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High-Speed Electro-Optic Plasmonic Modulator for CMOS Non-Contact Wafer-Level Testing 用于 CMOS 非接触式晶片级测试的高速电光等离子体调制器
IF 4.3 2区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-02 DOI: 10.1109/JSTQE.2024.3437193
Maryam Sadat Amiri Naeini;Pierre Berini
Wafer-level testing is an important step for process and quality control of electronic chips in integrated circuit (IC) manufacturing which occurs before packaging. The process of wafer probing in its conventional contacting schemes, becomes more complicated as ICs move to smaller technology nodes and more compact designs, greatly increasing testing costs. Non-contact optical wafer probing can overcome physical probing complications, reducing costs, and increasing throughput and reliability. In this article, a CMOS compatible, broadband (22 GHz), small footprint (5 μm dia.) plasmonic electro-optic modulator of low insertion loss (4 dB) and wide optical working bandwidth (100 nm) is proposed and demonstrated as a potential solution for wafer-level optical testing. The device modulates in reflection an incident optical carrier emerging from an optical fiber in a non-contact arrangement, to work as a data output channel from the wafer. A modulation depth of over 2% is achieved which should be sufficient to meet the requirements of wafer-level testing. The device can be placed anywhere on wafer.
晶圆级测试是集成电路(IC)制造中电子芯片封装前进行工艺和质量控制的重要步骤。随着集成电路向更小的技术节点和更紧凑的设计发展,采用传统接触方案的晶圆探测过程变得更加复杂,从而大大增加了测试成本。非接触式光学晶圆探测可以克服物理探测的复杂性,降低成本,提高产量和可靠性。本文提出并演示了一种与 CMOS 兼容、宽带(22 GHz)、小尺寸(5 μm 直径)、低插入损耗(4 dB)和宽光学工作带宽(100 nm)的等离子体电光调制器,作为晶圆级光学测试的潜在解决方案。该装置以非接触方式对光纤中出现的入射光载波进行反射调制,以作为晶圆的数据输出通道。调制深度超过 2%,足以满足晶圆级测试的要求。该装置可放置在晶片的任何位置。
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引用次数: 0
Thermo-Optical Modulation of PPLN Crystal for Tunable Poisson Spot Array 用于可调泊松光斑阵列的 PPLN 晶体的热光调制
IF 4.3 2区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-29 DOI: 10.1109/JSTQE.2024.3434659
Nicolo Incardona;Jaromir Behal;Veronica Vespini;Sara Coppola;Vittorio Bianco;Lisa Miccio;Simonetta Grilli;Manuel Martinez-Corral;Pietro Ferraro
Lithium Niobate is a ferroelectric material with interesting physical properties. In particular, Periodically Poled Lithium Niobate (PPLN) crystals have been used in diverse applications, such as non-linear optics or microlens array fabrication. In this work, we used a PPLN crystal having hexagonal reversed polarization domains, disposed on a square array of 200 µm period. We applied a temperature gradient to the PPLN and simultaneously observed it with a lensless incoherent holographic microscope. We observed that the phase of the inverse polarization domains varied depending on the temperature applied. Therefore, we induced a thermo-optical modulation of the PPLN crystal. We further analysed the behaviour of the PPLN, propagating the complex field beyond the crystal and plotting its intensity. We found that an elongated bright spot was formed at the centre of each hexagonal reversed polarization domain, due to diffraction. Given their shape and the nature of the phenomenon, these intensity spots are similar to Poisson spots. The intensity of the spots depended on the phase of the PPLN (hence, on the temperature applied). Therefore, we were able to generate a tunable Poisson spot array by controlling the temperature of the PPLN.
铌酸锂是一种具有有趣物理特性的铁电材料。其中,周期极化铌酸锂晶体(PPLN)已被广泛应用于非线性光学或微型透镜阵列制造等领域。在这项工作中,我们使用了一种具有六角形反向极化畴的 PPLN 晶体,并将其布置在周期为 200 微米的正方形阵列上。我们在 PPLN 上施加温度梯度,同时使用无透镜非相干全息显微镜对其进行观察。我们观察到,反偏振域的相位随温度的变化而变化。因此,我们对 PPLN 晶体进行了热光学调制。我们进一步分析了 PPLN 的行为,将复合场传播到晶体之外并绘制其强度图。我们发现,由于衍射作用,每个六边形反向极化域的中心都形成了一个拉长的亮点。鉴于其形状和现象的性质,这些亮斑类似于泊松斑。光斑的强度取决于 PPLN 的相位(因此也取决于应用的温度)。因此,我们能够通过控制 PPLN 的温度来生成可调泊松光斑阵列。
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引用次数: 0
Lattice Matched Tunable Wavelength GeSn Quantum Well Laser Architecture: Theoretical Investigation 晶格匹配可调谐波长 GeSn 量子阱激光器结构:理论研究
IF 4.3 2区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-29 DOI: 10.1109/JSTQE.2024.3434581
Rutwik Joshi;Luke F. Lester;Mantu K. Hudait
In this work, we propose aninitial framework and present numerical estimates for designing a GeSn-based quantum well (QW) laser that can attain efficient lasing, while utilizing a monolithic lattice matched (LM) InGaAs/GeSn/InGaAs stack. GeSn QW emission characteristics depend significantly on the quantized energy level as the bulk bandgap reduces and approaches zero for high Sn. One factor that diminishes the quantum efficiency of light sources is the defects present within the active region, which result in non-radiative recombination. Furthermore, defects at the interface can hinder the band alignment causing loss of carrier confinement. InGaAs, InAlAs and a well-designed LGB can provide large band offsets with GeSn to form a type I separate confinement heterostructure (SCH) QW laser structure while enabling a virtually defect-free active region suitable for room temperature operation and scalable to an arbitrary number of QWs. When LM, the InAlAs and InGaAs layers provide a large total band offset of ∼1.1eV and ∼0.6eV, respectively. For a 10 nm GeSn QW SCH laser, a threshold current (JTH) of ∼10 A/cm2 can be achieved at an emission wavelength of ∼2.6 μm with a net material and modal gain of ∼3000 cm−1 and ∼40 cm−1, respectively. The JTH and net gain can be optimized for the InAlAs/InGaAs/GeSn/InGaAs/InAlAs SCH laser structure for Sn between 8--18% by adaptively designing the SCH waveguide and QW. Through adaptive waveguide design, quantization, and Sn alloying, a wide application space (1.2 μm to 6 μm) can be covered.
在这项工作中,我们提出了一个初步框架,并给出了设计基于锗硒的量子阱(QW)激光器的数值估算,该激光器可以实现高效率的激光,同时利用单片晶格匹配(LM)InGaAs/GeSn/InGaAs 叠层。GeSn QW 的发射特性在很大程度上取决于量子化能级,因为体带隙会减小,高锡时接近零。降低光源量子效率的一个因素是有源区内存在的缺陷,这些缺陷会导致非辐射性重组。此外,界面上的缺陷也会阻碍带排列,导致载流子束缚的丧失。InGaAs、InAlAs 和精心设计的 LGB 可以与 GeSn 形成较大的带偏移,从而形成 I 型分离约束异质结构(SCH)QW 激光结构,同时实现几乎无缺陷的有源区,适合室温操作,并可扩展到任意数量的 QW。LM 时,InAlAs 和 InGaAs 层分别提供了 ∼1.1eV 和 ∼0.6eV 的较大总带偏移。对于 10 nm GeSn QW SCH 激光器,在发射波长为 2.6 μm 时,阈值电流 (JTH) 可达到 ∼10 A/cm2 ,材料和模态净增益分别为 ∼3000 cm-1 和 ∼40 cm-1。通过自适应设计SCH波导和QW,可以优化InAlAs/InGaAs/GeSn/InGaAs/InAlAs SCH激光器结构的JTH和净增益,使Sn在8%--18%之间。通过自适应波导设计、量化和锡合金化,可以覆盖广泛的应用空间(1.2 μm 至 6 μm)。
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引用次数: 0
The Impact of Band Bending on the Thermal Behaviour of Gain in Type-II GaAs-Based “W”-Lasers 带弯曲对基于 II 型砷化镓的 "W "型激光器增益热行为的影响
IF 4.3 2区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-29 DOI: 10.1109/JSTQE.2024.3434566
Dominic A. Duffy;Igor P. Marko;Christian Fuchs;Wolfgang Stolz;Stephen J. Sweeney
We undertake a comprehensive investigation of the temperature (T) and injection dependence of the modal gain in 1240 nm-emitting Type-II (GaIn)As/Ga(AsSb)/(GaIn)As “W” laser active regions for 25$leq$T$leq$300 K. From direct measurements of the short-wavelength transparency point, which serves as a proxy for population inversion, the behaviour of the maximum gain and peak blueshift are used to highlight the different temperature dependencies of the gain at different injection regimes. We show that the thermal redshift of the peak gain at room temperature reduces from 0.53$pm$0.03 nm/$^circ$C under flat band conditions to 0.32$pm$0.03 nm/$^circ$C at threshold. These results demonstrate the significant role of injection-dependent electrostatic effects and how it may be used through design to tailor the thermal properties of semiconductor lasers employing Type-II “W” active regions.
我们对 25$leq$T$leq$300 K 时 1240 nm 发射的 Type-II (GaIn)As/Ga(AsSb)/(GaIn)As "W" 激光有源区的模态增益的温度(T)和注入依赖性进行了全面研究。通过直接测量短波长透明点(作为种群反转的替代),最大增益和峰值蓝移的行为被用来突出不同注入制度下增益的不同温度依赖性。我们发现,在室温下,峰值增益的热红移从平带条件下的 0.53$pm$0.03 nm/$^circ$C 下降到阈值条件下的 0.32$pm$0.03 nm/$^circ$C。这些结果证明了依赖注入的静电效应的重要作用,以及如何通过设计来定制采用 II 型 "W "有源区的半导体激光器的热特性。
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引用次数: 0
Highly Sensitive Ultrasonic Sensor Using Anti-Resonant Reflection Optical Waveguide Mechanism in a Hollow-Core Fiber 在空芯光纤中使用反谐振反射光波导机制的高灵敏度超声波传感器
IF 4.3 2区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-29 DOI: 10.1109/JSTQE.2024.3435007
Zhihua Shao;Ziyu Zhang;Ruiming Liang;Xueguang Qiao
A compact fiber-optic ultrasonic sensor based on the anti-resonant reflecting optical waveguide (ARROW) in hollow core fiber is proposed and demonstrated experimentally. The proposed sensor consists of a section of hollow core fiber sandwiched by two single mode fibers. The hollow core fibers with different inner diameters are utilized to optimize the cladding thickness for detection. Moreover, the hollow core fiber's outer surface is coated with polymer materials that possess varying Young's modulus and refractive index. A sensitivity term, determined by the spectral slope and the material properties of ARROW, is proposed to evaluate the ultrasonic response of pre- and post-coating sensors. The results indicate that a thicker fiber cladding contributes to a higher sensitivity, and the polymer coatings also significantly improve the sensor response. The final sensor exhibits a −10 dB bandwidth of about 5.4 MHz and a temperature sensitivity of 220 pm/°C. By incorporating a waterproof aluminum layer, the acoustic pressure sensitivity is assessed, demonstrating its superiority compared to that of a fiber grating sensor. The proposed sensor introduces a novel high-performance ultrasonic probing approach relative to the conventional interference or grating methods.
本文提出了一种基于中空芯光纤反谐振反射光波导(ARROW)的紧凑型光纤超声波传感器,并进行了实验演示。拟议的传感器由一段中空芯纤和两根单模光纤夹层组成。利用不同内径的中空纤芯来优化包层厚度,以便进行探测。此外,中空纤芯光纤的外表面涂有具有不同杨氏模量和折射率的聚合物材料。根据 ARROW 的光谱斜率和材料特性,提出了一个灵敏度项,用于评估涂覆前和涂覆后传感器的超声波响应。结果表明,较厚的光纤包层有助于提高灵敏度,而聚合物涂层也能显著改善传感器的响应。最终传感器的 -10 dB 带宽约为 5.4 MHz,温度灵敏度为 220 pm/°C。通过加入防水铝层,对声压灵敏度进行了评估,证明其优于光纤光栅传感器。与传统的干涉或光栅方法相比,拟议的传感器引入了一种新型高性能超声探测方法。
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引用次数: 0
Energy Efficient and High Bandwidth Quantum Dot Comb Laser Based Silicon Microring Transmitter for Optical Interconnects 用于光互连的基于硅微oring 发射器的高能效、高带宽量子点组合激光器
IF 4.3 2区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-23 DOI: 10.1109/JSTQE.2024.3432313
Jiajian Chen;Bo Yang;Jiale Qin;Jingzhi Huang;Xiangru Cui;Jie Yan;Dingyi Wu;Xi Xiao;Zihao Wang;Changyuan Yu;Jianjun Zhang;Ting Wang
Explosive development of artificial intelligence has recently driven strong demand of ultra-large bandwidth interconnects. Optical I/O is considered as a promising approach of implementing ultra-short link data transmission among computing chips. Here, we demonstrated an O-band 8 × 100 Gb/s transmitter based on single quantum dot mode-locked comb laser and arrayed 8-λ microring modulators. The semiconductor laser currently offers the lowest power consumption for multi-wavelength operation and the most compact footprint. All 8 comb channels are modulated at 100 Gbps, with total energy efficiency of the transmitter at 1.66 pJ/bit (laser source included).
近来,人工智能的爆炸式发展推动了对超大带宽互连的强烈需求。光 I/O 被认为是在计算芯片间实现超短链路数据传输的一种前景广阔的方法。在这里,我们展示了一种基于单量子点锁模梳状激光器和阵列式 8-λ 微光调制器的 O 波段 8 × 100 Gb/s 发射器。目前,这种半导体激光器在多波长工作时功耗最低,体积最紧凑。所有 8 个梳状通道的调制速率均为 100 Gbps,发射器的总能效为 1.66 pJ/bit(包括激光源)。
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引用次数: 0
Finite-Element Thermal Simulation of High-Power Diode Laser Stacks for High-Duty-Cycle Pump Applications 用于高负荷周期泵浦应用的大功率二极管激光器堆栈的有限元热模拟
IF 4.3 2区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-19 DOI: 10.1109/JSTQE.2024.3431293
Mohamed Elattar;Marko Hübner;Martin Wilkens;Arnim Ginolas;Paul Crump
The two-dimensional heat distribution (steady-state and transient) within high-power diode laser stacks is simulated using a newly-developed model, based on finite element analysis and calibrated against prior experimental results. The model is then used to estimate the average temperature and thermal impedance of the stack elements under quasi-continuous-wave pulsed operation and investigate the impact of variations to the pulse conditions (pulse width and duty cycle). It is also used to show how using improved heat-spreading materials and increasing cooling efficiency can significantly reduce thermal impedance, thereby enabling duty cycle and optical power scaling.
利用新开发的模型模拟了高功率二极管激光器堆栈内的二维热分布(稳态和瞬态),该模型基于有限元分析,并根据先前的实验结果进行了校准。然后,利用该模型估算准连续波脉冲操作下堆栈元件的平均温度和热阻抗,并研究脉冲条件(脉冲宽度和占空比)变化的影响。该模型还用于说明使用改进的散热材料和提高冷却效率如何能够显著降低热阻抗,从而实现占空比和光功率的扩展。
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引用次数: 0
GaAs Based Edge Emitters at 626 nm, 725 nm and 1180 nm 波长为 626 纳米、725 纳米和 1180 纳米的砷化镓边缘发射器
IF 4.3 2区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-19 DOI: 10.1109/JSTQE.2024.3431225
Felix Mauerhoff;Philipp Hildenstein;André Maaßdorf;David Feise;Nils Werner;Johannes Glaab;Gunnar Blume;Katrin Paschke
GaAs-based semiconductor lasers with emission wavelengths around 626 nm, 725 nm and 1180 nm are challenging due to the necessary strain in the quantum well region. However, there is a lively interest worldwide in tapping into these wavelength ranges with semiconductor lasers. Here we describe the fabrication and properties of both broad area and ridge waveguide semiconductor lasers emitting at 626 nm, 725 nm and 1180 nm. For that, GaAs-based laser structures with highly strained quantum wells have been developed.
由于量子阱区域的必要应变,发射波长在 626 纳米、725 纳米和 1180 纳米左右的砷化镓半导体激光器具有挑战性。然而,全世界都对利用半导体激光器开发这些波长范围的激光器有着浓厚的兴趣。在此,我们介绍了发射波长为 626 nm、725 nm 和 1180 nm 的宽面积和脊波导半导体激光器的制造和特性。为此,我们开发了具有高应变量子阱的砷化镓激光器结构。
{"title":"GaAs Based Edge Emitters at 626 nm, 725 nm and 1180 nm","authors":"Felix Mauerhoff;Philipp Hildenstein;André Maaßdorf;David Feise;Nils Werner;Johannes Glaab;Gunnar Blume;Katrin Paschke","doi":"10.1109/JSTQE.2024.3431225","DOIUrl":"10.1109/JSTQE.2024.3431225","url":null,"abstract":"GaAs-based semiconductor lasers with emission wavelengths around 626 nm, 725 nm and 1180 nm are challenging due to the necessary strain in the quantum well region. However, there is a lively interest worldwide in tapping into these wavelength ranges with semiconductor lasers. Here we describe the fabrication and properties of both broad area and ridge waveguide semiconductor lasers emitting at 626 nm, 725 nm and 1180 nm. For that, GaAs-based laser structures with highly strained quantum wells have been developed.","PeriodicalId":13094,"journal":{"name":"IEEE Journal of Selected Topics in Quantum Electronics","volume":"31 2: Pwr. and Effic. Scaling in Semiconductor Lasers","pages":"1-10"},"PeriodicalIF":4.3,"publicationDate":"2024-07-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141740514","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High Power and Low Power Consumption Raman Pump Lasers With Electric Field Control Layer for Wide-Bands Raman Amplification 用于宽带拉曼放大的带电场控制层的高功率、低功耗拉曼泵浦激光器
IF 4.3 2区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-18 DOI: 10.1109/JSTQE.2024.3430223
Junji Yoshida;Naoya Hojo;Masaki Wakaba;Masayoshi Seki;Keiji Sakaguchi;Motoyuki Tanaka;Shun Kamada;Takuya Kokawa;Yusuke Isozaki;Akihiko Kasukawa
To realize high-power GaInAsP/InP pump lasers for Raman amplifiers, we propose a laser with a GaInAsP/InP electric field control layer that has high design freedom and is suitable for mass production. This laser structure realizes high power and low power consumption of Raman pump lasers with fiber output power exceeding 1 W at high temperature operation of 35 °C, and extremely low power consumption of 3.7 W at 55 °C with 0.5 W fiber output power is demonstrated. We also demonstrate that this laser structure is effective in achieving high-power fiber output power exceeding 0.78 W at 35 °C in the range from 1395 nm to 1547 nm for the application of broadband Raman amplification, which is a key technology for ultra-high-speed large-capacity optical transmission systems using digital coherent systems.
为了实现用于拉曼放大器的高功率 GaInAsP/InP 泵浦激光器,我们提出了一种带有 GaInAsP/InP 电场控制层的激光器,它具有很高的设计自由度,适合批量生产。这种激光器结构实现了拉曼泵浦激光器的高功率和低功耗,在 35 ℃ 高温工作条件下光纤输出功率超过 1 W,而在 55 ℃ 条件下,光纤输出功率为 0.5 W 时的功耗极低,仅为 3.7 W。我们还证明了这种激光器结构可在 35 °C、1395 nm 至 1547 nm 范围内有效实现超过 0.78 W 的高功率光纤输出功率,用于宽带拉曼放大,而宽带拉曼放大是使用数字相干系统的超高速大容量光传输系统的一项关键技术。
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引用次数: 0
Non-Volatile Reconfigurable Transmissive Notch Filter Using Wide Bandgap Phase Change Material Antimony Sulfide 使用宽带隙相变材料硫化锑的非易失性可重构透射陷波滤波器
IF 4.3 2区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-18 DOI: 10.1109/JSTQE.2024.3430214
Virat Tara;Rui Chen;Johannes E. Fröch;Zhuoran Fang;Jie Fang;Romil Audhkhasi;Minho Choi;Arka Majumdar
Reconfigurable free-space metasurfaces with subwavelength-scale tunable nano-scatterers can manipulate light for many applications ranging from bio-medical imaging, light detection and ranging to optical computing. Several endeavors have been made to achieve tunable metasurfaces using thermo-optic, electro-optic effects, liquid crystals, and phase change materials (PCMs). PCMs stand out, particularly for low-tuning frequency and low-power consumption applications, thanks to their non-volatile nature and drastic index modulation, leading to zero-static power and a small footprint. Antimony sulfide (Sb2S3) is an emerging low-loss PCM with the widest bandgap reported so far, enabling operation at low wavelengths down to ∼600 nm in the visible spectrum. In addition, Sb2S3 has slow crystallization speed, which enables amorphization of large-volume Sb2S3 without unintentional recrystallization. This makes Sb2S3 suitable for application in reconfigurable metasurfaces, where the switching area (usually > hundreds of μm2) is significantly larger than photonic integrated circuits (tens of μm2). Herein, we experimentally demonstrate an electrically tunable notch filter at a wavelength of ∼1150 nm on a Sb2S3-cladded silicon-on-sapphire platform. The notch filter is enabled by a 2-dimensional symmetry-protected quasi-bound-state-in-the-continuum (quasi-BIC) metasurface. We experimentally observed a quality factor of up to ∼200 and demonstrated reversible tuning of a record large volume (4.5 μm3) of Sb2S3. Thanks to the large modulation provided by Sb2S3, we observed a resonance shift as high as ∼4 nm in situ using a doped silicon microheater. Our work paves the way for compact and low-power nonvolatile notch filters. Moreover, due to the low loss of Sb2S3 in the visible, this work also lays the foundation for phase-only modulation in the visible using PCMs.
具有亚波长尺度可调纳米散射体的可重构自由空间元表面可以操纵光,用于生物医学成像、光探测和测距以及光学计算等多种应用。为了利用热光效应、电光效应、液晶和相变材料(PCMs)实现可调谐超表面,人们已经做出了许多努力。相变材料由于其非易失性和剧烈的指数调制,可实现零静态功耗和较小的占地面积,尤其适用于低调谐频率和低功耗应用。硫化锑(Sb2S3)是一种新兴的低损耗 PCM,具有迄今报道的最宽带隙,可在可见光谱中低至 600 纳米的低波长下工作。此外,Sb2S3 的结晶速度较慢,这使得大体积 Sb2S3 的非晶化过程不会发生意外再结晶。这使得 Sb2S3 适合应用于可重构元表面,其开关面积(通常>数百微米2)远远大于光子集成电路(数十微米2)。在此,我们通过实验展示了一种波长为 1150 nm 的电可调陷波滤波器,该滤波器采用 Sb2S3 封装的蓝宝石硅平台。该陷波滤波器由一个二维对称保护的准束缚态连续面(quasi-BIC)实现。我们通过实验观测到了高达 ∼200 的品质因数,并演示了对创纪录的大体积(4.5 μm3)Sb2S3 的可逆调谐。得益于 Sb2S3 提供的大调制,我们使用掺杂硅微加热器在原位观测到了高达 ∼4 nm 的共振偏移。我们的工作为小型、低功耗的非易失性陷波滤波器铺平了道路。此外,由于 Sb2S3 在可见光下的损耗较低,这项工作还为使用 PCM 在可见光下进行纯相位调制奠定了基础。
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引用次数: 0
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IEEE Journal of Selected Topics in Quantum Electronics
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