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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)最新文献

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A Glass-Like Carbon MEMS Strain Sensor 一种类玻璃碳MEMS应变传感器
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495726
Jongmoon Jang, Giulia Panusa, G. Boero, J. Brugger
Glass-like carbon (GC) has been widely used in micronano devices due to its excellent properties such as hardness, biocompatibility, and chemical inertness. In this work we investigate, for the first time, the piezoresistive behavior of GC in view of its potential applications in strain sensors. In particular, we present the structural and electrical properties of SU-8 derived GC thin films together with the fabrication and characterization of GC-based strain sensors. When mechanical displacement is applied to the GC strain sensors, the average gauge factors of the GC piezo-resistors pyrolyzed at 700 and 900°C are 7.3 and 2.0, respectively.
类玻璃碳(GC)由于其优异的硬度、生物相容性和化学惰性等特性,在微纳米器件中得到了广泛的应用。在这项工作中,我们首次研究了气相色谱的压阻行为,考虑到它在应变传感器中的潜在应用。特别地,我们介绍了SU-8衍生气相色谱薄膜的结构和电学性能,以及气相色谱应变传感器的制作和表征。当对GC应变传感器施加机械位移时,在700℃和900℃热解的GC压敏电阻的平均应变系数分别为7.3和2.0。
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引用次数: 0
Pyroelectrically Rechargeable Electret for Continuous Vibration Energy Harvester 用于连续振动能量采集器的热释电可充电驻极体
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495485
Pedro González-Losada, F. Alves, M. Martins, Stephen Mundy, R. Dias, K. Vinayakumar
In this manuscript, the first pyroelectric-based rechargeable electret for continuous energy harvester is reported. The proposed pyroelectric-based electret preparation provides two main advantages 1) Wafer-scale electret production with uniform surface charge density and 2) On-chip rechargeable option for the electret-based energy harvesters and sensors. Pyroelectrically generated surface charges are transferred to the dielectric material placed in contact with the polarized surface of the pyroelectric crystal. A 5 mm thick lithium niobate crystal is used as a pyroelectric material with a temperature gradient of 2.3°C/sec. A Teflon dielectric is used as an electret material with a surface area of 1 cm2 and thickness of $75mu m$. Obtained results from the pyroelectrically prepared electret showed a surface potential of ∼540V with a charging efficiency of 8.9% from the pyroelectric surface potential of 6060V. Obtained results were in good agreement with repeatability and charge stability for >15 days. Our preliminary experiment of energy harvester showed an average power of $1.29mu W$ at 4Hz.
本文报道了第一个用于连续能量收集器的热释电可充电驻极体。所提出的基于热释电的驻极体制备提供了两个主要优点:1)具有均匀表面电荷密度的晶片级驻极体生产;2)基于驻极体的能量收集器和传感器的片上可充电选项。热释电产生的表面电荷转移到与热释电晶体的极化表面接触的介电材料上。采用5mm厚的铌酸锂晶体作为热释电材料,温度梯度为2.3℃/秒。聚四氟乙烯电介质用作驻极体材料,其表面积为1平方厘米,厚度为75 μ m。从热释电制备的驻极体得到的结果表明,在6060V的热释电表面电位下,表面电位为~ 540V,充电效率为8.9%。所得结果符合重复性和电荷稳定性>15天。我们的能量采集器的初步实验显示,在4Hz下,平均功率为1.29美元。
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引用次数: 3
An Energy Harvesting Scheme with Temperature Threshold Triggered Generation for Heat Event Autonomous Monitoring 基于温度阈值触发的热事件自主监测能量收集方案
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495484
Ruofeng Han, Nianying Wang, Qisheng He, Jiachou Wang, Xinxin Li
This paper proposes a temperature threshold triggered energy harvesting scheme for potential monitoring thermal event. The demonstrated prototype comprises a generation cantilever and a bimetallic cantilever that magnetically attract together. When the structure is heated to a pre-set temperature threshold, heat absorption induced bimetallic effect of the bimetallic cantilever will cause sufficiently bend of the generation cantilever to get rid of the magnetic attraction and vibrate freely to generate electricity. After the heat in the bimetallic cantilever is dissipated, the two cantilevers attract together again to return to the original state. Under continual heating, the temperature threshold triggered cycle is repeated to intermittently generate electricity. In this paper, the temperature threshold of the harvester is modeled, and the harvester prototype is fabricated. When triggered at 71°C, the harvester is tested to generate Vpp of 1.14 V and power of 1.077 µW within one cycle.
提出了一种温度阈值触发能量收集方案,用于潜在热事件监测。所演示的原型包括产生悬臂梁和双金属悬臂梁,其磁性吸引在一起。当结构被加热到预先设定的温度阈值时,热吸收引起的双金属悬臂梁的双金属效应会使发电悬臂梁充分弯曲,从而摆脱磁场的吸引,自由振动产生电能。在双金属悬臂中的热量消散后,两个悬臂再次吸引在一起,恢复到原始状态。在持续加热的情况下,重复温度阈值触发循环,间歇发电。本文对收割机的温度阈值进行了建模,并制作了收割机样机。当在71°C触发时,测试采集器在一个周期内产生1.14 V的Vpp和1.077 μ W的功率。
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引用次数: 0
A Silicon MEMS Disk Resonator Oscillator Demonstrating 36 ppt Frequency Stability 演示36 ppt频率稳定性的硅MEMS磁盘谐振振荡器
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495722
Madan Parajuli, G. Sobreviela, Hemin Zhang, A. Seshia
This paper reports experimental results demonstrating excellent short-term frequency stability of 45.6 µLHz (36 ppt@0.4 s integration time) for a bulk acoustic wave (BAW) silicon disk resonator oscillator. The n=4 radial mode of a BAW disk resonator demonstrates an extremely high-quality factor of 1.8*106 at 1.25 MHz. The disk is designed with anchors aligned with nodal locations to minimize anchor damping. The results on the measured short-term frequency stability reported here benchmark favourably relative to the state-of-the-art.
本文报告的实验结果表明,体声波(BAW)硅盘谐振振荡器具有良好的短期频率稳定性,为45.6 μ LHz (36 ppt@0.4 s积分时间)。BAW圆盘谐振器的n=4径向模式在1.25 MHz下具有1.8*106的高质量因数。该盘的锚锚设计与节点位置对齐,以最大限度地减少锚锚阻尼。这里报告的测量短期频率稳定性的结果相对于最先进的基准来说是有利的。
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引用次数: 1
Nanogenerators and Self-Powered Microdevices Applied to Wireless Electrical Stimulation at Cell Level 纳米发电机和自供电微设备应用于细胞水平的无线电刺激
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495419
G. Murillo
An overview on nanogenerators and energy harvesting systems applied to electrical stimulation of electroactive cells is introduced in this paper. We have already demonstrated the use of ZnO nanostructures and other piezoelectric materials to stimulate osteoblast-like and muscle cells, by means of the local modulation of their membrane potentials with submicron spatial resolution. This stimulation improved proliferation and accelerated differentiation, and seem to be a great tool for the future bioelectronic nanomedicines. Our research is now focused on the development of biocompatible microdevices that integrate smart materials for wireless stimulation of excitable cells, by means of ultrasound or electromagnetic signals.
综述了用于电活性细胞电刺激的纳米发电机和能量收集系统的研究进展。我们已经展示了使用ZnO纳米结构和其他压电材料来刺激成骨细胞样细胞和肌肉细胞,通过局部调制它们的膜电位,具有亚微米空间分辨率。这种刺激改善了细胞增殖,加速了细胞分化,似乎是未来生物电子纳米医学的重要工具。我们现在的研究重点是开发生物相容性微设备,该设备集成了智能材料,通过超声波或电磁信号对可兴奋细胞进行无线刺激。
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引用次数: 0
An L-Shaped 2-Dimensional Particle Velocity Sensor l型二维粒子速度传感器
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495596
Zhezheng Zhu, Lingmeng Yang, Wenhan Chang, Chengchen Gao, Y. Hao, Zhenchuan Yang
An L-shaped two-dimensional acoustic particle velocity sensor (APVS), which has integrated two best performing one-dimensional APVS on a single chip is presented. This structure keeps the two sensitive axes exactly orthogonal to each other, avoiding the alignment error. There are no silicon substrate blocking in both sensitive directions, so the flow directions nearby the wires have little differences. As a result, the two axes have equal sensitivity, thus requiring no correction. The measured velocity sensitivity at 1 kHz is 2.53 dB V/Pa, with relative direction sensitivity of 28 dB. Since the total size of the chip is only 4.4 × 4.4 mm, it can detect the 2-D particle velocity at one point.
提出了一种l型二维声粒子速度传感器(APVS),它将两种性能最好的一维声粒子速度传感器集成在一个芯片上。这种结构使两个敏感轴彼此完全正交,避免了对准误差。在两个敏感方向上都没有硅衬底阻挡,因此导线附近的流动方向差异很小。因此,两个轴具有相同的灵敏度,因此不需要校正。测得的1 kHz速度灵敏度为2.53 dB V/Pa,相对方向灵敏度为28 dB。由于芯片的总尺寸仅为4.4 × 4.4 mm,因此可以检测到一点的二维粒子速度。
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引用次数: 1
Heterogeneous LiNbO3/Si Direct Bonding for Wavelength-Dependent Mid-Infrared Imaging 非均相LiNbO3/Si直接键合用于波长相关的中红外成像
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495511
Jikai Xu, Zhihao Ren, Xinmiao Liu, Cheng Xu, Chenxi Wang, Yanhong Tian, Chengkuo Lee
Lithium niobate (LiNbO3) is one of the most important multifunctional materials, which possesses excellent electro-optic and piezoelectric properties, as well as high transmittance in the mid-infrared (mid-IR) wavelength range. In this work, we developed a wet sequential plasma activated method for the heterogeneous direct bonding of single-crystal LiNbO3 and Si with a nanometer-scale (∼6.4 nm) interface. Both surface and interface characterizations are used for the exploration of the bonding mechanism. For the first time, atomic structures of the LiNbO3/Si direct bonding interface have been disclosed. Leveraging this direct bonding method, we creatively integrate the metasurface into the LiNbO3-based nanofluidics for wavelength-dependent imaging. Because of the accurate nanogap control between the nanoantenna and metal reflector, the quadrupole resonance can be well excited. Therefore, the mid-IR imaging with ultrahigh contrast has been achieved in the wavelength of $2.68 mu mathrm{m}, 3.16 mu mathrm{m}$, and $3.61 mumathrm{m}$. Moreover, since the hot spots are completely exposed in the nanochamber, which can be filled with various types of liquids. More images can be designed and presented based on the light-matter interaction and changes of refractive index. Therefore, this hybrid LiNbO3-based nanofluidics has great potential in the applications of switchable optical devices and information encryption.
铌酸锂(LiNbO3)是一种重要的多功能材料,具有优异的电光和压电性能,以及在中红外(中红外)波长范围内的高透射率。在这项工作中,我们开发了一种湿序序等离子体激活方法,用于单晶LiNbO3和Si在纳米尺度(~ 6.4 nm)界面上的非均相直接键合。表面和界面表征都用于探索键合机制。首次揭示了LiNbO3/Si直接键合界面的原子结构。利用这种直接键合方法,我们创造性地将超表面集成到基于linbo3的纳米流体中,用于波长相关成像。由于纳米天线与金属反射器之间的纳米间隙控制精确,可以很好地激发四极谐振。因此,在$2.68 mumathrm{m}、$ 3.16 mumathrm{m}$和$3.61 mumathrm{m}$波长范围内实现了超高对比度的中红外成像。此外,由于热点完全暴露在纳米室中,因此可以填充各种类型的液体。基于光-物质相互作用和折射率的变化可以设计和呈现更多的图像。因此,这种基于linbo3的混合纳米流体在可切换光学器件和信息加密方面具有很大的应用潜力。
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引用次数: 0
Bacterial Force on Nanopillars: Interaction at Single Cell 细菌对纳米柱的作用力:单细胞的相互作用
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495593
Jagriti Singh, Vaibhav Sharma, S. Chandorkar, P. Sen
Despite extensive studies there are contradictory findings regarding effects of nano-topography on bacterial adherence and viability. Here, we report that bacteria have ability to locate nearest pillars, enabling itself to expand and attach, and pulling these pillars towards itself. Two types of nanopillars, namely, Straight pillars (SP) and Conical pillars (CP) were used to investigate the behavior of bacterial cell on surface nano topographies. We calculated that the force applied by the bacteria on these pillars is in the order of few hundred nano-newtons, and most importantly, the magnitude of the applied force depends on the pillar dimensions. Straight pillars are bent significantly compared to sharp-tipped conical pillars, suggesting higher overall mechanical stress in/throughout the bacterial membrane on straight pillars, leading to membrane rupture and ultimately cell death. In the case of bacterial membrane on conical pillars, severe localized stress generated in the membrane, near the regions where pillars contacted the membrane due to small cross-section of conical pillars, pierces the membrane (no bending of pillars) which causes cell death.
尽管进行了广泛的研究,但关于纳米形貌对细菌粘附和生存能力的影响,发现存在矛盾。在这里,我们报道细菌有能力找到最近的柱子,使自己能够扩张和附着,并将这些柱子拉向自己。采用直柱(SP)和锥形柱(CP)两种纳米柱,研究了细菌细胞在纳米表面的行为。我们计算出细菌施加在这些柱子上的力大约是几百纳米牛顿,最重要的是,施加的力的大小取决于柱子的尺寸。与尖锥柱相比,直柱弯曲明显,这表明直柱上细菌膜的整体机械应力更高,导致膜破裂,最终导致细胞死亡。在锥形柱上的细菌膜,由于锥形柱的截面小,在柱与膜接触的区域附近,膜上产生了严重的局部应力,刺穿膜(柱不弯曲),导致细胞死亡。
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引用次数: 1
Development of a Thermo-Computing Platform 热计算平台的开发
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495663
V. Shirmohammadli, B. Bahreyni
There is an increasing demand for the recognition of context from sensor data. This is presently achieved through running complicated statistical signal processing algorithms with significant computing and memory requirements. In order to reduce the complexity and power requirements, unconventional computing platforms are being considered, which rely on the responses of the materials or devices instead of digitizing information and processing them. Herein, for the first time to the best of our knowledge, we propose a thermo-computing platform, which can shift much of the complex computations to the sensors. The proposed platform employs an entirely passive network of thermistors for processing temporal data. We present results that confirm the capability of the thermo-computer in processing data. A thermo-computer was then used for processing benchmark data, and its results are compared against algorithmic programming. The proposed platform, in addition to its use as a thermal computer, can lay the foundation for the development of cognizant sensor that utilize thermistor-like devices, such as MOX multi-gas sensors.
从传感器数据中识别上下文的需求越来越大。目前,这是通过运行复杂的统计信号处理算法来实现的,这需要大量的计算和内存需求。为了降低复杂性和功耗要求,人们正在考虑非传统的计算平台,这种平台依赖于材料或设备的响应,而不是将信息数字化并进行处理。在此,据我们所知,我们首次提出了一个热计算平台,它可以将许多复杂的计算转移到传感器上。所提出的平台采用完全无源的热敏电阻网络来处理时间数据。我们给出的结果证实了热计算机处理数据的能力。然后使用热计算机处理基准数据,并将其结果与算法编程进行比较。该平台除了可以作为热计算机使用外,还可以为利用热敏电阻类器件的认知传感器(如MOX多气体传感器)的发展奠定基础。
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引用次数: 0
Biofunctional and Self-Contractable Silk-Based Sensing Threads 生物功能和自收缩丝绸传感线
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495408
Yating Xie, Keyin Liu, T. Tao
We report a class of biofunctional, self-contractable silk-based electronic threads (e-threads) for skin lifting applications. The e-threads made of silk proteins are hierarchically structured and heterogeneously functionalized towards clinical applications, allowing 1) long-term stability of skin lifting effect, 2) tension sensing, 3) wound inflammatory response reduction and 4) near-infrared heating. The silk e-threads contract by > 18% (adjustable) as it is wetted by body fluid and blood after implantation for effective skin lifting. The e-threads can be used as tension sensor showing excellent responses to contraction, external pressure and bending loading, which allows for real-time monitoring of the lifting stress. As smart medical devices, our work offer insights to smart medical devices for plastic surgery and many other medical applications.
我们报告了一类生物功能,自收缩的基于丝绸的电子线(e-threads)的皮肤提升应用。丝蛋白制成的e线具有分层结构和异构功能化,可实现1)长期稳定的皮肤提升效果,2)张力传感,3)伤口炎症反应减少,4)近红外加热。丝质e线在植入后被体液和血液润湿,收缩> 18%(可调),有效提皮。e螺纹可用作张力传感器,对收缩、外部压力和弯曲载荷具有优异的响应,可以实时监测起升应力。作为智能医疗设备,我们的工作为整形手术和许多其他医疗应用的智能医疗设备提供了见解。
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引用次数: 0
期刊
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
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