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Dielectric thickness dependence of quantum capacitance in graphene varactors with local metal back gates 具有局部金属后门的石墨烯变容管中量子电容的介电厚度依赖性
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256974
M. Ebrish, S. Koester
The temperature-dependent C-V characteristics for two samples with target HfO2 thicknesses of 20 nm (sample A), and 10 nm (sample B) are shown in Figs. 2 and 3. The results show that the capacitance tuning range increases with decreasing HfO2 thicknesses, as expected. A comparison of the normalized C-V curves for both samples at room temperature is shown in Fig. 4. The capacitance tuning range from Vg - VDirac = 0 to +1.5 V is 1.17:1 for sample A and 1.38:1 for sample B. Fig. 5 shows a comparison of the C-V characteristics for the varactors with MIM capacitors fabricated on the same sample. A very consistent trend is observed where the capacitance-per-unit-area for the MIM capacitors is significantly higher than for the varactors. The EOT values extracted from the MIM capacitors are found to be 4.1 nm and 2.7 nm for samples A and B, respectively. In order to understand this behavior in more detail, numerical modeling was performed on the temperature-dependent C-V characteristics where the random potential fluctuations, σ, in the graphene was used as an adjustable fitting parameter [5]. The results are shown in Fig. 6. The fact that the fitted EOT values cannot completely account for the capacitance reduction in Fig. 5 is a strong indicator that the effective device area of the varactors is less than the layout area. However, additional modeling, particularly taking into account the effect of interface traps, and other imperfections between the graphene and HfO2 [6-7] is needed to fully understand the observed behavior. In the future, further scaling of the EOT needs to be investigated, as well as fabrication of the devices on insulating substrates for eventual use in resonator circuits. As a preliminary demonstration (Fig. 7), we have fabricated a single-finger varactor on a quartz substrate, with EOT (as determined by MIM capacitors) of 1.9 nm and tuning range >;1.5:1 at room temperature.
两种HfO2靶厚度分别为20 nm(样品A)和10 nm(样品B)的样品的温度依赖性C-V特性如图2和图3所示。结果表明,随着HfO2厚度的减小,电容调谐范围增大。两种样品在室温下的归一化C-V曲线对比如图4所示。从Vg - VDirac = 0到+1.5 V的电容调谐范围,样品A为1.17:1,样品b为1.38:1。图5显示了在相同样品上制造的变容管与MIM电容器的C-V特性的比较。观察到一个非常一致的趋势,即MIM电容器的单位面积电容明显高于变容管。从样品A和样品B中提取的EOT值分别为4.1 nm和2.7 nm。为了更详细地了解这种行为,对温度相关的C-V特性进行了数值模拟,其中石墨烯中的随机电位波动σ用作可调拟合参数[5]。结果如图6所示。拟合的EOT值不能完全解释图5中的电容减小,这一事实有力地表明,变容管的有效器件面积小于布局面积。然而,需要额外的建模,特别是考虑界面陷阱的影响,以及石墨烯和HfO2之间的其他缺陷[6-7],才能充分理解所观察到的行为。在未来,需要进一步研究EOT的缩放,以及在绝缘衬底上制造最终用于谐振器电路的器件。作为初步演示(图7),我们在石英衬底上制作了一个单指变容管,EOT(由MIM电容器确定)为1.9 nm,室温下调谐范围> 1.5:1。
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引用次数: 3
Solid-state electronics and single-molecule biophysics 固态电子学和单分子生物物理学
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256965
K. Shepard
Biomolecular systems are traditionally studied using ensemble measurements and fluorescence-based detection. Among the most common in vitro applications are DNA microarrays to identify target gene expression profiles [1] and enzyme-linked immunosorbent assays (ELISA) to identify proteins [2]. While much can be determined with ensemble measurements, scientific and technological interest is rapidly moving to single-molecule techniques. When probing at the single-molecule level, observations can be made about the inter- and intramolecular dynamics that are usually hidden in ensemble measurements. In molecular diagnostic, single-molecule techniques often do not require amplification and simplify sample preparation. The most popular single-molecule techniques based on fluorescence [3, 4] are fundamentally limited in resolution and bandwidth by the countable number of photons emitted by a single fluorophore (typically on the order of 2500 photons/sec). Instrumentation is complex, expensive, and large-form-factor. Furthermore, most optical probes photobleach, limiting observation times and pump powers. Single-molecule measurements of the kinetics of fast biomolecular processes are often unavailable through fluorescent techniques, as they lack the required temporal resolution.
生物分子系统传统上使用集合测量和基于荧光的检测来研究。最常见的体外应用是DNA微阵列鉴定靶基因表达谱[1]和酶联免疫吸附试验(ELISA)鉴定蛋白质[2]。虽然集合测量可以确定很多东西,但科学和技术的兴趣正迅速转向单分子技术。在单分子水平上进行探测时,可以观察到通常隐藏在系综测量中的分子间和分子内动力学。在分子诊断中,单分子技术通常不需要扩增和简化样品制备。最流行的基于荧光的单分子技术[3,4]在分辨率和带宽上受到单个荧光团发射的光子数量的限制(通常在2500光子/秒的数量级上)。仪器复杂、昂贵且尺寸大。此外,大多数光学探针会发生光漂白,限制了观察时间和泵浦功率。快速生物分子过程动力学的单分子测量通常无法通过荧光技术实现,因为它们缺乏所需的时间分辨率。
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引用次数: 0
Ultra-thin Body GaN-on-insulator nFETs and pFETs: Towards III-nitride complementary logic 超薄体gan -on-绝缘体nfet和pfet:走向iii -氮化物互补逻辑
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256962
Guowang Li, Ronghua Wang, J. Verma, H. Xing, D. Jena
Ultra-thin body (UTB) devices with tight electrostatic and quantum confinement of charge carriers have been well developed in highly scaled silicon CMOS technology. For adopting such advanced methods, III-nitrides can benefit immensely from epitaxial AlN as the substrate platform, in contrast to conventional GaN-based substrate platform. With its large polarization charge, wide bandgap and large band offsets, AlN induces the maximal carrier densities while providing the best confinement for nitride channels of all compositions. Such devices stand also to benefit from the symmetry of electronic polarization: high density hole gases can be generated in much the same way as the high density 2DEG in GaN HEMTs, thus enabling p-channel FETs on the same material platform in a logical manner. The AlN/GaN heterojunctions where mobile carriers are located are epitaxial, and excellent transport properties are expected as opposed to the rougher oxide-semiconductor interfaces. Furthermore, AlN is an excellent electrical insulator but simultaneously an excellent thermal conductor, which makes it highly attractive to act as back-barrier and to lower junction temperatures in high power devices by efficient heat dissipation. There have been reports on relaxed GaN n-channel FETs (nFETs) on AlN [1, 2] and III-nitride based p-channel field effect transistors (pFETs) [3, 4]. All the prior work uses relaxed GaN as the channel, and strained GaN channels on AlN have not been explored before. In this work we demonstrate UTB GaN nFETs [5] and pFETs on AlN grown by molecular beam epitaxy (MBE) as the first step towards complementary logic and high power applications.
超薄体(UTB)器件具有电荷载流子的严格静电和量子约束,在高尺度硅CMOS技术中得到了很好的发展。采用这种先进的方法,与传统的gan基衬底平台相比,iii -氮化物可以从外延AlN作为衬底平台中获益。AlN具有较大的极化电荷、较宽的带隙和较大的带偏移,可以诱导出最大载流子密度,同时为所有成分的氮化物通道提供最佳的约束。这种器件还受益于电子极化的对称性:高密度空穴气体可以以与GaN hemt中的高密度2DEG大致相同的方式产生,从而以逻辑方式在相同的材料平台上实现p沟道场效应管。移动载流子所在的AlN/GaN异质结是外延的,与粗糙的氧化物-半导体界面相反,期望具有优异的输运特性。此外,AlN是一种优秀的电绝缘体,同时也是一种优秀的热导体,这使得它具有很高的吸引力,可以作为背障,并通过有效的散热来降低大功率器件的结温。已经有关于在AlN[1,2]和iii -氮化物基p沟道场效应晶体管(pfet)上弛豫GaN n沟道场效应晶体管(nfet)的报道[3,4]。以往的工作都是使用松弛GaN作为通道,而在AlN上的应变GaN通道还没有被探索过。在这项工作中,我们展示了通过分子束外延(MBE)在AlN上生长的UTB GaN非场效应管[5]和pfet,作为实现互补逻辑和高功率应用的第一步。
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引用次数: 8
Exploration of vertical MOSFET and tunnel FET device architecture for Sub 10nm node applications 用于Sub 10nm节点应用的垂直MOSFET和隧道FET器件架构的探索
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256990
H. Liu, D. Mohata, A. Nidhi, V. Saripalli, V. Narayanan, S. Datta
A vertical device architecture having -40% density improvement over planar for sub-10nm technology node has been evaluated for Si NMOS and III-V HTFET with Lg=16nm. For LOP applications including the effect of parasitic elements, the HTFET presents superior energy efficiency and desired low-power analog performance for VDD<;0.6V, while MOSFET is superior for VDD>;0.6V. To further improve MOSFET performance, ION needs to be improved with higher injection velocity materials (e.g. III-V). For delay reduction, the parasitic capacitances (Cov and Cg,fringe) and contact resistance need to be further engineered for both MOSFETs and TFETs.
对于Lg=16nm的Si NMOS和III-V HTFET,在10nm以下的技术节点上,垂直器件结构密度比平面提高了-40%。对于包括寄生元件影响的LOP应用,HTFET在VDD;0.6V下具有优越的能效和理想的低功耗模拟性能。为了进一步提高MOSFET的性能,需要使用更高注入速度的材料(例如III-V)来改进ION。为了降低延迟,需要进一步设计mosfet和tfet的寄生电容(Cov和Cg,条纹)和接触电阻。
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引用次数: 26
MoS2-based devices and circuits 基于mos2的器件和电路
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6257008
B. Radisavljevic, Daria Krasnozhon, M. Whitwick, A. Kis
Two-dimensional crystals offer several inherent advantages over conventional 3D electronic materials or 1D nanomaterials such as nanotubes and nanowires. Their planar geometry makes it easier to fabricate circuits and complex structures by tailoring 2D layers into desired shapes. Because of their atomic scale thickness, 2D materials also represent the ultimate limit of miniaturization in the vertical dimension and allow the fabrication of shorter transistors due to enhanced electrostatic control. Another advantage of 2D semiconductors is that their electronic properties (band gap, mobility, work function) can be tuned for example by changing the number of layers or applying external electric fields.
与传统的三维电子材料或一维纳米材料(如纳米管和纳米线)相比,二维晶体具有几个固有的优势。通过将二维层裁剪成所需的形状,它们的平面几何结构使得制造电路和复杂结构变得更加容易。由于其原子尺度的厚度,二维材料也代表了垂直尺寸小型化的极限,并且由于增强的静电控制,可以制造更短的晶体管。二维半导体的另一个优点是它们的电子特性(带隙、迁移率、功函数)可以通过改变层数或施加外部电场来调节。
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引用次数: 1
Hole-blocking TiO2/silicon heterojunction for silicon photovoltaics 用于硅光伏的二氧化钛/硅异质结
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256955
S. Avasthi, W. McClain, J. Schwartz, J. Sturm
Narrow bandgap heterojunctions on crystalline silicon such as Si/Si1-xGex are now in widespread use, but to date there has been little progress on widegap heterojunctions on silicon. In this abstract, we report: (i) TiO2/Si heterojunction with a band alignment which blocks holes from silicon but freely passes electrons, and (ii) the application of this heterojunction to form a photovoltaic cell on silicon with no p-n junction, and all fabrication below a temperature of 75 °C.
晶体硅上的窄带隙异质结(如Si/Si1-xGex)现已广泛应用,但迄今为止在硅上的宽隙异质结方面进展甚微。在这篇摘要中,我们报告了:(i)具有能带排列的TiO2/Si异质结可以阻挡硅的空穴,但可以自由通过电子,以及(ii)应用该异质结在硅上形成没有pn结的光伏电池,并且所有制造温度低于75°C。
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引用次数: 3
Monolithically integrated E/D-mode InAlN HEMTs with ƒt/ƒmax > 200/220 GHz 单片集成E/ d模InAlN hemt, ƒt/ƒmax > 200/220 GHz
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6257009
B. Song, B. Sensale‐Rodriguez, Ronghua Wang, A. Ketterson, M. Schuette, E. Beam, P. Saunier, Xiang Gao, Shiping Guo, P. Fay, D. Jena, H. Xing
Although recent years have seen impressive progress on high speed GaN HEMTs [1-3], fabrication approaches allowing for monolithic integration of E and D-mode devices with simplicity and low-cost, such as gate recess and plasma treatment, remain challenging. Carrier mobility in channels subject to gate recess or plasma treatment generally degrades, which is difficult to fully recover even after post-processing annealing etc. In this work, we report high-performance monolithically integrated D-mode and gate-recessed E-mode InAlN/AlN/GaN HEMTs with a nominal gate length of 30 nm (Fig. 1) and 2-level metal interconnects. The D-mode HEMTs show an extrinsic gm of 920 mS/mm and ft/fmax of 194/220 GHz. The gate-recessed E-modes show an extrinsic gm of 1306 mS/mm and ft/fmax of 225/250 GHz. The higher speed of the E-modes stems from the higher intrinsic gm, which is also found to be comparable to that reported in epitaxially defined E-modes with a 4.5 nm barrier and 20-nm gate length by Shinohara et al. [1], ~ 1700 mS/mm, suggesting that the carrier mobility likely suffers from negligible degradation in our monolithically integrated E-mode HEMTs.
尽管近年来高速GaN hemt取得了令人印象深刻的进展[1-3],但允许简单和低成本地集成E模式和d模式器件的制造方法,如栅极凹槽和等离子体处理,仍然具有挑战性。经过栅极凹槽或等离子体处理的通道中的载流子迁移率一般会下降,即使经过后处理退火等处理也难以完全恢复。在这项工作中,我们报道了高性能单片集成d模式和门凹槽e模式InAlN/AlN/GaN hemt,标称栅极长度为30 nm(图1)和2级金属互连。d模hemt的外部增益为920 mS/mm, ft/fmax为194/220 GHz。栅极凹槽e模的外部增益为1306 mS/mm, ft/fmax为225/250 GHz。更高的e模速度源于更高的本然gm,这也被发现与Shinohara等人[1]报道的4.5 nm势垒和20 nm栅长的外延定义的e模相当,~ 1700 mS/mm,这表明在我们的单片集成e模hemt中载流子迁移率可能受到可以忽略的降低。
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引用次数: 19
III–V 4D transistors III-V - 4D晶体管
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6256964
Jiangjiang Gu, Xinwei Wang, J. Shao, A. Neal, M. Manfra, Roy G. Gordon, P. D. Ye
We fabricated for the first time vertically and laterally integrated III-V 4D transistors. III-V gate-all-around (GAA) nanowire MOSFETs with 3×4 arrays show high drive current of 1.35mA/μm and high transconductance of 0.85mS/μm. The vertical stacking of the III-V nanowires have provided an elegant solution to the drivability bottleneck of nanowire devices and is promising for future low-power logic and RF application.
我们首次制作了垂直和横向集成的III-V 4D晶体管。采用3×4阵列的III-V栅极全能(GAA)纳米线mosfet具有1.35mA/μm的高驱动电流和0.85mS/μm的高跨导性。III-V纳米线的垂直堆叠为纳米线器件的可驱动性瓶颈提供了一个优雅的解决方案,并有望在未来的低功耗逻辑和射频应用中得到应用。
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引用次数: 0
Comparative study of LEDs conformally overgrown on multi-facet GaN NWs vs. conventional c-plane LEDs 多层氮化镓NWs与传统c-平面led共形生长的比较研究
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6257004
A. Hosalli, P. Frajtag, D. Van Den Broeck, T. Paskova, N. El-Masry, S. Bedair
Over the last decade, considerable efforts have gone into researching techniques to improve the efficiency of light emitting diodes (LEDs) based on the III-nitride material system. These efforts can be classified into two main approaches : improving the internal quantum efficiency (IQE) and increasing the light extraction efficiency of the LED devices. In the work outlined below, we demonstrate a unique LED structure that has a significantly enhanced light output intensity compared to c-plane LEDs by tackling both approaches simultaneously. We investigated the ratio of light output intensity of the NWs LED vs the c-plane LED as a function of current density. At lower current densities, the lower QCSE in NWs LED is responsible for a large ratio. This reduces with increasing current density as carrier screening of the polarization field in the c-plane LED negates the QCSE effect. The ratio saturates at higher current densities where the mechanism for higher light output is dominated by the light extraction efficiency that depends only on the device geometry and is independent of the current density in the NWs LED.
在过去的十年中,人们在提高基于iii -氮化物材料体系的发光二极管(led)效率的技术研究上付出了相当大的努力。这些努力可以分为两种主要方法:提高内部量子效率(IQE)和提高LED器件的光提取效率。在下面概述的工作中,我们展示了一种独特的LED结构,通过同时处理两种方法,与c平面LED相比,它具有显着增强的光输出强度。我们研究了NWs LED与c平面LED的光输出强度之比与电流密度的关系。在较低的电流密度下,较低的QCSE在NWs LED中占很大的比例。由于c面LED偏振场的载流子筛选消除了QCSE效应,因此随着电流密度的增加,这种效应会减小。该比率在较高的电流密度下达到饱和,其中高光输出的机制主要取决于光提取效率,而光提取效率仅取决于器件几何形状,与NWs LED中的电流密度无关。
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引用次数: 0
Frequency dependence of amorphous silicon Schottky diodes for Large-Area rectification applications 大面积整流应用中非晶硅肖特基二极管的频率依赖性
Pub Date : 2012-06-18 DOI: 10.1109/DRC.2012.6257001
J. Sanz-Robinson, W. Rieutort-Louis, N. Verma, S. Wagner, J. Sturm
Schottky diodes can play a valuable role as rectifiers in Large-Area Electronics (LAE) systems and circuits. They can be used to recover a DC signal when an AC carrier is used to transmit signals between adjacent plastic electronic sheets through near-field wireless coupling [1], rectify DC power after AC transmission between sheets to provide power to sensors, and so forth. In this paper we describe: 1) the intrinsic frequency limits of Schottky diodes fabricated on hydrogenated amorphous silicon (a-Si:H); 2) circuit design strategies for using the diodes at frequencies far beyond their intrinsic limits; 3) and the application of these strategies to demonstrate, to the best of out knowledge, the first amorphous silicon (a-Si:H) full-wave rectifier, with an AC-to-DC power conversion efficiency (PCE) ranging from approximately 46% at 200 Hz to greater than 10 % at 1 MHz.
肖特基二极管在大面积电子(LAE)系统和电路中可以作为整流器发挥重要作用。利用交流载波通过近场无线耦合在相邻的塑料电子片间传输信号时,可用于恢复直流信号[1],也可用于片间交流传输后的直流电源整流,为传感器供电等。本文描述了:1)在氢化非晶硅(a-Si:H)上制备的肖特基二极管的固有频率极限;2)在远超过其固有极限的频率下使用二极管的电路设计策略;3)和这些策略的应用,以证明,据我们所知,第一个非晶硅(a-Si:H)全波整流器,交流到直流的功率转换效率(PCE)范围从约46%在200hz到大于10%在1mhz。
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引用次数: 2
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70th Device Research Conference
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