Pub Date : 2024-01-11DOI: 10.1109/JMEMS.2023.3349299
Tongkai Gu;Sitong Yan;Lanlan Wang;Yasheng Chang;Hongzhong Liu
High-quality optical observation through traditional microscopes faces significant challenges due to their low spatial sampling and the limited ability to respond only to the light intensity characteristics of optoelectronic devices. This limitation results in an inability to measure other critical optical information during imaging, such as phase, angle, polarization, and coherence. In response to these challenges, light field microscope (LFM) as a powerful imaging technique is capable of measuring samples with unprecedented depth and detail. LFM overcomes the limitations of conventional microscope methods by capturing both spatial and angular information of light rays. To further demonstrate these capabilities, the LFM based on microlens arrays is constructed here. These arrays are fabricated using advanced techniques such as laser lithography, microimprinting, and self-assembly technology. Using light field imaging, image segmentation methods, and deep learning fusion, the imaging quality is nearly doubled, significantly enhancing the quality of observations. LFM based on microlens arrays offers great promise for improving the quality of imaging observations in the field of microsope. [2023-0167]
{"title":"High-Quality Light Field Microscope Imaging Based on Microlens Arrays","authors":"Tongkai Gu;Sitong Yan;Lanlan Wang;Yasheng Chang;Hongzhong Liu","doi":"10.1109/JMEMS.2023.3349299","DOIUrl":"10.1109/JMEMS.2023.3349299","url":null,"abstract":"High-quality optical observation through traditional microscopes faces significant challenges due to their low spatial sampling and the limited ability to respond only to the light intensity characteristics of optoelectronic devices. This limitation results in an inability to measure other critical optical information during imaging, such as phase, angle, polarization, and coherence. In response to these challenges, light field microscope (LFM) as a powerful imaging technique is capable of measuring samples with unprecedented depth and detail. LFM overcomes the limitations of conventional microscope methods by capturing both spatial and angular information of light rays. To further demonstrate these capabilities, the LFM based on microlens arrays is constructed here. These arrays are fabricated using advanced techniques such as laser lithography, microimprinting, and self-assembly technology. Using light field imaging, image segmentation methods, and deep learning fusion, the imaging quality is nearly doubled, significantly enhancing the quality of observations. LFM based on microlens arrays offers great promise for improving the quality of imaging observations in the field of microsope. [2023-0167]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2024-01-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139950741","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2024-01-09DOI: 10.1109/JMEMS.2023.3348792
Tianyu Yang;Yu Chen;Binglei Zhang;Binlei Cao;Xiaoshi Li;Kaisheng Zhang;Jiangbo He;Wei Su
The piezoelectric thin-film traveling-wave micro-motor based on the microelectromechanical systems (MEMS) process has the advantages of compact size, easy integration and batch production. However, the piezoelectric thin-film micro-motor still exits a serious shortcoming of very small output torque. This paper proposes a novel lead zirconate titanate (PZT) piezoelectric thin-film motor with stator teeth to improve the output torque. Firstly, theoretical analysis and finite element simulations were performed to determine the design parameters of the stator teeth. The device preparation is completed by combining with wafer-scale MEMS fabrication techniques, in which the base Si layer of PZT-SOI wafer is thinned and etched to form the stator tooth structure based on the deep reactive ion etching (DRIE) process. Finally, the performance testing results showed that the novel motor achieved a large output torque of $39.4 mu text{N}cdot text{m}$ under a low driving voltage of 4.5 Vpp. The large output torque is 2.65 times higher than that of the previously reported piezoelectric thin-film motor with a much higher driving voltage of 11 Vpp. [2023-0099]
{"title":"A PZT Thin-Film Traveling-Wave Micro-Motor With Stator Teeth Based on MEMS Technology","authors":"Tianyu Yang;Yu Chen;Binglei Zhang;Binlei Cao;Xiaoshi Li;Kaisheng Zhang;Jiangbo He;Wei Su","doi":"10.1109/JMEMS.2023.3348792","DOIUrl":"10.1109/JMEMS.2023.3348792","url":null,"abstract":"The piezoelectric thin-film traveling-wave micro-motor based on the microelectromechanical systems (MEMS) process has the advantages of compact size, easy integration and batch production. However, the piezoelectric thin-film micro-motor still exits a serious shortcoming of very small output torque. This paper proposes a novel lead zirconate titanate (PZT) piezoelectric thin-film motor with stator teeth to improve the output torque. Firstly, theoretical analysis and finite element simulations were performed to determine the design parameters of the stator teeth. The device preparation is completed by combining with wafer-scale MEMS fabrication techniques, in which the base Si layer of PZT-SOI wafer is thinned and etched to form the stator tooth structure based on the deep reactive ion etching (DRIE) process. Finally, the performance testing results showed that the novel motor achieved a large output torque of \u0000<inline-formula> <tex-math>$39.4 mu text{N}cdot text{m}$ </tex-math></inline-formula>\u0000 under a low driving voltage of 4.5 Vpp. The large output torque is 2.65 times higher than that of the previously reported piezoelectric thin-film motor with a much higher driving voltage of 11 Vpp. [2023-0099]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2024-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139950995","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-12-29DOI: 10.1109/JMEMS.2023.3344018
Izhar;Yang Deng;Merrilyn M. A. Fiagbenu;Abhay Kochhar;Ramakrishna Vetury;Roy H. Olsson
We report a frequency tunable Lamb wave piezoelectric resonator using an Al0.7Sc0.3 N thin film. The frequency tuning of the resonator is demonstrated by its stiffness manipulation which is achieved by terminating the tuning electrodes (TE) with a variable capacitor. Resonators with 2, 3, 4, and 5 TE were fabricated and characterized. The highest tuning range of 24,694 ppm was achieved for the resonator with 5 TE. Whereas the best insertion loss of approximately −6 dB was demonstrated by the resonator with 2 TE. The tunning range (17,783 $sim $ 24,694 ppm) achieved by the Al0.7Sc0.3 N resonators is higher than zero power demonstrations in prior studies. The resonators are fabricated using a commercial XBAW $^{mathrm {TM}}$ process making it suitable for mass production without any needed exotic processing steps or materials. The resonators are promising for miniaturization of modern wireless communications system by providing a platform to process multi-channel frequencies with reduced components. [2023-0193]
我们报告了一种使用 Al0.7Sc0.3 N 薄膜的频率可调 Lamb 波压电谐振器。谐振器的频率可调是通过其刚度操纵实现的，而刚度操纵是通过用可变电容终止调谐电极（TE）来实现的。我们制作并鉴定了具有 2、3、4 和 5 个 TE 的谐振器。具有 5 个 TE 的谐振器实现了 24 694 ppm 的最高调谐范围。而 2 TE 谐振器的插入损耗最佳，约为 -6 dB。Al0.7Sc0.3 N谐振器实现的调谐范围（17,783 $sim $ 24,694 ppm）高于先前研究中的零功率演示。谐振器采用商用 XBAW $^{mathrm {TM}}$工艺制造，因此适合大规模生产，无需任何特殊的加工步骤或材料。这种谐振器为使用更少的元件处理多通道频率提供了一个平台，从而有望实现现代无线通信系统的小型化。[2023-0193]
{"title":"Highly Tunable Piezoelectric Resonators Using Al0.7Sc0.3N","authors":"Izhar;Yang Deng;Merrilyn M. A. Fiagbenu;Abhay Kochhar;Ramakrishna Vetury;Roy H. Olsson","doi":"10.1109/JMEMS.2023.3344018","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3344018","url":null,"abstract":"We report a frequency tunable Lamb wave piezoelectric resonator using an Al0.7Sc0.3 N thin film. The frequency tuning of the resonator is demonstrated by its stiffness manipulation which is achieved by terminating the tuning electrodes (TE) with a variable capacitor. Resonators with 2, 3, 4, and 5 TE were fabricated and characterized. The highest tuning range of 24,694 ppm was achieved for the resonator with 5 TE. Whereas the best insertion loss of approximately −6 dB was demonstrated by the resonator with 2 TE. The tunning range (17,783 \u0000<inline-formula> <tex-math>$sim $ </tex-math></inline-formula>\u0000 24,694 ppm) achieved by the Al0.7Sc0.3 N resonators is higher than zero power demonstrations in prior studies. The resonators are fabricated using a commercial XBAW\u0000<inline-formula> <tex-math>$^{mathrm {TM}}$ </tex-math></inline-formula>\u0000 process making it suitable for mass production without any needed exotic processing steps or materials. The resonators are promising for miniaturization of modern wireless communications system by providing a platform to process multi-channel frequencies with reduced components. [2023-0193]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140351437","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-12-29DOI: 10.1109/JMEMS.2023.3345286
Kewen Zhu;Yuhao Xiao;Jinzhao Han;Guoqiang Wu
Mechanical filters implement channel selection in a tiny percent bandwidth and become essential components in wireless communication systems and sensor networks. This paper reports a mechanically coupled piezoelectric microelectromechanical system (MEMS) filter, which consists of two width-extensional (WE) mode resonators mechanically coupled by a straight beam. The coupling beam, located at the plate edges and purposely designed to operate in flexural mode with low dynamic stiffness, enables the filter to achieve a small percent bandwidth. The designed mechanically coupled piezoelectric MEMS filter is fabricated based on a thin-film piezoelectric on silicon (TPoS) platform. Measurement results indicate that under a termination impedance of $550~Omega $ , the fabricated piezoelectric MEMS filter has a center frequency of 28.38 MHz, a percent bandwidth of 0.049%, an insertion loss of 2.0 dB, and a stopband rejection of approximately 41 dB outside the desired frequency range. [2023-0141]
{"title":"A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss","authors":"Kewen Zhu;Yuhao Xiao;Jinzhao Han;Guoqiang Wu","doi":"10.1109/JMEMS.2023.3345286","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3345286","url":null,"abstract":"Mechanical filters implement channel selection in a tiny percent bandwidth and become essential components in wireless communication systems and sensor networks. This paper reports a mechanically coupled piezoelectric microelectromechanical system (MEMS) filter, which consists of two width-extensional (WE) mode resonators mechanically coupled by a straight beam. The coupling beam, located at the plate edges and purposely designed to operate in flexural mode with low dynamic stiffness, enables the filter to achieve a small percent bandwidth. The designed mechanically coupled piezoelectric MEMS filter is fabricated based on a thin-film piezoelectric on silicon (TPoS) platform. Measurement results indicate that under a termination impedance of \u0000<inline-formula> <tex-math>$550~Omega $ </tex-math></inline-formula>\u0000, the fabricated piezoelectric MEMS filter has a center frequency of 28.38 MHz, a percent bandwidth of 0.049%, an insertion loss of 2.0 dB, and a stopband rejection of approximately 41 dB outside the desired frequency range. [2023-0141]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140351450","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-12-28DOI: 10.1109/JMEMS.2023.3343815
Zong Liu;Yushen Hu;Fei Wang;Man Wong
Integrating in one package a gas sensor array (GSA) unit and an artificial neural network (ANN) unit, a gas-sensing system based on two types of metal-oxide semiconductors is described. The GSA consists of micro-hotplates (MHPs) monolithically integrated with thin-film transistors (TFTs) built using a first metal-oxide semiconductor (MOS). The structural plates for realizing the MHPs are spontaneously suspended over a sealed cavity without requiring a sacrificial layer etch, thus largely overcoming potential issues of process incompatibility between the construction of the MHPs and the TFT active-matrix circuits. A second gas-sensing MOS is coated on the MHPs to reduce process complexity, with the resulting low sensing specificity remedied by exploiting the different temperature-dependent sensitivities of the different gas species. ANN consisting of dual-gate TFTs has been fabricated and trained for inferencing gas identification and quantification. This technology can be more generally applied to realizing other micro-fabricated “smart” sensors. [2023-0159]
{"title":"A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network","authors":"Zong Liu;Yushen Hu;Fei Wang;Man Wong","doi":"10.1109/JMEMS.2023.3343815","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3343815","url":null,"abstract":"Integrating in one package a gas sensor array (GSA) unit and an artificial neural network (ANN) unit, a gas-sensing system based on two types of metal-oxide semiconductors is described. The GSA consists of micro-hotplates (MHPs) monolithically integrated with thin-film transistors (TFTs) built using a first metal-oxide semiconductor (MOS). The structural plates for realizing the MHPs are spontaneously suspended over a sealed cavity without requiring a sacrificial layer etch, thus largely overcoming potential issues of process incompatibility between the construction of the MHPs and the TFT active-matrix circuits. A second gas-sensing MOS is coated on the MHPs to reduce process complexity, with the resulting low sensing specificity remedied by exploiting the different temperature-dependent sensitivities of the different gas species. ANN consisting of dual-gate TFTs has been fabricated and trained for inferencing gas identification and quantification. This technology can be more generally applied to realizing other micro-fabricated “smart” sensors. [2023-0159]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140351552","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-12-19DOI: 10.1109/JMEMS.2023.3341039
Almur A. S. Rabih;Seyedfakhreddin Nabavi;Michaël Ménard;Frederic Nabki
This work presents novel multi degrees-of-freedom (DOF) actuators based on piezoelectric and electrostatic actuation to generate both in-plane and out-of-plane motions, intended to position a suspended optical waveguide for chip-to-chip alignment in photonic integrated circuits. In this context, the mechanical structures of the actuators with a suspended platform to carry the waveguide, are designed to house aluminum nitride (AlN) as the piezoelectric material for generating out-of-plane motion and a comb-drive, whose fixed and moveable fingers are positioned on the same layer for in-plane motion. Two distinct designs, i.e., a 2-DOF design with motions along the Z-and Y-axes and a 3-DOF design with motions along the Z-, Y-, and X-axes were fabricated and tested. Both designs include capacitive-based displacement sensors to track the motions in Z-and Y-axes. Experimental results at ±60 V indicate that 3 devices of each design give an average displacement of 3.16 ± $0.34~mu text{m}$ and 0.63 ± $0.04~mu text{m}$ in the Z-axis for the 2-DOF and 3-DOF designs, respectively. For the Y-axis at 120 V, the average results for the two designs respectively were found to be 3.06 ± $0.17~mu text{m}$ and 7.38 ± $0.29~mu text{m}$ , with the ability to extended the later to $10.69~mu text{m}$ at 140 V. In the X-axis, the 3-DOF design can produce total of 300 nm of displacement at ±100 V. The capacitance measurements were found to correlate well with the tracked displacement. Furthermore, simultaneous activation of more than one actuator could mitigate misalignment and align the platform with a fixed surface. [2023-0148]
本研究提出了基于压电和静电驱动的新型多自由度（DOF）致动器，用于产生平面内和平面外运动，目的是定位悬浮光波导，以便在光子集成电路中进行芯片到芯片对齐。在这种情况下，推杆的机械结构带有一个承载波导的悬浮平台，其设计包括氮化铝（AlN）作为压电材料，用于产生平面外运动，以及一个梳状驱动器，其固定和可动指位于同一层，用于平面内运动。我们制作并测试了两种不同的设计，即沿 Z 轴和 Y 轴运动的 2-DOF 设计和沿 Z 轴、Y 轴和 X 轴运动的 3-DOF 设计。这两种设计都包括基于电容的位移传感器，用于跟踪 Z 轴和 Y 轴的运动。±60V电压下的实验结果表明，对于2-DOF和3-DOF设计，每种设计的3个器件在Z轴上的平均位移分别为3.16 ± $0.34~mu text{m}$和0.63 ± $0.04~mu text{m}$。在 120 V 电压下的 Y 轴上，两种设计的平均结果分别为 3.06 ± $0.17~mu text{m}$ 和 7.38 ± $0.29~mu text{m}$ ，后一种设计的平均结果可以扩展到 10.06 ± $0.17~mu text{m}$ 和 7.38 ± $0.29~mu text{m}$ 。在 X 轴上，3-DOF 设计可以在 ±100 V 的电压下产生总计 300 nm 的位移。此外，同时激活一个以上的致动器可减轻错位，并使平台与固定表面对齐。[2023-0148]
{"title":"Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors","authors":"Almur A. S. Rabih;Seyedfakhreddin Nabavi;Michaël Ménard;Frederic Nabki","doi":"10.1109/JMEMS.2023.3341039","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3341039","url":null,"abstract":"This work presents novel multi degrees-of-freedom (DOF) actuators based on piezoelectric and electrostatic actuation to generate both in-plane and out-of-plane motions, intended to position a suspended optical waveguide for chip-to-chip alignment in photonic integrated circuits. In this context, the mechanical structures of the actuators with a suspended platform to carry the waveguide, are designed to house aluminum nitride (AlN) as the piezoelectric material for generating out-of-plane motion and a comb-drive, whose fixed and moveable fingers are positioned on the same layer for in-plane motion. Two distinct designs, i.e., a 2-DOF design with motions along the Z-and Y-axes and a 3-DOF design with motions along the Z-, Y-, and X-axes were fabricated and tested. Both designs include capacitive-based displacement sensors to track the motions in Z-and Y-axes. Experimental results at ±60 V indicate that 3 devices of each design give an average displacement of 3.16 ± \u0000<inline-formula> <tex-math>$0.34~mu text{m}$ </tex-math></inline-formula>\u0000 and 0.63 ± \u0000<inline-formula> <tex-math>$0.04~mu text{m}$ </tex-math></inline-formula>\u0000 in the Z-axis for the 2-DOF and 3-DOF designs, respectively. For the Y-axis at 120 V, the average results for the two designs respectively were found to be 3.06 ± \u0000<inline-formula> <tex-math>$0.17~mu text{m}$ </tex-math></inline-formula>\u0000 and 7.38 ± \u0000<inline-formula> <tex-math>$0.29~mu text{m}$ </tex-math></inline-formula>\u0000, with the ability to extended the later to \u0000<inline-formula> <tex-math>$10.69~mu text{m}$ </tex-math></inline-formula>\u0000 at 140 V. In the X-axis, the 3-DOF design can produce total of 300 nm of displacement at ±100 V. The capacitance measurements were found to correlate well with the tracked displacement. Furthermore, simultaneous activation of more than one actuator could mitigate misalignment and align the platform with a fixed surface. [2023-0148]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676276","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-12-15DOI: 10.1109/JMEMS.2023.3328590
Zhenxiang Yi;Yu Wan;Ming Qin;Qing-An Huang
This paper proposes a new three-dimensional (3D) flexible wind sensor by utilizing dual-layer differential capacitors. The deformation of the sensor caused by wind leads to eight capacitances variation, which can be applied to obtain the wind speed along the x, y, and z axes (vx, vy and vz). Consequently, the 3D wind speed and direction are calculated by the vector synthesis. The feasibility of this measurement principle was verified by simulation. Then, the sensor was fabricated consisting of two windward pillar, four electrode layers, and two supporting layers, which were produced by polydimethylsiloxane (PDMS) with different Young’s modulus. Experiments demonstrated that the sensor can measure 3D wind speed and direction with the dynamic range of 0-23.9m/s. The average errors of wind speed measurement in XY, XZ and YZ planes are close to 0.58 m/s, 0.42 m/s, and 0.53 m/s, respectively, while the average errors of wind direction measurement are about 6.63°, 4.03°, and 5.65° respectively. Furthermore, temperature effect, as well as humidity effect, of the sensor was also investigated. The initial capacitances of the sensor are positively correlated with the temperature and humidity, and the slope are on the order of 6.21fF $cdot ^{circ }text{C}^{-1}$ , 3.21fF $cdot $ %RH−1, respectively. Moreover, trenches were fabricated to optimize the sensor’s sensitivity, which has been verified by experiments. [2023-0075]
{"title":"3D Flexible Wind Sensor With its Optimization and Environmental Effect","authors":"Zhenxiang Yi;Yu Wan;Ming Qin;Qing-An Huang","doi":"10.1109/JMEMS.2023.3328590","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3328590","url":null,"abstract":"This paper proposes a new three-dimensional (3D) flexible wind sensor by utilizing dual-layer differential capacitors. The deformation of the sensor caused by wind leads to eight capacitances variation, which can be applied to obtain the wind speed along the x, y, and z axes (vx, vy and vz). Consequently, the 3D wind speed and direction are calculated by the vector synthesis. The feasibility of this measurement principle was verified by simulation. Then, the sensor was fabricated consisting of two windward pillar, four electrode layers, and two supporting layers, which were produced by polydimethylsiloxane (PDMS) with different Young’s modulus. Experiments demonstrated that the sensor can measure 3D wind speed and direction with the dynamic range of 0-23.9m/s. The average errors of wind speed measurement in XY, XZ and YZ planes are close to 0.58 m/s, 0.42 m/s, and 0.53 m/s, respectively, while the average errors of wind direction measurement are about 6.63°, 4.03°, and 5.65° respectively. Furthermore, temperature effect, as well as humidity effect, of the sensor was also investigated. The initial capacitances of the sensor are positively correlated with the temperature and humidity, and the slope are on the order of 6.21fF\u0000<inline-formula> <tex-math>$cdot ^{circ }text{C}^{-1}$ </tex-math></inline-formula>\u0000, 3.21fF\u0000<inline-formula> <tex-math>$cdot $ </tex-math></inline-formula>\u0000%RH−1, respectively. Moreover, trenches were fabricated to optimize the sensor’s sensitivity, which has been verified by experiments. [2023-0075]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676305","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-12-14DOI: 10.1109/JMEMS.2023.3343158
{"title":"2023 Index Journal of Microelectromechanical Systems Vol. 31","authors":"","doi":"10.1109/JMEMS.2023.3343158","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3343158","url":null,"abstract":"","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10360136","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"138633796","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-12-12DOI: 10.1109/JMEMS.2023.3338250
Jiashuai Xu;Zong Liu;Junyan Zheng;Fangsheng Qian;Man Wong;Yansong Yang
This focuses on developing a new platform for the thin-film bulk acoustic wave (BAW) resonator, which features predefined sealed cavities, self-formed acoustic boundaries, and compatibility with subsequent fabrication. Different from conventional BAW resonator fabrication methods, this work has simplified fabrication by using silicon migration technology: building freely predefined cavities with self-formed acoustic boundaries without patterning the piezoelectric layer in only two steps (etching and annealing). Additionally, the sealed cavity is sturdy enough to be compatible with subsequent hetero-integrating with other devices. For higher frequency and better electromechanical coupling ( $K^{2}$ ), the proposed platform can excite the second-order asymmetric Lamb wave mode (A2) in scandium-doped aluminum nitride (Al1–xScxN) film with an optimized stress field. The fabricated devices demonstrate S1 and A2 resonant modes at 1.58 GHz and 3.52 GHz with electromechanical coupling coefficients of 1.47% and 5.12%, respectively. [2023-0185]
{"title":"Sealed-Cavity Bulk Acoustic Resonator for Subsequent Fabrication and Higher Order Mode","authors":"Jiashuai Xu;Zong Liu;Junyan Zheng;Fangsheng Qian;Man Wong;Yansong Yang","doi":"10.1109/JMEMS.2023.3338250","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3338250","url":null,"abstract":"This focuses on developing a new platform for the thin-film bulk acoustic wave (BAW) resonator, which features predefined sealed cavities, self-formed acoustic boundaries, and compatibility with subsequent fabrication. Different from conventional BAW resonator fabrication methods, this work has simplified fabrication by using silicon migration technology: building freely predefined cavities with self-formed acoustic boundaries without patterning the piezoelectric layer in only two steps (etching and annealing). Additionally, the sealed cavity is sturdy enough to be compatible with subsequent hetero-integrating with other devices. For higher frequency and better electromechanical coupling (\u0000<inline-formula> <tex-math>$K^{2}$ </tex-math></inline-formula>\u0000), the proposed platform can excite the second-order asymmetric Lamb wave mode (A2) in scandium-doped aluminum nitride (Al1–xScxN) film with an optimized stress field. The fabricated devices demonstrate S1 and A2 resonant modes at 1.58 GHz and 3.52 GHz with electromechanical coupling coefficients of 1.47% and 5.12%, respectively. [2023-0185]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676301","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-12-07DOI: 10.1109/JMEMS.2023.3337333
Chuan-Hui Ou;Nguyen Van Toan;Yao-Chuan Tsai;Ioana Voiculescu;Masaya Toda;Takahito Ono
An electromagnetic tip-tilt-piston micromirror with a large stroke is presented. This research introduced a novel actuation structure, based on a spring made from conductive metallic glass with excellent mechanical properties. For the first time, two functional elements, an electromagnetic actuation element and a mechanical support structure, were successfully integrated into a single-layer spring, made of metallic glass. With this novel actuator, the performance of stroke and angle controllability is remarkably improved. The fabricated device can achieve a $418 ~mu text{m}$ static stroke in upward direction. Furthermore, the tilting angles of the micromirror can be controlled with maximum accuracy of 0.05°/mA. The device is robust and has miniature dimensions, comparable or smaller, than existing electromagnetic micromirror dimensions published in literature. The displacement values of the micromirror are larger, compared to state-of-the–art electromagnetic micromirrors, which usually have strokes under $300 ~mu text{m}$ and do not have angle control mechanism. In spectrometer applications, the micromirror with a large stroke and controllable angle allows spectrometers to achieve higher resolution. These special qualities of the micromirror, will provide efficient, and reliable spatial light modulation required for interferometer applications. [2023-0104]
{"title":"A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film","authors":"Chuan-Hui Ou;Nguyen Van Toan;Yao-Chuan Tsai;Ioana Voiculescu;Masaya Toda;Takahito Ono","doi":"10.1109/JMEMS.2023.3337333","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3337333","url":null,"abstract":"An electromagnetic tip-tilt-piston micromirror with a large stroke is presented. This research introduced a novel actuation structure, based on a spring made from conductive metallic glass with excellent mechanical properties. For the first time, two functional elements, an electromagnetic actuation element and a mechanical support structure, were successfully integrated into a single-layer spring, made of metallic glass. With this novel actuator, the performance of stroke and angle controllability is remarkably improved. The fabricated device can achieve a \u0000<inline-formula> <tex-math>$418 ~mu text{m}$ </tex-math></inline-formula>\u0000 static stroke in upward direction. Furthermore, the tilting angles of the micromirror can be controlled with maximum accuracy of 0.05°/mA. The device is robust and has miniature dimensions, comparable or smaller, than existing electromagnetic micromirror dimensions published in literature. The displacement values of the micromirror are larger, compared to state-of-the–art electromagnetic micromirrors, which usually have strokes under \u0000<inline-formula> <tex-math>$300 ~mu text{m}$ </tex-math></inline-formula>\u0000 and do not have angle control mechanism. In spectrometer applications, the micromirror with a large stroke and controllable angle allows spectrometers to achieve higher resolution. These special qualities of the micromirror, will provide efficient, and reliable spatial light modulation required for interferometer applications. [2023-0104]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676304","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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