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Hybrid superconducting photonic-phononic chip for quantum information processing 用于量子信息处理的超导光子-声子混合芯片
Pub Date : 2022-09-01 DOI: 10.1016/j.chip.2022.100016
Xin-Biao Xu , Wei-Ting Wang , Lu-Yan Sun , Chang-Ling Zou

The integration of qubits with long coherence times and functional quantum devices on a single chip, and thus the realization of an all-solid-state quantum computing chip, is an important goal in current experimental research on quantum information processing. Among various quantum platforms, a series of significant progresses have been made in photonic quantum chips and superconducting quantum chips, while both the number of qubits and the complexity of quantum circuits have been increasing. Although these two chip platforms have respective unique advantages and potentials, their shortcomings have been gradually revealed and need to be solved. By introducing phonon-integrated devices, it is possible to combine all unsuspended phononic, photonic, and superconducting quantum devices organically on the same chip to achieve coherent coupling among them. Here, we provide a prospect and a short review on the integrated photonic, superconducting, and hybrid quantum chips for quantum information processing.

将具有长相干时间的量子比特与功能量子器件集成在单个芯片上,从而实现全固态量子计算芯片,是当前量子信息处理实验研究的重要目标。在各种量子平台中,光子量子芯片和超导量子芯片取得了一系列重大进展,量子比特的数量和量子电路的复杂性都在不断增加。虽然这两种芯片平台各自具有独特的优势和潜力,但它们的不足也逐渐显露出来,需要加以解决。通过引入声子集成器件,可以将所有非悬浮的声子、光子和超导量子器件有机地组合在同一芯片上,实现它们之间的相干耦合。本文对用于量子信息处理的集成光子、超导和混合量子芯片进行了展望和简要综述。
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引用次数: 5
Sensitive MoS2 photodetector cell with high air-stability for multifunctional in-sensor computing 灵敏的MoS2光电探测器电池,具有高空气稳定性,用于多功能传感器内计算
Pub Date : 2022-09-01 DOI: 10.1016/j.chip.2022.100023
Dong-Hui Zhao , Zheng-Hao Gu , Tian-Yu Wang , Xiao-Jiao Guo , Xi-Xi Jiang , Min Zhang , Hao Zhu , Lin Chen , Qing-Qing Sun , David Wei Zhang

With the development of artificial intelligence and the Internet of Things, the number of sensory nodes is growing rapidly, leading to the exchange of large quantities of redundant data between sensors and computing units. In-sensor computing schemes, which integrate sensing and processing, have provided a promising route to addressing the sensing/processing bottleneck by reducing power consumption, time delay and hardware redundancy. In this study, an in-sensor computing architecture involving a photoelectronic cell based on a wafer-scale two-dimensional MoS2 thin film was demonstrated. The MoS2 photodetector cell used a top-gate device structure with indium tin oxide (ITO) as the transparent gate electrode, which exhibited high air-stability and a high photoresponsivity (R) up to 555.8 A W–1 at an illumination power density (Pin) of 16.0 µW cm–2 (λ = 500 nm). Additionally, a MoS2 photodetector array with uniform photoresponsive characteristics was achieved. Furthermore, logic gates, including inverter, NAND, and NOR, were achieved based on MoS2 photodetector cells. Such multifunctional and robust in-sensor computing was ascribed to the uniform wafer-scale MoS2 film grown by atomic layer deposition (ALD) and the unique device structure. Because the detection of optical signals and logic operations were achieved through MoS2 photodetector cells with area efficiency, the proposed in-sensor computing device paves the way for potential applications in high-performance, integrated sensing and processing systems.

随着人工智能和物联网的发展,传感器节点数量快速增长,导致传感器与计算单元之间交换大量冗余数据。传感器内计算方案集成了传感和处理,通过降低功耗、时间延迟和硬件冗余,为解决传感/处理瓶颈提供了一条有前途的途径。在本研究中,展示了一种基于晶圆级二维二硫化钼薄膜的光电子电池的传感器内计算架构。MoS2光电探测器电池采用以氧化铟锡(ITO)为透明栅极的顶栅器件结构,在16.0µW cm-2 (λ = 500 nm)的照明功率密度(Pin)下,具有较高的空气稳定性和高达555.8 a W - 1的光响应率(R)。此外,还实现了具有均匀光响应特性的二硫化钼光电探测器阵列。此外,还实现了基于MoS2光电探测器单元的逻辑门,包括逆变器、NAND和NOR。这种多功能和鲁棒的传感器内计算归功于原子层沉积(ALD)生长的均匀晶圆级MoS2薄膜和独特的器件结构。由于光信号的检测和逻辑运算是通过具有面积效率的MoS2光电探测器单元实现的,因此所提出的传感器内计算设备为高性能集成传感和处理系统的潜在应用铺平了道路。
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引用次数: 2
A tassel-type multilayer flexible probe for invasive neural recording 一种用于有创神经记录的流苏型多层柔性探针
Pub Date : 2022-09-01 DOI: 10.1016/j.chip.2022.100024
Zi-Peng Ye , Jing Qi , Yi-Ling Ni , Zhi-Yong Wu , Xiao Xiao , Shi-Sheng Xiong

Invasive neural probes are one of the most critical components in the intracortical neural signal recording system. However, they can cause brain damage and tissue response during and after implantation. Thus, neural probes with high flexibility, biocompatibility, and simple implantation methods are required in brain research. Here we present a novel approach to fabricating a multilayer flexible tassel-type neural probe using low-cost maskless laser direct-write lithography, combined with straightforward release and assembly methods to prepare a whole implantation system. The probe has 32 recording electrodes with an area of 8 × 8 µm2, arranged into two rows of different depths and 16 separated shanks, aiming at the neural signal recording in an extensive range. Polyimide and gold are used as the insulating and conductive layers, respectively. With the help of a polyethylene glycol (PEG) coating, the tassel structure was mechanically enhanced for successful implantation, and our morphology characterization showed that the diameter of the coated probe was less than 50 µm. Mechanical property tests also proved that it had the necessary stiffness for brain implantation. Afterwards, electrochemical tests were carried out, which showed that the probe had a rather low impedance after a simple gold electroplating. Finally, in vivo experiments demonstrated our probe can be successfully used in neural recording.

有创神经探针是皮层内神经信号记录系统中最重要的组成部分之一。然而,它们会在植入期间和植入后引起脑损伤和组织反应。因此,脑研究需要具有高柔韧性、生物相容性、植入方法简单的神经探针。本文提出了一种利用低成本无掩模激光直写光刻技术制造多层柔性流苏型神经探针的新方法,并结合直接释放和组装方法制备了一个完整的植入系统。探头有32个记录电极,面积为8 × 8µm2,排列成两排不同深度和16个分离的柄,旨在大范围记录神经信号。聚酰亚胺和金分别用作绝缘层和导电层。在聚乙二醇(PEG)涂层的帮助下,机械增强了流苏结构,成功植入,我们的形态学表征表明,涂层探针的直径小于50µm。力学性能测试也证明了它具有脑部植入所需的刚度。随后进行了电化学测试,结果表明,探针经过简单的镀金处理后阻抗较低。最后,在体内实验证明我们的探针可以成功地用于神经记录。
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引用次数: 0
The development of laser-produced plasma EUV light source 激光等离子体极紫外光源的研制
Pub Date : 2022-09-01 DOI: 10.1016/j.chip.2022.100019
De-Kun Yang , Du Wang , Qiu-Shi Huang , Yi Song , Jian Wu , Wen-Xue Li , Zhan-Shan Wang , Xia-Hui Tang , Hong-Xing Xu , Sheng Liu , Cheng-Qun Gui

Extreme ultraviolet lithography (EUVL) has been demonstrated to meet the industrial requirements of new-generation semiconductor fabrication. The development of high-power EUV sources is a long-term critical challenge to the implementation of EUVL in high-volume manufacturing (HVM), together with other technologies such as photoresist and mask. Historically, both theoretical studies and experiments have clearly indicated that the CO2 laser-produced plasma (LPP) system is a promising solution for EUVL source, able to realize high conversion efficiency (CE) and output power. Currently, ASML's NXE:3400B EUV scanner configuring CO2 LPP source system has been installed and operated at chipmaker customers. Meanwhile, other research teams have made different progresses in the development of LPP EUV sources. However, in their technologies, some critical areas need to be further improved to meet the requirements of 5 nm node and below. Critically needed improvements include higher laser power, stable droplet generation system and longer collector lifetime. In this paper, we describe the performance characteristics of the laser system, droplet generator and mirror collector for different EUV sources, and also the new development results.

极紫外光刻技术(EUVL)已被证明可以满足新一代半导体制造的工业要求。高功率EUV源的开发是在大批量制造(HVM)中实现EUVL的长期关键挑战,以及其他技术,如光刻胶和掩膜。从历史上看,理论研究和实验都清楚地表明,CO2激光产生等离子体(LPP)系统能够实现高转换效率(CE)和输出功率,是一种很有前途的EUVL光源解决方案。目前,ASML配置CO2 LPP源系统的NXE:3400B EUV扫描仪已在芯片制造商客户中安装和运行。与此同时,其他研究团队在LPP极紫外光源的开发方面也取得了不同的进展。然而,在他们的技术中,一些关键领域需要进一步改进,以满足5nm节点及以下的要求。迫切需要的改进包括更高的激光功率,稳定的液滴产生系统和更长的集热器寿命。本文介绍了不同极紫外光源的激光系统、液滴发生器和反射集热器的性能特点,以及最新的发展成果。
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引用次数: 6
Waveguide-coupled deterministic quantum light sources and post-growth engineering methods for integrated quantum photonics 波导耦合确定性量子光源与集成量子光子学的后生长工程方法
Pub Date : 2022-09-01 DOI: 10.1016/j.chip.2022.100018
Xu-Dong Wang , Yi-Fan Zhu , Ting-Ting Jin , Wei-Wen Ou , Xin Ou , Jia-Xiang Zhang

Integrated photonic quantum circuits (IPQCs) have attracted increasing attention in recent years due to their widespread applications in quantum information science. While the most envisioned quantum technologies such as quantum communications, quantum computer and quantum simulations have placed a strict constraint on the scalability of chip-integrated quantum light sources. By introducing size-confined nanostructures or crystal imperfections, low-dimensional semiconductors have been broadly explored as chip-scale deterministic single-photon sources (SPSs). Thus far a variety of chip-integrated deterministic SPSs have been investigated across both monolithic and hybrid photonic platforms, including molecules, quantum dots, color centers and two-dimensional materials. With the rapid development of the chip-scale generation of single photons with deterministic quantum emitters, the field of IPQCs has raised new challenges and opportunities. In this paper, we highlight recent progress in the development of waveguide-coupled deterministic SPSs towards scalable IPQCs, and review the post-growth tuning techniques that are specifically developed to engineer the optical properties of these WG-coupled SPSs. Future prospects on stringent requirement for the quantum engineering toolbox in the burgeoning field of integrated photonics are also discussed.

近年来,集成光子量子电路由于在量子信息科学中的广泛应用而受到越来越多的关注。虽然量子通信、量子计算机和量子模拟等最具前瞻性的量子技术对芯片集成量子光源的可扩展性施加了严格的限制。通过引入尺寸受限的纳米结构或晶体缺陷,低维半导体作为芯片级确定性单光子源(SPSs)已被广泛探索。到目前为止,已经在单片和混合光子平台上研究了各种芯片集成的确定性量子力学,包括分子、量子点、色心和二维材料。随着具有确定性量子发射体的单光子芯片的快速发展,ipqc领域提出了新的挑战和机遇。在本文中,我们重点介绍了面向可扩展ipqc的波导耦合确定性SPSs的最新进展,并回顾了专门开发用于设计这些wg耦合SPSs光学特性的生长后调谐技术。并对集成光子学领域对量子工程工具箱的严格要求进行了展望。
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引用次数: 1
Adaptive SRM neuron based on NbOx memristive device for neuromorphic computing 基于NbOx记忆装置的自适应SRM神经元神经形态计算
Pub Date : 2022-06-01 DOI: 10.1016/j.chip.2022.100015
Jing-Nan Huang , Tong Wang , He-Ming Huang , Xin Guo

The spike-response model (SRM) describes the adaptive behaviors of a biological neuron in response to repeated or prolonged stimulation, so that SRM neurons can avoid information overload and support neural networks for competitive learning. In this work, an artificial SRM neuron with the leaky integrate-and-fire (LIF) functions and the adaptive threshold is firstly implemented by the volatile memristive device of Pt/NbOx/TiN. By modulating the volatile speed of the device, the threshold of the SRM neuron is adjusted to achieve the adaptive behaviors, such as the refractory period and the lateral inhibition. To demonstrate the function of the SRM neuron, a spiking neural network (SNN) is constructed with the SRM neurons and trained by the unsupervised learning rule, which successfully classifies letters with noises, while a similar SNN with LIF neurons fails. This work demonstrates that the SRM neuron not only emulates the adaptive behaviors of a biological neuron, but also enriches the functionality and unleashes the computational power of SNNs.

spike-response模型(SRM)描述了生物神经元对重复或长时间刺激的自适应行为,使SRM神经元能够避免信息过载,支持神经网络进行竞争性学习。本文首先利用Pt/NbOx/TiN易失性记忆器件实现了一个具有漏失积分与触发(LIF)功能和自适应阈值的人工SRM神经元。通过调节器件的挥发速度,调节SRM神经元的阈值,实现不应期和侧抑制等自适应行为。为了证明SRM神经元的功能,利用SRM神经元构建了一个尖峰神经网络(SNN),并使用无监督学习规则进行训练,该网络成功地对带有噪声的字母进行了分类,而使用LIF神经元的SNN则失败。这项工作表明,SRM神经元不仅模拟了生物神经元的自适应行为,而且丰富了snn的功能,释放了snn的计算能力。
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引用次数: 2
High thermal conductivity and remarkable damping composite gels as thermal interface materials for heat dissipation of chip 高导热性和显著阻尼的复合凝胶作为芯片散热的热界面材料
Pub Date : 2022-06-01 DOI: 10.1016/j.chip.2022.100013
Sheng-Chang Ding , Jian-Feng Fan , Dong-Yi He , Lin-Feng Cai , Xiang-Liang Zeng , Lin-Lin Ren , Guo-Ping Du , Xiao-Liang Zeng , Rong Sun

The emerging applications of composite gels as thermal interface materials (TIMs) for chip heat dissipation in intelligent vehicle and wearable devices require high thermal conductivity and remarkable damping properties. However, thermal conductivity and damping properties are usually correlated and coupled each other. Here, inspired by Maxwell theory and adhesion mechanism of gecko's setae, we present a strategy to fabricate polydimethylsiloxane-based composite gels integrating high thermal conductivity and remarkable damping properties over a broad frequency and temperature range. The multiple relaxation modes of dangling chains and the dynamic interaction between the dangling chains and aluminum fillers can efficiently dissipate the vibration energy, endowing the composite gels with ultrahigh damping property (tan δ > 0.3) over a broad frequency (0.01 – 100 Hz) and temperature range (–50 – 150 °C), which exceeds typical state-of-the-art damping materials. The dangling chains also comfort to the interfaces between polymer matrix and aluminum via van der Waals interaction, resulting in high thermal conductivity (4.72 ± 0.04 W m–1 K–1). Using the polydimethylsiloxane-based composite gel as TIMs, we demonstrate effective heat dissipation in chip operating under vigorous vibrations. We believe that our strategy could be applied to a wide range of composite gels and lead to the development of high-performance composite gels as TIMs for chip heat dissipation.

复合凝胶作为智能汽车和可穿戴设备芯片散热的热界面材料(TIMs)的新兴应用需要高导热性和卓越的阻尼性能。然而,热导率和阻尼性能通常是相互关联和耦合的。在这里,受麦克斯韦理论和壁虎刚毛粘附机理的启发,我们提出了一种制造聚二甲基硅氧烷基复合凝胶的策略,该凝胶在宽频率和宽温度范围内具有高导热性和显著的阻尼性能。悬垂链的多种松弛模式以及悬垂链与铝填料之间的动态相互作用可以有效地耗散振动能量,使复合凝胶具有超高的阻尼性能(tan δ >0.3)在宽频率(0.01 - 100 Hz)和温度范围(- 50 - 150°C),这超过了典型的最先进的阻尼材料。悬垂链还通过范德华相互作用使聚合物基体与铝之间的界面更加舒适,从而获得高导热系数(4.72±0.04 W m-1 K-1)。使用聚二甲基硅氧烷基复合凝胶作为TIMs,我们证明了芯片在剧烈振动下的有效散热。我们相信我们的策略可以应用于广泛的复合凝胶,并导致高性能复合凝胶作为芯片散热的TIMs的发展。
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引用次数: 15
Classical and quantum photonic sources based upon a nonlinear GaP/Si-superlattice micro-ring resonator 基于非线性GaP/ si超晶格微环谐振器的经典和量子光子源
Pub Date : 2022-06-01 DOI: 10.1016/j.chip.2022.100011
Richard Soref (Life Fellow IEEE) , Francesco De Leonardis

We present a theoretical investigation, based on the tight-binding Hamiltonian, of efficient second- and third-order nonlinear optical processes in the lattice-matched undoped (GaP)N/(Si2)M short-period superlattice that is waveguide-integrated in a microring resonator on an opto-electronic chip. The nonlinear superlattice structures are situated on the optically pumped input area of a heterogeneous “XOI” chip based on silicon. The spectra of χzzz(2)(2ω,ω,ω), χxzx(2)(2ω,ω,ω), χxxxx(3)(3ω,ω,ω,ω) and the Kerr refractive index (n2), have been simulated as a function of the number of the atomic monolayers for “non-relaxed” heterointerfaces; These nonlinearities are induced by transitions between valence and conduction bands. The large obtained values make the (GaP)N/(Si2)M short-period superlattice a good candidate for future high-performance XOI photonic integrated chips that may include Si3N4 or SiC or AlGaAs or Si. Near or at the 810-nm and 1550-nm wavelengths, we have made detailed calculations of the efficiency of second- and third-harmonic generation as well as the performances of entangled photon-pair quantum sources that are based upon spontaneous parametric down conversion and spontaneous four-wave mixing. The results indicate that the (GaP)N/(Si2)M short-period superlattice is competitive with present technologies and is practical for classical and quantum applications.

本文基于紧密结合的哈密顿量,对波导集成在光电芯片微环谐振器中的晶格匹配未掺杂(GaP)N/(Si2)M短周期超晶格中有效的二阶和三阶非线性光学过程进行了理论研究。非线性超晶格结构位于硅基非均相“XOI”芯片的光泵浦输入区。模拟了χzzz(2)(2ω,ω,ω)、χxzx(2)(2ω,ω,ω)、χxxxx(3)(3ω,ω,ω,ω)的光谱和Kerr折射率(n2)作为“非松弛”异质界面原子单层数的函数;这些非线性是由价带和导带之间的跃迁引起的。获得的大数值使(GaP)N/(Si2)M短周期超晶格成为未来高性能XOI光子集成芯片的良好候选者,该芯片可能包括Si3N4或SiC或AlGaAs或Si。在810nm和1550nm波长附近,我们详细计算了基于自发参数下转换和自发四波混频的纠缠光子对量子源的二次和三次谐波产生效率。结果表明,(GaP)N/(Si2)M短周期超晶格与现有技术相比具有竞争力,在经典和量子应用中具有实用性。
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引用次数: 3
Quantum advantage with membosonsampling memboson采样的量子优势
Pub Date : 2022-06-01 DOI: 10.1016/j.chip.2022.100007
Jun Gao , Xiao-Wei Wang , Wen-Hao Zhou , Zhi-Qiang Jiao , Ruo-Jing Ren , Yu-Xuan Fu , Lu-Feng Qiao , Xiao-Yun Xu , Chao-Ni Zhang , Xiao-Ling Pang , Hang Li , Yao Wang , Xian-Min Jin

Quantum computer, harnessing quantum superposition to boost a parallel computational power, promises to outperform its classical counterparts and offer an exponentially increased scaling. The term “quantum advantage” was proposed to mark the key point when people can solve a classically intractable problem by artificially controlling a quantum system in an unprecedented scale, even without error correction or known practical applications. Boson sampling, a problem about quantum evolutions of multi-photons on multimode photonic networks, as well as its variants, has been considered as a promising candidate to reach this milestone. However, the current photonic platforms suffer from the scaling problems, both in photon numbers and circuit modes. Here, we propose a new variant of the problem, membosonsampling, exploiting the scaling of the problem can be in principle extended to a large scale. We experimentally verify the scheme on a self-looped photonic chip inspired by memristor, and obtain multi-photon registrations up to 56-fold in 750,000 modes with a Hilbert space up to 10254. The results exhibit an integrated and cost-efficient shortcut stepping into the “quantum advantage” regime in a photonic system far beyond previous scenarios, and provide a scalable and controllable platform for quantum information processing.

量子计算机利用量子叠加来提高并行计算能力,有望超越经典计算机,并提供指数级增长的扩展。“量子优势”一词的提出,标志着人们可以在没有纠错或已知实际应用的情况下,通过在前所未有的规模上人工控制量子系统来解决经典棘手问题的关键点。玻色子采样,一个关于多模光子网络上多光子的量子演化问题,以及它的变体,被认为是一个有希望达到这一里程碑的候选者。然而,目前的光子平台在光子数和电路模式上都存在缩放问题。在此,我们提出了该问题的一种新变体——membosonsampling,利用该问题的尺度性原则上可以扩展到更大的尺度。我们在记忆电阻启发的自环光子芯片上实验验证了该方案,并在750,000模式下获得了高达56倍的多光子配准,希尔伯特空间高达10254。该结果展示了一种集成的、成本效益高的捷径,在光子系统中进入“量子优势”状态,远远超出了以前的场景,并为量子信息处理提供了一个可扩展和可控的平台。
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引用次数: 9
The trend of emerging non-volatile TCAM for parallel search and AI applications 并行搜索和人工智能应用中出现的非易失性TCAM的趋势
Pub Date : 2022-06-01 DOI: 10.1016/j.chip.2022.100012
Ke-Ji Zhou , Chen Mu , Bo Wen , Xu-Meng Zhang , Guang-Jian Wu , Can Li , Hao Jiang , Xiao-Yong Xue , Shang Tang , Chi-Xiao Chen , Qi Liu

In this paper, we review the recent trends in parallel search and artificial intelligence (AI) applications using emerging non-volatile ternary content addressable memory (TCAM). Firstly, the principle and development of four typical emerging memory used to implement the non-volatile TCAM are discussed. Then, we analyze the principle and challenges of SRAM-based TCAM and non-volatile TCAM for the parallel search. Finally, the research trends and challenges of non-volatile TCAM used for AI application are presented, which include computer-science oriented and neuroscience oriented computing.

在本文中,我们回顾了使用新兴的非易失性三元内容可寻址存储器(TCAM)的并行搜索和人工智能(AI)应用的最新趋势。首先,讨论了用于实现非易失性TCAM的四种典型新兴存储器的原理和发展。然后,分析了基于sram的TCAM和非易失性TCAM并行搜索的原理和挑战。最后,提出了用于人工智能应用的非易失性TCAM的研究趋势和挑战,包括面向计算机科学和面向神经科学的计算。
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引用次数: 3
期刊
Chip
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