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300 Mm sSOI engineering with ultra thin buried oxide 300mm超薄埋氧化sSOI工程
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-30 DOI: 10.1016/j.sse.2025.109307
D. Barge , M. Gallard , J.-M. Hartmann , F. Fournel , V. Loup , F. Mazen , E. Nolot , P. Hauchecorne , J. Sturm , V.H. Le , I. Huyet , D. Delprat , F. Boedt , F. Servant
This paper presents the fabrication of 300 mm tensile-strained silicon-on-insulator (sSOI) wafers designed for next-generation fully depleted silicon-on-insulator (FD-SOI) CMOS devices. The wafers feature a 25 nm thick buried oxide (BOX) and a 12 nm thick tensile-strained top silicon layer. The integration scheme involved growing a thin silicon layer on a relaxed SiGe thick graded buffer, followed by partial transfer to a base wafer using the Smart Cut™ process. The tensile stress in the top silicon layer was successfully modulated from 0.6 GPa to 1.8 GPa by adjusting the germanium content in the SiGe thick graded buffer underneath. Transmission electron microscopy and Raman spectroscopy confirmed the high crystalline quality and uniform strain distribution across the wafers. The study demonstrates the potential for achieving different levels of strain to optimize the performance of nMOS devices.
本文介绍了用于下一代完全耗尽绝缘体上硅(FD-SOI) CMOS器件的300 mm拉伸应变绝缘体上硅(sSOI)晶圆的制造。晶圆具有25纳米厚的埋藏氧化物(BOX)和12纳米厚的拉伸应变顶层硅层。集成方案包括在松弛的SiGe厚梯度缓冲层上生长薄硅层,然后使用Smart Cut™工艺将部分转移到基片上。通过调节SiGe厚级缓冲剂中的锗含量,成功地将顶部硅层的拉伸应力从0.6 GPa调节到1.8 GPa。透射电子显微镜和拉曼光谱证实了晶圆的高晶体质量和均匀的应变分布。该研究证明了实现不同水平应变以优化nMOS器件性能的潜力。
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引用次数: 0
Oxidation state modulation for p-Type stannous oxide with Two-Stage low temperature defect reduction annealing 两段低温缺陷还原退火对p型氧化亚锡氧化态的调制
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-30 DOI: 10.1016/j.sse.2025.109308
Zhibo Zeng , Kai-Jhih Gan , Wenjie Lei , Shiyu Zeng , Jialong Xiang , Bojun Zhang , Kuei-Shu Chang-Liao , Cheng-Chang Yu , Po-Chung Huang , Dun-Bao Ruan
This work employs a two-stage low temperature defect reduction annealing treatment for oxidation state modulation and defect reduction of stannous oxide (SnO) thin-film transistors (TFTs). With higher Sn2+ proportion and fewer defects, the device stability and carrier mobility of p-type SnO TFTs are improved. The SnO TFTs with two-stage low temperature defect reduction annealing exhibit an on/off ratio of 1.22 × 104, a field-effect mobility of 0.44 cm2/V·s, a 50.2 % reduction in IOFF, without subthreshold swing degradation. With the detailed material analysis, the internal physical mechanism of the defect reduction in of SnO is well discussed. The discoveries presented in this work are expected to provide technical methodologies for the high-performance TFTs.
本文采用两阶段低温缺陷还原退火处理方法对氧化态调制和缺陷还原氧化亚锡薄膜晶体管(TFTs)进行了研究。较高的Sn2+比例和较少的缺陷,提高了p型SnO tft的器件稳定性和载流子迁移率。经过两阶段低温缺陷还原退火的SnO tft的开/关比为1.22 × 104,场效应迁移率为0.44 cm2/V·s, IOFF降低50.2%,且无亚阈值摆动退化。通过详细的材料分析,探讨了SnO缺陷减少的内部物理机制。本研究的发现有望为高性能tft提供技术方法。
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引用次数: 0
Modeling of tunneling through Schottky barriers 通过肖特基屏障的隧道建模
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-29 DOI: 10.1016/j.sse.2025.109295
Bogdan Majkusiak
A computational model of probability of tunneling through Schottky barrier, based on the transfer matrix method, is presented and used for a quantitative study of tunneling probability and tunnel current at comparison to the over-barrier transitions for various parameters of Al-SiO2-Si(n) material system. It is proved that tunneling through Schottky barrier can significantly contribute to the total current even at moderate doping levels, especially if the insulator layer is very thin.
提出了基于传递矩阵法的肖特基势垒隧穿概率计算模型,并与Al-SiO2-Si(n)材料体系不同参数下的过势垒跃迁相比较,定量研究了隧道隧穿概率和隧道电流。证明了即使在中等掺杂水平下,特别是绝缘层很薄的情况下,通过肖特基势垒的隧穿也能显著地增加总电流。
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引用次数: 0
Temperature modeling and pulse shaping strategies for energy optimization in 2T-SOT-MRAM 2T-SOT-MRAM能量优化的温度建模和脉冲整形策略
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-25 DOI: 10.1016/j.sse.2025.109284
Tomáš Hadámek , Viktor Sverdlov
A fully 3D model coupling spin, charge, magnetization, and temperature dynamics has been employed to study the two-terminal spin–orbit-torque magnetoresistive random-access memory (2T-SOT-MRAM). To account for heating from tunneling electrons, we applied an asymmetric heating model near the tunnel barrier, revealing that symmetric model can underestimate free layer temperature increase by over 25%. We further employ the model to simulate switching of the 2T-SOT-MRAM under different voltage pulse shapes and show that the pulse-shaping strategies can not only reduce power consumption by more than 30%, but also significantly reduce peak temperature of the device during writing.
采用一个耦合自旋、电荷、磁化和温度动力学的全三维模型研究了双端自旋-轨道-转矩磁阻随机存取存储器(2T-SOT-MRAM)。为了解释隧道电子的加热,我们在隧道势垒附近应用了不对称加热模型,结果表明对称模型可以低估自由层温度升高25%以上。我们进一步利用该模型模拟了2T-SOT-MRAM在不同电压脉冲形状下的开关,结果表明,脉冲整形策略不仅可以降低30%以上的功耗,而且可以显著降低器件在写入过程中的峰值温度。
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引用次数: 0
Multilevel conductance modulation in HfO2, Al2O3, and HfO2/Al2O3 bilayer memristors HfO2, Al2O3和HfO2/Al2O3双层记忆电阻器的多电平电导调制
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-19 DOI: 10.1016/j.sse.2025.109294
H. García , G. Vinuesa , T.del Val , K. Kalam , M.B. González , F. Campabadal , S. Dueñas , H. Castán
Memristors have drawn interest due to their use as artificial synapses in neuromorphic circuits. This work investigates the multilevel conductance modulation in Al2O3 and HfO2-based memristors. Specifically, the control of the depression or reset transition when applying identical consecutive voltage pulses was the main objective. Both pulse amplitude and pulse accumulated time can control the reset transition. Voltage required to reset the device is higher for Al2O3, which can lead to higher energy consumption. However, this material showed better reset transition linearity.
记忆电阻器由于在神经形态回路中用作人工突触而引起了人们的兴趣。本文研究了Al2O3和hfo2基记忆电阻器的多电平电导调制。具体地说,当施加相同的连续电压脉冲时,抑制或复位过渡的控制是主要目标。脉冲振幅和脉冲累积时间都可以控制复位过渡。对于Al2O3,复位器件所需的电压较高,这会导致更高的能耗。然而,该材料表现出更好的复位转变线性。
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引用次数: 0
Effect of PN passivation on MOSFETs performance in 28 nm FD-SOI PN钝化对28 nm FD-SOI中mosfet性能的影响
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-15 DOI: 10.1016/j.sse.2025.109293
M. Vanbrabant , M. Rack , A. Cathelin , J.-P. Raskin , V. Kilchytska
This work investigates, for the first time, how the PN passivation introduced in the fully depleted silicon-on-insulator (FD-SOI) substrate below the buried oxide (BOX) to improve substrate performance for RF applications in 28 nm FD-SOI technology affects active MOSFET parameters. DC performance and low-frequency noise (LFN) of MOSFETs are studied for different substrate resistivities and implant parameters. It is demonstrated that PN passivation impacts the device performance via modification of the back-gate realization.
这项工作首次研究了在埋设氧化物(BOX)下方的完全耗尽绝缘体上硅(FD-SOI)衬底中引入PN钝化以提高28nm FD-SOI技术射频应用中的衬底性能如何影响有源MOSFET参数。研究了不同衬底电阻率和植入物参数下mosfet的直流性能和低频噪声。通过修改后门实现,证明PN钝化对器件性能的影响。
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引用次数: 0
Analysis of leakage current mechanisms in AlInGaN/GaN metal-insulator-semiconductor capacitors AlInGaN/GaN金属绝缘体-半导体电容器漏电流机理分析
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-11 DOI: 10.1016/j.sse.2025.109292
Guiyu Shen , Ying Wang , Yulong Fang , Yongchuan Tang , He Guan
For emerging 5G millimeter-wave base stations and automotive radar systems operating in the V/W bands, suppressing gate leakage currents in AlInGaN/GaN MIS capacitors is critical to mitigate energy losses exceeding 15 % and thermal runaway risks under high-power RF conditions. This study systematically investigates the leakage mechanisms in AlInGaN/GaN Metal-Insulator-Semiconductor (MIS) capacitors, focusing on the influence of electrode geometry. We analyze the factors governing leakage behavior by fabricating devices with a series of electrode dimensions and spacings, and conducting comprehensive current–voltage (I-V) and capacitance–voltage (C-V) measurements. The results demonstrate that reducing electrode spacing intensifies local electric field concentration, enhancing trap-assisted tunneling at the interface and thereby increasing leakage current density. Conversely, increasing electrode size and spacing improves the uniformity of the electric field distribution and significantly mitigates the leakage currents. In addition, C-V measurement shows that the Si3N4 passivation process can effectively suppress the defects of the heterojunction interface. After passivation, the interface state density decreases to 6.1 × 1011 cm−2 eV−1. Further analysis elucidates the voltage-dependent nature of leakage mechanisms: ohmic conduction dominates in low-field regions, while Schottky emission and Frenkel-Poole emission contribute in medium-to-high fields, with Fowler-Nordheim tunneling prevails under high electric fields. These findings emphasize the critical role of optimizing electrode geometries and interface passivation strategies in enhancing device reliability. This work provides theoretical insights and experimental guidance for advancing high-frequency, high-power GaN-based devices for emerging applications in communications and RF technologies.
对于新兴的5G毫米波基站和运行在V/W频段的汽车雷达系统,抑制AlInGaN/GaN MIS电容器中的栅极泄漏电流对于降低高功率射频条件下超过15%的能量损失和热失控风险至关重要。本研究系统地研究了AlInGaN/GaN金属绝缘体半导体(MIS)电容器的泄漏机制,重点研究了电极几何形状的影响。我们通过制造具有一系列电极尺寸和间距的器件,并进行全面的电流-电压(I-V)和电容-电压(C-V)测量,分析了影响泄漏行为的因素。结果表明,减小电极间距可增强局部电场浓度,增强界面处的陷阱辅助隧道效应,从而提高漏电流密度。相反,增加电极尺寸和间距可以改善电场分布的均匀性,并显著减轻泄漏电流。此外,C-V测量表明,Si3N4钝化工艺可以有效抑制异质结界面的缺陷。钝化后,界面态密度降至6.1 × 1011 cm−2 eV−1。进一步分析阐明了泄漏机制的电压依赖性:在低电场区域欧姆传导占主导地位,而在中高电场区域肖特基发射和Frenkel-Poole发射占主导地位,在高电场区域以Fowler-Nordheim隧穿为主。这些发现强调了优化电极几何形状和界面钝化策略在提高器件可靠性方面的关键作用。这项工作为推进高频,高功率基于gan的器件在通信和射频技术中的新兴应用提供了理论见解和实验指导。
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引用次数: 0
In-depth DC characterization of asymmetric vertical nanowire Accumulation-Mode junctionless GAA pMOSFETs on SOI from 300 K to 400 K 非对称垂直纳米线累积模式无结GAA pmosfet在300 K至400 K SOI上的深入直流特性
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-07 DOI: 10.1016/j.sse.2025.109290
A. Tahiat , B. Cretu , A. Veloso , E. Simoen
In this article, we present an in-depth investigation of the direct current (DC) characteristics of asymmetric vertical nanowire (VNW) accumulation-mode junctionless (JL) gate-all-around (GAA) pMOSFETs fabricated on silicon-on-insulator (SOI) substrates. Measurements were performed over a temperature range from 300 K to 400 K in both linear and saturation regimes. Our results reveal significant temperature and polarization-dependent behaviors. It has been demonstrated that the nanowire diameter impacts the DC performance. A nanowire diameter larger than 20 nm leads to a significant increase in off-state leakage current and a higher on-state drive current compared to smaller diameters. Although a larger diameter improves the on-state current, it degrades the subthreshold swing (SS), indicating weaker electrostatic control. Furthermore, using the top electrode as either the drain (forward operation mode) or the source (reverse operation mode) significantly affects device performance due to their asymmetric architecture. In the forward mode, a higher off-state leakage current is observed, while in the reverse mode, the on-state saturation current is higher. This asymmetry may be attributed to asymmetric access resistances (RS>RD). From high-temperature measurements, using different series-resistance-free parameter-extraction (Y-function-based) methodologies, it is observed that the series resistance of the devices remains unchanged, and the low-field mobility is mainly limited by Coulomb scattering. This study provides a better understanding of the behavior and performance of VNW accumulation-mode JL GAA pMOSFETs and paves the way for further optimization.
在本文中,我们深入研究了在绝缘体上硅(SOI)衬底上制备的非对称垂直纳米线(VNW)积累模式无结(JL)栅极全能(GAA) pmosfet的直流(DC)特性。在线性和饱和状态下,测量温度范围从300 K到400 K。我们的结果揭示了显著的温度和极化依赖行为。研究表明,纳米线直径对直流性能有影响。与直径较小的纳米线相比,直径大于20nm的纳米线会导致断开状态泄漏电流显著增加,并且导通状态驱动电流更高。虽然更大的直径提高了导通电流,但它降低了亚阈值摆幅(SS),表明静电控制较弱。此外,由于其不对称结构,使用顶部电极作为漏极(正向工作模式)或源极(反向工作模式)会显著影响器件性能。在正向模式下,观察到更高的断开状态泄漏电流,而在反向模式下,导通状态饱和电流更高。这种不对称可能归因于非对称访问阻力(RS>;RD)。通过高温测量,采用不同的无串联电阻参数提取方法(基于y函数),观察到器件的串联电阻保持不变,低场迁移率主要受到库仑散射的限制。该研究为VNW积累模式JL GAA pmosfet的行为和性能提供了更好的理解,并为进一步优化铺平了道路。
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引用次数: 0
Band structure-based methodology for analysis of radiation-induced interface traps on reliability of UTB MOS devices 基于波段结构的辐射诱导界面陷阱对UTB MOS器件可靠性分析方法
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-07 DOI: 10.1016/j.sse.2025.109289
Nalin Vilochan Mishra, Yogesh Dhote, Aditya Sankar Medury
The impact of Ionizing Radiation (IR) dose on interface trap state generation is critical to consider in Ultra-Thin (UT) Silicon-on-Insulator (SOI) MOS devices, where these radiation-induced interface traps are likely to have a significant effect on the reliability of these devices. Additionally, in these devices, the effect of Quantum Confinement also needs to be properly considered to ensure an accurate analysis of device tolerance to radiation. Therefore, in this work, we present a band structure-based simulation approach to accurately quantify the maximum extent of radiation-induced (α, proton, γ, X-rays) interface traps and their degradation on these devices for various SOI channel thicknesses. Through this analysis, we then determine the practical radiation tolerance of these devices for various IR, with the consideration of partial recovery when subjected to continuous stress, and show the impact of QCEs on key electrostatic parameters such as threshold voltage and gate capacitance.
在超薄(UT)绝缘体上硅(SOI) MOS器件中,电离辐射(IR)剂量对界面阱态产生的影响至关重要,这些辐射诱导的界面阱可能对这些器件的可靠性产生重大影响。此外,在这些器件中,还需要适当考虑量子限制的影响,以确保准确分析器件的辐射耐受性。因此,在这项工作中,我们提出了一种基于能带结构的模拟方法,以准确量化辐射诱导(α,质子,γ, x射线)界面陷阱的最大程度及其在不同SOI通道厚度下在这些器件上的降解。通过这一分析,我们确定了这些器件在各种红外下的实际辐射容限,并考虑了在连续应力下的部分恢复,并显示了qce对阈值电压和栅极电容等关键静电参数的影响。
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引用次数: 0
A mathematical model for non-equilibrium body potential of SOI Pseudo-MOS and physical mechanism analysis SOI伪mos非平衡体势的数学模型及物理机理分析
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-07 DOI: 10.1016/j.sse.2025.109287
Tiexin Zhang , Fanyu Liu , Lei Shu , Bo Li , Zhengsheng Han , Tianchun Ye
Based on SOI Pseudo-MOS, an equivalent circuit model of non-equilibrium body potential (Vneq) is proposed. The non-equilibrium majority carriers cannot be neglected to interpret the mechanism of Vneq. An accurate mathematical Vneq is determined through bringing non-equilibrium majority carriers into the discrete Poisson equation, which is validated by TCAD simulations.
基于SOI伪mos,提出了非平衡体电位(Vneq)的等效电路模型。非平衡多数载流子是解释Vneq机理的重要因素。通过在离散泊松方程中引入非平衡多数载流子,确定了精确的数学Vneq,并通过TCAD仿真进行了验证。
{"title":"A mathematical model for non-equilibrium body potential of SOI Pseudo-MOS and physical mechanism analysis","authors":"Tiexin Zhang ,&nbsp;Fanyu Liu ,&nbsp;Lei Shu ,&nbsp;Bo Li ,&nbsp;Zhengsheng Han ,&nbsp;Tianchun Ye","doi":"10.1016/j.sse.2025.109287","DOIUrl":"10.1016/j.sse.2025.109287","url":null,"abstract":"<div><div>Based on SOI Pseudo-MOS, an equivalent circuit model of non-equilibrium body potential (<em>V</em><sub>neq</sub>) is proposed. The non-equilibrium majority carriers cannot be neglected to interpret the mechanism of <em>V</em><sub>neq.</sub> An accurate mathematical <em>V</em><sub>neq</sub> is determined through bringing non-equilibrium majority carriers into the discrete Poisson equation, which is validated by TCAD simulations.</div></div>","PeriodicalId":21909,"journal":{"name":"Solid-state Electronics","volume":"231 ","pages":"Article 109287"},"PeriodicalIF":1.4,"publicationDate":"2025-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145569166","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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Solid-state Electronics
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