Pub Date : 2023-12-05DOI: 10.1109/JMEMS.2023.3337513
Ziji Wang;Junming Wu;Gong Sun;Jintang Shang
A monolithically integrated 3D atomic chip for weak magnetic field detection is presented in this work. A 14.8 ohm MEMS thin film non-magnetic micro heater is monolithically integrated onto a micro spherical alkali vapor cell to realize on-chip atomic density control. Both magnetic and thermal characteristics of the non-magnetic heater are analyzed theoretically. Based on the heater-integrated atomic chip, a chip-scale scalar atomic magnetometer is realized and tested in a magnetic shield. Effect of heating noise suppression methods including high frequency heating, noise-shifting heating and high precision feedback control on magnetometer performance is experimentally analyzed. By further analyzing and eliminating glitch noise in output signal, magnetic noise floor of the constructed device reduced by over 88 %. The proposed atomic chip is especially advantageous for future low-cost and high integration quantum optical magnetometry. [2023-0152]
{"title":"Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry","authors":"Ziji Wang;Junming Wu;Gong Sun;Jintang Shang","doi":"10.1109/JMEMS.2023.3337513","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3337513","url":null,"abstract":"A monolithically integrated 3D atomic chip for weak magnetic field detection is presented in this work. A 14.8 ohm MEMS thin film non-magnetic micro heater is monolithically integrated onto a micro spherical alkali vapor cell to realize on-chip atomic density control. Both magnetic and thermal characteristics of the non-magnetic heater are analyzed theoretically. Based on the heater-integrated atomic chip, a chip-scale scalar atomic magnetometer is realized and tested in a magnetic shield. Effect of heating noise suppression methods including high frequency heating, noise-shifting heating and high precision feedback control on magnetometer performance is experimentally analyzed. By further analyzing and eliminating glitch noise in output signal, magnetic noise floor of the constructed device reduced by over 88 %. The proposed atomic chip is especially advantageous for future low-cost and high integration quantum optical magnetometry. [2023-0152]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676286","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
High-volume manufacturing of microstructures is essential for the uptake of the related scientific results for commercial use and also if hundreds or thousands of devices with repeatable performance are needed during the large-scale experimental research. Polydimethyl siloxane (PDMS) is one of the most widely used materials for academia to prepare microfluidic test devices. This has also motivated the development of roll-to-roll imprinting towards the fabrication of PDMS-based devices at high volumes. The gas bubble entrapping during the replication process has remained an issue resulting in defects in the microstructure. Performing imprinting in vacuum is a well-known method to avoid bubbles but it has not been applied in roll-to-roll processing. In this work we demonstrated a reduced ambient pressure roll to roll imprinting process using PDMS silicone elastomer as imprint resist. We observed the reduction in the number of bubble-originated defects in individual micro-features from 100 % to < 1 % when the ambient pressure was reduced from 1 atm to 1/8 atm. [2023-0063]
{"title":"Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures","authors":"Olli-Heikki Huttunen;Johanna Hiitola-Keinänen;Jarno Petäjä;Eero Hietala;Hannu Lindström;Jussi Hiltunen","doi":"10.1109/JMEMS.2023.3336740","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3336740","url":null,"abstract":"High-volume manufacturing of microstructures is essential for the uptake of the related scientific results for commercial use and also if hundreds or thousands of devices with repeatable performance are needed during the large-scale experimental research. Polydimethyl siloxane (PDMS) is one of the most widely used materials for academia to prepare microfluidic test devices. This has also motivated the development of roll-to-roll imprinting towards the fabrication of PDMS-based devices at high volumes. The gas bubble entrapping during the replication process has remained an issue resulting in defects in the microstructure. Performing imprinting in vacuum is a well-known method to avoid bubbles but it has not been applied in roll-to-roll processing. In this work we demonstrated a reduced ambient pressure roll to roll imprinting process using PDMS silicone elastomer as imprint resist. We observed the reduction in the number of bubble-originated defects in individual micro-features from 100 % to < 1 % when the ambient pressure was reduced from 1 atm to 1/8 atm. [2023-0063]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10342677","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676267","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-12-01DOI: 10.1109/JMEMS.2023.3334297
Fangzheng Li;Dandan Liu;Le Gao;Bingyang Cai;Lujia Yang;Yuan Wang;Chun Zhao;Wenjie Wu;Liangcheng Tu
High-precision MEMS accelerometers with nano-g resolution are emergent instruments for geophysical applications and proved their competence in terms of functionality. The electromagnetic actuator, which serves as an auxiliary component in nano-g MEMS accelerometers for improving the dynamic response, faces the challenges of process incompatibility, temperature sensitivity, and large form factor. Thereby, this paper proposes an area-changed capacitive method for both displacement transducing and force balance in a nano-g MEMS accelerometer, aiming to address those posed challenges and provide favourable performance. Thanks to the allowed large displacement range in the sensitive direction of the proposed device, the area-changed capacitive mechanism is able to be integrated with a highly-sensitive quasi-zero stiffness spring-mass structure. As a result, the fabricated force-balance MEMS accelerometer attains a calibrated self-noise of 1.3 ng/ $surd $ Hz, which is one of the most sensitive MEMS-based accelerometers reported to date. The settling time, on the other hand, is reduced to 0.5 s with the electrostatic closed-loop control featuring the proposed subject, compared to 15.7 s in the open-loop configuration. In addition, the critical acceleration input at the boundary of the “pull-in” is calculated as 5.4 g, which is adaptable to most geophysical applications. This work is of considerable potential in geophysical applications such as earthquake monitoring or gravity measurements, and promising a high-performance closed-loop MEMS accelerometer. [2023-0161]
{"title":"Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer","authors":"Fangzheng Li;Dandan Liu;Le Gao;Bingyang Cai;Lujia Yang;Yuan Wang;Chun Zhao;Wenjie Wu;Liangcheng Tu","doi":"10.1109/JMEMS.2023.3334297","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3334297","url":null,"abstract":"High-precision MEMS accelerometers with nano-g resolution are emergent instruments for geophysical applications and proved their competence in terms of functionality. The electromagnetic actuator, which serves as an auxiliary component in nano-g MEMS accelerometers for improving the dynamic response, faces the challenges of process incompatibility, temperature sensitivity, and large form factor. Thereby, this paper proposes an area-changed capacitive method for both displacement transducing and force balance in a nano-g MEMS accelerometer, aiming to address those posed challenges and provide favourable performance. Thanks to the allowed large displacement range in the sensitive direction of the proposed device, the area-changed capacitive mechanism is able to be integrated with a highly-sensitive quasi-zero stiffness spring-mass structure. As a result, the fabricated force-balance MEMS accelerometer attains a calibrated self-noise of 1.3 ng/\u0000<inline-formula> <tex-math>$surd $ </tex-math></inline-formula>\u0000Hz, which is one of the most sensitive MEMS-based accelerometers reported to date. The settling time, on the other hand, is reduced to 0.5 s with the electrostatic closed-loop control featuring the proposed subject, compared to 15.7 s in the open-loop configuration. In addition, the critical acceleration input at the boundary of the “pull-in” is calculated as 5.4 g, which is adaptable to most geophysical applications. This work is of considerable potential in geophysical applications such as earthquake monitoring or gravity measurements, and promising a high-performance closed-loop MEMS accelerometer. [2023-0161]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676274","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-12-01DOI: 10.1109/JMEMS.2023.3334497
Tapio Pernu;Teuvo Sillanpää;Cyril Baby Karuthedath;Abhilash Thanniyil Sebastian
Piezoelectric micromachined ultrasound transducers (PMUTs) and a high sensitivity PMUT-based gas flowmeter were designed, fabricated and characterised. In this work a single side measurement geometry is introduced for a simple PMUT assembly and enabling high sensitivity for the low flowrate measurement. While PMUT-based gas flow sensors of previous work serve higher flowrate ranges, the advantage of our system is that its novel sensor and measurement geometry is designed specifically for low flow rates to ensure high sensitivity in the low-flow domain. The characterised flowmeter measurement range is ±50 sccm with a non-linearity error of 0.015%. A typical flow error within the measurement range of ±50 sccm is ±0.7% from the flow reading and ±0.2% from the full-scale (±50 sccm) flowrate. [2023-0162]
{"title":"Development of PMUT-Based High Sensitivity Gas Flow Sensor","authors":"Tapio Pernu;Teuvo Sillanpää;Cyril Baby Karuthedath;Abhilash Thanniyil Sebastian","doi":"10.1109/JMEMS.2023.3334497","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3334497","url":null,"abstract":"Piezoelectric micromachined ultrasound transducers (PMUTs) and a high sensitivity PMUT-based gas flowmeter were designed, fabricated and characterised. In this work a single side measurement geometry is introduced for a simple PMUT assembly and enabling high sensitivity for the low flowrate measurement. While PMUT-based gas flow sensors of previous work serve higher flowrate ranges, the advantage of our system is that its novel sensor and measurement geometry is designed specifically for low flow rates to ensure high sensitivity in the low-flow domain. The characterised flowmeter measurement range is ±50 sccm with a non-linearity error of 0.015%. A typical flow error within the measurement range of ±50 sccm is ±0.7% from the flow reading and ±0.2% from the full-scale (±50 sccm) flowrate. [2023-0162]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-11-30DOI: 10.1109/JMEMS.2023.3334533
{"title":"Member ad suite","authors":"","doi":"10.1109/JMEMS.2023.3334533","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3334533","url":null,"abstract":"","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-11-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10336359","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"138468132","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-11-30DOI: 10.1109/JMEMS.2023.3334529
{"title":"TechRxiv: Share Your Preprint Research with the World!","authors":"","doi":"10.1109/JMEMS.2023.3334529","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3334529","url":null,"abstract":"","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-11-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10336177","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"138468152","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-11-30DOI: 10.1109/JMEMS.2023.3327838
{"title":"Journal of Microelectromechanical Systems","authors":"","doi":"10.1109/JMEMS.2023.3327838","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3327838","url":null,"abstract":"","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-11-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10336245","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"138468130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The fused silica micro-hemispherical resonant gyroscope is a new type of solid-wave gyroscope and offers numerous benefits including high precision, low power consumption, small size, and long life. The core component of the gyroscope is the micro-hemispherical resonator (MHR). The inevitable frequency split of the MHR working modes will directly restrict the performance improvement of the gyroscope. Therefore, it is crucial to eliminate the frequency split by a tuning method. A femtosecond laser ablation method is reported for permanent frequency tuning of the wineglass modes in MHRs with teeth-like tines. Firstly, the influence of different positions and depths of the tuning ablation grooves on the eigenfrequencies and frequency split of the working modes is determined by theory and simulation. In the low-frequency rigid axis, the efficient tuning method is located at the outer edges of the tines, while closer to the middle of the tines can obtain a more accurate frequency split. In addition, the Laser Doppler Vibrometer (LDV) test system has been built to test the frequency split of the MHR. Femtosecond laser ablation experiments were then designed, and the experiments and simulations were in good consistency. Finally, combined with the test system and the tuning method, the frequency split of a MHR is reduced to one percent of the initial, which is helpful for the gyroscope’s performance. [2023-0130]
{"title":"Frequency Tuning Method on Teeth-Like Tines of the Fused Silica Micro-Hemispherical Resonator Using Femtosecond Laser","authors":"Youwang Hu;Haoning Zheng;Yao Wang;Yalong Wang;Xiaoyan Sun;Ji’an Duan","doi":"10.1109/JMEMS.2023.3332669","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3332669","url":null,"abstract":"The fused silica micro-hemispherical resonant gyroscope is a new type of solid-wave gyroscope and offers numerous benefits including high precision, low power consumption, small size, and long life. The core component of the gyroscope is the micro-hemispherical resonator (MHR). The inevitable frequency split of the MHR working modes will directly restrict the performance improvement of the gyroscope. Therefore, it is crucial to eliminate the frequency split by a tuning method. A femtosecond laser ablation method is reported for permanent frequency tuning of the wineglass modes in MHRs with teeth-like tines. Firstly, the influence of different positions and depths of the tuning ablation grooves on the eigenfrequencies and frequency split of the working modes is determined by theory and simulation. In the low-frequency rigid axis, the efficient tuning method is located at the outer edges of the tines, while closer to the middle of the tines can obtain a more accurate frequency split. In addition, the Laser Doppler Vibrometer (LDV) test system has been built to test the frequency split of the MHR. Femtosecond laser ablation experiments were then designed, and the experiments and simulations were in good consistency. Finally, combined with the test system and the tuning method, the frequency split of a MHR is reduced to one percent of the initial, which is helpful for the gyroscope’s performance. [2023-0130]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-11-22DOI: 10.1109/JMEMS.2023.3332595
Chenyang Luo;Jonathan B. Hopkins;Michael A. Cullinan
This work details the experimental characterization of a MEMS thermal actuator, which constitutes a three-dimensional meso-robotic metamaterial lattice that can achieve actively controlled mechanical properties such as tunable stiffness. To achieve a target stiffness value via closed-loop control in a timeframe that is practical for most metamaterial applications, it is necessary that such actuators can rapidly respond to the controller’s commands. In this letter, a fabricated thermal actuator experimentally demonstrates the ability to achieve desired stiffness values within 100s of milliseconds of receiving the command signal. The actuator can also maintain those stiffness values regardless of changing external loading conditions with acceptable accuracy. Thus, the results of this work prove that the metamaterial design can enable practical applications such as surgical tools that can change from compliant to stiff states as they perform their functions within the body and materials that can tune their natural frequencies to enable technologies that leverage resonant actuation such as steerable mirrors and optical switches. [2023-0150]
{"title":"Response Speed Characterization of a Thermally Actuated Programmable Metamaterial","authors":"Chenyang Luo;Jonathan B. Hopkins;Michael A. Cullinan","doi":"10.1109/JMEMS.2023.3332595","DOIUrl":"https://doi.org/10.1109/JMEMS.2023.3332595","url":null,"abstract":"This work details the experimental characterization of a MEMS thermal actuator, which constitutes a three-dimensional meso-robotic metamaterial lattice that can achieve actively controlled mechanical properties such as tunable stiffness. To achieve a target stiffness value via closed-loop control in a timeframe that is practical for most metamaterial applications, it is necessary that such actuators can rapidly respond to the controller’s commands. In this letter, a fabricated thermal actuator experimentally demonstrates the ability to achieve desired stiffness values within 100s of milliseconds of receiving the command signal. The actuator can also maintain those stiffness values regardless of changing external loading conditions with acceptable accuracy. Thus, the results of this work prove that the metamaterial design can enable practical applications such as surgical tools that can change from compliant to stiff states as they perform their functions within the body and materials that can tune their natural frequencies to enable technologies that leverage resonant actuation such as steerable mirrors and optical switches. [2023-0150]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":null,"pages":null},"PeriodicalIF":2.7,"publicationDate":"2023-11-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139676275","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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