首页 > 最新文献

2010 IEEE International Memory Workshop最新文献

英文 中文
A comprehensive study of degradation behavior of select transistors in the Charge Trap Flash memories 电荷阱快闪存储器中所选晶体管退化行为的综合研究
Pub Date : 2010-05-16 DOI: 10.1109/IMW.2010.5488386
Byeong-In Choe, Sung-Il Chang, Chang-seok Kang, Jintaek Park, Joohyuck Chung, Young-woo Park, Jungdal Choi, C. Chung
The local electron trapping in the select transistors used in the Charge Trap Flash (CTF) NAND was analyzed in depth for the first time in terms of operation conditions and gate spacer process. In this work, we examined the mechanism of swing degradation in the select transistors with TANOS (TaN-Al2O3-Si3N4-SiO2-Si) structure due to repetitive program/erase [P/E] operation. The swing degradation can be explained by the local electron trapping induced from electric field between select transistors and neighboring transistors. The local electron trapping in select transistors are well correlated to the saturation of threshold voltage in the erased cells. The erase Vth saturation appears to be caused by unfavorable backward tunneling of electrons from gate to the trap layer. The degradation in the select transistor is perfectly solved by decreasing the electric field during erase operation and keeping an appropriate distance between select transistors and neighboring transistors.
本文首次从工作条件和栅极间隔工艺两个方面对电荷阱闪存(CTF) NAND中所选用晶体管的局部电子捕获进行了深入分析。在这项工作中,我们研究了TANOS (TaN-Al2O3-Si3N4-SiO2-Si)结构的选择晶体管由于重复的程序/擦除[P/E]操作而导致摆动退化的机制。振荡衰减可以用电场在所选晶体管和邻近晶体管之间引起的局部电子俘获来解释。所选晶体管中的局部电子捕获与擦除单元中阈值电压的饱和密切相关。擦除电压饱和似乎是由不利的电子从栅极到陷阱层的反向隧穿引起的。通过减小擦除过程中的电场并使所选晶体管与邻近晶体管保持适当的距离,可以很好地解决所选晶体管的退化问题。
{"title":"A comprehensive study of degradation behavior of select transistors in the Charge Trap Flash memories","authors":"Byeong-In Choe, Sung-Il Chang, Chang-seok Kang, Jintaek Park, Joohyuck Chung, Young-woo Park, Jungdal Choi, C. Chung","doi":"10.1109/IMW.2010.5488386","DOIUrl":"https://doi.org/10.1109/IMW.2010.5488386","url":null,"abstract":"The local electron trapping in the select transistors used in the Charge Trap Flash (CTF) NAND was analyzed in depth for the first time in terms of operation conditions and gate spacer process. In this work, we examined the mechanism of swing degradation in the select transistors with TANOS (TaN-Al2O3-Si3N4-SiO2-Si) structure due to repetitive program/erase [P/E] operation. The swing degradation can be explained by the local electron trapping induced from electric field between select transistors and neighboring transistors. The local electron trapping in select transistors are well correlated to the saturation of threshold voltage in the erased cells. The erase Vth saturation appears to be caused by unfavorable backward tunneling of electrons from gate to the trap layer. The degradation in the select transistor is perfectly solved by decreasing the electric field during erase operation and keeping an appropriate distance between select transistors and neighboring transistors.","PeriodicalId":149628,"journal":{"name":"2010 IEEE International Memory Workshop","volume":"265 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123444725","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Lifetime and wearout current modeling of ultra-thin oxide antifuse bitcells using transient characterization 利用瞬态表征的超薄氧化物抗熔断单元寿命和损耗电流建模
Pub Date : 2010-05-16 DOI: 10.1109/IMW.2010.5488412
M. Deloge, B. Allard, P. Candelier, J. Damiens, E. Le-Roux, M. Rafik
The lifetime modeling of antifuse bit cells is studied using transient measurements. Firstly, the wearout current is successfully modeled as Fowler-Nordheim. Secondly, the TDDB power-law voltage acceleration model is validated down to 30 0ns for a stress voltage of 5.5 V. Lifetime results are compared with the Multi-Vibrational Hydrogen Release Model.
采用瞬态测量方法研究了防熔丝钻头单元的寿命建模。首先,成功地建立了Fowler-Nordheim模型。其次,在应力电压为5.5 V的情况下,验证了TDDB幂律电压加速模型,该模型的电压加速度降至30 0ns。寿命结果与多振动氢释放模型进行了比较。
{"title":"Lifetime and wearout current modeling of ultra-thin oxide antifuse bitcells using transient characterization","authors":"M. Deloge, B. Allard, P. Candelier, J. Damiens, E. Le-Roux, M. Rafik","doi":"10.1109/IMW.2010.5488412","DOIUrl":"https://doi.org/10.1109/IMW.2010.5488412","url":null,"abstract":"The lifetime modeling of antifuse bit cells is studied using transient measurements. Firstly, the wearout current is successfully modeled as Fowler-Nordheim. Secondly, the TDDB power-law voltage acceleration model is validated down to 30 0ns for a stress voltage of 5.5 V. Lifetime results are compared with the Multi-Vibrational Hydrogen Release Model.","PeriodicalId":149628,"journal":{"name":"2010 IEEE International Memory Workshop","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128195919","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Novel 3-D stacked NAND flash string without body cross-talk effect 新型无体串扰的三维堆叠NAND闪存串
Pub Date : 2010-05-16 DOI: 10.1109/IMW.2010.5488410
M. Jeong, Joo-Wan Lee, I. Cho, Byung-Gook Park, Hyungcheol Shin, Jang-Sik Lee
We have investigated ID-VGS characteristic of proposed 3-D stacked NAND flash string with common gate structure and a shield layer. The body cross-talk problem was eliminated completely. We think proposed structure and its modification will be very promising candidate for future high density NAND flash memory.
我们研究了所提出的具有通用栅极结构和屏蔽层的三维堆叠NAND闪存串的ID-VGS特性。身体的串音问题完全消除了。我们认为所提出的结构及其改进将是未来高密度NAND闪存的一个很有前途的候选。
{"title":"Novel 3-D stacked NAND flash string without body cross-talk effect","authors":"M. Jeong, Joo-Wan Lee, I. Cho, Byung-Gook Park, Hyungcheol Shin, Jang-Sik Lee","doi":"10.1109/IMW.2010.5488410","DOIUrl":"https://doi.org/10.1109/IMW.2010.5488410","url":null,"abstract":"We have investigated ID-VGS characteristic of proposed 3-D stacked NAND flash string with common gate structure and a shield layer. The body cross-talk problem was eliminated completely. We think proposed structure and its modification will be very promising candidate for future high density NAND flash memory.","PeriodicalId":149628,"journal":{"name":"2010 IEEE International Memory Workshop","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132061929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Investigation of charge-trap memories with AlN based band engineered storage layers 基于AlN的带工程存储层电荷阱存储器的研究
Pub Date : 2010-05-16 DOI: 10.1109/IMW.2010.5488309
G. Molas, J. Colonna, R. Kies, D. Belhachemi, M. Bocquet, M. Gely, V. Vidal, P. Brianceau, L. Vandroux, G. Ghibaudo, B. De Salvo
This paper presents an in-depth investigation of the electrical properties of charge trap memories with AlN based storage layers. The memory performance and reliability are studied in details and compared with the ones of a reference device using standard Si3N4 as storage layer. An engineered charge trapping layer is also proposed, made by an AlN/Si3N4 double layer, which shows reduced program/erase voltages, combined with 106 excellent endurance and good retention (ΔVT>5V after 10 years at 125°C).
本文对基于AlN存储层的电荷阱存储器的电学特性进行了深入的研究。详细研究了该器件的存储性能和可靠性,并与采用标准氮化硅作为存储层的参考器件进行了比较。此外,还提出了一种由AlN/Si3N4双层材料制成的工程电荷捕获层,该层具有较低的程序/擦除电压,106优异的耐久性和良好的保留性(ΔVT在125°C下10年后>5V)。
{"title":"Investigation of charge-trap memories with AlN based band engineered storage layers","authors":"G. Molas, J. Colonna, R. Kies, D. Belhachemi, M. Bocquet, M. Gely, V. Vidal, P. Brianceau, L. Vandroux, G. Ghibaudo, B. De Salvo","doi":"10.1109/IMW.2010.5488309","DOIUrl":"https://doi.org/10.1109/IMW.2010.5488309","url":null,"abstract":"This paper presents an in-depth investigation of the electrical properties of charge trap memories with AlN based storage layers. The memory performance and reliability are studied in details and compared with the ones of a reference device using standard Si<sub>3</sub>N<sub>4</sub> as storage layer. An engineered charge trapping layer is also proposed, made by an AlN/Si<sub>3</sub>N<sub>4</sub> double layer, which shows reduced program/erase voltages, combined with 10<sup>6</sup> excellent endurance and good retention (ΔV<sub>T</sub>>5V after 10 years at 125°C).","PeriodicalId":149628,"journal":{"name":"2010 IEEE International Memory Workshop","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130963579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
3D IC architecture for high density memories 用于高密度存储器的3D集成电路架构
Pub Date : 2010-05-16 DOI: 10.1109/IMW.2010.5488391
Sang-Yun Lee, D. Schroder
3D ICs for high-density memories have significant benefits compared to conventional memories. The first one is high productivity. An area for memory arrays is not required on the semiconductor substrate and the area for the memory control logic can be further reduced for an optimized logic process. Hence, about 4 times more die-per-wafer can be expected for DRAMs with a cell efficiency of about 50%, leading to reduced fab tool investment with increased productivity. Furthermore, the process is optimized for both logic and memory cells because they are processed sequentially. It is well known that processes for logic and memory, especially DRAM and flash, are not compatible. Using 3D ICs, process incompatibility problems are easily solved and SoC (System-on-a-Chip) can be implemented with various embedded memories. An additional advantage is the small form factor. As die sizes shrink for 3D ICs, the yield will increase rapidly, especially important for FPGAs with distributed memories and high-performance CPUs with large cache memories. 3D ICs for high-density memories will extend the lifespan of low-cost CMOS memories.
与传统存储器相比,用于高密度存储器的3D集成电路具有显著的优势。第一个是高生产率。在半导体衬底上不需要用于存储阵列的区域,并且用于存储控制逻辑的区域可以进一步减小以用于优化的逻辑过程。因此,在电池效率约为50%的情况下,每片dram的晶片芯片数量可增加约4倍,从而减少晶圆厂工具投资,提高生产率。此外,该过程对逻辑和存储单元都进行了优化,因为它们是顺序处理的。众所周知,逻辑进程和存储器,特别是DRAM和闪存,是不兼容的。使用3D ic,可以轻松解决工艺不兼容问题,并且可以使用各种嵌入式存储器实现SoC(片上系统)。另一个优点是外形小。随着3D集成电路的芯片尺寸缩小,产量将迅速增加,这对于具有分布式存储器的fpga和具有大缓存存储器的高性能cpu尤其重要。用于高密度存储器的3D集成电路将延长低成本CMOS存储器的使用寿命。
{"title":"3D IC architecture for high density memories","authors":"Sang-Yun Lee, D. Schroder","doi":"10.1109/IMW.2010.5488391","DOIUrl":"https://doi.org/10.1109/IMW.2010.5488391","url":null,"abstract":"3D ICs for high-density memories have significant benefits compared to conventional memories. The first one is high productivity. An area for memory arrays is not required on the semiconductor substrate and the area for the memory control logic can be further reduced for an optimized logic process. Hence, about 4 times more die-per-wafer can be expected for DRAMs with a cell efficiency of about 50%, leading to reduced fab tool investment with increased productivity. Furthermore, the process is optimized for both logic and memory cells because they are processed sequentially. It is well known that processes for logic and memory, especially DRAM and flash, are not compatible. Using 3D ICs, process incompatibility problems are easily solved and SoC (System-on-a-Chip) can be implemented with various embedded memories. An additional advantage is the small form factor. As die sizes shrink for 3D ICs, the yield will increase rapidly, especially important for FPGAs with distributed memories and high-performance CPUs with large cache memories. 3D ICs for high-density memories will extend the lifespan of low-cost CMOS memories.","PeriodicalId":149628,"journal":{"name":"2010 IEEE International Memory Workshop","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129171234","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Non-volatile Spin-Transfer Torque RAM (STT-RAM): An analysis of chip data, thermal stability and scalability 非易失性自旋转移扭矩RAM (STT-RAM):芯片数据,热稳定性和可扩展性的分析
Pub Date : 2010-05-16 DOI: 10.1109/IMW.2010.5488325
A. Driskill-Smith, S. Watts, D. Apalkov, D. Druist, X. Tang, Z. Diao, X. Luo, A. Ong, V. Nikitin, E. Chen
STT-RAM (Spin-Transfer Torque Random Access Memory) is a fast (≪10 ns), scalable, durable, non-volatile memory technology that is easily embedded in standard CMOS processes. An STT-RAM memory cell consists of an access transistor and a magnetic tunnel junction (MTJ) storage element (Figure 1). The minimum area of a single-level STT-RAM cell is 6 F2, which is competitive with DRAM and NOR Flash, and superior to SRAM. Even smaller effective unit cell areas are projected for multi-level cell architectures.
STT-RAM(自旋传递扭矩随机存取存储器)是一种快速(≪10 ns)、可扩展、耐用、非易失性存储器技术,可轻松嵌入标准CMOS工艺中。STT-RAM存储单元由一个存取晶体管和一个磁隧道结(MTJ)存储元件组成(图1)。单级STT-RAM存储单元的最小面积为6 F2,与DRAM和NOR闪存竞争,优于SRAM。甚至更小的有效单元面积被投射到多层次的单元结构中。
{"title":"Non-volatile Spin-Transfer Torque RAM (STT-RAM): An analysis of chip data, thermal stability and scalability","authors":"A. Driskill-Smith, S. Watts, D. Apalkov, D. Druist, X. Tang, Z. Diao, X. Luo, A. Ong, V. Nikitin, E. Chen","doi":"10.1109/IMW.2010.5488325","DOIUrl":"https://doi.org/10.1109/IMW.2010.5488325","url":null,"abstract":"STT-RAM (Spin-Transfer Torque Random Access Memory) is a fast (≪10 ns), scalable, durable, non-volatile memory technology that is easily embedded in standard CMOS processes. An STT-RAM memory cell consists of an access transistor and a magnetic tunnel junction (MTJ) storage element (Figure 1). The minimum area of a single-level STT-RAM cell is 6 F2, which is competitive with DRAM and NOR Flash, and superior to SRAM. Even smaller effective unit cell areas are projected for multi-level cell architectures.","PeriodicalId":149628,"journal":{"name":"2010 IEEE International Memory Workshop","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126647253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 22
High performance 65nm 2T-embedded Flash memory for high reliability SOC applications 高性能65nm 2t嵌入式闪存,适用于高可靠性SOC应用
Pub Date : 2010-05-16 DOI: 10.1109/IMW.2010.5488403
Sung-Rae Kim, K. Han, Kin-Sing Lee, Rophina Li, J. Wolfman, Tae-Hoon Kim, Patty Liu, Hyuk Kim, P. Lee, Yu Wang, Yingbo Jia, F. Dhaoui, F. Hawley, Huan-Chung Tseng
High speed array architecture and cell optimization in the Uniform Channel Program and Erase (UCPE) floating gate 2 transistor (2T)-embedded flash cell (eFlash) are investigated. It is important to optimize select gate (SG) channel length from 2T-eFlash test array when CG flash device width/length and SG length are pre-determined by other constraints. SG-punch through (PT) driven Gate Disturb (GD) and Gate Induced Drain Leakage current (GIDL) driven GD must be simultaneously studied to determine the optimum CG and SG spacing. For the applications requiring thick tunnel oxide (10nm) such as automotive products, the conductivities of the Sector Select Gate (SSG) device and Control Gate (CG) flash device are critical for read performance. A double SSG scheme per sector and common metal source line architecture were introduced. In this paper, we report our investigation results to optimize 2T eFlash cell design and array architecture to achieve high performance eFlash operation without sacrificing reliability within the constraint of embedding a flash process in the 65nm standard logic process.
研究了均匀通道程序和可擦除(UCPE)浮栅2晶体管(2T)嵌入式闪存单元(eFlash)中的高速阵列结构和单元优化。当CG flash器件宽度/长度和SG长度由其他约束条件预先确定时,从2T-eFlash测试阵列中优化选择门(SG)通道长度非常重要。必须同时研究SG冲通(PT)驱动的栅极扰动(GD)和栅极感应漏极电流(GIDL)驱动的GD,以确定最佳的CG和SG间距。对于需要厚隧道氧化物(10nm)的应用,如汽车产品,扇区选择门(SSG)器件和控制门(CG)闪存器件的电导率对读取性能至关重要。介绍了双扇区SSG方案和共金属源线结构。在本文中,我们报告了我们的研究结果,以优化2T eFlash单元设计和阵列架构,在不牺牲可靠性的前提下,在65nm标准逻辑工艺中嵌入flash工艺的约束下,实现高性能的eFlash操作。
{"title":"High performance 65nm 2T-embedded Flash memory for high reliability SOC applications","authors":"Sung-Rae Kim, K. Han, Kin-Sing Lee, Rophina Li, J. Wolfman, Tae-Hoon Kim, Patty Liu, Hyuk Kim, P. Lee, Yu Wang, Yingbo Jia, F. Dhaoui, F. Hawley, Huan-Chung Tseng","doi":"10.1109/IMW.2010.5488403","DOIUrl":"https://doi.org/10.1109/IMW.2010.5488403","url":null,"abstract":"High speed array architecture and cell optimization in the Uniform Channel Program and Erase (UCPE) floating gate 2 transistor (2T)-embedded flash cell (eFlash) are investigated. It is important to optimize select gate (SG) channel length from 2T-eFlash test array when CG flash device width/length and SG length are pre-determined by other constraints. SG-punch through (PT) driven Gate Disturb (GD) and Gate Induced Drain Leakage current (GIDL) driven GD must be simultaneously studied to determine the optimum CG and SG spacing. For the applications requiring thick tunnel oxide (10nm) such as automotive products, the conductivities of the Sector Select Gate (SSG) device and Control Gate (CG) flash device are critical for read performance. A double SSG scheme per sector and common metal source line architecture were introduced. In this paper, we report our investigation results to optimize 2T eFlash cell design and array architecture to achieve high performance eFlash operation without sacrificing reliability within the constraint of embedding a flash process in the 65nm standard logic process.","PeriodicalId":149628,"journal":{"name":"2010 IEEE International Memory Workshop","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121557253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
CoOx-RRAM memory cell technology using recess structure for 128Kbits memory array CoOx-RRAM存储单元技术采用凹槽结构为128Kbits存储阵列
Pub Date : 2010-05-16 DOI: 10.1109/IMW.2010.5488319
S. Kawabata, Mitsuru Nakura, S. Yamazaki, T. Shibuya, Y. Inoue, Junya Onishi, Yoshiaki Tabuchi, Y. Tamai, Y. Yaoi, K. Ishihara, Y. Ohta, H. Shima, H. Akinaga, Natsuki Fukuda, Hidenao Kurihara, Yoshiaki Yoshida, Y. Kokaze, Y. Nishioka, K. Suu, K. Nakayama, A. Kitagawa, S. Ohnishi, N. Awaya
This paper presents the process integration and device technology for the Resistance RAM(RRAM) memory array using a CoOx film and a recess structure as a resistor, which is capable of low voltage, high speed and low current operation. The resistance of the CoOx film and its uniformity are strongly dependent on the film quality, which is optimized by controlling the O2 gas flow rate during the film deposition. We demonstrate the basic write and read operation of the 128Kbits memory array by developing the novel process integration technology and optimizing the test algorism.
本文介绍了采用CoOx薄膜和凹槽结构作为电阻器的电阻存储器阵列的工艺集成和器件技术,实现了低电压、高速度和低电流的工作。CoOx膜的阻力和均匀性与膜质量密切相关,膜质量可通过控制膜沉积过程中氧气流速来优化。通过开发新的过程集成技术和优化测试算法,我们演示了128Kbits存储阵列的基本读写操作。
{"title":"CoOx-RRAM memory cell technology using recess structure for 128Kbits memory array","authors":"S. Kawabata, Mitsuru Nakura, S. Yamazaki, T. Shibuya, Y. Inoue, Junya Onishi, Yoshiaki Tabuchi, Y. Tamai, Y. Yaoi, K. Ishihara, Y. Ohta, H. Shima, H. Akinaga, Natsuki Fukuda, Hidenao Kurihara, Yoshiaki Yoshida, Y. Kokaze, Y. Nishioka, K. Suu, K. Nakayama, A. Kitagawa, S. Ohnishi, N. Awaya","doi":"10.1109/IMW.2010.5488319","DOIUrl":"https://doi.org/10.1109/IMW.2010.5488319","url":null,"abstract":"This paper presents the process integration and device technology for the Resistance RAM(RRAM) memory array using a CoOx film and a recess structure as a resistor, which is capable of low voltage, high speed and low current operation. The resistance of the CoOx film and its uniformity are strongly dependent on the film quality, which is optimized by controlling the O2 gas flow rate during the film deposition. We demonstrate the basic write and read operation of the 128Kbits memory array by developing the novel process integration technology and optimizing the test algorism.","PeriodicalId":149628,"journal":{"name":"2010 IEEE International Memory Workshop","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130872934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
The dual role of PZT in metal-PZT-Al2O3 structure for nonvolatile memory cell PZT在非易失性存储电池金属-PZT- al2o3结构中的双重作用
Pub Date : 2010-05-16 DOI: 10.1109/IMW.2010.5488383
S. Cui, D. Eun, B. Marinkovic, C. Peng, Xiao Pan, Xiao Sun, H. Koser, T. Ma
We have shown that the metal-PZT-Al2O3 memory stack exhibits much larger than usual memory window, in the direction of charge-trapping effect (which is opposite to the polarization switching effect) which we attribute to the enhanced charge injection due to the large polarization field of the PZT. Other attractive properties such as excellent endurance characteristics and good retention make the metalPZT-Al2O3 memory stack a promising candidate for nonvolatile memory technology. Although the memory stack used in this study contains relatively thick PZT that necessitates high P/E voltages, our preliminary results have shown much lower P/E voltages for thinner PZT, and results for such scaled memory stacks will be reported at the conference.
我们已经表明,金属-PZT- al2o3记忆堆栈在电荷捕获效应(与极化开关效应相反)的方向上表现出比通常的记忆窗口大得多,我们将其归因于PZT大极化场导致的电荷注入增强。其他吸引人的特性,如优异的耐用性和良好的保留性,使金属pzt - al2o3存储器堆栈成为非易失性存储器技术的一个有前途的候选者。虽然本研究中使用的存储堆栈包含相对较厚的PZT,需要高P/E电压,但我们的初步结果显示,较薄的PZT的P/E电压要低得多,并且这种缩放存储堆栈的结果将在会议上报告。
{"title":"The dual role of PZT in metal-PZT-Al2O3 structure for nonvolatile memory cell","authors":"S. Cui, D. Eun, B. Marinkovic, C. Peng, Xiao Pan, Xiao Sun, H. Koser, T. Ma","doi":"10.1109/IMW.2010.5488383","DOIUrl":"https://doi.org/10.1109/IMW.2010.5488383","url":null,"abstract":"We have shown that the metal-PZT-Al2O3 memory stack exhibits much larger than usual memory window, in the direction of charge-trapping effect (which is opposite to the polarization switching effect) which we attribute to the enhanced charge injection due to the large polarization field of the PZT. Other attractive properties such as excellent endurance characteristics and good retention make the metalPZT-Al2O3 memory stack a promising candidate for nonvolatile memory technology. Although the memory stack used in this study contains relatively thick PZT that necessitates high P/E voltages, our preliminary results have shown much lower P/E voltages for thinner PZT, and results for such scaled memory stacks will be reported at the conference.","PeriodicalId":149628,"journal":{"name":"2010 IEEE International Memory Workshop","volume":"356 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133724401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A novel superlattice band-gap engineered (SBE) capacitorless DRAM cell with extremely short channel length down to 30 nm 一种新型的超晶格带隙工程(SBE)无电容DRAM电池,具有极短的通道长度,可达30纳米
Pub Date : 2010-05-16 DOI: 10.1109/IMW.2010.5488405
Sunyeong Lee, J. Jang, J. Shin, H. Kim, H. Bae, D. Yun, D. Kim, D. Kim
We propose a novel SiGe superlattice band-gap engineered (SBE) capacitorless dynamic random access memory (DRAM) cell with the 30 nm channel by the 2D TCAD simulation. The SBE capacitorless DRAM cell used a common source structure and different metal layers for the top gate word line from the bottom gate word line to realize the 4F2 (0.0036 µm2) feature size. From the 2D TCAD simulation of the SBE capacitorless DRAM cell, thanks to both the Si0.8Ge0.2 quantum well and SiO2 physical energy barrier, we obtained the sensing margin of 6.4 µA and the retention time of 15 msec.
通过二维TCAD仿真,提出了一种具有30 nm通道的新型SiGe超晶格带隙工程(SBE)无电容动态随机存取存储器(DRAM)单元。SBE无电容DRAM单元采用了相同的源结构和不同的金属层,实现了4F2(0.0036µm2)的特征尺寸。通过对SBE无电容DRAM电池的二维TCAD仿真,由于Si0.8Ge0.2量子阱和SiO2物理能垒的存在,我们获得了6.4µA的传感裕度和15 msec的保持时间。
{"title":"A novel superlattice band-gap engineered (SBE) capacitorless DRAM cell with extremely short channel length down to 30 nm","authors":"Sunyeong Lee, J. Jang, J. Shin, H. Kim, H. Bae, D. Yun, D. Kim, D. Kim","doi":"10.1109/IMW.2010.5488405","DOIUrl":"https://doi.org/10.1109/IMW.2010.5488405","url":null,"abstract":"We propose a novel SiGe superlattice band-gap engineered (SBE) capacitorless dynamic random access memory (DRAM) cell with the 30 nm channel by the 2D TCAD simulation. The SBE capacitorless DRAM cell used a common source structure and different metal layers for the top gate word line from the bottom gate word line to realize the 4F<sup>2</sup> (0.0036 µm<sup>2</sup>) feature size. From the 2D TCAD simulation of the SBE capacitorless DRAM cell, thanks to both the Si<inf>0.8</inf>Ge<inf>0.2</inf> quantum well and SiO<inf>2</inf> physical energy barrier, we obtained the sensing margin of 6.4 µA and the retention time of 15 msec.","PeriodicalId":149628,"journal":{"name":"2010 IEEE International Memory Workshop","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133489223","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
期刊
2010 IEEE International Memory Workshop
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1