,"abstract":"The present investigation reports a facile method for the biosynthesis of gold nanoparticles from the rind extract of Garcinia mangostana, a medicinal plant which acts as a reducing agent. It was observed that the aqueous gold ions, when exposed to the rind extract of G.mangostana were reduced in the solution, thereby leading to the formation of gold nanoparticles (GMREGNP). The structural characterization was performed using HR-TEM; the micrographs showed the well dispersed spherical nanoparticles ranged from 25 - 60 nm. The SAED diffraction rings suggested that the GMREGNP were polycrystalline in nature. The peaks in the XRD were in good agreement with the standard values of the spherical form of metallic gold and no peaks of impurities were detected. From the Fourier Transformed-Infrared Spectra (FT-IR) of the rind extract and phytosynthesised gold nanoparticles, the possible functional groups involved in the gold ions reduction and capping of the gold nanoparticles were identified. The particle size (DLS) and the electro kinetic measurement (zeta potential) of the GMREGNP was also evaluated. The nanoparticles were assessed for their increased antimicrobial activity with various antibiotics against potential human pathogens. Further the fabrication of the bio-inspired GMREGNP with the drug and the changes on the characteristics of the nanoparticles were studied using various techniques like UV-VIS spectroscopy and FT-IR. The minimal inhibitory concentration (MIC) of the GMREGNP and drug fabricated GMREGNP has been recorded. The topological changes stamped by the nanoparticles on the surface of the bacteria have been recorded by SEM images. Experiments are underway to prove the possible mechanism for the synergistic effect of the nanoparticles with antibiotics.","PeriodicalId":6646,"journal":{"name":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","volume":"350 1","pages":"431-434"},"PeriodicalIF":0.0,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78901889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-08-01DOI: 10.1109/NANO.2016.7751379
S. M. Sultan, S. H. Pu, S. Fishlock, L. H. Wah, H. Chong, J. McBride
The electrical characteristics of nanocrystalline graphite (NCG) on p-type Si Schottky diodes were investigated. The NCG/p-Si Schottky diodes were fabricated on a 6-inch wafer by metal-free catalyst plasma enhanced chemical vapour deposition (PECVD) and photolithography pattern transfer method. The NCG film consists of nanoscale grains of ~35 nm in size. The NCG/p-Si Schottky diode shows rectifying behavior with Schottky barrier height of 0.58 eV. This result in addition to nanosized grains can be exploited towards various chemical and gas sensor applications.
{"title":"Electrical behavior of nanocrystalline graphite/p-Si Schottky diode","authors":"S. M. Sultan, S. H. Pu, S. Fishlock, L. H. Wah, H. Chong, J. McBride","doi":"10.1109/NANO.2016.7751379","DOIUrl":"https://doi.org/10.1109/NANO.2016.7751379","url":null,"abstract":"The electrical characteristics of nanocrystalline graphite (NCG) on p-type Si Schottky diodes were investigated. The NCG/p-Si Schottky diodes were fabricated on a 6-inch wafer by metal-free catalyst plasma enhanced chemical vapour deposition (PECVD) and photolithography pattern transfer method. The NCG film consists of nanoscale grains of ~35 nm in size. The NCG/p-Si Schottky diode shows rectifying behavior with Schottky barrier height of 0.58 eV. This result in addition to nanosized grains can be exploited towards various chemical and gas sensor applications.","PeriodicalId":6646,"journal":{"name":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","volume":"370 1","pages":"307-310"},"PeriodicalIF":0.0,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76430901","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-08-01DOI: 10.1109/NANO.2016.7751455
Y. Itoh, T. Kawashima, K. Washio
Control and mechanism analysis of Ge quantum dot (QD) formation on Si(100) by using two carbon (C) mediated methods, c(4×4) surface reconstruction (SR) and solid-phase epitaxy (SPE), was demonstrated for the first time. Si surface was reconstructed via the formation of C-Si bonds in advance of Ge deposition in SR method, QDs grew in Volmer-Wever mode due to the preferential nucleation on uncarbonized Si surface. Ge QDs were formed by annealing an amorphous Ge/C/Si heterostructure in SPE method, QDs grew in Stranski-Krastanov mode due to the incorporation of C-Ge bonds. Investigations, in this work, clarified that both c(4×4) surface reconstruction and strain relief played important roles through the analyses of surface morphology and C binding states.
{"title":"Control of VW and SK growth modes in Ge quantum dot formation on Si(100) via carbon mediation","authors":"Y. Itoh, T. Kawashima, K. Washio","doi":"10.1109/NANO.2016.7751455","DOIUrl":"https://doi.org/10.1109/NANO.2016.7751455","url":null,"abstract":"Control and mechanism analysis of Ge quantum dot (QD) formation on Si(100) by using two carbon (C) mediated methods, c(4×4) surface reconstruction (SR) and solid-phase epitaxy (SPE), was demonstrated for the first time. Si surface was reconstructed via the formation of C-Si bonds in advance of Ge deposition in SR method, QDs grew in Volmer-Wever mode due to the preferential nucleation on uncarbonized Si surface. Ge QDs were formed by annealing an amorphous Ge/C/Si heterostructure in SPE method, QDs grew in Stranski-Krastanov mode due to the incorporation of C-Ge bonds. Investigations, in this work, clarified that both c(4×4) surface reconstruction and strain relief played important roles through the analyses of surface morphology and C binding states.","PeriodicalId":6646,"journal":{"name":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","volume":"232 1","pages":"694-696"},"PeriodicalIF":0.0,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76564296","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-08-01DOI: 10.1109/NANO.2016.7751502
Y. Hayashi, Kyosuke Fujita, Ichihito Narira, M. Inoue, H. Takizawa
A process of silver nanowire transparent conductive films has been developed to synthesize by organic needle-shaped precursor painting reduction. Needle-shaped nanowire precursors are simply synthesized by ultrasound irradiation of silver oxide and carboxylic acid as starting materials. The aspect ratio of the needle-shaped precursors is chenged by condition of ultrasound irradiation. Silver nanowires can be easily obtained by reducing these needle-shaped precursors with hydrazine gas. The morphology of the resulting nanowires is different from that of typical nanowires that have been reported. The small nanoparticles are connected to form polycrystal nanowire. The polycrystal silver nanowire is considered to increase the transparency of the film because of its rough morphology. This method can synthesize silver nanowires and fabricate the transparent conductive film simultaneously, in low cost and high throughput.
{"title":"Synthesis and optimization of silver nanowire transparent conductive film by organic needle-shaped precursor painting reduction method","authors":"Y. Hayashi, Kyosuke Fujita, Ichihito Narira, M. Inoue, H. Takizawa","doi":"10.1109/NANO.2016.7751502","DOIUrl":"https://doi.org/10.1109/NANO.2016.7751502","url":null,"abstract":"A process of silver nanowire transparent conductive films has been developed to synthesize by organic needle-shaped precursor painting reduction. Needle-shaped nanowire precursors are simply synthesized by ultrasound irradiation of silver oxide and carboxylic acid as starting materials. The aspect ratio of the needle-shaped precursors is chenged by condition of ultrasound irradiation. Silver nanowires can be easily obtained by reducing these needle-shaped precursors with hydrazine gas. The morphology of the resulting nanowires is different from that of typical nanowires that have been reported. The small nanoparticles are connected to form polycrystal nanowire. The polycrystal silver nanowire is considered to increase the transparency of the film because of its rough morphology. This method can synthesize silver nanowires and fabricate the transparent conductive film simultaneously, in low cost and high throughput.","PeriodicalId":6646,"journal":{"name":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","volume":"73 1","pages":"257-260"},"PeriodicalIF":0.0,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86366135","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-08-01DOI: 10.1109/NANO.2016.7751431
T. Uchida, M. Jo, A. Tsurumaki‐Fukuchi, M. Arita, A. Fujiwara, Y. Takahashi
Series coupled triple quantum dots (TQDs) have been studied as an important element of quantum computers. It is needed to fabricate QD array connected in series with a compact structure to scale up the quantum bits. To develop quantum bits based on the TQDs, evaluation of the charge stability diagram is needed. However, since the center gate usually couples to all dots in the compact TQDs, it is difficult to achieve the charge stability diagram of TQDs by simply scanning the gate voltages. Here, we propose a simple method to achieve the stability diagram of TQDs. First, we check the stability diagram of the compact TQDs by the use of Monte Carlo simulations and succeed in developing a method to achieve the stability diagram by simultaneously sweeping of three gate voltages in the simulation. Then the method is applied to a silicon TQDs device fabricated by pattern-dependent oxidation. As the result, the formation of TQDs together with its stability diagram is confirmed.
{"title":"Evaluation of serially coupled triple quantum dots with a compact device structure by a simultaneous voltage-sweeping method","authors":"T. Uchida, M. Jo, A. Tsurumaki‐Fukuchi, M. Arita, A. Fujiwara, Y. Takahashi","doi":"10.1109/NANO.2016.7751431","DOIUrl":"https://doi.org/10.1109/NANO.2016.7751431","url":null,"abstract":"Series coupled triple quantum dots (TQDs) have been studied as an important element of quantum computers. It is needed to fabricate QD array connected in series with a compact structure to scale up the quantum bits. To develop quantum bits based on the TQDs, evaluation of the charge stability diagram is needed. However, since the center gate usually couples to all dots in the compact TQDs, it is difficult to achieve the charge stability diagram of TQDs by simply scanning the gate voltages. Here, we propose a simple method to achieve the stability diagram of TQDs. First, we check the stability diagram of the compact TQDs by the use of Monte Carlo simulations and succeed in developing a method to achieve the stability diagram by simultaneously sweeping of three gate voltages in the simulation. Then the method is applied to a silicon TQDs device fabricated by pattern-dependent oxidation. As the result, the formation of TQDs together with its stability diagram is confirmed.","PeriodicalId":6646,"journal":{"name":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","volume":"1 1","pages":"119-122"},"PeriodicalIF":0.0,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86491798","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-08-01DOI: 10.1109/NANO.2016.7751313
Jin He
Surface effect and nonlocal effect are incorporated into classical Euler beam equation to study the static bending behavior of nanobridges. The generalized Young-Laplace equation and core-shell model are used to model the surface effect. The nonlocal effect is introduced in bending moment equation. Results show that a positive surface tension causes the nanobridge more difficult to bend while the nonlocal effect causes the nanobridge easier to bend. Moreover, the influences of the surface effect and the nonlocal effect on the nanobridge bending behavior are found to be dependent of the applied force position. This study indicates the importance of the excitation force position in the characterizations and applications of nanobridges.
{"title":"Influences of surface effect and nonlocal effect on nanobridges bent by a force at an arbitrary axial position","authors":"Jin He","doi":"10.1109/NANO.2016.7751313","DOIUrl":"https://doi.org/10.1109/NANO.2016.7751313","url":null,"abstract":"Surface effect and nonlocal effect are incorporated into classical Euler beam equation to study the static bending behavior of nanobridges. The generalized Young-Laplace equation and core-shell model are used to model the surface effect. The nonlocal effect is introduced in bending moment equation. Results show that a positive surface tension causes the nanobridge more difficult to bend while the nonlocal effect causes the nanobridge easier to bend. Moreover, the influences of the surface effect and the nonlocal effect on the nanobridge bending behavior are found to be dependent of the applied force position. This study indicates the importance of the excitation force position in the characterizations and applications of nanobridges.","PeriodicalId":6646,"journal":{"name":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","volume":"4 1","pages":"881-883"},"PeriodicalIF":0.0,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83869344","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-08-01DOI: 10.1109/NANO.2016.7751545
Zhengli Han, Takuya Takahashi, H. Toshiyoshi
A terahertz (THz) dynamic switch with polarization dependence is proposed with MEMS metamaterial method. The split ring resonators (SRRs) are located on a silicon-on-insulator (SOI) wafer, where the buried oxide (BOX) is etched to let the silicon layer together with the SRRs work as an electromechanical shutter to control the incident THz wave propagation. Electrostatic actuation is employed for the shutter operation.
{"title":"A MEMS metamaterial for dynamic terahertz wave switching","authors":"Zhengli Han, Takuya Takahashi, H. Toshiyoshi","doi":"10.1109/NANO.2016.7751545","DOIUrl":"https://doi.org/10.1109/NANO.2016.7751545","url":null,"abstract":"A terahertz (THz) dynamic switch with polarization dependence is proposed with MEMS metamaterial method. The split ring resonators (SRRs) are located on a silicon-on-insulator (SOI) wafer, where the buried oxide (BOX) is etched to let the silicon layer together with the SRRs work as an electromechanical shutter to control the incident THz wave propagation. Electrostatic actuation is employed for the shutter operation.","PeriodicalId":6646,"journal":{"name":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","volume":"1 1","pages":"735-738"},"PeriodicalIF":0.0,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83723440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-08-01DOI: 10.1109/NANO.2016.7751454
T. Dinh, Hoang‐Phuong Phan, T. Kozeki, Afzaal Qamar, T. Namazu, Yong Zhu, N. Nguyen, D. Dao
In this work, we present the design and fabrication of high-frequency SiC nanoresonators for highly sensitive nanoparticle sensing. A 280-nm single crystalline SiC film was grown on a Si wafer, and released from the substrate using an isotropic dry etching process. The SiC nanoresonators were then formed using the Focused Ion Beam technique. The simulation results show that the as-fabricated resonators can be thermally actuated at a very high in-plane resonant frequency of 366.11 MHz, and utilized as sensitive nano-particle sensing elements with a high mass sensitivity of 233 kHz/femtogram. These data indicate the possibility of developing SiC nanoresonators for high-resolution mass sensing and other high-frequency applications.
{"title":"Design and fabrication of electrothermal SiC nanoresonators for high-resolution nanoparticle sensing","authors":"T. Dinh, Hoang‐Phuong Phan, T. Kozeki, Afzaal Qamar, T. Namazu, Yong Zhu, N. Nguyen, D. Dao","doi":"10.1109/NANO.2016.7751454","DOIUrl":"https://doi.org/10.1109/NANO.2016.7751454","url":null,"abstract":"In this work, we present the design and fabrication of high-frequency SiC nanoresonators for highly sensitive nanoparticle sensing. A 280-nm single crystalline SiC film was grown on a Si wafer, and released from the substrate using an isotropic dry etching process. The SiC nanoresonators were then formed using the Focused Ion Beam technique. The simulation results show that the as-fabricated resonators can be thermally actuated at a very high in-plane resonant frequency of 366.11 MHz, and utilized as sensitive nano-particle sensing elements with a high mass sensitivity of 233 kHz/femtogram. These data indicate the possibility of developing SiC nanoresonators for high-resolution mass sensing and other high-frequency applications.","PeriodicalId":6646,"journal":{"name":"2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)","volume":"30 1","pages":"160-163"},"PeriodicalIF":0.0,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83538412","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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