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Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)最新文献

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InAlAs/InGaAs varactor diodes with THz cutoff frequencies fabricated by planar integrated technology 采用平面集成技术制备太赫兹截止频率的InAlAs/InGaAs变容二极管
P. Marsh, G. Ng, D. Pavlidis, K. Hong
Future space-based radiotelescopes and planetary radar projects plan to include THz frequency coverage. Such applications necessitate the use of high-reliability compact local oscillators (LO's) to drive the THz receivers' mixers. While THz molecular lasers can provide high power, they are bulky and not reliable enough for space applications. Presently, solid-state LO's show the greatest potential reliability and compactness. Among the solid-state sources, LO's based on varactor multiplier chains show the most promise in terms of potential output power and efficiency. The highest performance diodes have traditionally relied on whisker anode contacting which is suitable only for discrete devices and has limited reliability. To address these problems, planar diodes have been proposed and demonstrated using GaAs. This paper reports on a planar integrated technology which, unlike previous approaches, utilizes InP-based materials and plated Au airbridges to contact the anode. This airbridge technology reduces parasitics by avoiding the use of a bridge-supporting dielectric. The In/sub x/A/sub 1-x/As/InGaAs heterojunction concept permits high C-V nonlinearity, reduced access resistance (R/sub s/) and high saturation velocity. Furthermore, this developed technology is fully planar and lends itself to integration with passive elements for monolithic applications.<>
未来的天基射电望远镜和行星雷达项目计划包括太赫兹频率覆盖。这种应用需要使用高可靠性的紧凑本振(LO)来驱动太赫兹接收器的混频器。虽然太赫兹分子激光器可以提供高功率,但它们体积庞大,对于空间应用来说不够可靠。目前,固态LO显示出最大的潜在可靠性和紧凑性。在固态光源中,基于变容倍增器链的LO在潜在输出功率和效率方面表现出最大的潜力。传统上,性能最高的二极管依赖于晶须阳极接触,这只适用于离散器件,可靠性有限。为了解决这些问题,利用砷化镓提出并演示了平面二极管。本文报道了一种平面集成技术,与以往的方法不同,该技术利用inp基材料和镀金气桥来接触阳极。这种气桥技术通过避免使用桥支撑电介质来减少寄生。In/sub x/A/sub 1-x/As/InGaAs异质结概念允许高C-V非线性,降低接入电阻(R/sub s/)和高饱和速度。此外,这种开发的技术是完全平面的,适合与单片应用的无源元件集成。
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引用次数: 2
The applications of nanotechnology in electronic devices 纳米技术在电子器件中的应用
S. Beaumont
Nanometre-scale lithography allows transistors to be fabricated with excellent potential for performance above 100 GHz. Whether this performance is realised depends on the detailed construction of the device. Control of these details requires a 'total nanotechnology' approach to device fabrication which also offers right-first-time design of high performance circuits and predictable yield provided good physical forecasting tools become available for HEMTs. One may also use this approach to realise new device structures for specific applications. In this paper I want to show that the realisation of high performance sub-100 nm gate transistors demands semiconductor nanotechnology of the highest quality; and how that technology might be used to realise right-first-time, manufacturable systems.<>
纳米级光刻技术可以制造出具有100ghz以上性能潜力的晶体管。这种性能能否实现取决于器件的详细结构。控制这些细节需要“全纳米技术”方法来制造器件,这也提供了高性能电路的正确首次设计和可预测的产量,为hemt提供了良好的物理预测工具。人们也可以使用这种方法来实现特定应用的新器件结构。在本文中,我想表明,实现高性能的亚100纳米栅极晶体管需要最高质量的半导体纳米技术;以及该技术如何用于实现首次制造的可制造系统。
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引用次数: 4
Effect of barrier width on the performance of compressively strained InGaAs/InGaAsP MQW lasers 势垒宽度对压缩应变InGaAs/InGaAsP MQW激光器性能的影响
J. Binsma, P. Thijs, T. van Dongen, M. Sander-Jochem, R. Slootweg
Strained-layer (SL) Multiple Quantum Well (MQW) InGaAs(P)/InGaAsP and InGaAs/InP structures are of large interest for a variety of optoelectronic devices in the 1300 and 1550 nm wavelength regions. Among these devices are lasers, amplifiers as well as modulators based on electrorefraction or electro-absorption effects. Recently, promising results were reported for electro-absorption modulators employing the Wannier-Stark effect. Such modulators need rather thin barrier layers (thickness, /spl les/7.5 nm) in order to achieve the required strong coupling between the quantum wells. A powerful technique for monolithic integration of modulators with lasers, waveguides, tapers etc. is area selective growth of MQW structures via Organometallic Vapour Phase Epitaxy (OMVPE). This technique allows local bandgap control and thereby the fabrication of all desired waveguide and active layers in a single epitaxial step. A prerequisite for applying this technique will be that the optimum overall designs (e.g. ratio of barrier to well thickness, confinement layers) of the MQW structures for the various parts are more or less similar. As there is no information available on the barrier thickness-effect on the performance of strained-layer InGaAs/InGaAsP MQW lasers, it was decided to study this for the entire range from coupled to decoupled QWs corresponding to barrier thicknesses from 2.5 to 20 nm.<>
应变层(SL)多量子阱(MQW) InGaAs(P)/InGaAsP和InGaAs/InP结构在1300和1550 nm波长区域的各种光电器件中具有很大的兴趣。在这些装置中有激光器、放大器以及基于电折射或电吸收效应的调制器。最近,利用wanner - stark效应的电吸收调制器取得了可喜的结果。这种调制器需要相当薄的势垒层(厚度,/spl les/7.5 nm),以实现量子阱之间所需的强耦合。通过有机金属气相外延(OMVPE)实现MQW结构的面积选择性生长是调制器与激光器、波导、锥等单片集成的一种强大技术。该技术允许局部带隙控制,从而在单个外延步骤中制造所有所需的波导和有源层。应用该技术的先决条件是,各个部件的MQW结构的最佳整体设计(例如,势垒与井厚的比例,约束层)或多或少相似。由于没有关于势垒厚度对应变层InGaAs/InGaAsP MQW激光器性能的影响的信息,因此决定对从耦合到解耦的整个范围内的势垒厚度从2.5到20 nm进行研究。
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引用次数: 0
Reverse breakdown characteristics in InGa(Al)P/InGaP p-i-n junctions InGa(Al)P/InGaP P -i-n结的反向击穿特性
J. David, M. Hopkinson, R. Ghin, M. Pate
The avalanche breakdown behavior of InGa(Al)P has been investigated by growing a series of pin diode structures covering the material range from InGaP to InAlP. The results show that reverse leakage currents are very low in this material system in keeping with the large band-gap until the onset of avalanche breakdown. Comparing the breakdown voltage (Vbd) with that of GaAs, we find that significant increases are obtained, with InAlP having in excess of twice the Vbd of GaAs. Comparisons with AlGaAs structures of similar band-gap shows that the InGa(Al)P system still has a larger Vbd, suggesting that it may be better for power applications.<>
通过生长一系列引脚二极管结构,研究了InGa(Al)P的雪崩击穿行为,这些结构覆盖了从InGaP到InAlP的材料范围。结果表明,在雪崩击穿发生之前,该材料体系的反向泄漏电流非常低,且与大带隙保持一致。将击穿电压(Vbd)与GaAs的击穿电压(Vbd)进行比较,我们发现得到了显着的增加,其中InAlP的Vbd超过GaAs的两倍。与具有相似带隙的AlGaAs结构相比,InGa(Al)P体系仍然具有更大的Vbd,这表明它可能更适合于电源应用。
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引用次数: 0
Optical transitions in strained quantum wells of In/sub x/Ga/sub 1-x/As/sub y/P/sub 1-y/ with InGaAsP barriers in /sub x/Ga/sub 1-x/As/sub y/P/sub 1-y/具有InGaAsP势垒的应变量子阱中的光学跃迁
X. P. Jiang, P. Thiagarajan, G. Patrizi, G. Y. Robinson, H. Temkin, S. Forouhar, J. Vandenberg, D. Coblentz, R. Logan
We extend the phenomenological deformation potential strain model previously applied to InGaAs wells with InP barriers to quaternary wells and barriers. The model allows for any quaternary composition in the well or barrier, with the strain of either sign applied to the wells or barriers, as needed for comparison with advanced device structures. The model is tested by calculating the confinement energies of light and heavy hole transitions in compressively strained wells of InGaAsP clad by lattice matched barriers of InGaAsP. The calculated energies are compared with measurements carried out on multiquantum-well laser structures with compressive lattice mismatch strain as high as /spl Delta/a/a=0.75%. Excellent agreement is obtained between the extended model and the experiment.<>
我们将以前应用于具有InP屏障的InGaAs井的现象学变形位势应变模型扩展到第四系井和屏障。该模型允许井或屏障中的任何第四系成分,并根据需要将任一符号的应变应用于井或屏障,以便与先进的设备结构进行比较。通过计算InGaAsP晶格匹配势垒包覆的InGaAsP压缩应变井中轻、重空穴跃迁的约束能,对该模型进行了验证。将计算得到的能量与压缩晶格失配应变高达/spl δ /a/a=0.75%的多量子阱激光结构的测量结果进行了比较。扩展模型与实验结果吻合良好。
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引用次数: 0
Wannier-Stark effect in In/sub x/Ga/sub 1-x/As/In/sub y/Ga/sub 1-y/As superlattices of different compositions on InP 不同组成的in /sub x/Ga/sub 1-x/As/ in /sub y/Ga/sub 1-y/As超晶格在InP上的wanier - stark效应
B. Opitz, A. Kohl, J. Kováč, S. Brittner, F. Grunberg, K. Heime, J. Woitok
We report photocurrent spectroscopy at 77 K as well as at room temperature on MOVPE grown PIN diodes containing In/sub x/Ga/sub 1-x/As/In/sub y/Ga/sub 1-y/As strained layer superlattices as a function of bias voltage. Pronounced excitonic features were observed, and clear evidence for the formation of Stark ladders was found for the first time in this material system. The absorption edge is energetically below but close to 1.55 /spl mu/m. Improved optical spectra are obtained for structures grown with a compensation of strain in well and barrier.<>
我们报道了含有In/sub x/Ga/sub 1-x/ as /In/sub y/Ga/sub 1-y/ as应变层超晶格的MOVPE生长PIN二极管在77 K和室温下的光电流光谱随偏置电压的变化。观察到明显的激子特征,并首次在该材料体系中发现了Stark梯状结构形成的明确证据。能量吸收边低于但接近1.55 /spl mu/m。在井和势垒中进行应变补偿后,结构的光谱得到了改善
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引用次数: 0
Gratings for distributed feedback lasers formed by selective epitaxial growth 选择性外延生长形成的分布式反馈激光器光栅
O. Albrektsen, J. Salzman, P. Tidemand-Petersson, J. Hanberg, A. Moller-Larsen, J. M. Nielsen
The implementation of state-of-the-art semiconductor lasers with distributed feedback (DFB), and the optimization of the DFB resonator for specific operating characteristics, require, in many cases, a grating with carefully tailored, slowly varying parameters along the cavity axis. A change in the corrugation pitch and incorporation of discrete phase shifts along the cavity may be implemented by E-beam lithographic methods, and by changes in the geometrical parameters of the laser waveguide. A change in the coupling strength, |/spl kappa/|, is more difficult to realize. Recently, a novel method for fabricating a DFB laser with two discrete values of |/spl kappa/| in different sections of the laser cavity, was demonstrated, but the extension of this method to arbitrary variations in |/spl kappa/| along the laser is not straightforward. Selective organometallic vapor phase epitaxy (OMVPE) on masked substrates is an attractive option for epitaxial layer deposition with controllable thickness variations. Both the growth rate and the composition of ternary or quaternary layers are determined by the mask geometry. In this work, a novel method for the formation of DFB gratings is demonstrated, relying on selective OMVPE growth. The method does not require semiconductor etching, and furthermore it allows for a controlled variation of |/spl kappa/| along the laser cavity.<>
实现最先进的分布式反馈半导体激光器(DFB),并优化DFB谐振器的特定工作特性,在许多情况下,需要一个精心定制的光栅,沿着腔轴缓慢变化的参数。可以通过电子束光刻方法和激光波导几何参数的改变来实现波纹间距的改变和沿腔离散相移的结合。耦合强度的变化|/spl kappa/|更难实现。近年来,提出了一种在激光腔的不同截面上制作具有两个离散值|/spl kappa/|的DFB激光器的新方法,但将该方法扩展到沿激光方向任意变化的|/spl kappa/|并不简单。掩膜衬底上的选择性有机金属气相外延(OMVPE)是一种具有可控制厚度变化的外延层沉积的有吸引力的选择。三层或四层的生长速率和组成都由掩膜的几何形状决定。在这项工作中,证明了一种新的方法形成DFB光栅,依赖于选择性OMVPE生长。该方法不需要半导体蚀刻,而且它允许沿激光腔的可控变化|/spl kappa/|。
{"title":"Gratings for distributed feedback lasers formed by selective epitaxial growth","authors":"O. Albrektsen, J. Salzman, P. Tidemand-Petersson, J. Hanberg, A. Moller-Larsen, J. M. Nielsen","doi":"10.1109/ICIPRM.1994.328305","DOIUrl":"https://doi.org/10.1109/ICIPRM.1994.328305","url":null,"abstract":"The implementation of state-of-the-art semiconductor lasers with distributed feedback (DFB), and the optimization of the DFB resonator for specific operating characteristics, require, in many cases, a grating with carefully tailored, slowly varying parameters along the cavity axis. A change in the corrugation pitch and incorporation of discrete phase shifts along the cavity may be implemented by E-beam lithographic methods, and by changes in the geometrical parameters of the laser waveguide. A change in the coupling strength, |/spl kappa/|, is more difficult to realize. Recently, a novel method for fabricating a DFB laser with two discrete values of |/spl kappa/| in different sections of the laser cavity, was demonstrated, but the extension of this method to arbitrary variations in |/spl kappa/| along the laser is not straightforward. Selective organometallic vapor phase epitaxy (OMVPE) on masked substrates is an attractive option for epitaxial layer deposition with controllable thickness variations. Both the growth rate and the composition of ternary or quaternary layers are determined by the mask geometry. In this work, a novel method for the formation of DFB gratings is demonstrated, relying on selective OMVPE growth. The method does not require semiconductor etching, and furthermore it allows for a controlled variation of |/spl kappa/| along the laser cavity.<<ETX>>","PeriodicalId":161711,"journal":{"name":"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)","volume":"88 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115646779","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High static performance polarization insensitive strained InGaAsP/InGaAsP MQW electroabsorption modulator grown by atmospheric pressure MOVPE 常压MOVPE生长的高性能极化不敏感应变InGaAsP/InGaAsP MQW电吸收调制器
A. Ougazzaden, A. Mircea, S. Chelles, F. Devaux, F. Huet, G. Le-Roux
Electroabsorption (EA) modulators based on the quantum confined Stark effect (QCSE) reach a high level of performance using InGaAsP/lnGaAsP multi-quantum well (MQW) structures. However applications for optical fiber communications, such as in-line optical pulse reshaping and optical demultiplexing, require polarization independent operation. This means identical on-state attenuation and electroabsorption spectra for both TE and TM modes. That is, the same electron to heavy hole, and electron to light hole transition energies as well as their shift with the applied electric field; and the same oscillator strength for TE and TM modes. The growth was performed by atmospheric pressure MOVPE in a T-shaped reactor.<>
利用InGaAsP/lnGaAsP多量子阱(MQW)结构,基于量子受限斯塔克效应(QCSE)的电吸收(EA)调制器达到了高水平的性能。然而,光纤通信的应用,如在线光脉冲整形和光解复用,需要偏振无关的操作。这意味着TE和TM模式的导态衰减和电吸收光谱相同。即相同的电子到重空穴、电子到轻空穴的跃迁能及其随外加电场的位移;并且TE和TM模式的振荡器强度相同。在t型反应器中用常压MOVPE进行生长。
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引用次数: 1
Radiation degradation in In/sub 0.53/Ga/sub 0.47/As solar cells in /sub 0.53/Ga/sub 0.47/As太阳能电池的辐射退化
S. Messenger, R. Walters, H. Cotal, G. Summers
This paper presents the radiation results on p/n In/sub 0.53/Ga0/sub 0.47/As bottom cells. The main conclusion is that In/sub 0.53/Ga0/sub 0.47/As solar cells display the same radiation tolerance, regardless of the cell polarity. This result is, in general, not expected. Previous results involving damage coefficients for both Si, GaAs, and InP show that the polarity of the device does indeed matter. This paper therefore gives device fabricators the liberty of choosing either type of polarity depending on their needs.<>
本文介绍了p/n In/sub 0.53/Ga0/sub 0.47/As底电池的辐射结果。主要结论是,无论电池极性如何,In/sub 0.53/Ga0/sub 0.47/As太阳能电池都具有相同的辐射耐受性。一般来说,这个结果是意料之外的。先前涉及Si、GaAs和InP损伤系数的结果表明,器件的极性确实有影响。因此,这篇论文给了器件制造商根据他们的需要选择任何一种极性的自由。
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引用次数: 1
Optical switching in InGaAsP amplifiers InGaAsP放大器中的光开关
D. Davies
Future optical communications networks will require large bandwidth, high capacity switching systems that can be controlled as easily and flexibly as possible; in a variety of applications involving high bit rate systems, photonic switching appears to offer advantages in the provision of space, time and wavelength switching. Optical amplifiers based on InGaAsP material technology are proving to be very flexible when employed in such switching devices. As well as offering compact, readily controlled gates with a considerable on/off ratio, their inherent gain can overcome splitting losses in spatial switching arrays, while their nonlinear and spectral properties allow a range of functions to be implemented suitable for high speed and multi-wavelength systems. Means of exploiting these properties can roughly be divided into devices where the optical path is controlled electronically via the injection current, and those with a d.c. injection current where incoming intense optical pulses cause modulation via nonlinear effects in the device active region. Examples of both will be discussed in this paper.<>
未来的光通信网络将需要大带宽、高容量的交换系统,这些系统要尽可能容易和灵活地控制;在涉及高比特率系统的各种应用中,光子交换似乎在提供空间、时间和波长交换方面具有优势。基于InGaAsP材料技术的光放大器在这种开关器件中被证明是非常灵活的。除了提供紧凑,易于控制的具有相当开/关比的门外,其固有增益可以克服空间开关阵列中的分裂损耗,而其非线性和光谱特性允许实现适用于高速和多波长系统的一系列功能。利用这些特性的方法可以大致分为通过注入电流以电子方式控制光路的器件,以及那些具有直流注入电流的器件,其中入射的强光脉冲通过器件有源区域的非线性效应引起调制。本文将讨论这两种方法的例子。
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引用次数: 0
期刊
Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)
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