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2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems最新文献

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Mechanical properties of intermetallics formed during thermal aging of Cu-Al ball bonds Cu-Al球键热时效形成的金属间化合物的力学性能
M.H.M. Koutersa, G.H.M. Gubbelsa, O. O'Halloranb, R. Rongenb, E.R. Weltevredena
In high power automotive electronics copper wire bonding is regarded as most promising alternative for gold wire bonding in 1st level interconnects and therefore subjected to severe functional requirements. In the Cu-Al ball bond interface the growth of intermetallic compounds may deteriorate the wire bond. The thermo-mechanical properties of these intermetallic compounds are crucial in the prediction of the long term behavior. To determine the mechanical properties diffusion couples were aged and 5 separate intermetallic compounds were melted using the pure elements Cu and Al. These samples were annealed in vacuum at high temperature and chemically analyzed in order to identify the intermetallic compounds. The measured hardness, indentation Young's moduli and densities of these intermetallic compounds are presented. Consequences of the thermo-mechanical properties of the intermetallic compounds are crucial for the prediction of the long term mechanical behavior of Cu-Al ball bonds.
在大功率汽车电子中,铜线键合被认为是一级互连中最有前途的金线键合替代品,因此受到严格的功能要求。在Cu-Al球键界面中,金属间化合物的生长会使线键恶化。这些金属间化合物的热机械性能对预测其长期行为至关重要。为了确定合金的力学性能,对合金的扩散偶进行时效处理,并采用纯元素Cu和Al熔炼5种不同的金属间化合物,对样品进行高温真空退火和化学分析,以鉴定金属间化合物。给出了这些金属间化合物的硬度、压痕杨氏模量和密度。金属间化合物热机械性能的结果对于预测Cu-Al球键的长期力学行为至关重要。
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引用次数: 7
A substructure method for strip level warpage simulation of a power module in assembly process 一种用于电源模块装配过程中带材翘曲仿真的子结构方法
Jianghai Gu, L. Liang, Y. Liu
A substructural method is developed to simulate the strip level warpage of a power module in assembly process. The comparison between substructure and non-substructure methods is presented and discussed. Parametric design of experimental (DoE) study on low side (LS) and high side (HS) die thickness, epoxy mold compound (EMC) thicknenss, as well the Young's modulus Ez of prepreg and Young's modulus of EMC is conducted in the simulation.
提出了一种模拟电源模块装配过程中带材翘曲的子结构方法。对子结构法和非子结构法进行了比较和讨论。仿真中进行了低侧(LS)和高侧(HS)模具厚度、环氧模料(EMC)厚度、预浸料的杨氏模量Ez和EMC的杨氏模量的参数化设计实验(DoE)研究。
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引用次数: 1
Modelling aluminium wire bond reliability in high power OMP devices 高功率OMP器件中铝线键合可靠性建模
R. Kregting, C. Yuan, A. Xiao, F. de Bruijn
In a RF power application such as the OMP, the wires are subjected to high current (because of the high power) and high temperature (because of the heat from IC and joule-heating from the wire itself). Moreover, the wire shape is essential to the RF performance. Hence, the aluminium wire is preferred and wedge-wedge wire bonding is widely used. As a result of poor wire shape design, wedge break can be found. Additionally, for the in-shin wires, which are typically very high and can reach high temperatures, failure by wire melting can be reached.
在射频电源应用(如OMP)中,导线承受大电流(由于高功率)和高温(由于IC的热量和导线本身的焦耳加热)。此外,导线形状对射频性能至关重要。因此,首选铝线,楔-楔焊线被广泛使用。由于线材形状设计不良,会出现楔断现象。此外,对于通常非常高且可以达到高温的shin线,可能会因线熔化而失效。
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引用次数: 3
Simulation environment for MEMS sensors and actuators MEMS传感器和执行器的仿真环境
M. Kaltenbacher, H. Kock
The design of modern sensors, actuators as well as sensor-actuators systems, which are often Micro-Electro-Mechanical Systems (MEMS), strongly depends on the availability of appropriate computer aided engineering (CAE) tools, since the fabrication of each prototype is quite costly. We preset such a CAE tool, which solves the underlying system of partial di#erential equations (PDEs) by the Finite Element (FE) method. As a practical example we present investigations for a capacitive micromachined ultrasound transducers (CMUTs) as used for ultrasound imaging. Furthermore, we discuss a homogenization approach for the integrated power electronic structures on such a MEMS transducer to allow for a thermal simulation of the whole device.
现代传感器、致动器以及传感器致动器系统的设计,通常是微机电系统(MEMS),在很大程度上依赖于适当的计算机辅助工程(CAE)工具的可用性,因为每个原型的制造都非常昂贵。我们预先设置了这样一个CAE工具,它通过有限元(FE)方法解决了偏微分方程(PDEs)的底层系统。作为一个实际的例子,我们提出了一种用于超声成像的电容式微机械超声换能器(CMUTs)的研究。此外,我们讨论了在这种MEMS传感器上集成电力电子结构的均匀化方法,以允许整个器件的热模拟。
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引用次数: 2
Improving the solderability and electromigration behavior of Low-Ag SnAgCu soldering 改善低银SnAgCu钎焊的可焊性和电迁移行为
Sun Fenglian, Liu Yang, Wang Jiabing
Compared with widely used SAC305 (Sn-3.0Ag-0.5Cu) solder, low-Ag (Ag≤1%) SAC solder obviously shows advantages in cost and mechanical impact resistance, and disadvantages in worse wettability, higher melting point and degeneration in electromigration, which restrict its application. Therefore, adding some suitable elements to the solder to improve the solderability and mechanical performance is very important for applications. In this paper, the solderability and electromigration behavior of Low-Ag SAC solder were studied. The effect of adding Bi and Ni elements on the wettability, melting temperature and electromigration properties of SAC0705 (Sn-0.7Ag-0.5Cu) soldering on Cu pad were analysed by SEM and DSC investigations. Results indicate that addition of some Bi and Ni elements into SAC0705 could decrease the peak melting point of the solder, improve the wettability of solder on Cu pad obviously, and decrease the IMC grain size in interface. In addition, adding some Bi and Ni elements could restrict the electromigration behavior under high temperature and high density current stressing. It is found that the thermal condition has much more influence on electromigartion behavior. The IMC polarized distribution and copper consumption aggravate sharply under higher temperature and high density current stressing condition.
与广泛使用的SAC305 (Sn-3.0Ag-0.5Cu)焊料相比,低银(Ag≤1%)SAC焊料在成本和机械抗冲击性方面具有明显优势,但在润湿性差、熔点高、电迁移退化等方面存在缺点,制约了其应用。因此,在焊料中加入一些合适的元素,以提高可焊性和机械性能,对于应用是非常重要的。本文研究了低银SAC焊料的可焊性和电迁移行为。通过SEM和DSC分析了添加Bi和Ni元素对SAC0705 (Sn-0.7Ag-0.5Cu)钎料润湿性、熔化温度和电迁移性能的影响。结果表明,在SAC0705中加入一定的Bi和Ni元素,可以降低钎料的峰值熔点,明显提高钎料在Cu焊盘上的润湿性,减小界面IMC晶粒尺寸。此外,添加一定的Bi和Ni元素可以限制高温和高密度电流应力下的电迁移行为。发现热条件对电迁移行为的影响更大。在高温和高密度电流应力条件下,IMC极化分布和铜消耗急剧加剧。
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引用次数: 14
Mechanical model of a MEMS inertial rotational gyroscope MEMS 惯性旋转陀螺仪的机械模型
F. Braghin, E. Leo, F. Resta, Stefano Cerra
The verification phase (Final Test) of inertial MEMS gyroscopes design properties takes a basic role in the sensors production. It's during this phase that devices are tested to reveal their effectiveness in the survey of the angular rate. The verification phase is based on a set of several tests able to evaluate the gyroscope characteristic properties, such as the resonance frequency, the quality factor, the quadrature error, and the gyroscope sensitivity. The main goal of the Final Test is to identify characteristic parameters as far as possible in order to save money: actually each gyroscope has to be tested before putting it on the market. The test bench used during the Final Test phase will be proposed as well as a new experimental procedure able to fast identify characteristic parameters. This new testing procedure has been applied both for single-axis and double-axis gyroscopes. The results achieved has been compared with a more accurate (but slower) experimental procedure.
惯性 MEMS 陀螺仪设计特性的验证阶段(最终测试)是传感器生产的基础。在这一阶段,要对设备进行测试,以揭示其在角速率测量中的有效性。验证阶段基于一系列能够评估陀螺仪特性的测试,如共振频率、品质因数、正交误差和陀螺仪灵敏度。最终测试的主要目的是尽可能确定特性参数,以节省成本:实际上,每台陀螺仪在投放市场之前都必须经过测试。最终测试阶段使用的测试台以及能够快速确定特征参数的新实验程序将被提出。这种新的测试程序既适用于单轴陀螺仪,也适用于双轴陀螺仪。所取得的结果与更精确(但更慢)的实验程序进行了比较。
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引用次数: 1
Thermal mechanical modeling and assessment for a novel power system module with vertical input capacitor 一种新型垂直输入电容电力系统模块的热力学建模与评估
R. Qian, Yumin Liu, Y. Liu, Steve Martin, O. Jeon
In this paper, a novel power system module (PSM) is developed by integrating the vertical input capacitor inside the package. Comparing with the traditional PSM, the novel PSM has better electrical performance with less parasitic inductance and switching loss, due to a small loop from the input capacitor to the MOSFETs. A comprehensive modeling study is carried out to assess the assembly stress, thermal performance and reliability performance of the novel PSM. The impact of input capacitor height of the novel PSM is studied by building models with different input capacitor height designs. The modeling of the traditional PSM without the input capacitor is also conducted for comparison. The molding cure process is simulated to study the thermal stress induced by the CTE mismatch of different materials. The non-linear elastic plastic material constitutive model is applied to solder, clip and lead frame. The stress on die, solder paste and solder bump is evaluated and analyzed. Thermal characterization of all the package models is conducted to calculate the thermal resistance Rthja according to the JEDEC standards. The matrix method is used to obtain the thermal resistance of all dies, by applying power on different dies separately. The reliability performance is simulated and compared for all package models, including the autoclave (ACLV) test and preconditioning test. An equivalent CTE method is used to simulate the total stress after the ACLV and reflow process, including the hygroscopic stress, vapor pressure induced stress, and the CTE mismatch induced stress. Finally, the possible failure modes of the novel PSM are discussed.
本文设计了一种新型的电源系统模块(PSM),将垂直输入电容集成在封装内部。与传统的PSM相比,由于从输入电容到mosfet的环路较小,新型PSM具有更小的寄生电感和开关损耗,具有更好的电性能。对新型永磁同步电机的装配应力、热性能和可靠性进行了全面的建模研究。通过建立不同输入电容高度设计的模型,研究了输入电容高度对新型永磁同步电机的影响。并对不带输入电容的传统PSM进行了建模比较。模拟成型固化过程,研究不同材料CTE错配引起的热应力。将非线性弹塑性材料本构模型应用于焊料、夹片和引线框架。对模具、焊膏和凸点的应力进行了评估和分析。根据JEDEC标准,对所有封装模型进行热表征,计算热阻Rthja。采用矩阵法对不同的模具分别通电,得到各模具的热阻。对所有封装模型的可靠性性能进行了仿真和比较,包括高压灭菌器(ACLV)试验和预处理试验。采用等效CTE方法模拟了ACLV和回流过程后的总应力,包括吸湿应力、蒸汽压诱导应力和CTE失配诱导应力。最后,讨论了新型永磁同步电机的可能失效模式。
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引用次数: 2
Buckling analysis of carbon nanotubes and the influence of defect position 碳纳米管屈曲分析及缺陷位置的影响
R. Poelma, H. Sadeghian, S. Koh, G.Q. Zhang
In this paper, the buckling behavior of fixed-fixed, both single- and multi- wall carbon nanotubes (CNTs) under axial compressive loads, are studied using analytical continuum theory and molecular dynamics (MD). An approach based on the tethering of atoms, is used to apply the boundary conditions and extract the reaction forces during the MD simulation. Both the analytical and the MD results agree well for slender CNTs (length=diameter = L/D ≥ 9), that show global buckling. The critical buckling load of non slender CNTs (L/D < 9) is overestimated by the analytical model due to the local buckling. Moreover, the effects of the vacancy defect position on the critical buckling load are studied at room temperature and at low temperature (1 K). It is concluded that the defects at the ends of the CNT and close to the middle of the CNT significantly reduce the critical buckling load and strain of CNTs at 1 K. However, the influence of vacancy defects on the critical buckling load and strain appears to be small at room temperature. The MD results can be used for developing more computationally efficient and accurate continuum descriptions of the CNT mechanics in future work.
本文采用解析连续介质理论和分子动力学方法研究了固定-固定单壁和多壁碳纳米管在轴向压缩载荷作用下的屈曲行为。在模拟过程中,采用了基于原子系缚的方法来应用边界条件和提取反作用力。对于细长的CNTs(长度=直径= L/D≥9),分析结果和MD结果一致,均表现出全局屈曲。非细长CNTs的临界屈曲载荷(L/D <9)由于局部屈曲的原因,解析模型过高估计。在室温和低温(1 K)下,研究了空位缺陷位置对临界屈曲载荷的影响。结果表明,碳纳米管末端和靠近碳纳米管中部的缺陷显著降低了碳纳米管在1 K时的临界屈曲载荷和应变。然而,在室温下,空位缺陷对临界屈曲载荷和应变的影响很小。该结果可用于在未来的工作中开发更有效和准确的碳纳米管力学连续体描述。
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引用次数: 1
Thermal performance analysis of photoelectric parameters on high-power LEDs packaging modules 大功率led封装模组光电参数热性能分析
Lei Liu, Daoguo Yang, G.Q. Zhang, Zhi You, Fengze Hou, Dongjing Liu
Compared with incandescent lamps and fluorescent lamps, nowadays LEDs (Light Emitting Diodes) are power saving, environment-friendly, and have the advantages of long lifetime and flexible color output. Therefore, LEDs are being widely used in many fields. In this paper, three high-power LEDs packaging modules with different packaging structures were selected to do the performance analysis based on the experiments. In the measurement, the LED junction temperature was controlled at seven levels (25°C, 50°C, 65°C, 75°C, 85°C, 95C, 100°C) in sequence. The thermal variation of some photoelectric parameters for LED packaging modules, such as forward voltage, relative flux output, correlated color temperature (CCT), color rending index (Ra), luminous efficiency and spectrum, were focused on and analyzed here. The experimental results demonstrated that the luminous flux, luminous efficacy and forward voltage of LEDs decreased with the increase of the junction temperature, but these three LEDs packaging modules have different varieties on CRI, CCT and spectrum. The related reasons were analyzed briefly in this paper.
与白炽灯和荧光灯相比,如今的led (Light Emitting Diodes)具有节能、环保、寿命长、颜色输出灵活等优点。因此,led在许多领域得到了广泛的应用。本文在实验的基础上,选取了三种不同封装结构的大功率led封装模块进行性能分析。在测量中,LED结温被依次控制在25°C、50°C、65°C、75°C、85°C、95°C、100°C七个级别。重点分析了LED封装模块的正向电压、相对磁通输出、相关色温(CCT)、显色指数(Ra)、发光效率和光谱等光电参数的热变化规律。实验结果表明,随着结温的升高,led的光通量、光效和正向电压均有所降低,但这三种led封装模块在CRI、CCT和光谱上有不同的变化。本文简要分析了相关原因。
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引用次数: 10
Low cycle fatigue crack growth in nanostructure copper 纳米结构铜的低周疲劳裂纹扩展
S. Koh, A. Saxena, W. V. van Driel, G.Q. Zhang, R. Tummala
ITRS has predicted that integrated chip (IC) packages will have interconnections with I/O pitch of 90 nm by the year 2018. Lead-based solder materials in flip chip technology will not be able to satisfy the thermal mechanical requirement these fine pitches. Of all the known interconnect technologies, nanostructure interconnects such as nanocrystalline Cu are the most promising technology to meet the high mechanical reliability and electrical requirements of next generation devices. However, there is a need to fully characterize their fatigue properties. In this research, numerical analysis has been employed to study the semi-elliptical crack growth and shape evolution in nanostructured interconnects subject to uniaxial fatigue loading. The results indicate that nanocrystalline copper is in fact a suitable candidate for ultra-fine pitch interconnects applications. This study also predicts that crack growth is a relatively small portion of the total fatigue life of interconnects under LCF conditions. Hence, crack initiation life is the main factor in determining the fatigue life of interconnects.
ITRS预测,到2018年,集成芯片(IC)封装的I/O间距将达到90纳米。在倒装芯片技术中,铅基焊料材料将无法满足这些细间距的热机械要求。在所有已知的互连技术中,纳米结构互连如纳米晶铜是最有前途的技术,以满足下一代设备的高机械可靠性和电气要求。然而,有必要充分表征其疲劳性能。在本研究中,采用数值分析方法研究了纳米结构互连在单轴疲劳载荷作用下的半椭圆裂纹扩展和形态演化。结果表明,纳米晶铜实际上是超细间距互连应用的合适候选材料。该研究还预测,在LCF条件下,裂纹扩展在互连体总疲劳寿命中所占的比例相对较小。因此,裂纹起裂寿命是决定连接件疲劳寿命的主要因素。
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引用次数: 2
期刊
2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
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