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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)最新文献

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Micro Swimming Robots Powered by a Single-Axis Alternating Magnetic Field with Controllable Manipulation 可控单轴交变磁场驱动的微型游泳机器人
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495441
Fanping Sui, Yuanyuan Huang, Ruiqi Guo, Liwei Lin
We herein demonstrate micro swimming robots powered by a single-axis magnetic system with controllable mobility and stability. Five distinctive advancements have been achieved: (1) using a single-axis alternating magnetic field to remotely power propeller-style micro swimming robots; (2) controllable moving speed as well as direction for the swimming structure by regulating magnetic field magnitude, frequency, and direction; (3) ultrafast moving speed of 19.1 body length per second under a magnetic field of 1.5 mT; (4) several underwater maneuvering demos including upwards, downwards and stationary motions and movements towards a target location to carry out basic tasks; and (5) attitude stability achieved by the effect of center of pressure over center of mass.
我们在此展示了由单轴磁系统驱动的微型游泳机器人,具有可控的移动性和稳定性。取得了五个显著进展:(1)利用单轴交变磁场远程驱动螺旋桨式微型游泳机器人;(2)通过调节磁场的大小、频率和方向来控制游动结构的运动速度和方向;(3)在1.5 mT磁场下的超快移动速度为19.1体长/秒;(4)若干水下机动演示,包括向上、向下、静止运动和向目标位置移动,以执行基本任务;(5)压力中心对质量中心的影响实现姿态稳定性。
{"title":"Micro Swimming Robots Powered by a Single-Axis Alternating Magnetic Field with Controllable Manipulation","authors":"Fanping Sui, Yuanyuan Huang, Ruiqi Guo, Liwei Lin","doi":"10.1109/Transducers50396.2021.9495441","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495441","url":null,"abstract":"We herein demonstrate micro swimming robots powered by a single-axis magnetic system with controllable mobility and stability. Five distinctive advancements have been achieved: (1) using a single-axis alternating magnetic field to remotely power propeller-style micro swimming robots; (2) controllable moving speed as well as direction for the swimming structure by regulating magnetic field magnitude, frequency, and direction; (3) ultrafast moving speed of 19.1 body length per second under a magnetic field of 1.5 mT; (4) several underwater maneuvering demos including upwards, downwards and stationary motions and movements towards a target location to carry out basic tasks; and (5) attitude stability achieved by the effect of center of pressure over center of mass.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"32 1","pages":"357-360"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88279098","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
An Ear-Inspired Sound Pressure Amplification Structure for Fabry-Perot Acoustic Sensor 一种用于Fabry-Perot声传感器的耳式声压放大结构
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495434
Xi Xiao, Cheng Li, Shangchun Fan, Xuefeng Song
In this paper, inspired by the ossicular chain in human middle ear, a miniature sound pressure amplification structure (SPAS) based on double $10 mu mathrm{m}$-thickness E-shaped steel diaphragms with the corresponding diameters of 15 mm and 3 mm was developed to enhance the sensitivity of diaphragm-type Fabry-Perot (F-P) acoustic sensor. FEM simulation demonstrated the availability of the SPAS in terms of the achieved acoustic field response within a certain frequency range. Then acoustic test showed that the F-P acoustic sensor using a silver diaphragm, adapted with the developed SPAS, achieved a remarkable sensitivity amplification ratio of up to ∼7.6 in the range of 1.5∼2.1 kHz, which can be further widened by optimizing structure dimensions and membrane materials.
为了提高膜片式法布里-珀罗(F-P)声传感器的灵敏度,本文以人类中耳听骨链为灵感,设计了一种基于10 mu mathrm{m}$厚度、直径分别为15 mm和3 mm的双e形钢膜片的微型声压放大结构(SPAS)。有限元仿真结果表明,SPAS在一定频率范围内的声场响应是有效的。声学测试表明,采用银膜片的F-P声传感器在1.5 ~ 2.1 kHz范围内获得了高达7.6的灵敏度放大比,通过优化结构尺寸和膜材料可以进一步扩大。
{"title":"An Ear-Inspired Sound Pressure Amplification Structure for Fabry-Perot Acoustic Sensor","authors":"Xi Xiao, Cheng Li, Shangchun Fan, Xuefeng Song","doi":"10.1109/Transducers50396.2021.9495434","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495434","url":null,"abstract":"In this paper, inspired by the ossicular chain in human middle ear, a miniature sound pressure amplification structure (SPAS) based on double $10 mu mathrm{m}$-thickness E-shaped steel diaphragms with the corresponding diameters of 15 mm and 3 mm was developed to enhance the sensitivity of diaphragm-type Fabry-Perot (F-P) acoustic sensor. FEM simulation demonstrated the availability of the SPAS in terms of the achieved acoustic field response within a certain frequency range. Then acoustic test showed that the F-P acoustic sensor using a silver diaphragm, adapted with the developed SPAS, achieved a remarkable sensitivity amplification ratio of up to ∼7.6 in the range of 1.5∼2.1 kHz, which can be further widened by optimizing structure dimensions and membrane materials.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"88 1","pages":"1174-1177"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88398805","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Magnetically-Coupled Micromachined Electrostatic Energy Harvester Driven by Eye Blinking Motion 眨眼运动驱动的磁耦合微机械静电能量采集器
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495499
E. Pourshaban, M. Karkhanis, A. Deshpande, A. Banerjee, C. Ghosh, Hanseup Kim, C. Mastrangelo
We present the fabrication and experimental results of a magnetically coupled body motion electrostatic energy harvester chip suitable for a smart contact lens application. The device is designed to be driven by the lateral motion of the eye blinking without any physical contact with the eyelid. The $4times 3 text{mm}^{2}$ harvester generates 486.54 nJ and $6.09 mu mathrm{J}$ of energy per blink and average power of 194.6 nW and $2.44 mu mathrm{W}$ when pre-charged at 3.18 V and 6.27 V, respectively when driven at typical blinking velocity conditions.
介绍了一种适用于智能隐形眼镜的磁耦合体运动静电能量采集芯片的制作和实验结果。该设备的设计是通过眼睛眨眼的横向运动来驱动,而无需与眼睑进行任何物理接触。在典型的闪烁速度条件下,当3.18 V和6.27 V预充电时,$4times 3 text{mm}^{2}$收割机每次闪烁分别产生486.54 nJ和6.09 mu mathm {J}$的能量,平均功率分别为194.6 nW和2.44 mu mathm {W}$。
{"title":"A Magnetically-Coupled Micromachined Electrostatic Energy Harvester Driven by Eye Blinking Motion","authors":"E. Pourshaban, M. Karkhanis, A. Deshpande, A. Banerjee, C. Ghosh, Hanseup Kim, C. Mastrangelo","doi":"10.1109/Transducers50396.2021.9495499","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495499","url":null,"abstract":"We present the fabrication and experimental results of a magnetically coupled body motion electrostatic energy harvester chip suitable for a smart contact lens application. The device is designed to be driven by the lateral motion of the eye blinking without any physical contact with the eyelid. The $4times 3 text{mm}^{2}$ harvester generates 486.54 nJ and $6.09 mu mathrm{J}$ of energy per blink and average power of 194.6 nW and $2.44 mu mathrm{W}$ when pre-charged at 3.18 V and 6.27 V, respectively when driven at typical blinking velocity conditions.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"9 1","pages":"960-963"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88834769","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Development of Weighing Systems with Improved Dynamic Range Using High-Resolution Resonant MEMS Strain Sensors 采用高分辨率谐振MEMS应变传感器开发具有改进动态范围的称重系统
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495570
L. Belsito, M. Ferri, L. Masini, A. Roncaglia
The application of high-resolution MEMS strain sensors based on micromechanical resonators fabricated with wafer-level vacuum packaging to the construction of large dynamic range weighing systems is explored. Resonant sensors with sub-nano strain resolution are adopted to build a load cell prototype using a standard aluminum structure normally utilized in commercial weighing systems. A differential strain measurement configuration is implemented with two sensors oriented at 90° between them and fabricated on the same chip for temperature compensation. The load cell equipped with the resonant MEMS sensors shows an excellent dynamic range of 108 dB, effective temperature compensation and good weight measurement reproducibility.
探讨了基于晶圆级真空封装的微机械谐振腔的高分辨率MEMS应变传感器在大动态范围称重系统中的应用。采用亚纳米应变分辨率的谐振传感器,采用通常用于商业称重系统的标准铝结构构建称重传感器原型。差分应变测量配置实现了两个传感器之间定向90°,并制作在同一芯片上进行温度补偿。采用谐振式MEMS传感器的称重传感器具有108 dB的动态范围、有效的温度补偿和良好的称重再现性。
{"title":"Development of Weighing Systems with Improved Dynamic Range Using High-Resolution Resonant MEMS Strain Sensors","authors":"L. Belsito, M. Ferri, L. Masini, A. Roncaglia","doi":"10.1109/Transducers50396.2021.9495570","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495570","url":null,"abstract":"The application of high-resolution MEMS strain sensors based on micromechanical resonators fabricated with wafer-level vacuum packaging to the construction of large dynamic range weighing systems is explored. Resonant sensors with sub-nano strain resolution are adopted to build a load cell prototype using a standard aluminum structure normally utilized in commercial weighing systems. A differential strain measurement configuration is implemented with two sensors oriented at 90° between them and fabricated on the same chip for temperature compensation. The load cell equipped with the resonant MEMS sensors shows an excellent dynamic range of 108 dB, effective temperature compensation and good weight measurement reproducibility.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"52 1","pages":"1331-1334"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77270123","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An Integrated Microfluidic Platform for Detecting BRCA1/BRCA2 Gene Mutation and Risk Assessment of Ovarian Cancer BRCA1/BRCA2基因突变检测及卵巢癌风险评估的集成微流控平台
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495503
Yuen Cheng, Chih-Hung Wang, K. Hsu, Gwo-Bin Lee
Ovarian cancer is known as a “silent killer” for women because it is difficult to be diagnosed at early stages. The five-year survival rate of early-stage ovarian cancer is 92%, but at the late stages, drops to only 17%. Several tools have been used for ovarian cancer screening; however, the outcome is still not satisfactory. Therefore, there is a great need to develop a new method to screen ovarian cancer precisely. Recently, BRCA1/2 gene mutations were confirmed to be highly associate with the occurrence of ovarian cancer. Patients with these gene mutations are risky of developing it in their lifetime. Liquid biopsy such as cell-free DNA (cfDNA) is an emerging non-invasive technology that brings information about tumors from the blood. Previous studies have found BRCA1/2 gene mutations in cfDNA could serve a potential tool for the screening and risk assessment of ovarian cancer. Therefore, an integrated microfluidic system was developed in this work to extract cfDNA from patients' plasma and BRCA1/2 gene mutations were verified automatically, which can provide clinicians a convenient way for risk assessment.
卵巢癌被称为女性的“无声杀手”,因为在早期阶段很难被诊断出来。早期卵巢癌的5年生存率为92%,但到了晚期,存活率仅为17%。有几种工具被用于卵巢癌筛查;然而,结果仍然不令人满意。因此,迫切需要开发一种新的方法来精确筛查卵巢癌。最近,BRCA1/2基因突变被证实与卵巢癌的发生高度相关。患有这些基因突变的患者在其一生中有患这种疾病的风险。液体活检,如无细胞DNA (cfDNA)是一种新兴的非侵入性技术,可以从血液中获取肿瘤信息。先前的研究发现,cfDNA中的BRCA1/2基因突变可以作为卵巢癌筛查和风险评估的潜在工具。因此,本研究开发了一种集成的微流控系统,用于从患者血浆中提取cfDNA,并自动验证BRCA1/2基因突变,为临床医生提供一种便捷的风险评估方法。
{"title":"An Integrated Microfluidic Platform for Detecting BRCA1/BRCA2 Gene Mutation and Risk Assessment of Ovarian Cancer","authors":"Yuen Cheng, Chih-Hung Wang, K. Hsu, Gwo-Bin Lee","doi":"10.1109/Transducers50396.2021.9495503","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495503","url":null,"abstract":"Ovarian cancer is known as a “silent killer” for women because it is difficult to be diagnosed at early stages. The five-year survival rate of early-stage ovarian cancer is 92%, but at the late stages, drops to only 17%. Several tools have been used for ovarian cancer screening; however, the outcome is still not satisfactory. Therefore, there is a great need to develop a new method to screen ovarian cancer precisely. Recently, BRCA1/2 gene mutations were confirmed to be highly associate with the occurrence of ovarian cancer. Patients with these gene mutations are risky of developing it in their lifetime. Liquid biopsy such as cell-free DNA (cfDNA) is an emerging non-invasive technology that brings information about tumors from the blood. Previous studies have found BRCA1/2 gene mutations in cfDNA could serve a potential tool for the screening and risk assessment of ovarian cancer. Therefore, an integrated microfluidic system was developed in this work to extract cfDNA from patients' plasma and BRCA1/2 gene mutations were verified automatically, which can provide clinicians a convenient way for risk assessment.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"69 1","pages":"1024-1027"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91278227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
In-House Fabrication of Solenoid Inductor and Multilayer Metal Core Using 3D Printing, Selective Electroless Plating, Electroplating, and Pressing 内部制造电磁电感和多层金属芯使用3D打印,选择性化学镀,电镀和压制
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495524
Jun Ying Tan, A. Ahmed, J. Kim
This paper presents a simple in-house fabrication of a solenoid inductor using 3D printing, selective electroless plating, and electroplating for the inductor, and pressing for a highly laminated metal core. The frame of the solenoid inductor was 3D printed, where the design of the frame has a solenoid trench and ridge for wiring and insulator, respectively. The ridge of the frame was selectively coated with a novolac resin by dipping and rolling. The unique selective electroless plating showed the direct patterning to form a solenoid conductive path that came from the different surface activation. Electroplating to thicken the solenoid wire completes the inductor fabrication. A pressing and stacking of a nickel film form the highly laminated magnetic core for the inductor. A 10-turn solenoid inductor with a wire thickness of was successfully fabricated. An average inductance of 133 nH was measured in air-core condition. A 120 nickel layer cores were integrated into the inductor and showed the boosted inductance of 252 nH. The proposed simple fabrication has a great potential for various RF passive 3D devices including antennas, filters, and waveguides.
本文介绍了一个简单的内部制造螺线管电感使用3D打印,选择性化学镀,和电镀的电感,并压制高度层压金属芯。电磁电感器的框架进行了3D打印,其中框架的设计具有电磁沟槽和脊线,分别用于布线和绝缘体。通过浸渍和轧制的方法,在框架的脊上选择性地涂上了一层新伏拉克树脂。独特的选择性化学镀表现出直接的图案,形成电磁传导路径,来自不同的表面活化。电镀加厚螺线管导线完成电感的制作。对镍薄膜的压制和堆叠形成用于电感器的高度层压磁芯。成功地制作了导线厚度为的10匝电磁电感器。在空芯条件下测得平均电感为133 nH。将120镍层铁芯集成到电感器中,显示出252 nH的升压电感。提出的简单制造对于各种RF无源3D器件,包括天线,滤波器和波导具有巨大的潜力。
{"title":"In-House Fabrication of Solenoid Inductor and Multilayer Metal Core Using 3D Printing, Selective Electroless Plating, Electroplating, and Pressing","authors":"Jun Ying Tan, A. Ahmed, J. Kim","doi":"10.1109/Transducers50396.2021.9495524","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495524","url":null,"abstract":"This paper presents a simple in-house fabrication of a solenoid inductor using 3D printing, selective electroless plating, and electroplating for the inductor, and pressing for a highly laminated metal core. The frame of the solenoid inductor was 3D printed, where the design of the frame has a solenoid trench and ridge for wiring and insulator, respectively. The ridge of the frame was selectively coated with a novolac resin by dipping and rolling. The unique selective electroless plating showed the direct patterning to form a solenoid conductive path that came from the different surface activation. Electroplating to thicken the solenoid wire completes the inductor fabrication. A pressing and stacking of a nickel film form the highly laminated magnetic core for the inductor. A 10-turn solenoid inductor with a wire thickness of was successfully fabricated. An average inductance of 133 nH was measured in air-core condition. A 120 nickel layer cores were integrated into the inductor and showed the boosted inductance of 252 nH. The proposed simple fabrication has a great potential for various RF passive 3D devices including antennas, filters, and waveguides.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"28 1","pages":"1379-1382"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87110480","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design, Modeling and Validation of a Flexible Strain Sensor Based on Moire Patterns and Image Processing 基于云纹图案和图像处理的柔性应变传感器的设计、建模和验证
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495456
Xiaoke Ding, L. Que
This paper reports a new flexible strain sensor using the moiré pattern as the transducing signal, which can be used to map the strain/stress on a planar surface or a curved surface. Different from our previously reported flexible strain sensor based on the nanopore thin film, which uses the reflected optical signal as the transducing signal. This type of strain sensor has the following unique features: one grating (G1) is fabricated on a flexible substrate, the other grating (G2), which has a slightly different pitch, is simply stored in a computer. Images of G1 under different strains/stresses are taken using a smartphone camera. Then moiré patterns are formed by superimposing the images of the two gratings (G1 and G2) in a computer. Finally, the strain/stress is determined by feature extraction of the moiré patterns using image processing.
本文报道了一种以波纹图为传感信号的柔性应变传感器,该传感器可用于测量平面或曲面上的应变/应力。不同于我们之前报道的基于纳米孔薄膜的柔性应变传感器使用反射光信号作为换能器信号。这种类型的应变传感器具有以下独特的特点:一个光栅(G1)是在柔性基板上制造的,另一个光栅(G2),其间距略有不同,简单地存储在计算机中。G1在不同应变/应力下的图像是使用智能手机相机拍摄的。然后将两个光栅(G1和G2)的图像在计算机中叠加形成莫尔条纹。最后,利用图像处理技术对波纹图案进行特征提取,确定应变/应力。
{"title":"Design, Modeling and Validation of a Flexible Strain Sensor Based on Moire Patterns and Image Processing","authors":"Xiaoke Ding, L. Que","doi":"10.1109/Transducers50396.2021.9495456","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495456","url":null,"abstract":"This paper reports a new flexible strain sensor using the moiré pattern as the transducing signal, which can be used to map the strain/stress on a planar surface or a curved surface. Different from our previously reported flexible strain sensor based on the nanopore thin film, which uses the reflected optical signal as the transducing signal. This type of strain sensor has the following unique features: one grating (G1) is fabricated on a flexible substrate, the other grating (G2), which has a slightly different pitch, is simply stored in a computer. Images of G1 under different strains/stresses are taken using a smartphone camera. Then moiré patterns are formed by superimposing the images of the two gratings (G1 and G2) in a computer. Finally, the strain/stress is determined by feature extraction of the moiré patterns using image processing.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"11 1","pages":"1303-1306"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78660402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Fine Patterning on 3D Sample with Curvature and Depth Using Resist Sheet with Latent Image 利用具有隐影的抗蚀片对具有曲率和深度的三维样品进行精细图像化
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495743
Takayuki Kuroyanagi, Shigenori Saito, M. Sasaki
A new patterning technique for applying the photolithography to the 3D sample is described. A sheet is newly introduced. This sheet has water-soluble polymer of polyvinyl alcohol. On this the photoresist can be spin-coated and patterned using the standard resist spin-coater and the mask aligner. The photoresist with the latent image is pasted on 3D samples. By patterning the resist film before pasting, the limit of Fresnel diffraction can be solved enabling the patterning at the close distance with the photomask. The fine patterns are demonstrated both on convex and concave samples.
本文介绍了一种用于三维样品光刻的新型图案化技术。一张纸是新推出的。本品为水溶性聚乙烯醇聚合物。在这种情况下,光刻胶可以使用标准的光刻胶旋转涂布机和掩膜校正器进行旋转涂布和图像化。带有潜影的光刻胶粘贴在3D样品上。通过在贴合前对抗蚀膜进行图像化处理,可以解决菲涅耳衍射的限制,使其能够在与掩膜近距离处进行图像化。在凸面和凹面样品上均显示出良好的图案。
{"title":"Fine Patterning on 3D Sample with Curvature and Depth Using Resist Sheet with Latent Image","authors":"Takayuki Kuroyanagi, Shigenori Saito, M. Sasaki","doi":"10.1109/Transducers50396.2021.9495743","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495743","url":null,"abstract":"A new patterning technique for applying the photolithography to the 3D sample is described. A sheet is newly introduced. This sheet has water-soluble polymer of polyvinyl alcohol. On this the photoresist can be spin-coated and patterned using the standard resist spin-coater and the mask aligner. The photoresist with the latent image is pasted on 3D samples. By patterning the resist film before pasting, the limit of Fresnel diffraction can be solved enabling the patterning at the close distance with the photomask. The fine patterns are demonstrated both on convex and concave samples.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"23 1","pages":"521-524"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85566737","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nonlinear Wind Energy Harvesting Based on Mechanical Synchronous Switch Harvesting on Inductor 基于电感器机械同步开关采集的非线性风能采集
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495514
Mayue Shi, A. Holmes, E. Yeatman
We present for the first time a miniature flexible galloping piezoelectric energy harvester that combines a nonlinear aeroelastic energy harvesting structure with an energy extraction circuit employing mechanical synchronous switch harvesting on inductor (mechanical SSHI). Extra stoppers protect the harvester from overload at high wind speed, thus extending the highest working speed from 10 m/s to 13.5 m/s based on wind tunnel tests. The conductive contact on the bluff body and the conductive stoppers further forms a mechanical synchronous switch, used in the SSHI circuit for energy extraction. The maximum power enhancement reaches 221% compared to the design without SSHI, at a low wind speed of 3.6 m/s.
本文首次提出了一种将非线性气动弹性能量收集结构与采用电感上机械同步开关收集的能量提取电路相结合的微型柔性驰动压电能量收集器。额外的挡板保护收割机在高风速下不会过载,从而根据风洞试验将最高工作速度从10米/秒延长到13.5米/秒。钝体上的导电触点和导电塞进一步形成机械同步开关,用于SSHI电路中进行能量提取。在3.6 m/s的低风速下,与无SSHI设计相比,最大功率提高了221%。
{"title":"Nonlinear Wind Energy Harvesting Based on Mechanical Synchronous Switch Harvesting on Inductor","authors":"Mayue Shi, A. Holmes, E. Yeatman","doi":"10.1109/Transducers50396.2021.9495514","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495514","url":null,"abstract":"We present for the first time a miniature flexible galloping piezoelectric energy harvester that combines a nonlinear aeroelastic energy harvesting structure with an energy extraction circuit employing mechanical synchronous switch harvesting on inductor (mechanical SSHI). Extra stoppers protect the harvester from overload at high wind speed, thus extending the highest working speed from 10 m/s to 13.5 m/s based on wind tunnel tests. The conductive contact on the bluff body and the conductive stoppers further forms a mechanical synchronous switch, used in the SSHI circuit for energy extraction. The maximum power enhancement reaches 221% compared to the design without SSHI, at a low wind speed of 3.6 m/s.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"56 1","pages":"964-967"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85942555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Nanogenerators and Self-Powered Microdevices Applied to Wireless Electrical Stimulation at Cell Level 纳米发电机和自供电微设备应用于细胞水平的无线电刺激
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495419
G. Murillo
An overview on nanogenerators and energy harvesting systems applied to electrical stimulation of electroactive cells is introduced in this paper. We have already demonstrated the use of ZnO nanostructures and other piezoelectric materials to stimulate osteoblast-like and muscle cells, by means of the local modulation of their membrane potentials with submicron spatial resolution. This stimulation improved proliferation and accelerated differentiation, and seem to be a great tool for the future bioelectronic nanomedicines. Our research is now focused on the development of biocompatible microdevices that integrate smart materials for wireless stimulation of excitable cells, by means of ultrasound or electromagnetic signals.
综述了用于电活性细胞电刺激的纳米发电机和能量收集系统的研究进展。我们已经展示了使用ZnO纳米结构和其他压电材料来刺激成骨细胞样细胞和肌肉细胞,通过局部调制它们的膜电位,具有亚微米空间分辨率。这种刺激改善了细胞增殖,加速了细胞分化,似乎是未来生物电子纳米医学的重要工具。我们现在的研究重点是开发生物相容性微设备,该设备集成了智能材料,通过超声波或电磁信号对可兴奋细胞进行无线刺激。
{"title":"Nanogenerators and Self-Powered Microdevices Applied to Wireless Electrical Stimulation at Cell Level","authors":"G. Murillo","doi":"10.1109/Transducers50396.2021.9495419","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495419","url":null,"abstract":"An overview on nanogenerators and energy harvesting systems applied to electrical stimulation of electroactive cells is introduced in this paper. We have already demonstrated the use of ZnO nanostructures and other piezoelectric materials to stimulate osteoblast-like and muscle cells, by means of the local modulation of their membrane potentials with submicron spatial resolution. This stimulation improved proliferation and accelerated differentiation, and seem to be a great tool for the future bioelectronic nanomedicines. Our research is now focused on the development of biocompatible microdevices that integrate smart materials for wireless stimulation of excitable cells, by means of ultrasound or electromagnetic signals.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"45 1","pages":"97-100"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81244408","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
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