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Neural Network-Based prediction for Cross-Temperature induced VT distribution shift in 3D NAND flash memory 基于神经网络的 3D NAND 闪存跨温度诱导 VT 分布偏移预测
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-12 DOI: 10.1016/j.sse.2024.108925
Kyeongrae Cho , Chanyang Park , Hyundong Jang , Hyeok Yun , Seungjoon Eom , Min Sang Park , Rock-Hyun Baek

In this study, a neural network (NN) was proposed for predicting the VT characteristics of NAND flash memories under cross-temperature conditions. The training data were obtained from commercial NAND flash memory chip measurements at various temperatures. The VT distribution shift caused by cross-temperature was accurately predicted by investigating the optimum data dimensions while minimizing the data generation process. Two types of NNs were used to achieve an accurate VT distribution prediction, and each network was optimized using specific parameters based on the data characteristics at various program verify levels. Finally, quantitative and visual evaluations were conducted to verify the performance of the trained NNs. When the program-measured temperature varied from low to high, the NNs achieved mean errors of 1.87%, 1.41% at low and 0.34%, 0.77% at high for the average and width of the VT distribution, respectively. Similarly, when the temperature varied from high to low, the corresponding mean errors were 2.01%, 0.74% at high and 0.23%, 1.59% at low. These findings demonstrate that NNs can minimize the procedures for detecting the VT distribution shift caused by cross-temperature, thereby offering a promising approach to enhance reliability in the presence of such effects.

本研究提出了一种神经网络 (NN),用于预测 NAND 闪存在跨温度条件下的 VT 特性。训练数据来自商用 NAND 闪存芯片在不同温度下的测量结果。在最小化数据生成过程的同时,通过研究最佳数据尺寸,准确预测了交叉温度引起的 VT 分布偏移。为了实现准确的 VT 分布预测,使用了两种类型的 NN,并根据不同程序验证级别的数据特征,使用特定参数对每个网络进行了优化。最后,进行了定量和可视化评估,以验证训练有素的 NN 的性能。当程序测量的温度从低到高变化时,NN 对于 VT 分布的平均值和宽度的平均误差分别为:低时 1.87%、1.41%,高时 0.34%、0.77%。同样,当温度从高到低变化时,相应的平均误差分别为:高为 2.01%、0.74%;低为 0.23%、1.59%。这些研究结果表明,NN 可以最大限度地减少检测交叉温度引起的 VT 分布偏移的程序,从而为在这种效应下提高可靠性提供了一种可行的方法。
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引用次数: 0
BCl3/Cl2 plasma etching process to fabricate a ferroelectric gate structure for device integration 利用 BCl3/Cl2 等离子体蚀刻工艺制造用于器件集成的铁电栅极结构
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-06 DOI: 10.1016/j.sse.2024.108918
Bohyeon Kang, Sung-min Ahn, Jongseo Park, Jehyun An, Giryun Hong, Beomjoo Ham, Rock-Hyun Baek

Despite the significant potential of ferroelectric devices in overcoming the challenges faced by conventional high-k-based CMOS devices owing to the scaling of CMOS processes, most ferroelectric devices are not implemented in practical circuits yet. For practical application, integrating them into a circuit is essential, and the development of a reliable etching process is crucial for the integration of individual devices into circuits. Therefore, this study proposes a process for etching hafnium zirconium oxide (HZO)-based gate stacks to fabricate a gate structure and integrate HZO-based devices into circuits. First, poly-Si/TiN/HZO/TiN/SiO2 was deposited on a Si substrate and etched via Cl2 and BCl3/Cl2 plasma etchings. Cl2 plasma etching was found to be less effective, whereas BCl3/Cl2 plasma etching exhibited a higher etching rate. The optimal etching time for the BCl3/Cl2 plasma at which the entire stack was successfully removed was 50 s. Furthermore, the optimal ratio of Ar:Cl2:BCl3 that resulted in minimal damage to the Si surface was determined to be 1:1:3. These results led to the successful formation of an HZO-based gate structure and provided the potential to integrate ferroelectric devices into the circuit, thereby enabling their practical utilization.

尽管铁电器件在克服传统基于高 K 值的 CMOS 器件因 CMOS 工艺缩放而面临的挑战方面具有巨大潜力,但大多数铁电器件尚未应用于实际电路中。在实际应用中,将它们集成到电路中至关重要,而开发可靠的蚀刻工艺对于将单个器件集成到电路中至关重要。因此,本研究提出了一种蚀刻基于氧化铪锆(HZO)的栅极堆栈的工艺,以制造栅极结构并将基于 HZO 的器件集成到电路中。首先,在硅衬底上沉积聚硅/TiN/HZO/TiN/SiO2,并通过 Cl2 和 BCl3/Cl2 等离子体蚀刻进行蚀刻。结果发现 Cl2 等离子刻蚀的效果较差,而 BCl3/Cl2 等离子刻蚀的刻蚀率较高。此外,Ar:Cl2:BCl3 的最佳比例为 1:1:3,对硅表面的损害最小。这些结果成功地形成了基于 HZO 的栅极结构,并为将铁电器件集成到电路中提供了可能性,从而实现了铁电器件的实际应用。
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引用次数: 0
Analysis of breakdown voltage for GaN MIS-HEMT with various composite field plate configurations and passivation layers 采用不同复合场板配置和钝化层的 GaN MIS-HEMT 击穿电压分析
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-03 DOI: 10.1016/j.sse.2024.108930
Catherine Langpoklakpam , Yi-Kai Hsiao , Edward Yi Chang , Chun-Hsiung Lin , Hao-Chung Kuo

The effects of different field plate designs on the breakdown voltage of GaN Metal-insulator-semiconductor high electron mobility transistors (MIS-HEMTs) were examined in this study. The study's primary goal was to determine the dependence of breakdown voltage with respective to composite field plate designs using TCAD simulation. For devices featuring only G-FP, with a fixed gate to drain distance of 15 μm and a fixed G-FP to drain distance of 15 μm, the maximum breakdown voltage was achieved 1 μm G-FP. Breakdown voltage trends were also determined for composite field plate configurations, such as adding a source field plate (S-FP) or a drain field plate (D-FP) with a fixed 1 μm G-FP length. A further enhancement in device breakdown performance was demonstrated by employing a novel D-FP structure. A single D-FP improves the breakdown voltage from 1.4 kV (conventional breakdown voltage with 1um G-FP) to 1.6 kV when combined with 1 μm G-FP, while the novel two-step D-FP achieves a breakdown voltage of about 1.7 kV when combined with 1 μm G-FP. We also investigated the influence of high-k dielectric passivation layers on the breakdown voltage. The breakdown voltage of the devices with optimized G-FP can be further improved by using high-k dielectric material as a passivation layer. The thorough investigations contribute to a better understanding of GaN MIS-HEMT breakdown characteristics and prospective pathways for improving their performance via unique field plate designs and superior dielectric materials.

本研究探讨了不同场板设计对氮化镓金属绝缘体-半导体高电子迁移率晶体管(MIS-HEMT)击穿电压的影响。研究的主要目标是利用 TCAD 仿真确定击穿电压与复合场板设计的关系。对于仅采用 G-FP 的器件,栅极到漏极的固定距离为 15 μm,G-FP 到漏极的固定距离为 15 μm,1 μm G-FP 可达到最大击穿电压。此外,还确定了复合场板配置的击穿电压趋势,例如增加一个源场板(S-FP)或一个漏场板(D-FP),G-FP 长度固定为 1 μm。通过采用新型 D-FP 结构,器件的击穿性能得到了进一步提高。当结合 1 μm G-FP 时,单个 D-FP 可将击穿电压从 1.4 kV(使用 1um G-FP 的传统击穿电压)提高到 1.6 kV,而当结合 1 μm G-FP 时,新型两步式 D-FP 可实现约 1.7 kV 的击穿电压。我们还研究了高介电钝化层对击穿电压的影响。通过使用高介电材料作为钝化层,使用优化 G-FP 的器件的击穿电压可以进一步提高。这些深入研究有助于更好地了解 GaN MIS-HEMT 的击穿特性,以及通过独特的场板设计和优质介电材料提高其性能的前景。
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引用次数: 0
Improvement of instrumentation consistency using DUV filter in Spectroscopic Ellipsometry 在光谱椭偏仪中使用 DUV 滤波器提高仪器一致性
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-03 DOI: 10.1016/j.sse.2024.108912
Yu-Seong Gim, Yong-Woo Jung, Jong-Seok Yi, Kang-Won Lee

In the process of mass-production of semiconductors, it has been continuously required to determine whether the process is normal or not, and for this, it must be premised that the measurement equipment can produce reliable and consistent measurement data. However, Due to the denaturation of Working Reference Material (WRM), which is the basis for judging the accuracy and precision of the equipment, it is difficult to maintain the consistency of the instrument. In this study, the effect of preventing WRM denaturation was analyzed through optical path control in Spectroscopic Ellipsometry (SE) equipment. Therefore, by applying it to actual equipment, It is suggested methods to improve measurement equipment reliability.

在半导体的大规模生产过程中,一直需要判断生产过程是否正常,而这必须以测量设备能够提供可靠、一致的测量数据为前提。然而,由于作为判断设备准确度和精确度基础的工作标准物质(WRM)会发生变性,因此很难保持仪器的一致性。本研究通过光谱椭偏仪(SE)设备中的光路控制,分析了防止 WRM 变性的效果。因此,通过将其应用于实际设备,提出了提高测量设备可靠性的方法。
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引用次数: 0
Proposed package type for evaluating reliability of HBM Memory 用于评估 HBM 内存可靠性的拟议封装类型
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-03 DOI: 10.1016/j.sse.2024.108923
Dongsoo Lee, G.H. Bae, J.S. Bae, N.H. Lee, Y.S. Lee, S.B. Ko

This paper proposes an experimental package type with a new structure and material that can evaluate the HBM reliability accurately by overcoming the limitations of the previous proxy package. This is based on the revision to the package type that reflects the actual user environment which was not applied in the previous type. First, side and top EMC were eliminated to enhance the consistency with SIP and the proxy package. Secondly, the Si interposer which is used to connect HBM to PCB was altered from wire bonding to TSV structure. Lastly, NCF is changed to Underfill between HBM and the Si Interposer to create an environment identical to that of SIP. Through using this new package type, the failure rate by temperature cycling during 1000 cycles in HBM2E showed 0% from the previous 13%, and that during 2000 cycles in HBM3 showed 0%, and as a result, the HBM memories are well in volume production.

本文提出了一种具有新结构和新材料的实验封装类型,通过克服以前代理封装的局限性,可以准确评估 HBM 的可靠性。这是在对封装类型进行修改的基础上实现的,修改后的封装类型反映了实际的用户环境,而以前的封装类型则没有这样做。首先,取消了侧面和顶部 EMC,以增强与 SIP 和代理封装的一致性。其次,用于连接 HBM 和 PCB 的 Si 中间件从接线键合改为 TSV 结构。最后,在 HBM 和 Si Interposer 之间将 NCF 改为底部填充,以创造与 SIP 相同的环境。通过使用这种新的封装类型,HBM2E 在 1000 次循环中的温度循环故障率从之前的 13% 降为 0%,HBM3 在 2000 次循环中的温度循环故障率也降为 0%,因此,HBM 存储器的批量生产进展顺利。
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引用次数: 0
A wireless neural recording microsystem with operator-based spike detection 具有基于操作员的尖峰检测功能的无线神经记录微型系统
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-03 DOI: 10.1016/j.sse.2024.108915
Joonyoung Lim , Chae-Eun Lee , Jong-Hyun Park , Chieun Choi , Yoon-Kyu Song

We introduce an innovative approach that incorporates operator-based spike detection in wireless microsystems for neural signal processing. Through comparative analyses between simple thresholding and operator-based detection conducted on pre-recorded spike detection experiments, our research emphasizes the superiority of the operator-based spike detection approach. The operator-based spike detection emerges as a promising technique for miniaturized wireless neural signal devices, primarily due to its proficient noise-handling capabilities paired with reduced power consumption. Furthermore, its adaptability across various experimental conditions amplifies its versatility. Empirical tests underscored its low power requisites and compactness, emphasizing practical utility of the detection scheme in the neural microsystems. Collectively, our results mark a significant progression in wireless cerebral signal recording methodologies, paving the way for optimized wireless brain-machine interface (BMI) systems.

我们引入了一种创新方法,将基于操作员的尖峰检测纳入无线微系统,用于神经信号处理。通过在预先录制的尖峰检测实验中对简单阈值检测和基于运算器的检测进行比较分析,我们的研究强调了基于运算器的尖峰检测方法的优越性。基于运算器的尖峰检测是微型化无线神经信号设备的一种有前途的技术,这主要是由于它具有熟练的噪声处理能力,同时还能降低功耗。此外,它在各种实验条件下的适应性也增强了其通用性。经验测试强调了它的低功耗要求和紧凑性,强调了该检测方案在神经微系统中的实用性。总之,我们的研究成果标志着无线脑信号记录方法的重大进步,为优化无线脑机接口(BMI)系统铺平了道路。
{"title":"A wireless neural recording microsystem with operator-based spike detection","authors":"Joonyoung Lim ,&nbsp;Chae-Eun Lee ,&nbsp;Jong-Hyun Park ,&nbsp;Chieun Choi ,&nbsp;Yoon-Kyu Song","doi":"10.1016/j.sse.2024.108915","DOIUrl":"https://doi.org/10.1016/j.sse.2024.108915","url":null,"abstract":"<div><p>We introduce an innovative approach that incorporates operator-based spike detection in wireless microsystems for neural signal processing. Through comparative analyses between simple thresholding and operator-based detection conducted on pre-recorded spike detection experiments, our research emphasizes the superiority of the operator-based spike detection approach. The operator-based spike detection emerges as a promising technique for miniaturized wireless neural signal devices, primarily due to its proficient noise-handling capabilities paired with reduced power consumption. Furthermore, its adaptability across various experimental conditions amplifies its versatility. Empirical tests underscored its low power requisites and compactness, emphasizing practical utility of the detection scheme in the neural microsystems. Collectively, our results mark a significant progression in wireless cerebral signal recording methodologies, paving the way for optimized wireless brain-machine interface (BMI) systems.</p></div>","PeriodicalId":21909,"journal":{"name":"Solid-state Electronics","volume":"216 ","pages":"Article 108915"},"PeriodicalIF":1.7,"publicationDate":"2024-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140344164","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A wireless stimulator system-on-chip with an optically writable ID for addressable cortical microimplants 用于可寻址皮层微植入物的带有光学可写 ID 的无线刺激器片上系统
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-03 DOI: 10.1016/j.sse.2024.108914
Chae-Eun Lee , Jong-Hyun Park , Joonyoung Lim , Chieun Choi , Yoon-Kyu Song

For a profound understanding of brain function and connectivity, there is an escalating need to cover expansive cortical areas. While external recording methods such as electroencephalography (EEG) are prevalent, direct bidirectional interaction with the neural network mandates implanted electrodes. Integrating all microimplant functionalities into a single integrated circuit (IC) increases design complexities. Thus, challenges in the intricacies of distributed system networking have frustrated the drive toward implant miniaturization. In this context, we introduce addressable microimplants equipped with gate oxide-based anti-fuse (AF) Chip-IDs activated by a photodiode (PD) array. This mechanism generates a binary ID code by selectively degrading the anti-fuse gate oxide, eliminating the need for I/O PADs. These ID-equipped wireless micro-implants are distributed over vast regions, enabling bidirectional neural interfacing through recording and stimulation. We successfully fabricated an 8-channel wireless microstimulator and a spike-sensor in 180 nm CMOS, demonstrating the efficacy of the 5-bit Chip-ID in real-time networking scenarios. The system draws power from RF electromagnetic waves, receiving 1.2 V and 1 mW, and employs amplitude modulation at a 900 MHz carrier frequency for data communication. The minimum amplitude detected for demodulation was 350 mV, regenerating a 1 MHz clock and 34-bit command data. When tested, the array of eight microstimulators responded distinctly based on sequential command parameters. This IC realized in TSMC 180 nm CMOS technology, occupies only a 1 mm2 area.

为了深入了解大脑的功能和连接性,覆盖广阔皮层区域的需求日益增长。虽然脑电图(EEG)等外部记录方法非常普遍,但与神经网络的直接双向互动需要植入电极。将所有微型植入功能集成到单个集成电路 (IC) 中会增加设计的复杂性。因此,分布式系统网络错综复杂的挑战阻碍了植入体微型化的进程。在这种情况下,我们推出了可寻址微植入体,它配备了由光电二极管(PD)阵列激活的基于氧化栅的防熔断(AF)芯片 ID。这种机制通过选择性降解抗熔断栅极氧化物来生成二进制 ID 代码,从而消除了对输入/输出 PAD 的需求。这些装有 ID 的无线微型植入体可分布在广大区域,通过记录和刺激实现双向神经接口。我们在 180 nm CMOS 上成功制造了一个 8 通道无线微刺激器和一个尖峰传感器,证明了 5 位芯片 ID 在实时联网场景中的功效。该系统从射频电磁波中获取能量,接收电压为 1.2 V,功率为 1 mW,采用 900 MHz 载波频率的振幅调制进行数据通信。解调时检测到的最小振幅为 350 mV,可再生 1 MHz 时钟和 34 位指令数据。测试时,由八个微刺激器组成的阵列根据顺序命令参数作出了不同的响应。该集成电路采用台积电 180 纳米 CMOS 技术实现,仅占地 1 平方毫米。
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引用次数: 0
Analysis of electrical and hysteresis characteristics of flexible OTFT using solution-processable DPP-DTT polymer and Parylene-C 使用可溶液加工的 DPP-DTT 聚合物和对二甲苯-C 分析柔性 OTFT 的电气和磁滞特性
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-03-31 DOI: 10.1016/j.sse.2024.108922
Yoojeong Ko, Hyo-Won Jang, Hyeok Kim, Dong-Wook Park

Organic thin-film transistors (OTFTs) fabricated on Parylene-C substrates have the advantages of a simple process, low cost, and flexible characteristics. This study introduces the manufacturing method and electrical characteristics of an OTFT using organic materials as the substrate, gate dielectric, and channel material. PDPP2T-TT-OD(DPP-DTT) is used as the channel material, which is a highly mobile p-type polymer with good air stability. The proposed OTFT device has flexible characteristics because it is fabricated on a Parylene-C substrate and can be used even in a curved state. Furthermore, the manufacturing process was largely achieved via a simple, low-cost solution process using spin-coating and photolithography with a photo-curable material. Under flat conditions, the threshold voltage (VTH) is approximately –3 V, the average ION/IOFF ratio is approximately 105, and the mobility is 0.84 cm2/Vs.

在对二甲苯-C 衬底上制造的有机薄膜晶体管(OTFT)具有工艺简单、成本低廉、特性灵活等优点。本研究介绍了以有机材料作为衬底、栅极电介质和沟道材料的 OTFT 的制造方法和电气特性。沟道材料采用了 PDPP2T-TT-OD(DPP-DTT),它是一种具有良好空气稳定性的高流动性 p 型聚合物。所提出的 OTFT 器件具有灵活的特性,因为它是在对二甲苯-C 衬底上制造的,即使在弯曲状态下也能使用。此外,制造工艺主要是通过使用光固化材料进行旋涂和光刻的简单、低成本解决方案实现的。在平坦条件下,阈值电压(VTH)约为-3 V,平均离子/离子交换比约为 105,迁移率为 0.84 cm2/Vs。
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引用次数: 0
Analysis of metal and zinc oxide semiconductor interface resistance using transmission line method 利用传输线方法分析金属和氧化锌半导体界面电阻
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-03-30 DOI: 10.1016/j.sse.2024.108916
Do-Yeon Lee, Woon-San Ko, Ki-Nam Kim, Jun-Ho Byun, Eun-Gi Kim, So-Yeon Kwon, Ga-Won Lee

The transmission line method (TLM) is modified to analyze the contact resistance between the metal and zinc oxide semiconductor considering interface resistance. TCAD is used to simulate an ideal defect-less state and compare it with experimental result. It is found that the current transfer length can be overestimated in conventional TLM measurement. The importance of interface resistance is shown through interface trap and Schottky contact effect analysis: Resistance comparison between different metal used device, and the activation energy shift measurement after O2 pre-annealing. Based on these, the conventional resistance equation for TLM is corrected by separating channel resistance and non-ideal contact resistance. The mobility and temperature coefficient of resistance (TCR) of ZnO channel are extracted using the suggested method. This shows the importance of metal/semiconductor interface resistance in devices using semiconductor channel.

对传输线法(TLM)进行了修改,以分析金属和氧化锌半导体之间的接触电阻(考虑到界面电阻)。使用 TCAD 模拟理想的无缺陷状态,并将其与实验结果进行比较。结果发现,在传统的 TLM 测量中,电流传输长度可能被高估。界面陷阱和肖特基接触效应分析表明了界面电阻的重要性:不同金属器件之间的电阻比较,以及氧气预退火后的活化能转移测量。在此基础上,通过分离沟道电阻和非理想接触电阻,修正了 TLM 的传统电阻方程。利用建议的方法提取了氧化锌沟道的迁移率和电阻温度系数(TCR)。这表明了在使用半导体沟道的器件中金属/半导体界面电阻的重要性。
{"title":"Analysis of metal and zinc oxide semiconductor interface resistance using transmission line method","authors":"Do-Yeon Lee,&nbsp;Woon-San Ko,&nbsp;Ki-Nam Kim,&nbsp;Jun-Ho Byun,&nbsp;Eun-Gi Kim,&nbsp;So-Yeon Kwon,&nbsp;Ga-Won Lee","doi":"10.1016/j.sse.2024.108916","DOIUrl":"https://doi.org/10.1016/j.sse.2024.108916","url":null,"abstract":"<div><p>The transmission line method (TLM) is modified to analyze the contact resistance between the metal and zinc oxide semiconductor considering interface resistance. TCAD is used to simulate an ideal defect-less state and compare it with experimental result. It is found that the current transfer length can be overestimated in conventional TLM measurement. The importance of interface resistance is shown through interface trap and Schottky contact effect analysis: Resistance comparison between different metal used device, and the activation energy shift measurement after O<sub>2</sub> pre-annealing. Based on these, the conventional resistance equation for TLM is corrected by separating channel resistance and non-ideal contact resistance. The mobility and temperature coefficient of resistance (TCR) of ZnO channel are extracted using the suggested method. This shows the importance of metal/semiconductor interface resistance in devices using semiconductor channel.</p></div>","PeriodicalId":21909,"journal":{"name":"Solid-state Electronics","volume":"216 ","pages":"Article 108916"},"PeriodicalIF":1.7,"publicationDate":"2024-03-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140338914","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Multi-level storage in cleaved-gate ferroelectric FETs investigated by 3D phase-field-based quantum transport simulation 通过基于三维相场的量子输运模拟研究裂隙栅铁电场效应晶体管中的多级存储
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-03-30 DOI: 10.1016/j.sse.2024.108928
Jeonghwan Jang, Hyeongu Lee, Mincheol Shin

In this work, we investigate the feasibility of cleaved-gate ferroelectric FET (CG-FeFET) as multi-level cell (MLC) memory devices, by conducting 3-dimensional quantum transport simulations based on time-dependent-Ginzburg–Landau equation, and the non-equilibrium Green’s function method. Our results indicate that CG-FeFET can achieve multi-level operations by utilizing different thicknesses of the ferroelectric layer. We analyze the influence of electron–phonon interaction and also verify that CG-FeFET is robust to noise. Furthermore, we identify the critical role of the spacing between two ferroelectric layers in determining the memory window, considering the effects of polarization cancellation and electrostatic coupling. These findings provide valuable insights into designing stable and reliable nonvolatile memory technologies, which could offer potential solutions for high-density memory requirements.

在这项研究中,我们基于与时间相关的金兹堡-朗道方程和非平衡格林函数法进行了三维量子输运模拟,研究了裂栅铁电场效应晶体管(CG-FeFET)作为多电平单元(MLC)存储器件的可行性。结果表明,CG-FeFET 可以利用不同厚度的铁电层实现多级运行。我们分析了电子-声子相互作用的影响,还验证了 CG-FeFET 对噪声的鲁棒性。此外,考虑到极化抵消和静电耦合的影响,我们确定了两个铁电层之间的间距在决定存储器窗口方面的关键作用。这些发现为设计稳定可靠的非易失性存储器技术提供了宝贵的见解,为满足高密度存储器需求提供了潜在的解决方案。
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引用次数: 0
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Solid-state Electronics
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