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Extraction of trap densities in Al:HfO2 MIM capacitors using voltage ramp stress measurements 利用电压斜坡应力测量提取Al:HfO2 MIM电容器中的陷阱密度
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-10 DOI: 10.1016/j.sse.2025.109239
Corinna Fohn , Emmanuel Chery , Kristof Croes , Michele Stucchi , Valeri Afanas’ev
We present an experimental method to directly evaluate the oxide trap densities in TiN/Al:HfO2/TiN capacitors from the low-field current hysteresis in voltage-ramp-stress (VRS) measurements. The extracted densities of deep electron traps are in the 1013 cm−2 range and virtually independent of the Al-doping concentration in HfO2 (ranging from 2% to 20%). These results indicate that the trapping sites are intrinsic and may be related to polaronic states in disordered HfO2. Regarding reproducibility and stability, the measurements were consistent across all samples, except for those with low Al doping, which exhibited increased leakage and degradation likely due to partial crystallization. In degraded samples, conductive paths formed after electrical stress confine the leakage, limiting the sensitivity of the method to local trap densities adjacent to the leakage path.
我们提出了一种实验方法,通过电压-斜坡-应力(VRS)测量中的低场电流滞后,直接评估TiN/Al:HfO2/TiN电容器中的氧化物阱密度。深电子阱的提取密度在1013 cm−2范围内,几乎与HfO2中al掺杂浓度(2% ~ 20%)无关。这些结果表明,捕获位点是本征的,可能与无序HfO2中的极化态有关。在再现性和稳定性方面,所有样品的测量结果都是一致的,除了那些低Al掺杂的样品,由于部分结晶可能导致泄漏和降解增加。在降解样品中,电应力后形成的导电路径限制了泄漏,限制了该方法对泄漏路径附近局部陷阱密度的灵敏度。
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引用次数: 0
Impact of bottom channel coverage ratio on electrical characteristics of GAA Si NS CFETs for Sub-1-nm nodes 底部通道覆盖率对亚1nm节点GAA Si NS cfet电特性的影响
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-08 DOI: 10.1016/j.sse.2025.109244
Min-Hui Chuang , Sekhar Reddy Kola , Yiming Li
This study examines the impact of the bottom parasitic channel coverage ratio on the electrical characteristics of gate-all-around silicon nanosheet complementary FETs (GAA Si NS CFETs) optimized for sub-1-nm technology nodes. The coverage ratio, ranging from 60% to 100%, is analyzed in both n on p and p on n stacked configurations. Results reveal a strong inverse correlation between coverage ratio and bottom-device leakage current: devices with 60% coverage exhibit leakage currents up to 169× (p on n) and 140× (n on p) greater than those with full (100%) coverage. Additionally, the high-frequency behavior of a common-source amplifier shows that the cut-off frequency significantly improves in devices with a 100% bottom channel coverage ratio, highlighting the critical role of bottom-channel integrity in analog performance.
本研究考察了底部寄生通道覆盖率对栅极全硅纳米片互补场效应管(GAA Si NS cfet)电特性的影响,该互补场效应管优化用于亚1nm技术节点。在n on p和p on n堆叠两种配置下,分析了覆盖率,范围从60%到100%。结果显示,覆盖率与底部器件泄漏电流之间存在很强的负相关关系:60%覆盖率的器件的泄漏电流比完全(100%)覆盖率的器件的泄漏电流大169倍(p on n)和140倍(n on p)。此外,共源放大器的高频特性表明,在100%底通道覆盖率的设备中,截止频率显著提高,突出了底通道完整性在模拟性能中的关键作用。
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引用次数: 0
Flexible & light-weight III-V concentrated photovoltaics for automobile application 柔性和轻便的III-V型聚光光伏汽车应用
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-06 DOI: 10.1016/j.sse.2025.109243
Sahil Sharma , Kumaran Selva , Carlos A. Favela , Bo Yu , Venkat Selvamanickam
Use of solar energy for electric power has a huge potential to reduce the carbon footprint caused by greenhouse gases (GHG). While photovoltaics (PV) has been adopted in mainstream terrestrial applications, their implementation in the automotive sector, to make PV-powered vehicles, has been minimal. The existing PV-powered vehicles utilize low-efficiency solar cells, which limits the driving range to 20 miles/day. In this work, we present concentrated photovoltaic (CPV) devices using high-efficiency III-V solar cells for automobile application to realize longer driving range. We have developed inexpensive and flexible III-V PV on metal tapes and integrated them with a durable, flexible PDMS microlens for light concentration. The integrated device showed more than 9 times improvement in current density and power output compared to a solar device without a light concentrator at 1 sun. Use an array of microlens integrated with III-V PV could extend the driving range to 115 miles/day for a vehicle with an electric mileage of 10 miles/kWh. We have also investigated the effect of the light incident angle on device performance to evaluate the optimal tilt angle while mounting the PV module on the vehicle’s roof.
利用太阳能发电在减少温室气体(GHG)造成的碳足迹方面具有巨大的潜力。虽然光伏(PV)已经在主流地面应用中被采用,但它们在汽车领域的实施,以制造光伏动力车辆,一直很少。现有的太阳能汽车使用低效率的太阳能电池,这限制了行驶里程20英里/天。在这项工作中,我们提出了用于汽车的聚光光伏(CPV)装置,该装置采用高效率的III-V太阳能电池,以实现更长的行驶里程。我们已经在金属带上开发了廉价且灵活的III-V光伏,并将它们与耐用,灵活的PDMS微透镜集成在一起,用于光集中。与没有光集中器的太阳能装置相比,集成装置在1个太阳下的电流密度和功率输出提高了9倍以上。使用与III-V型光伏集成的微透镜阵列可以将行驶里程延长到115英里/天,而电动里程为10英里/千瓦时。我们还研究了入射角对器件性能的影响,以评估将光伏组件安装在车顶时的最佳倾斜角度。
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引用次数: 0
Silicon nanowire field-effect transistor biosensors with bowtie antenna 带领结天线的硅纳米线场效应晶体管生物传感器
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-06 DOI: 10.1016/j.sse.2025.109230
Yongqiang Zhang , Kai Li , Nazarii Boichuk , Denys Pustovyi , Valeriia Chekubasheva , Hanlin Long , Mykhailo Petrychuk , Svetlana Vitusevich
In this study, we fabricated high-quality, liquid gate-all-around silicon nanowire (NW) field-effect transistor (FET) biosensors with a gold bowtie antenna using a silicon-on-insulator (SOI) wafer. The electrical and noise properties of these novel NW FETs were investigated under 940 nm light-emitting diode (LED) optical excitation in different solutions. A two-level signal (TLS) that is useful for biosensing was successfully activated at the light excitation only. The detection of repeatable fluctuations in current, manifested as minor peaks in the I–V curves under infrared illumination, confirms the activation of a TLS in the biosensors. The TLS demonstrates a linear dependence of its amplitude in relation to intensity. Moreover, we performed TLS studies in MgCl2 solutions of different concentrations. The results indicate that the FET devices incorporating a gold antenna have considerable potential for the excitation of TLS, thus allowing the sensitivity of the biosensors to be about 300 % enhanced.
在这项研究中,我们利用绝缘体上硅(SOI)晶圆制造了高质量的液态栅极全方位硅纳米线场效应晶体管(FET)生物传感器,该传感器具有金领结天线。在940 nm发光二极管(LED)光激发下,研究了新型NW场效应管在不同溶液下的电学和噪声特性。仅在光激发下就成功激活了用于生物传感的双电平信号(TLS)。在红外照射下,可重复检测到电流波动,表现为I-V曲线上的小峰,证实了生物传感器中TLS的激活。TLS的振幅与强度呈线性关系。此外,我们在不同浓度的MgCl2溶液中进行了TLS研究。结果表明,采用金天线的FET器件具有相当大的激发TLS的潜力,从而使生物传感器的灵敏度提高了约300%。
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引用次数: 0
A closed-form model for programming of oxide-based resistive random access memory cells derived from the Stanford model 基于斯坦福模型的基于氧化物的电阻随机存取存储单元编程的封闭模型
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-09-03 DOI: 10.1016/j.sse.2025.109238
Nadine Dersch , Eduardo Perez , Christian Wenger , Mike Schwarz , Benjamin Iniguez , Alexander Kloes
This paper presents a closed-form model for pulse-based programming of oxide-based resistive random access memory devices. The Stanford model is used as a basis and solved in a closed-form for the programming cycle. A constant temperature is set for this solution. With the closed-form model, the state of the device after programming or the required programming settings for achieving a specific device conductance can be calculated directly and quickly. The Stanford model requires time-consuming iterative calculations for high accuracy in transient analysis, which is not necessary for the closed-form model. The closed-form model is scalable across different programming pulse widths and voltages.
本文提出了一种基于脉冲编程的基于氧化物的电阻随机存取存储器器件的封闭模型。以斯坦福模型为基础,以封闭形式求解规划周期。这个溶液的温度是恒定的。通过封闭式模型,可以直接快速地计算出编程后器件的状态或实现特定器件电导所需的编程设置。斯坦福模型需要耗时的迭代计算以获得较高的瞬态分析精度,而这对于闭型模型来说是不必要的。封闭形式的模型可在不同的编程脉冲宽度和电压之间进行扩展。
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引用次数: 0
A 3 nm IRDS projection based design space variability and experimental feasibility in junctionless forksheet FET: implications for next-generation digital, analog/RF, and circuit applications 基于3nm IRDS投影的无结叉片FET设计空间可变性和实验可行性:对下一代数字、模拟/RF和电路应用的影响
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-31 DOI: 10.1016/j.sse.2025.109231
Kavya Mulaga , Mohan Siva Kumar Mattaparthi , Ramya Dalai , Sresta Valasa , Venkata Ramakrishna Kotha , Sunitha Bhukya , Narendar Vadthiya
This article explores the digital and analog/RF figures of merit (FOMs), and circuit performances for finding the optimal design space targeted at sub-3 nm technology node for the Junctionless Forksheet FET (JL FS-FET). Within the sub-3 nm node, the gate length (Lg), width (WFS), and thickness (TFS) are varied between 6 nm–14 nm, 20 nm–40 nm, and 5 nm–9 nm respectively. An optimal design space of Lg = 6 nm − 12 nm can be chosen for digital and analog/RF applications in the sub-3 nm technology node and scaling of Lg > 12 nm is not suitable for designed JL-FSFET since it gives deteriorated Av and fT which are the primary performance metrics to boost the device performance. Additionally, lowering the WFS and TFS is an optimal choice for improving the digital and analog performance whereas higher WFS and TFS should be opted for better RF performance in the sub-3 nm technology node. Moreover, stacking the sheets is a good idea to enhance the analog/RF performance at the cost of compromised Av whereas an improper choice for digital performance. Further, the JL-FSFET based CMOS inverter layout cell for the optimal dimensions (Lg = 12 nm, TFS = 5 nm, WFS = 20 nm) provided better noise margins, gain of ∼9.82 V/V, and delay of ∼5.8 ps making the designed device to be adopted into digital ICs. These findings suggest that design space at sub-3 nm node hold significant potential for optimizing JL-FSFET performance for future device and circuit development.
本文探讨了数字和模拟/RF优值(FOMs)以及电路性能,以寻找针对亚3nm技术节点的无结叉片FET (JL FS-FET)的最佳设计空间。在亚3nm节点内,栅极长度(Lg)、宽度(WFS)和厚度(TFS)分别在6 nm - 14 nm、20 nm - 40 nm和5 nm - 9 nm之间变化。对于sub- 3nm技术节点的数字和模拟/RF应用,可以选择Lg = 6 nm - 12 nm的最佳设计空间,Lg >; 12 nm的缩放不适合设计的jl - fset,因为它会导致Av和fT的恶化,而这是提高器件性能的主要性能指标。此外,降低WFS和TFS是提高数字和模拟性能的最佳选择,而在sub- 3nm技术节点中,应该选择更高的WFS和TFS以获得更好的射频性能。此外,以牺牲Av为代价来提高模拟/RF性能是一个好主意,而对于数字性能来说,这是一个不正确的选择。此外,基于jl - fset的CMOS逆变器布局单元的最佳尺寸(Lg = 12 nm, TFS = 5 nm, WFS = 20 nm)提供了更好的噪声裕度,增益为~ 9.82 V/V,延迟为~ 5.8 ps,使设计的器件可用于数字ic。这些发现表明,在sub- 3nm节点上的设计空间对于优化jl - fset性能具有重大潜力,可用于未来器件和电路的开发。
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引用次数: 0
Assessing the impact of process and design variations on reliability of complementary FET 评估工艺和设计变化对互补场效应管可靠性的影响
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-30 DOI: 10.1016/j.sse.2025.109226
Ankit Dixit , Sandeep Kumar , Naveen Kumar , Deven H. Patil , S. Dasgupta , Navjeet Bagga , Luiz Felipe Aguinsky , Vihar Georgiev
This paper comprehensively analyzes the reliability concerns of the Complementary FET (CFET), engrossing the design parameters and the variability effects. The impact of process-induced variabilities, such as random dopant distribution (RDD), line edge roughness (LER), and metal gate granularity (MGG), is extensively studied through well-calibrated TCAD models. Variation aware compact model based statistical analysis is used to analyze 100 random device samples, which shows a significant spread in the IDS-VGS curve (transfer characteristics). Electrical performance based on the grain size and fin width is also analyzed on both n and p-type device. Therefore, the variation in threshold voltage (Vth) is used to predict the early aging of the devices.
本文综合分析了互补场效应管的可靠性问题,重点考虑了设计参数和变异性效应。通过校准良好的TCAD模型,广泛研究了随机掺杂分布(RDD)、线边缘粗糙度(LER)和金属栅粒度(MGG)等过程引起的变量的影响。采用基于变化感知紧凑模型的统计分析方法对100个随机设备样本进行了分析,发现IDS-VGS曲线(传输特性)存在显著的扩散。在n型和p型器件上分析了基于晶粒尺寸和翅片宽度的电性能。因此,阈值电压(Vth)的变化可以用来预测器件的早期老化。
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引用次数: 0
Optimization of lateral source/drain growth profile for improving RC delay in nanosheet field-effect transistor 改善纳米片场效应晶体管RC延迟的横向源极/漏极生长曲线优化
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-30 DOI: 10.1016/j.sse.2025.109227
Jin Ho Park , Jae Woog Jung , Hyunwoo Kim
In the advancing sub-3 nm technology node, device evolution has progressed from FinFET to gate-all-around based nanosheet architectures (NSFETs). This transition addresses the limitations of FinFETs, where scaling down leads to a reduced number of fins, maintaining a quantized width and resulting in decreased current drivability. In contrast, NSFETs offer flexible width design similar to traditional planar structures and allow for multi-channel stacking, increasing current and making them an attractive candidate from a circuit design perspective. However, NSFETs also faces challenges in device performance due to increased parasitic RC components, despite improved gate controllability.
In this work, we analyzed parasitic RC components in NSFETs with different source/drain growth profiles using 3D TCAD simulations and then examined the RC delay to determine the source/drain growth profile that exhibits optimal device performance. Furthermore, we investigated self-heating effects (SHEs) to evaluate heat dissipation across different source/drain profiles, integrating these findings with RC delay analyses to propose the optimal growth profile.
在不断发展的亚3nm技术节点,器件已经从FinFET发展到基于栅极的纳米片结构(nsfet)。这种转变解决了finfet的局限性,缩小尺寸会导致翅片数量减少,保持量子化宽度,导致电流可驱动性降低。相比之下,nsfet提供类似于传统平面结构的灵活宽度设计,允许多通道堆叠,增加电流,从电路设计的角度来看,使其成为有吸引力的候选者。然而,尽管栅极可控性得到了改善,但由于寄生RC元件的增加,nsfet在器件性能方面也面临着挑战。在这项工作中,我们使用3D TCAD模拟分析了具有不同源极/漏极生长曲线的nsfet中的寄生RC元件,然后检查RC延迟以确定具有最佳器件性能的源极/漏极生长曲线。此外,我们研究了自热效应(SHEs),以评估不同源/漏剖面的散热情况,并将这些发现与RC延迟分析相结合,提出了最佳生长剖面。
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引用次数: 0
Impact of back-biasing on the series resistance in ultrathin SOI devices 背偏对超薄SOI器件串联电阻的影响
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-30 DOI: 10.1016/j.sse.2025.109225
Yu Yan , Cunhua Dou , Xuan Zhang , Weijia Song , Zhiyu Tang , Binhong Li , Jing Wan , Huabin Sun , Xing Zhao , Yun Wang , Yong Xu , Sorin Cristoloveanu
The universal burden of series resistance in short-channel MOSFETs is even more critical in ultrathin transistors where the sheet resistance of source and drain terminals is high. However, FD-SOI devices benefit from the back-gate action which can also modulate the series resistance. Several methods for series resistance extraction are examined. Unlike an advanced FD-SOI MOSFET with highly-doped raised terminals, the junctionless transistors (with either conventional or core–shell architecture) exhibit higher series resistance, strongly dependent on back-gate voltage.
短沟道mosfet中串联电阻的普遍负担在超薄晶体管中更为严重,因为超薄晶体管的源极和漏极的片电阻很高。然而,FD-SOI器件受益于后门作用,它也可以调制串联电阻。介绍了几种串联电阻提取方法。与具有高掺杂凸起端子的先进FD-SOI MOSFET不同,无结晶体管(具有传统或核壳结构)具有更高的串联电阻,强烈依赖于反向电压。
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引用次数: 0
Enhancing carrier transport in AlGaN/GaN HEMTs through structural optimization and transconductance modeling 通过结构优化和跨电导建模增强AlGaN/GaN hemt中的载流子输运
IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-08-29 DOI: 10.1016/j.sse.2025.109222
Hyo-Joung Kim , Walid Amir , Surajit Chakraborty , Ju-Won Shin , Ki-Young Shin , Hyuk-Min Kwon , Tae-Woo Kim
In GaN-based High-Electron Mobility Transistors (HEMTs), the carrier transport properties of the 2-Dimensional Electron Gas (2DEG), specifically the saturation velocity (υsat) and effective mobility (μn_eff,), are critical determinants of device performance. To enhance these properties, we conducted structural optimizations, which included reducing the Al mole fraction in the AlxGa1-xN barrier and introducing an AlGaN back barrier. Recognizing the limitations of traditional extraction techniques, we employed transconductance modeling to accurately extract effective mobility and saturation velocity values. The implementation of the AlGaN back barrier resulted in an effective mobility enhancement to 748 cm2/V·s. Additionally, reducing the Al mole fraction in the AlxGa1-xN top barrier led to an effective mobility improvement of 484 cm2/V·s. These findings provide valuable insights into the design of epitaxial structures for AlGaN/GaN HEMTs aimed at achieving superior performance in future applications.
在基于氮化镓的高电子迁移率晶体管(hemt)中,二维电子气体(2DEG)的载流子输运特性,特别是饱和速度(sat)和有效迁移率(μn_eff,)是器件性能的关键决定因素。为了提高这些性能,我们进行了结构优化,包括减少AlxGa1-xN势垒中的Al摩尔分数和引入AlGaN后势垒。认识到传统提取技术的局限性,我们采用跨电导建模来准确提取有效迁移率和饱和速度值。AlGaN后屏障的实施使迁移率有效提高到748 cm2/V·s。此外,降低AlxGa1-xN顶势垒中的Al摩尔分数可使迁移率提高484 cm2/V·s。这些发现为AlGaN/GaN hemt的外延结构设计提供了有价值的见解,旨在在未来的应用中实现卓越的性能。
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引用次数: 0
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Solid-state Electronics
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