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Analysis of terahertz zero bias detectors by using a triple-barrier resonant tunneling diode integrated with a self-complementary bow-tie antenna 利用自互补领结天线集成的三势垒谐振隧道二极管分析太赫兹零偏压探测器
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256934
M. Suhara, S. Takahagi, K. Asakawa, T. Okazaki, M. Nakamura, S. Yamashita, Y. Itagaki, M. Saito, A. Tchegho, G. Keller, A. Poloczek, W. Prost, F. Tegude
Recently, heavy emitter doping rather than decreasing the barrier thickness has boosted the peak current density of resonant tunneling diodes (RTDs) above 1,000 kA/cm2. Based on this achievement very mature InP-based RTD with current densities above 500 kA/cm2 are nowadays the leading solid-state THz device [1, 2]. Here, we show that even triple-barrier RTD (TBRTD) devices now reach a current density in excess of 250 kA/cm2 making this element ideally suited for rectification [3] but now at THz frequencies. Figure 1 is the state of art of THz detection sensitivity of previously reported zero bias detectors. Focusing on such zero bias broadband THz detection, we have also been studying on a design policy for a μm-sized on-chip self-complementally antenna and especially we have reported basic performances of a bow-tie antenna[4,5] integrated with a conventional homogeneous semiconductor mesa structure. However, it was still limited studies considering neither of actual nonlinear devices and peripheral circuits.
近年来,重发射极掺杂并没有降低势垒厚度,反而使共振隧道二极管的峰值电流密度提高到1000 kA/cm2以上。基于这一成就,电流密度超过500 kA/cm2的非常成熟的基于inp的RTD是目前领先的固态太赫兹器件[1,2]。在这里,我们表明,即使是三垒RTD (TBRTD)器件现在也能达到超过250 kA/cm2的电流密度,使该元件非常适合整流[3],但现在是在太赫兹频率下。图1是先前报道的零偏检测器的太赫兹探测灵敏度的最新技术。专注于这种零偏频宽带太赫兹探测,我们也一直在研究μm尺寸的片上自互补天线的设计策略,特别是我们报道了与传统均匀半导体平台结构集成的领结天线的基本性能[4,5]。然而,考虑到实际的非线性器件和外围电路的研究仍然有限。
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引用次数: 7
Regrown ohmic contacts to InxGa1−xAs approaching the quantum conductivity limit InxGa1−xAs的欧姆接触接近量子电导率极限
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6257010
J. Law, A. Carter, S. Lee, A. Gossard, M. Rodwell
We report contact resistances between source-drain regrowth and underlying semiconductor quantum well channels in test structures designed for characterization of source and drain access resistances in III-V MOSFETs. Regrowths included both N+ InAs and N+ graded InAs-InxGa1-xAs; channel materials included both unstrained In0.53Ga0.47As and unstrained InAs. The access resistivity correlates strongly with the sheet carrier concentration of the 2-dimensional electron gas, consistent with quantum- but not classical- transport theory. With source-drain regrowth of InAs contacts to InAs channels, the total access resistance is within a factor of two of the inverse of Landauer's quantum-state-limited conductance [1-3]. The state-limited conductance in TLM structures and the ballistic MOSFET transconductance both arise from the same physical process, hence the Landauer term in the TLM resistance does not contribute to the MOSFET source access resistance. Application of TLM data to transistor characterization must therefore correct for the state-limited access resistivity. Samples with contacts regrown onto channels with high 5·1014/cm2 sheet carrier concentration, hence low quantum-state-limited resistance, showed extremely low 12.7 Ω-μm access resistivity. This demonstrates the utility of MBE regrowth for source/drain formation in III-V MOS technology.
我们报道了在III-V型mosfet中为表征源极和漏极通路电阻而设计的测试结构中,源极-漏极再生和底层半导体量子阱通道之间的接触电阻。再生包括N+ InAs和N+分级InAs- inxga1 - xas;通道材料包括未应变In0.53Ga0.47As和未应变InAs。电阻率与二维电子气体的载流子浓度密切相关,符合量子输运理论,但不符合经典输运理论。随着InAs触点的源漏再生长到InAs通道,总接入电阻在Landauer量子态限制电导的倒数的两倍之内[1-3]。TLM结构中的状态限制电导和弹道MOSFET的跨电导都是由相同的物理过程产生的,因此TLM电阻中的兰道尔项对MOSFET源通路电阻没有贡献。因此,将TLM数据应用于晶体管表征必须校正状态限制的存取电阻率。具有高5·1014/cm2载流子浓度的触点再生到通道上的样品具有较低的量子态限制电阻,其电阻率极低,为12.7 Ω-μm。这证明了MBE再生在III-V型MOS技术的源/漏形成中的效用。
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引用次数: 2
InAs avalanche photodiode with improved electric field uniformity 具有改善电场均匀性的雪崩光电二极管
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256992
S. Maddox, W. Sun, Z. Lu, H. Nair, J. Campbell, S. R. Bank
Here, we report a significant, ~5x, increase in the room temperature multiplication gain for InAs APD's, as compared to the state-of-the-art at 10 V reverse bias.
在这里,我们报告了与目前最先进的10v反向偏置相比,InAs APD的室温倍增增益显著增加了约5倍。
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引用次数: 0
Experimental demonstration of a wafer-bonded heterostructure based unipolar transistor with In0.53Ga0.47as channel and III-N drain 具有In0.53Ga0.47as沟道和III-N漏极的晶片键合异质结构单极晶体管的实验演示
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6257041
S. Lal, Jing Lu, B. Thibeault, S. Denbaars, U. Mishra
This paper report the first demonstration of a fully functional wafer-bonded current aperture vertical electron transistor (BAVET). A maximum drain current (Id) of 29 mA and transconductance (gm_d) of 7.4 mS at a Vgs = 0 V is measured for a device with a width of (75x2) f.lm and an aperture length (Lap) of 8 μm.
本文报道了全功能晶圆键合电流孔径垂直电子晶体管(BAVET)的首次演示。对于宽度为(75x2) f.m m、孔径长度为8 μm的器件,在Vgs = 0 V时测得最大漏极电流(Id)为29 mA,跨导(gm_d)为7.4 mS。
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引用次数: 0
Ga2O3 Schottky barrier diodes fabricated on single-crystal β-Ga2O3 substrates 在单晶β-Ga2O3衬底上制备Ga2O3肖特基势垒二极管
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6257021
K. Sasaki, M. Higashiwaki, A. Kuramata, T. Masui, S. Yamakoshi
In conclusion, we fabricated Ga2O3 SBDs on a single-crystal ß-Ga2O3 (010) substrate. The devices showed good device characteristics such as an ideal factor close to 1.0 and reasonably high reverse VBR. These results indicate that Ga2O3 SBDs have comparable or even more potential than Si and typical widegap semiconductors SiC and GaN have for power device applications. This work was partially supported by NEDO and JST PRESTO programs, Japan.
综上所述,我们在单晶ß-Ga2O3(010)衬底上制备了Ga2O3 sdd。器件的理想因数接近1.0,反向VBR较高,具有良好的器件特性。这些结果表明,Ga2O3 sdd在功率器件应用方面具有与Si和典型的宽间隙半导体SiC和GaN相当甚至更大的潜力。这项工作得到了日本NEDO和JST PRESTO项目的部分支持。
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引用次数: 3
Graphene nanomesh contacts and its transport properties 石墨烯纳米网接触及其输运性质
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6257037
T. Chu, Zhihong Chen
This paper present a study that combines the advantages of GNM with the use of few layer graphene (FLG). In particular, by creating the nanomesh structure in the contact area of the FLG, we are able to achieve two previously unrealized feats: 1) We obtain a substantially reduced contact resistance through the contact to multiple graphene layers and 2) we are able to observe on/off current ratios that rival those in SLG FETs. Based on these findings and a detailed study comparing the impact of scattering in GNM FETs and conventional graphene FETs, we are concluding that FLG FETs with GNM contacts are an excellent choice for future generations of graphene based devices.
本文将GNM的优点与少层石墨烯(FLG)的使用相结合。特别是,通过在FLG的接触区域创建纳米网格结构,我们能够实现两个以前未实现的壮举:1)我们通过与多个石墨烯层的接触获得了显着降低的接触电阻,2)我们能够观察到与SLG fet相媲美的通/关电流比。基于这些发现以及对GNM fet和传统石墨烯fet中散射影响的详细研究,我们得出结论,具有GNM触点的FLG fet是未来几代石墨烯基器件的绝佳选择。
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引用次数: 2
Vertical InAs nanowire MOSFETs with IDS = 1.34 mA/µm and gm = 1.19 mS/µm at VDS = 0.5 V 垂直InAs纳米线mosfet,在VDS = 0.5 V时,IDS = 1.34 mA/µm, gm = 1.19 mS/µm
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256966
Karl‐Magnus Persson, Martin Berg, M. Borg, Jun Wu, Henrik Sjöland, E. Lind, L. Wernersson
III-V MOSFETs are currently considered for extension of, or as an add-on to, the Si CMOS technology. Following the Si-technology evolution, it is attractive to consider advanced III-V transistor architectures with non-planar geometry and improved electrostatic control. We report on vertical InAs single nanowire FETs with diameter of 45 nm diameter, integrated on Si substrates with LG = 200 nm. The devices demonstrate normalized extrinsic gm and IDS of 1.34 S/mm and 1.19 A/mm, respectively, at a VDS of 0.5 V, and with an onresistance of 321 Ωμm, all values normalized to the circumference. The main performance limitation is identified as the drain resistance in the ungated top part of the wire. By scaling the NW diameter to 28 nm, we also observe subthreshold swing down to 80 mV/decade at 50 mV VDS. However, the on-resistance increases for the narrow wires to 75 kΩμm, and the normalized current level is reduced as compared to the larger diameter wires.
III-V型mosfet目前被认为是Si CMOS技术的扩展或附加组件。随着si技术的发展,考虑具有非平面几何形状和改进静电控制的先进III-V晶体管架构是有吸引力的。我们报道了直径为45 nm的垂直InAs单纳米线场效应管,集成在LG = 200 nm的Si衬底上。在VDS为0.5 V时,器件的归一化外部gm和IDS分别为1.34 S/mm和1.19 A/mm,导通电阻为321 Ωμm,所有值都归一化到周长。主要的性能限制是确定在电线的非门控顶部漏阻。通过将NW直径缩放到28 nm,我们还观察到在50 mV VDS下亚阈值振荡降至80 mV/ 10年。然而,窄线的导通电阻增加到75 kΩμm,与直径较大的线相比,归一化电流水平降低。
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引用次数: 8
High current density InAsSb/GaSb tunnel field effect transistors 高电流密度InAsSb/GaSb隧道场效应晶体管
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6257038
A. Dey, B. Borg, B. Ganjipour, Martin Ek, Kimberly A. Dick, E. Lind, P. Nilsson, C. Thelander, L. Wernersson
Steep-slope devices, such as tunnel field-effect transistors (TFETs), have recently gained interest due to their potential for low power operation at room temperature. The devices are based on inter-band tunneling which could limit the on-current since the charge carriers must tunnel through a barrier to traverse the device. The InAs/GaSb heterostructure forms a broken type II band alignment which enables inter-band tunneling without a barrier, allowing high on-currents. We have recently demonstrated high current density (ION,reverse = 17.5 mA/μm2) nanowire Esaki diodes and in this work we investigate the potential of InAs/GaSb heterostructure nanowires to operate as TFETs. We present device characterization of InAs0.85Sb0.15/GaSb nanowire TFETs, which exhibit record-high on-current levels.
陡坡器件,如隧道场效应晶体管(tfet),由于其在室温下低功耗工作的潜力,最近引起了人们的兴趣。该器件基于带间隧穿,由于电荷载流子必须隧穿屏障才能穿过器件,因此可以限制导通电流。InAs/GaSb异质结构形成了一个破碎的II型带对齐,可以在没有势垒的情况下实现带间隧道,从而允许高导通电流。我们最近展示了高电流密度(离子,反向= 17.5 mA/μm2)纳米线Esaki二极管,在这项工作中,我们研究了InAs/GaSb异质结构纳米线作为tfet的潜力。我们介绍了InAs0.85Sb0.15/GaSb纳米线tfet的器件特性,它具有创纪录的高导通电流水平。
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引用次数: 12
N-polar GaN/InAlN MIS-HEMT with 400-GHz ƒmax
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256939
D. Denninghoff, J. Lu, M. Laurent, E. Ahmadi, S. Keller, U. Mishra
This paper reports 400-GHz fmax using a tall-stem T-gate on an N-polar GaN/InAIN MIS-HEMT grown by MOCVD. This is the highest reported fmax value to date for an N-polar GaN HEMT and is among the highest values for all GaN HEMTs. GaN-based HEMTs.
本文报道了在MOCVD生长的n极GaN/InAIN mishemt上使用高杆t栅实现400 ghz fmax。这是迄今为止报道的n极性GaN HEMT的最高fmax值,也是所有GaN HEMT的最高值之一。GaN-based HEMTs。
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引用次数: 35
High performance, large area graphene transistors on quasi-free-standing graphene using synthetic hexagonal boron nitride gate dielectrics 采用合成六方氮化硼栅极电介质的准独立石墨烯上的高性能、大面积石墨烯晶体管
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256986
M. Hollander, A. Agrawal, M. Bresnehan, M. Labella, K. Trumbull, R. Cavalero, S. Datta, J. A. Robinson
In recent years, hexagonal boron nitride (h-BN) has gained interest as a material for use in graphene based electronics, where its ultra-smooth two-dimensional structure, lack of dangling bonds, and high energy surface optical phonon modes are desirable when considering the effect of dielectric materials in introducing additional sources of scattering for carriers within graphene. Initial work has indicated that use of h-BN in place of SiO2 supporting substrates can lead to 2-3x improvements in device performance [1,2], suggesting that h-BN may be an excellent choice as top-gate dielectric for graphene devices. In this work, we integrate h-BN with quasi-freestanding graphene (QFEG) for the first time and demonstrate a 2x improvement in radio frequency (RF) performance and the highest fT·Lg product yet reported for h-BN integrated graphene devices (25 GHz·μm).
近年来,六方氮化硼(h-BN)作为一种用于石墨烯基电子器件的材料引起了人们的兴趣,当考虑到介电材料在石墨烯载流子中引入额外散射源的影响时,其超光滑的二维结构、缺乏悬空键和高能量表面光学声子模式是可取的。初步研究表明,使用h-BN代替SiO2支撑衬底可以使器件性能提高2-3倍[1,2],这表明h-BN可能是石墨烯器件顶栅介质的绝佳选择。在这项工作中,我们首次将h-BN与准独立式石墨烯(QFEG)集成在一起,并展示了射频(RF)性能提高了2倍,以及迄今为止报道的h-BN集成石墨烯器件(25 GHz·μm)的最高fT·Lg产品。
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引用次数: 0
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70th Device Research Conference
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