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Emission cells with quantum dots on silicon chip prepared by using fs pulsed laser 利用 fs 脉冲激光在硅芯片上制备量子点发射电池
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-10-04 DOI: 10.1016/j.sse.2024.109009
Wei-Qi Huang , Yin-lian Li , Zhong-Mei Huang , Hao-Ze Wang , Xi Zhang , Qi-Bin Liu , Shi-Rong Liu
Emission efficiency of bulk-silicon is very low due to its indirect-gap of energy band. However, it is interesting that the enhanced emission has been observed in the micro-cavities array fabricated by using femtosecond (fs) pulsed laser, in which the stimulated emission characteristics occur after annealing for suitable time in the photo-luminescence (PL) measurement at room temperature. The results of experiment and calculation demonstrated that the enhanced emission may be originated from the Si quantum dots embedded in the micro-cavities prepared by fs pulsed laser. Here, the direct-gap of energy band appears after annealing due to the Heisenberg principle related to ⊿k–1/⊿x in quantum system of nanostructures. The PL intensity obviously increases on the Si quantum dots growing with annealing for better crystallization, in which the external quantum efficiency is higher than 40 % near 760 nm. A new kind of emission source of the micro-cavities array in visible wavelength has been built on silicon wafer, in which the Si quantum dots play a main role for enhancement of emission. It should have a good application in optical integrated chip based on silicon, such as emission cells built on Si chip.
由于能带的间接间隙,硅块的发射效率非常低。然而,有趣的是,在使用飞秒(fs)脉冲激光制造的微腔阵列中观察到了增强的发射,在室温下进行光致发光(PL)测量时,退火适当时间后会出现受激发射特性。实验和计算的结果表明,增强的发射可能源于fs脉冲激光制备的微腔中嵌入的硅量子点。在这里,由于纳米结构量子体系中与⊿k-1/⊿x相关的海森堡原理,能带的直接隙在退火后出现。在退火后生长的硅量子点上,PL 强度明显增加,结晶效果更好,其中 760 纳米附近的外部量子效率高于 40%。在硅晶片上构建了一种新型可见光波长微腔阵列发射源,其中硅量子点在增强发射方面发挥了主要作用。它可以很好地应用于基于硅的光学集成芯片,如在硅芯片上构建的发射电池。
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引用次数: 0
A nanophotonic approach to signal-to-noise ratio of quantum dot infrared photodetectors with surface plasmonic excitation 利用表面等离子体激发量子点红外光探测器信噪比的纳米光子方法
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-29 DOI: 10.1016/j.sse.2024.109008
S.C. Lee
A nanophotonic approach to the signal-to-noise ratio (SNR) of an InAs-based quantum dot infrared photodetector (QDIP) with surface plasmonic excitation is reported. A 100 nm-thick Au film, perforated with a 3.1 μm-period, 2-dimensional square array of holes, referred to as a metal photonic crystal (MPC), is employed as a plasmonic coupler for it. Under the irradiance on the MPC integrated atop the QDIP, the fundamental surface plasma wave (SPW) is excited along their interface at ∼10.3 μm in wavelength. It carries the near-field that interacts with the quantum dots (QDs) under the interface. Depending on the presence of the coupler, the QDIP generates two different current–voltage (I-V) characteristics; one from the QDs normally working without MPC and the other from those coupled to the SPW near-field with it. The two I-V’s unfold the signal and noise current of each case with photoconductive gain. In their relation, generation-recombination and shot noises which are correlated with the detector signal current are directly affected by the plasmonic coupling but other sources including thermal noise are not relevant to it. Relying on these differences, the I-V analysis allows the SNR of each case and shows ∼20× enhancement by the plasmonic coupling. It reveals that most of the noise current is attributed to thermal fluctuations inherent to the quantum confinement of the QDIP. The SNR lower than the quantum efficiency in plasmonic enhancement is addressed.
本研究报告采用一种纳米光子方法,通过表面等离子体激发来提高基于砷化铟的量子点红外光探测器(QDIP)的信噪比(SNR)。该器件采用了 100 nm 厚的金薄膜作为等离子耦合器,薄膜上穿有周期为 3.1 μm 的二维方形孔阵列,称为金属光子晶体 (MPC)。在集成于 QDIP 上的 MPC 上的辐照下,基本表面等离子体波(SPW)沿着波长为 10.3 μm 的界面被激发。它携带的近场与界面下的量子点(QDs)相互作用。根据耦合器的存在,QDIP 会产生两种不同的电流-电压(I-V)特性;一种特性来自正常工作时没有 MPC 的 QD,另一种特性来自与 SPW 近场耦合的 QD。这两个 I-V 反映了每种情况下具有光电导增益的信号电流和噪声电流。在它们之间的关系中,与探测器信号电流相关的生成-重组和射频噪声直接受到等离子耦合的影响,而包括热噪声在内的其他来源则与之无关。根据这些差异,I-V 分析可得出各种情况下的信噪比,并显示等离子体耦合可提高信噪比 ∼ 20 倍。分析表明,大部分噪声电流归因于 QDIP 量子约束固有的热波动。在等离子增强中,信噪比低于量子效率的问题得到了解决。
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引用次数: 0
Smart-CX – Method of extraction of parasitic capacitances in ICs Smart-CX - 集成电路寄生电容提取方法
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-26 DOI: 10.1016/j.sse.2024.109007
O.M. Grudanov , M.B. Grudanov
This paper proposes a novel rule-based parasitic capacitance extraction methodology, integrated into Smart-CX, to enhance the accuracy of SPICE simulations and physical verification of ICs. This methodology is crucial during the microchip design phase, particularly in preparation for fabrication on mature to advanced process nodes. The proposed enhanced analytical method addresses the accuracy/time tradeoffs between numerical and analytical extraction techniques. This study validates the accuracy of the methodology by comparison of the extracted parasitic parameters with foundry-provided 2D-models. The parasitic capacitances that are extracted within this method include: area capacitances (Ca), coupling capacitances (Cc), including via-to-via capacitances (Cmv), contact-to-gate capacitances (Cmg), contact-to-active capacitances (Cmc) and fringe type capacitances with the top (Cft) and bottom (Cfb) conductive layers.
本文提出了一种新颖的基于规则的寄生电容提取方法,并将其集成到 Smart-CX 中,以提高 SPICE 仿真和集成电路物理验证的准确性。这种方法在微芯片设计阶段至关重要,特别是在准备在成熟到先进工艺节点上制造时。所提出的增强型分析方法解决了数值提取技术和分析提取技术之间的精度/时间权衡问题。本研究通过将提取的寄生参数与代工厂提供的二维模型进行比较,验证了该方法的准确性。该方法提取的寄生电容包括:面积电容 (Ca)、耦合电容 (Cc),包括通孔至通孔电容 (Cmv)、触点至栅极电容 (Cmg)、触点至有源电容 (Cmc) 以及顶层 (Cft) 和底层 (Cfb) 导电层的边缘型电容。
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引用次数: 0
Enhanced response and recovery performance of α-hexathiophene sensors for NO2 gas by dual heterogeneous interface 通过双异质界面提高α-六硫酚传感器对二氧化氮气体的响应和回收性能
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-19 DOI: 10.1016/j.sse.2024.109006
Kaicaiayi Kelimu, Yiqun Zhang, Yangyang Zhu, Heping Su, Xi Lu, Li Juan Wang
Organic semiconductor gas sensors of α-hexathiophene (α-6 T) films as active layers with dual heterogeneous interface layers of p-hexabiphenyl and pentacene films are prepared by continuous vacuum evaporation method. The enhanced properties of sensors are achieved by modulating the thickness of the α-6 T films. The sensitivity of 1373 %/ ppm and a theoretical low detection limit of 361 ppb are obtained. The sensors demonstrate fast response and recovery properties of 1.05 and 1.51 min for NO2 gas of 20 ppm. The improved performance is attributed to the continuity of the interface layers and high adsorption of island-like growth. This approach is effective to improve organic sensors by introducing dual heterogeneous interface and tuning the growth of active layers.
通过连续真空蒸发法制备了以α-六噻吩(α-6 T)薄膜为活性层、对六联苯和五碳烯薄膜为双异质界面层的有机半导体气体传感器。通过调节 α-6 T 薄膜的厚度,增强了传感器的性能。传感器的灵敏度为 1373 %/ppm,理论检测限低至 361 ppb。对于 20 ppm 的二氧化氮气体,传感器的快速响应和恢复性能分别为 1.05 和 1.51 分钟。性能的提高归功于界面层的连续性和岛状生长的高吸附性。通过引入双异质界面和调整活性层的生长,这种方法可以有效地改进有机传感器。
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引用次数: 0
Carrier modulation and effective passivation of tin oxide thin-film transistors by organic surface doping 通过有机表面掺杂实现氧化锡薄膜晶体管的载流子调制和有效钝化
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-16 DOI: 10.1016/j.sse.2024.109005
Guoxiang Song , Xinan Zhang , Haoxuan Xu

Doping is a useful technique for metal oxide thin-film transistors (TFTs) to adjust the threshold voltage and charge carrier density. However, a notable drawback is the disruption of the microstructure caused by doping crystalline lattice, leading to a partial decrease in charge carrier mobility. In this work, we suggest a surface doping technique that modifies the carrier concentration and passivates the device surface while preserving the channel layer lattice structure through the use of organic dopant molecules. It is shown that tin oxide (SnO2) TFTs doped in this manner typically exhibit improved electrical characteristics, particularly greater mobility and a noticeably lower threshold voltage, without negatively affecting the devices on/off current ratio. Furthermore, compared to pristine devices, bias stress stability and long-term durability are also enhanced. These findings suggest that surface doping may find use in high-performance oxide semiconductor devices and circuits.

掺杂是金属氧化物薄膜晶体管(TFT)调节阈值电压和电荷载流子密度的有效技术。然而,一个显著的缺点是掺杂晶格会破坏微观结构,导致部分电荷载流子迁移率下降。在这项工作中,我们提出了一种表面掺杂技术,通过使用有机掺杂剂分子来改变载流子浓度和钝化器件表面,同时保留沟道层晶格结构。研究表明,以这种方式掺杂的氧化锡(SnO2)TFT 通常具有更好的电气特性,尤其是更高的迁移率和明显更低的阈值电压,而不会对器件的开/关电流比产生负面影响。此外,与原始器件相比,偏压稳定性和长期耐用性也得到了提高。这些发现表明,表面掺杂可用于高性能氧化物半导体器件和电路。
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引用次数: 0
Fine-tuning Cesium lead chloride perovskite field-effect transistors for sensing applications: Bridging numerical modeling and experimental validation 微调用于传感应用的氯化铯铅过氧化物场效应晶体管:连接数值建模与实验验证
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-12 DOI: 10.1016/j.sse.2024.109004
Gehad Ali , Reem Mahmoud , Mohamed Wafeek , Moataz M.K. Yousef , Sameh O. Abdellatif

This study presents a comprehensive approach to fine-tuning Cesium Lead Chloride Perovskite Field-Effect Transistors (CsPbCl3-FETs) for sensing applications by bridging numerical modeling with experimental validation. By combining finite element methods in COMSOL Multiphysics for optimization, we tailored FET parameters such as oxide and perovskite thin film thickness. The fabricated FET, with a 200 nm semiconductor layer and 30 nm oxide thickness, was strategically chosen to operate in a non-depletion mode, maximizing mobility while minimizing power consumption. Experimental results closely aligned with numerical simulations, showcasing a threshold voltage of 0.50 V±0.07 V and an impressive on/off current ratio of 1.50 x 104 ± 0.3 x 104. Notably, the perovskite FET exhibited remarkable carrier mobility in saturation mode, reaching 5.40 cm2/V-s ± 0.8 cm2/V-s, outperforming other attempts in the literature. This work underscores the potential of CsPbCl3 FETs for high-performance sensing applications, offering insights into optimizing device parameters for enhanced functionality and efficiency.

本研究提出了一种综合方法,通过将数值建模与实验验证相结合,对用于传感应用的氯化铯铅包晶石场效应晶体管(CsPbCl3-FET)进行微调。通过结合 COMSOL Multiphysics 中的有限元方法进行优化,我们定制了场效应晶体管参数,如氧化物和包晶体薄膜厚度。制造的场效应晶体管具有 200 nm 的半导体层和 30 nm 的氧化物厚度,我们战略性地选择了在非耗尽模式下工作,从而在最大限度地提高迁移率的同时最大限度地降低功耗。实验结果与数值模拟紧密吻合,阈值电压为 0.50 V±0.07 V,导通/关断电流比为 1.50 x 104 ± 0.3 x 104,令人印象深刻。值得注意的是,这种过氧化物场效应晶体管在饱和模式下表现出显著的载流子迁移率,达到 5.40 cm2/V-s ± 0.8 cm2/V-s,优于文献中的其他尝试。这项研究强调了 CsPbCl3 FET 在高性能传感应用方面的潜力,为优化器件参数以增强功能和效率提供了启示。
{"title":"Fine-tuning Cesium lead chloride perovskite field-effect transistors for sensing applications: Bridging numerical modeling and experimental validation","authors":"Gehad Ali ,&nbsp;Reem Mahmoud ,&nbsp;Mohamed Wafeek ,&nbsp;Moataz M.K. Yousef ,&nbsp;Sameh O. Abdellatif","doi":"10.1016/j.sse.2024.109004","DOIUrl":"10.1016/j.sse.2024.109004","url":null,"abstract":"<div><p>This study presents a comprehensive approach to fine-tuning Cesium Lead Chloride Perovskite Field-Effect Transistors (CsPbCl<sub>3</sub>-FETs) for sensing applications by bridging numerical modeling with experimental validation. By combining finite element methods in COMSOL Multiphysics for optimization, we tailored FET parameters such as oxide and perovskite thin film thickness. The fabricated FET, with a 200 nm semiconductor layer and 30 nm oxide thickness, was strategically chosen to operate in a non-depletion mode, maximizing mobility while minimizing power consumption. Experimental results closely aligned with numerical simulations, showcasing a threshold voltage of 0.50 V±0.07 V and an impressive on/off current ratio of 1.50 x 10<sup>4</sup> ± 0.3 x 10<sup>4</sup>. Notably, the perovskite FET exhibited remarkable carrier mobility in saturation mode, reaching 5.40 cm<sup>2</sup>/V-s ± 0.8 cm<sup>2</sup>/V-s, outperforming other attempts in the literature. This work underscores the potential of CsPbCl<sub>3</sub> FETs for high-performance sensing applications, offering insights into optimizing device parameters for enhanced functionality and efficiency.</p></div>","PeriodicalId":21909,"journal":{"name":"Solid-state Electronics","volume":"221 ","pages":"Article 109004"},"PeriodicalIF":1.4,"publicationDate":"2024-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142233637","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Improved Temperature-Scalable DC model for SiC power MOSFET including Quasi-Saturation effect 包含准饱和效应的改进型碳化硅功率 MOSFET 温度可变直流模型
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-12 DOI: 10.1016/j.sse.2024.108993
Hicham Er-rafii, Abdelghafour Galadi

In this paper, accurate temperature-dependent static model for Silicon-Carbide (SiC) power MOSFET is presented. The proposed model is formed by two equations relating to linear and saturation operating regions. In this model, new formalism of the saturation drain current is introduced to consider the peculiar features observed in the I-V static characteristics of the SiC power MOSFET: a) moderate inversion region, or region of low gate voltages and b) quasi-saturation region, region of high gate voltages at which the drain current becomes less sensitive to the increase of gate voltage. In addition, the model captures with high-precision the transition region between linear and saturation region, pinch-off region, noticed in the output characteristics of the SiC power MOSFETs. It will be shown that the model equations ensure continuity and smooth transition between all operating regions. Temperature scaling of the model is carried out by its temperature scaling parameters. The proposed compact model is simple and efficient using reduced number of technology independent parameters. Simple parameter extraction procedure is described that uses an optimizer algorithm based on good experimental initial guess. Excellent agreement is obtained by comparing model to TCAD simulation and device measurement.

本文提出了碳化硅(SiC)功率 MOSFET 随温度变化的精确静态模型。所提出的模型由与线性和饱和工作区域相关的两个方程组成。在该模型中,引入了新的饱和漏极电流形式,以考虑在碳化硅功率 MOSFET 的 I-V 静态特性中观察到的特殊特征:a)适度反转区域,即低栅极电压区域;b)准饱和区域,即高栅极电压区域,在该区域,漏极电流对栅极电压的增加变得不那么敏感。此外,该模型还高精度地捕捉到了碳化硅功率 MOSFET 输出特性中注意到的线性区和饱和区之间的过渡区,即掐断区。模型方程确保了所有工作区域之间的连续性和平稳过渡。模型的温度缩放由其温度缩放参数实现。通过减少与技术无关的参数数量,所提出的紧凑型模型简单而高效。描述了简单的参数提取程序,该程序使用基于良好实验初始猜测的优化算法。通过将模型与 TCAD 仿真和器件测量进行比较,可以获得极佳的一致性。
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引用次数: 0
A novel method to determine bias-dependent source and drain parasitic series resistances in AlGaN/GaN high electron mobility transistors 确定氮化铝/氮化镓高电子迁移率晶体管中与偏置有关的源极和漏极寄生串联电阻的新方法
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-08-02 DOI: 10.1016/j.sse.2024.108991
Guangyuan Jiang , Chen Fu , Yang Liu , Guang Yang , Peng Cui , Guangyuan Zhang , Yuanjie Lv , Zhaojun Lin

The AlGaN/GaN high electron mobility transistors (HEMTs) with T-gate that suitable for high frequency applications were fabricated. A novel method to extract the bias-dependent source and drain parasitic series resistances (Rs and Rd) of AlGaN/GaN HEMTs is proposed. By analyzing the distributed capacitance and current generator network in the velocity saturated regions of the AlGaN/GaN HEMTs, a new restriction relationship between small-signal equivalent circuit elements is found. The Rs and Rd can be determined under active bias through wideband S-parameter measurements, which can better reflect the physical mechanism of AlGaN/GaN HEMTs under normal operation. The S-parameters and extrinsic transconductance calculated based the small-signal equivalent circuit element values extracted by the method proposed in this paper are very consistent with the experimental values, which reflects the accuracy of this element extraction method. In this paper, the physical mechanism that causes Rs and Rd to vary with bias voltage is also studied. This study has a deeper insight into the bias-dependence of Rs and Rd, which modifies the understanding for physical mechanisms of AlGaN/GaN HEMTs. The research results provide new ideas for establishing small-signal equivalent circuit models containing more physical effects and is of great significance to GaN-based integrated circuit design.

我们制造出了适合高频应用的带 T 型栅极的 AlGaN/GaN 高电子迁移率晶体管 (HEMT)。本文提出了一种提取 AlGaN/GaN HEMT 与偏置有关的源极和漏极寄生串联电阻(Rs 和 Rd)的新方法。通过分析 AlGaN/GaN HEMT 速度饱和区域的分布电容和电流发生器网络,发现了小信号等效电路元件之间的新限制关系。通过宽带 S 参数测量,可以确定有源偏压下的 Rs 和 Rd,从而更好地反映 AlGaN/GaN HEMT 正常工作时的物理机制。根据本文提出的方法提取的小信号等效电路元件值计算出的 S 参数和外超导与实验值非常一致,反映了这种元件提取方法的准确性。本文还研究了导致 Rs 和 Rd 随偏置电压变化的物理机制。这项研究对 Rs 和 Rd 的偏置依赖性有了更深入的了解,从而修正了对 AlGaN/GaN HEMT 物理机制的理解。研究成果为建立包含更多物理效应的小信号等效电路模型提供了新思路,对基于氮化镓的集成电路设计具有重要意义。
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引用次数: 0
The study on influence factors of contact properties of metal-MoS2 interfaces 金属-MoS2界面接触性能影响因素研究
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-30 DOI: 10.1016/j.sse.2024.108992
Jiawei Li, Jiale Sun, Hongliang Lu, Yuming Zhang, Yuche Pan

The metal and two-dimension (2D) semiconductor contact interfaces have a more considerable contact resistance hindering carrier injection, which makes the performance of 2D semiconductor devices less than the theory. The contact properties of Ni, Au, and Mo with MoS2 are simulated by the first-principles method. The interface dipole caused by the interface charge redistribution changes the work function difference at the metal-MoS2 interface, so the interface charge redistribution is one of the important factors for correctly evaluating the contact properties. Due to the metal-induced gap states (MIGS) at metal-monolayer (ML) MoS2 interfaces, the Fermi level is strongly pinned to fixed energy, and the Schottky barrier height (SBH) cannot be regulated efficiently by the metal work function. Although the work function of Au is bigger than Ni, the Fermi level of Au is pinned at a higher position. In the meantime, the bandgap of MoS2 narrows and metallization occurs due to the larger MIGS. In the Mo-MoS2 interface, the Fermi level is pinned near the conduction band minimum of MoS2. The contact resistances (Rc) of the three structures are tested by the Circular Transfer Length Method (CTLM), which is consistent with the prediction of the simulation. The Mo-MoS2 has the smallest Rc. The results indicate that contact resistance of 2D semiconductors cannot be simply predicted by soled work functions or Fermi level pinning, but is determined by several factors.

金属与二维(2D)半导体的接触界面具有较大的接触电阻,阻碍载流子注入,从而使 2D 半导体器件的性能低于理论值。本文采用第一原理方法模拟了镍、金和钼与 MoS2 的接触特性。界面电荷再分布引起的界面偶极子改变了金属-MoS2 界面的功函数差,因此界面电荷再分布是正确评估接触特性的重要因素之一。由于金属-单层(ML)MoS2 界面存在金属诱导间隙态(MIGS),费米级被强力钉在固定能量上,肖特基势垒高度(SBH)无法通过金属功函数进行有效调节。虽然金的功函数比镍大,但金的费米级被固定在更高的位置。在 Mo-MoS2 界面上,费米级被固定在 MoS2 的导带最小值附近。通过圆周传输长度法(CTLM)测试了三种结构的接触电阻(Rc),结果与模拟预测一致。Mo-MoS2 的 Rc 最小。结果表明,二维半导体的接触电阻不能简单地用溶胶功函数或费米级针销来预测,而是由多个因素决定的。
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引用次数: 0
ANN-based framework for modeling process induced variation using BSIM-CMG unified model 利用 BSIM-CMG 统一模型,建立基于 ANN 的流程诱导变异建模框架
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-07-22 DOI: 10.1016/j.sse.2024.108988
Anant Singhal , Yogendra Machhiwar , Shashank Kumar , Girish Pahwa , Harshit Agarwal

In this work, we present a machine-learning augmented compact modeling framework for modeling process induced variations in advanced semiconductor devices. The framework employs BSIM-CMG unified compact model at the core and can be used for any advanced devices like GAA nanosheets and nanowires, FinFETs etc. We have validated the model with extensive numerical simulations and experimental data such as 14nm technology FinFET and 24nm technology Nanowire. Our results show excellent accuracy in modeling variability in key electrical parameters of the device including off-current (Ioff), on-current (Ion), threshold voltage (Vth), subthreshold swing (SS) etc. We observe that the overall accuracy of the ML-based framework strongly depends on the nature and physical behavior of the core model used for modeling the nominal device.

在这项工作中,我们提出了一个机器学习增强紧凑建模框架,用于对先进半导体器件的工艺诱导变化进行建模。该框架以 BSIM-CMG 统一紧凑模型为核心,可用于 GAA 纳米片和纳米线、FinFET 等任何先进器件。我们通过大量的数值模拟和实验数据(如 14 纳米技术 FinFET 和 24 纳米技术纳米线)验证了该模型。我们的结果表明,该模型在模拟关断电流 (Ioff)、导通电流 (Ion)、阈值电压 (Vth)、亚阈值电压摆幅 (SS) 等器件关键电气参数的变化方面具有出色的准确性。我们注意到,基于 ML 的框架的整体准确性在很大程度上取决于用于标称器件建模的内核模型的性质和物理行为。
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引用次数: 0
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Solid-state Electronics
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