2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474441
T. Nakamura, M. Sakata, A. Goryu, M. Ishida, T. Kawano
Here we report vertical metal/silicon dioxide (SiO2) multiwalled microtube arrays as electrical and optical neuroprobes for “optogenetic”. Three-dimensional metal/SiO2-microtube arrays can be fabricated by vapor-liquid-solid (VLS) growth of silicon-wire, followed by the SiO2/metal depositions and the core-silicon etching. As the inside metal, we use iridium (Ir) with a low electrical electrolyte/electrode interfacial impedance in saline. An optical propagation through the Ir/SiO2-tube calculated by finite-difference time-domain (FDTD) method clearly indicates the effect of the inside Ir on the improved locality of light stimuli with the spot diameter of <; 3 μm. These results suggest that the Ir/SiO2-microtube array provides the low-impedance electrode and local optical stimuli with a same alignment, promising a new class of multifunctional neuroprobes for optogenetic.
{"title":"Metal/silicon dioxide microtube improves optical and electrical properties of neuroprobe","authors":"T. Nakamura, M. Sakata, A. Goryu, M. Ishida, T. Kawano","doi":"10.1109/MEMSYS.2013.6474441","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474441","url":null,"abstract":"Here we report vertical metal/silicon dioxide (SiO2) multiwalled microtube arrays as electrical and optical neuroprobes for “optogenetic”. Three-dimensional metal/SiO2-microtube arrays can be fabricated by vapor-liquid-solid (VLS) growth of silicon-wire, followed by the SiO2/metal depositions and the core-silicon etching. As the inside metal, we use iridium (Ir) with a low electrical electrolyte/electrode interfacial impedance in saline. An optical propagation through the Ir/SiO2-tube calculated by finite-difference time-domain (FDTD) method clearly indicates the effect of the inside Ir on the improved locality of light stimuli with the spot diameter of <; 3 μm. These results suggest that the Ir/SiO2-microtube array provides the low-impedance electrode and local optical stimuli with a same alignment, promising a new class of multifunctional neuroprobes for optogenetic.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84311661","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474365
O. Zorlu, S. Turkyilmaz, A. Muhtaroğlu, H. Kulah
This paper presents a MEMS-based electromagnetic (EM) energy harvester for low frequency and low acceleration vibrations. The harvester is an improved version of [1], which operates with the frequency up conversion (FupC) principle. The former structure was composed of a low-frequency diaphragm carrying a magnet and 16 high-frequency cantilevers with coils. In this work, the phase difference between the coil outputs, leading to voltage cancellation in serial connection, has been eliminated by using a single coil placed on a diaphragm. Furthermore, the placement and the volume of the magnetic film have been modified for better magnetic coupling. The RMS values of the generated voltage and delivered power to an equivalent resistive load have been measured as 6.94 mV and 1.2 nW, respectively with 10 Hz, 3 mm peak to peak vibrations (0.6 g acceleration). About 32-fold increase in the peak power output has been demonstrated with the presented energy harvester with respect to the previous work.
{"title":"An electromagnetic energy harvester for low frequency and low-g vibrations with a modified frequency up conversion method","authors":"O. Zorlu, S. Turkyilmaz, A. Muhtaroğlu, H. Kulah","doi":"10.1109/MEMSYS.2013.6474365","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474365","url":null,"abstract":"This paper presents a MEMS-based electromagnetic (EM) energy harvester for low frequency and low acceleration vibrations. The harvester is an improved version of [1], which operates with the frequency up conversion (FupC) principle. The former structure was composed of a low-frequency diaphragm carrying a magnet and 16 high-frequency cantilevers with coils. In this work, the phase difference between the coil outputs, leading to voltage cancellation in serial connection, has been eliminated by using a single coil placed on a diaphragm. Furthermore, the placement and the volume of the magnetic film have been modified for better magnetic coupling. The RMS values of the generated voltage and delivered power to an equivalent resistive load have been measured as 6.94 mV and 1.2 nW, respectively with 10 Hz, 3 mm peak to peak vibrations (0.6 g acceleration). About 32-fold increase in the peak power output has been demonstrated with the presented energy harvester with respect to the previous work.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76856616","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474236
Jungwook Park, Jerome Pine, Yu-Chong Tai
A flexible multi-electrode-array (MEA) with parylene-C (PA-C) cages on PA-C substrate for neural network study in vitro is presented here. 8×8 cage arrays were fabricated on a 10-μm-thick PA-C film. For our use, the array was glued on a 100μm-thick glass substrate for ease of handling. Each cage is to trap an individual neuron to force a close proximity of the neuron to an embedded electrode inside the cage for stimulation and recording. In addition, each neurocage has six tunnels emanating from the cage to allow axons and dendrites to grow outward and form synapses with other trapped neurons. The Electrode inside each neurocage can then be used to stimulate and/or record electrical activity from the trapped cell at any given time. Why thin and flexible? From our previous work, it is learned that manually loading neuron one-by-one into the cage is time-consuming. We then propose to use laser tweezer to do the cell loading from the backside of the array. To facilitate laser tweezer neuron loading, the neurocage array must be transparent and thin. On the other hand, device flexibility facilitates a high-yield fabrication, easy singulation and attachment to almost any substrate for use.
本文提出了一种柔性多电极阵列(MEA)，该阵列具有聚苯乙烯- c (PA-C)笼，在PA-C衬底上进行体外神经网络研究。在10 μm厚的PA-C薄膜上制备了8×8笼形阵列。为了便于操作，我们将阵列粘在100μm厚的玻璃基板上。每个笼子将捕获一个单独的神经元，迫使神经元靠近笼子内的嵌入式电极，以进行刺激和记录。此外，每个神经细胞都有6条通道从笼子里伸出来，让轴突和树突向外生长，并与其他被困的神经元形成突触。然后，每个神经细胞内的电极可以用来刺激和/或记录在任何给定时间被困细胞的电活动。为什么又薄又柔韧?从我们之前的工作中了解到，手动将神经元一个接一个地装入笼中是非常耗时的。然后，我们建议使用激光镊子从阵列的背面进行细胞加载。为了便于激光镊子神经元的加载，神经细胞阵列必须是透明和薄的。另一方面，器件的灵活性促进了高产量的制造，易于模拟和附着在几乎任何基板上使用。
{"title":"Flexible neurocage array for live neural network study","authors":"Jungwook Park, Jerome Pine, Yu-Chong Tai","doi":"10.1109/MEMSYS.2013.6474236","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474236","url":null,"abstract":"A flexible multi-electrode-array (MEA) with parylene-C (PA-C) cages on PA-C substrate for neural network study in vitro is presented here. 8×8 cage arrays were fabricated on a 10-μm-thick PA-C film. For our use, the array was glued on a 100μm-thick glass substrate for ease of handling. Each cage is to trap an individual neuron to force a close proximity of the neuron to an embedded electrode inside the cage for stimulation and recording. In addition, each neurocage has six tunnels emanating from the cage to allow axons and dendrites to grow outward and form synapses with other trapped neurons. The Electrode inside each neurocage can then be used to stimulate and/or record electrical activity from the trapped cell at any given time. Why thin and flexible? From our previous work, it is learned that manually loading neuron one-by-one into the cage is time-consuming. We then propose to use laser tweezer to do the cell loading from the backside of the array. To facilitate laser tweezer neuron loading, the neurocage array must be transparent and thin. On the other hand, device flexibility facilitates a high-yield fabrication, easy singulation and attachment to almost any substrate for use.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81975773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474178
M. Nagai, Y. Hayasaka, T. Kawashima, T. Shibata
An active transporter of particle is essential for mixing, pumping, and separation in microfluidics. We propose an application of cilia of Vorticella as a particle transporter in a microchannel. We apply transport of particle to mix fluid in confined and continuous environments. Two solutions in stationary and dynamic fluids are mixed by Vorticella. In a microchamber, single Vorticella increases the speed of mixing by two orders of magnitude higher than mixing by diffusion. 9 to 15 cells of Vorticella mix the particles in a dynamic fluid. Investigation of individual mixing effect by Vorticella reveal the vertical transport to a flow is effective.
{"title":"Particle transporter using cilia of Vorticella","authors":"M. Nagai, Y. Hayasaka, T. Kawashima, T. Shibata","doi":"10.1109/MEMSYS.2013.6474178","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474178","url":null,"abstract":"An active transporter of particle is essential for mixing, pumping, and separation in microfluidics. We propose an application of cilia of Vorticella as a particle transporter in a microchannel. We apply transport of particle to mix fluid in confined and continuous environments. Two solutions in stationary and dynamic fluids are mixed by Vorticella. In a microchamber, single Vorticella increases the speed of mixing by two orders of magnitude higher than mixing by diffusion. 9 to 15 cells of Vorticella mix the particles in a dynamic fluid. Investigation of individual mixing effect by Vorticella reveal the vertical transport to a flow is effective.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85400594","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474428
J. Chang, Yang Liu, Dongyang Kang, M. Monge, Yu Zhao, Chia-Chen Yu, A. Emami-Neyestanak, J. Weiland, M. Yun, Yu-Chong Tai
Much effort has been put into developing multi-channel retinal prosthetic devices. Currently, even the most advanced prostheses do not have enough channels to provide vision to a desirable level. In this paper, we present a system design and a packaging scheme for a 512-channel intraocular epiretinal implant. Both a wireless power coil (with high transfer efficiency) and a data coil are included for this intraocular system. Simulation of the interference between coils is investigated and the results show that the two coils can be put in a co-planar fashion using two notch filters to minimize interference. The complete package is demonstrated with a mechanical model with a parylene-C flexible circuit board, i.e., parylene flex, to show the placement of the IC chips, discrete components, and coils. It also shows the final folded device after surgical insertion into an eye to save space. The feasibility of the proposed structure has been successfully tested in vivo. Experimentally, the maximum allowable pulling force is measured by a dynamic mechanical analysis (DMA) machine to be 8N, which provides a large safety margin for surgery.
{"title":"Packaging study for a 512-channel intraocular epiretinal implant","authors":"J. Chang, Yang Liu, Dongyang Kang, M. Monge, Yu Zhao, Chia-Chen Yu, A. Emami-Neyestanak, J. Weiland, M. Yun, Yu-Chong Tai","doi":"10.1109/MEMSYS.2013.6474428","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474428","url":null,"abstract":"Much effort has been put into developing multi-channel retinal prosthetic devices. Currently, even the most advanced prostheses do not have enough channels to provide vision to a desirable level. In this paper, we present a system design and a packaging scheme for a 512-channel intraocular epiretinal implant. Both a wireless power coil (with high transfer efficiency) and a data coil are included for this intraocular system. Simulation of the interference between coils is investigated and the results show that the two coils can be put in a co-planar fashion using two notch filters to minimize interference. The complete package is demonstrated with a mechanical model with a parylene-C flexible circuit board, i.e., parylene flex, to show the placement of the IC chips, discrete components, and coils. It also shows the final folded device after surgical insertion into an eye to save space. The feasibility of the proposed structure has been successfully tested in vivo. Experimentally, the maximum allowable pulling force is measured by a dynamic mechanical analysis (DMA) machine to be 8N, which provides a large safety margin for surgery.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85524678","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474305
A. Takei, H. Fujita
Multi-layered systems composed of a rigid thin film and an elastomeric base are ubiquitous in nature and in technology [1,2]. When stress is applied to the system, the surface of the system is often deformed in periodical wrinkle patterns due to the mismatch of the stiffness and the length. As reported in [3,4], the periodical patterns result in functional surfaces, such as smart adhesion, hydrophobic surfaces and diffractive gratings. In this paper, we present a tunable grating and a hydrophobic surface using the wrinkle phenomenon. The device is composed of a rigid layer and an elastomeric chamber. The chamber can be inflated pneumatically using oil, and the strain exerted on the device is controllable. By controlling the strain, we achieved a wrinkle pattern with a 10 μm wavelength whose amplitude is tunable from 1.6 μm to 2.8 μm. With this method, a tunable optical grating has been achieved. We have also created a tunable hydrophobic surface by controlling the surface roughness in two dimensions. The contact angle of a water droplet on the device ranged from 110 degrees to 130 degrees. The device can be fabricated with a transparent and flexible material and does not require electrical wires. This paper presents a range of possibilities for a functional wrinkle structure controlled using a MEMS technique.
{"title":"Wrinkle meets MEMS: Tunable grating and hydrophobic surface","authors":"A. Takei, H. Fujita","doi":"10.1109/MEMSYS.2013.6474305","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474305","url":null,"abstract":"Multi-layered systems composed of a rigid thin film and an elastomeric base are ubiquitous in nature and in technology [1,2]. When stress is applied to the system, the surface of the system is often deformed in periodical wrinkle patterns due to the mismatch of the stiffness and the length. As reported in [3,4], the periodical patterns result in functional surfaces, such as smart adhesion, hydrophobic surfaces and diffractive gratings. In this paper, we present a tunable grating and a hydrophobic surface using the wrinkle phenomenon. The device is composed of a rigid layer and an elastomeric chamber. The chamber can be inflated pneumatically using oil, and the strain exerted on the device is controllable. By controlling the strain, we achieved a wrinkle pattern with a 10 μm wavelength whose amplitude is tunable from 1.6 μm to 2.8 μm. With this method, a tunable optical grating has been achieved. We have also created a tunable hydrophobic surface by controlling the surface roughness in two dimensions. The contact angle of a water droplet on the device ranged from 110 degrees to 130 degrees. The device can be fabricated with a transparent and flexible material and does not require electrical wires. This paper presents a range of possibilities for a functional wrinkle structure controlled using a MEMS technique.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82190149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474270
Huchuan Zhou, P. Kropelnicki, J. Tsai, Chengkuo Lee
An infrared sensor based on a vertically integrated double layer (VIDL) thermopile which comprises of 96 thermocouples on a suspended membrane has been designed and fabricated by a CMOS-compatible process. The properties of this thermopile are characterized. The responsivity (Rs) of the VIDL thermopile is 202.8V/W and the detectivity (D*) of it is 2.85×108 cmHz1/2 W-1.
{"title":"CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers","authors":"Huchuan Zhou, P. Kropelnicki, J. Tsai, Chengkuo Lee","doi":"10.1109/MEMSYS.2013.6474270","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474270","url":null,"abstract":"An infrared sensor based on a vertically integrated double layer (VIDL) thermopile which comprises of 96 thermocouples on a suspended membrane has been designed and fabricated by a CMOS-compatible process. The properties of this thermopile are characterized. The responsivity (Rs) of the VIDL thermopile is 202.8V/W and the detectivity (D*) of it is 2.85×108 cmHz1/2 W-1.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82476543","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474275
N. Piekiel, W. Churaman, C. Morris, L. Currano
Certain porous silicon (PS) structures have demonstrated energetic characteristics when mixed with an appropriate oxidizer [1-4]. However, limited studies on the effect of PS structure on its combustion have been performed. This work investigates how various material properties of PS films; surface area, porosity and pore size, affect the combustion process. With pore sizes in the range of 2.6-5.2 nm and surface area reaching over 900 m2/g, these materials are capable of considerably fast reactions. Combustion characterization is performed through high speed imaging at a rate of 930,000 frames per second. Propagation speeds in the current study range from 300-1950 m/s, and some relationships between the pore characteristics and the propagation velocity are observed.
{"title":"Combustion and material characterization of porous silicon nanoenergetics","authors":"N. Piekiel, W. Churaman, C. Morris, L. Currano","doi":"10.1109/MEMSYS.2013.6474275","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474275","url":null,"abstract":"Certain porous silicon (PS) structures have demonstrated energetic characteristics when mixed with an appropriate oxidizer [1-4]. However, limited studies on the effect of PS structure on its combustion have been performed. This work investigates how various material properties of PS films; surface area, porosity and pore size, affect the combustion process. With pore sizes in the range of 2.6-5.2 nm and surface area reaching over 900 m2/g, these materials are capable of considerably fast reactions. Combustion characterization is performed through high speed imaging at a rate of 930,000 frames per second. Propagation speeds in the current study range from 300-1950 m/s, and some relationships between the pore characteristics and the propagation velocity are observed.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81942576","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474326
Yuerui Lu, A. Lal
The sensitivity of a micro/nano-scale mechanical mass sensor is limited by its frequency stabilities, which are affected by various frequency noises. Typically, device nonlinearity is intentionally avoided, because higher amplitude fluctuations in the nonlinear region could be translated into frequency variability. Here, we successfully used damping nonlinearity bifurcation to stabilize a mechanical membrane oscillator frequency to 0.04 ppm, a reduction by two orders of magnitude over that from linear motion. This method presents a general mechanism for oscillation frequency stabilization. We recently presented a DNA mass sensor with femto-molar sensitivity - coupled with the result in this paper, the sensitivity of the mass sensor could be improved by a factor of two orders of magnitude.
{"title":"Nonlinearity-assisted frequency stabilization for nanowire array membrane oscillator","authors":"Yuerui Lu, A. Lal","doi":"10.1109/MEMSYS.2013.6474326","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474326","url":null,"abstract":"The sensitivity of a micro/nano-scale mechanical mass sensor is limited by its frequency stabilities, which are affected by various frequency noises. Typically, device nonlinearity is intentionally avoided, because higher amplitude fluctuations in the nonlinear region could be translated into frequency variability. Here, we successfully used damping nonlinearity bifurcation to stabilize a mechanical membrane oscillator frequency to 0.04 ppm, a reduction by two orders of magnitude over that from linear motion. This method presents a general mechanism for oscillation frequency stabilization. We recently presented a DNA mass sensor with femto-molar sensitivity - coupled with the result in this paper, the sensitivity of the mass sensor could be improved by a factor of two orders of magnitude.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76361240","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474408
A. Inaba, G. Yoo, Y. Takei, Kiyoshi Matsumoto, I. Shimoyama
We report a gas sensor based on a field-effect transistor (FET) with a graphene channel and ionic liquid (IL) gate. Graphene is supremely sensitive to its surroundings. Owing to the ~1-nm-thick electric double layer, ILs enable low-voltage operation of the FET. In addition, their solubility selectivity for different gases are controllable. Therefore, the proposed sensor selectively detects low concentration gases at low gate voltage. We fabricated the IL-gate FET using graphene grown by chemical vapor deposition. The current-voltage characteristic of the graphene-FET changed in proportion to logarithm of gas concentration. We demonstrated that our device was able to detect at least 30 ppm of ammonia (NH3) and 4000 ppm of carbon dioxide (CO2) at gate voltage below 1 V. The difference between the current-voltage response to NH3 and CO2 indicates the potential for selective gas measurement.
{"title":"A graphene FET gas sensor gated by ionic liquid","authors":"A. Inaba, G. Yoo, Y. Takei, Kiyoshi Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2013.6474408","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474408","url":null,"abstract":"We report a gas sensor based on a field-effect transistor (FET) with a graphene channel and ionic liquid (IL) gate. Graphene is supremely sensitive to its surroundings. Owing to the ~1-nm-thick electric double layer, ILs enable low-voltage operation of the FET. In addition, their solubility selectivity for different gases are controllable. Therefore, the proposed sensor selectively detects low concentration gases at low gate voltage. We fabricated the IL-gate FET using graphene grown by chemical vapor deposition. The current-voltage characteristic of the graphene-FET changed in proportion to logarithm of gas concentration. We demonstrated that our device was able to detect at least 30 ppm of ammonia (NH3) and 4000 ppm of carbon dioxide (CO2) at gate voltage below 1 V. The difference between the current-voltage response to NH3 and CO2 indicates the potential for selective gas measurement.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76437333","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)
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