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Low cost multi-chip modules based on single and double sided chip-on-board modules following Jedec standard specifications 低成本多芯片模块基于单面和双面芯片板上模块遵循Jedec标准规范
P. Clot
The author explains how two original designs using chip-on-board technology have been completed and pushed into production. Both are made on the same kind of modified multilayer glass epoxy. One is equipped with J lead output pins, allowing the mounting of silicon dice on both faces of the printed circuit board; the second supports dice on the top only, the bottom face being reserved for direct surface mount device (SMD) soldering carefully prepared for this purpose. Design rules, dimensions regarding Jedec standard, mounting procedures as well as qualification program and test approach are described. Considerations on the choice of dice epoxy coatings are explained. Dispensing and machining are defined to allow pick and place handling by automatic machine.<>
作者解释了两种采用片上技术的原始设计是如何完成并投入生产的。两者都是在同一种改性多层玻璃环氧树脂上制成的。一种是配备J引脚输出引脚,允许在印刷电路板的两面安装硅片;第二个支持骰子只在顶部,底面保留直接表面贴装设备(SMD)焊接为此目的精心准备。设计规则,尺寸有关Jedec标准,安装程序以及资格程序和测试方法进行了描述。介绍了选用环氧树脂涂料的注意事项。点胶和加工被定义为允许自动机器进行取放处理。
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引用次数: 0
Designing a reliability demonstration test on a lithography expose tool using Bayesian techniques 利用贝叶斯技术设计光刻曝光工具的可靠性演示测试
Mario Villacourt, M. Mahaney
The Bayesian Reliability Testing method is used for the estimation of the shape and scale parameters of an inverted gamma prior distribution of the mean time between failures (MTBF) for equipment having an exponential time to failure distribution. This method allows the use of existing failure data of the equipment in question, provided certain conditions are satisfied. The Bayesian method is usable to update the prior distribution as new failure data becomes available. Through this updating process, confidence is built in to reliability demonstrations.<>
对于具有指数级故障间隔时间分布的设备,采用贝叶斯可靠性测试方法对其平均故障间隔时间(MTBF)的倒伽马先验分布的形状和尺度参数进行估计。在满足某些条件的情况下,该方法允许使用所讨论设备的现有故障数据。贝叶斯方法可以在新的失效数据出现时更新先验分布。通过这一更新过程,对可靠性演示建立了信心。
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引用次数: 7
The current state of laminate based, molded MCM technology 目前的现状是以层压板为主,模压型MCM技术
P.E. Rogren
Laminate technology has progressed to the point where it is capable of producing multichip module (MCM) substrates that can compete favorably with both cofire ceramic and thin film. By virtue of the properties of the materials set and flexibility of the process, laminate based MCM offer superior electrical performance. Laminates can be expected to be faster than either cofire ceramic or thin film and will be significantly less noise than ceramic based MCMs. In terms of thermal performance, several levels of thermal enhancements available on laminate substrates keep pace with similar methods available for ceramic or metal packages.<>
层压板技术已经发展到能够生产多芯片模块(MCM)基板的地步,可以与cofire陶瓷和薄膜竞争。由于材料的特性和工艺的灵活性,层压MCM具有优越的电气性能。层压板可以预期比cofire陶瓷或薄膜更快,并且比陶瓷基mcm的噪音要低得多。在热性能方面,层压基板上可用的几个级别的热增强与陶瓷或金属封装的类似方法保持同步
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引用次数: 0
A demonstration system based on a fuzzy logic controller 基于模糊控制器的演示系统
N. Godfrey, Hua Li, W. Marcy
In the semiconductor manufacturing industry, many systems to be controlled are highly nonlinear and dynamic. A demonstration project, real-time control of a beam balancing system based on fuzzy logic, is described. This prototyping system can be operated automatically by the execution of a fuzzy control algorithm. Unlike most of the conventional and optimal control algorithms, this fuzzy logic controller requires no explicit system parameters. It is characterized by its simplicity and robustness.<>
在半导体制造业中,许多需要控制的系统是高度非线性和动态的。介绍了一种基于模糊逻辑的电子束平衡系统的实时控制演示方案。该原型系统可通过执行模糊控制算法实现自动运行。与大多数传统和最优控制算法不同,这种模糊逻辑控制器不需要显式的系统参数。它的特点是简单和健壮
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引用次数: 0
Optimizing the wafer dicing process 优化晶圆切片工艺
Udi Efrat
Wafer dicing is one of the critical elements of the IC assembly process where improvements can make a major contribution to yield. Chipping (damage along the cut line inherent to the wafer dicing operation) has been identified by semiconductor manufacturers as a relevant area for improvement. A study of process factors that affect the magnitude of the chipping phenomenon is described. The goal is to explore the limits of the current equipment. Cursory experiments are conducted to zero-in on significant factors. During this phase, several factors that were considered major causes for chipping, are found to have no significant effect. A set of designed experiments is run. It identifies chipping sensitivity to process parameters and points at an operating window that improves cut quality. Field tests in production environment confirm the experimental results.<>
晶圆切割是集成电路组装过程的关键要素之一,改进可以对良率做出重大贡献。晶圆切屑(晶圆切屑操作固有的切割线损坏)已被半导体制造商确定为需要改进的相关领域。对影响切屑现象大小的工艺因素进行了研究。我们的目标是探索现有设备的极限。进行粗略的实验以确定重要因素。在这一阶段,有几个被认为是导致碎裂的主要因素被发现没有显著的影响。运行了一套设计好的实验。它确定了对工艺参数的切屑敏感性,并指出了提高切割质量的操作窗口。现场生产环境试验证实了试验结果
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引用次数: 32
Flip chip on board (FCOB) process characterization 板上倒装芯片(FCOB)工艺表征
S.M. Scheifers, C. Raleigh
A no clean flux process for flip chip on board is characterized for ionic flux residue and board contamination using a new cleanliness testing system. The benchmarking procedure establishes a correlation of flux residue to thermal shock reliability. Speciation and quantitation of ionic printed wiring board (PWB) constituents permits segregation of incoming board contamination from that caused by the flux. A process window to minimize defects and maximize reliability performance is developed. Methods for performing similar characterization and benchmarking of processes are presented.<>
采用一种新的洁净度测试系统,对板上倒装芯片的无清洁焊剂工艺进行了离子焊剂残留和板面污染的表征。基准测试程序建立了焊剂残留量与热冲击可靠性的相关性。离子印刷线路板(PWB)成分的形成和定量允许将进入的电路板污染与由焊剂引起的污染分离开来。开发了最小化缺陷和最大化可靠性性能的过程窗口。提出了对过程进行类似表征和基准测试的方法
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引用次数: 0
Packaging technology for high-speed multichip module using copper-polyimide thin film multilayer substrate [for B-ISDN] 采用铜聚酰亚胺薄膜多层基板的高速多芯片模块封装技术[用于B-ISDN]
S. Yamaguchi, Y. Ohno, H. Tomimuro
The authors describe a multichip module (MCM) having a copper-polyimide thin-film multilayer substrate that overcomes the problems of increased transmission loss at high frequencies maintaining crosstalk noise low, and the increased simultaneous switching noise with a larger number of LSI chips. The conductors are designed to be 10-/spl mu/m thick and 25-/spl mu/m wide to enable the transmission of high speed pulses at several Gb/s without decreasing the interconnection density while maintaining crosstalk noise as low as -30 dB. The dielectric thickness between the power and ground layers making up the current loop in the ceramic substrate is designed to be 50/spl mu/m, which gives rise to a low effective inductance.<>
作者描述了一种多芯片模块(MCM),它具有铜聚酰亚胺薄膜多层衬底,克服了高频传输损耗增加的问题,保持了较低的串扰噪声,以及大量LSI芯片同时增加的开关噪声。导线设计为10-/spl mu/m厚,25-/spl mu/m宽,可以在不降低互连密度的情况下传输数Gb/s的高速脉冲,同时保持串扰噪声低至-30 dB。在陶瓷基板中,构成电流回路的功率层和接地层之间的介电厚度被设计为50/spl μ m /m,这导致有效电感较低。
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引用次数: 3
The effects of process variations on the performance of MCM-D interconnects 工艺变化对MCM-D互连性能的影响
D. Solomon, R. Adams, M. Lanka, K. Berry, S. El-Kilani
The performance of thin film interconnects is dependent upon successful interaction between design and the fabrication process. The functional verification of process tolerances to achieve the originally simulated design requirements is addressed. Variational analysis results about the nominal design value are presented and compared with initial simulation results. Interconnect capacitance and impedance variations as a function of conductor and dielectric geometry are shown. The analysis shows that the process is capable of giving an impedance within 10% of the nominal design value.<>
薄膜互连的性能取决于设计和制造过程之间的成功相互作用。解决了工艺公差的功能验证,以实现最初的模拟设计要求。给出了标称设计值的变分分析结果,并与初始仿真结果进行了比较。显示了互连电容和阻抗随导体和介质几何形状的变化。分析表明,该工艺能够提供在标称设计值的10%以内的阻抗。
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引用次数: 0
IBM Austin Industrial Business Center total productive maintenance - The beginning IBM奥斯汀工业业务中心全面生产维护-开始
M. Sanderson, M. Shelton, S. Mulligan
The efforts of IBM Austin Industrial Business Center (AIBC) to adopt total productive maintenance (TPM) as the process for improving quality, increasing production and eliminating waste on the pull production lines (PPLs) are described. Over-all equipment effectiveness (OEE) is seen as the measurement for AIBC improvement activities. The initial introductory conversations with management and early pilot measurement activities are described. The data collection tools used and the resulting analysis of the data collected are shown. The initial benchmark activities are described. The authors describe how they obtained the necessary top-down commitment from management by showing the faults of pilot measurements.<>
介绍了IBM奥斯汀工业业务中心(AIBC)在拉动式生产线(ppl)上采用全面生产维护(TPM)作为提高质量、增加产量和消除浪费的过程所做的努力。整体设备效率(OEE)被视为AIBC改进活动的衡量标准。描述了与管理层和早期试点度量活动的初始介绍性对话。显示了所使用的数据收集工具和所收集数据的结果分析。描述了初始基准测试活动。作者描述了他们如何通过展示试点测量的错误,从管理层获得必要的自上而下的承诺。
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引用次数: 7
Tape automated bonded chip on MCM-D 在MCM-D上带自动粘合芯片
T. Chung, J. Chang, A. Emamjomeh
Tape automated bonding (TAB) is an integrated circuit (IC) chip-level interconnect technology. An in-depth overview of TAB chip on board technology and related applications is presented. Key considerations of design, materials, assembly, and equipment for TAB chip on multichip module (MCM)-D are discussed in detail. The issues, pros and cons, problems and solutions, and guidelines are provided to examine a variety of applications. Examples of both face-up and flipped TAB chip on MCM-D applications are presented and discussed. Future trends of TAB technology are also discussed.<>
磁带自动键合(TAB)是一种集成电路(IC)芯片级互连技术。对TAB芯片板载技术及其应用进行了深入的综述。详细讨论了多芯片模块(MCM)-D上TAB芯片的设计、材料、装配和设备等关键问题。提供了问题、优点和缺点、问题和解决方案以及指导方针,以检查各种应用程序。介绍并讨论了MCM-D应用中正面和翻转TAB芯片的实例。展望了TAB技术的发展趋势。
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引用次数: 0
期刊
Proceedings of 15th IEEE/CHMT International Electronic Manufacturing Technology Symposium
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