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C-V characterization of the trap-rich layer in a novel Double-BOX structure 新型双 BOX 结构中陷阱丰富层的 C-V 特性分析
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-05-09 DOI: 10.1016/j.sse.2024.108951
Yang Huang , Fanyu Liu , Sorin Cristoloveanu , Shiqi Ma , Massinissa Nabet , Yiyi Yan , Bo Li , Binhong Li , Bich-Yen Nguyen , Zhengsheng Han , Jean-Pierre Raskin

A new Double-BOX structure is introduced to explore the electrical properties of the trap-rich layer used to enhance the performance of radio frequency Silicon-on-Insulator substrates. Capacitance-voltage (C-V) measurements reveal anomalous behavior with a “shoulder” emerging in the electron accumulation region and a shift towards negative gate voltage in hysteresis. TCAD simulation shows that these features are related to trap states at the grain boundary in the trap-rich polycrystalline silicon (polysilicon) layer. These traps form a potential barrier and affect the C-V curves. To determine the traps density in polysilicon, a three-element circuit model is used. The effective density of fast traps is evaluated from the corrected C-V curve, while the hysteresis of double-sweep C-V measurement yields the slow traps density at the grain boundary in polysilicon.

为了探索用于提高射频绝缘体上硅衬底性能的富陷阱层的电气特性,我们引入了一种新的双 BOX 结构。电容-电压(C-V)测量结果表明,电子积聚区出现了 "肩",滞后中的栅极电压趋向于负值。TCAD 模拟显示,这些特征与多晶硅(多晶硅)层中富含陷阱的晶界陷阱态有关。这些陷阱形成了势垒,影响了 C-V 曲线。为了确定多晶硅中的陷阱密度,我们使用了一个三元素电路模型。根据校正后的 C-V 曲线评估快速陷阱的有效密度,而根据双扫 C-V 测量的滞后性得出多晶硅晶界处的慢速陷阱密度。
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引用次数: 0
Detailed analysis of the capacitance characteristic measured using the pseudo-metal–oxide–semiconductor method 使用伪金属氧化物半导体法测量电容特性的详细分析
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-05-06 DOI: 10.1016/j.sse.2024.108950
Shingo Sato , Yifan Yuan

This paper discusses the capacitance–voltage (C–V) characteristics of a silicon-on-insulator (SOI) wafer obtained using the alternating current (AC) pseudo-metal–oxide–semiconductor (MOS) method. This study clarified that the C–V characteristics measured using the standard configuration of the AC pseudo-MOS method were strongly ruled by the condition of both the top and back contacts. Using a distinctive setup referred to as the Kelvin AC pseudo-MOS method, coupled with specific treatments applied to the wafer, we acquired C–V and impedance-related characteristics that differed from the standard configuration and aligned with the theoretical expectation for the entire range of measurement frequencies below a few megahertz. In addition, this study demonstrated the qualitative behavior of the frequency-dependent capacitance with the channel conduction of carriers using an analytical model.

本文讨论了使用交流伪金属氧化物半导体(MOS)方法获得的绝缘体上硅(SOI)晶片的电容-电压(C-V)特性。这项研究表明,使用交流伪 MOS 方法的标准配置测量的 C-V 特性受到顶面和背面触点条件的很大影响。我们使用了一种称为开尔文交流伪 MOS 方法的独特设置,并对晶片进行了特殊处理,从而获得了不同于标准配置的 C-V 和阻抗相关特性,并在低于几兆赫兹的整个测量频率范围内符合理论预期。此外,这项研究还利用分析模型证明了频率相关电容与载流子沟道传导的定性行为。
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引用次数: 0
Stable and repeatable ZrO2 RRAM achieved by NiO barrier layer for negative set phenomenon elimination 通过氮氧化物阻挡层消除负集现象,实现稳定且可重复的 ZrO2 RRAM
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-05-03 DOI: 10.1016/j.sse.2024.108948
Tangyou Sun , Fantao Yu , Chengcheng Li , Taohua Ning , Xingpeng Liu , Zhimou Xu , Zhiqiang Yu , Chunsheng Jiang , Haiou Li , Fabi Zhang , Qing Liao

Resistive random-access memory (RRAM) is a promising non-volatile memory technology due to its fast operation, low power consumption, and high reliability. However, the negative set phenomenon remains a challenge for RRAM, which can lead to the deterioration of device switching parameters. In this study, we successfully addressed this issue by inserting a NiO blocking layer between the ZrO2 and Ag top electrodes in ZrO2-based RRAM. In addition, the resistive switching characteristics of the device are significantly enhanced by the incorporation of a p-type oxide NiO layer. Compared to single-layer ZrO2 devices, the double-layer Ag/NiO/ZrO2/ITO RRAM exhibits improved cycling durability (>500 cycles) and good retention time (3 × 104s). Our analysis of the device conduction mechanism and proposed resistive switching model suggest that oxygen vacancies play a connecting role in the reset process, leading to failed reset behavior. Through the incorporation of a p-type semiconductor NiO layer into ZrO2-based RRAMs, the interference of oxygen vacancies on the reset process can be effectively impeded. This approach not only provides an effective resolution to the unforeseen negative set phenomenon in RRAM devices, but it also holds paramount significance for the advancement of high-performance RRAMs.

电阻式随机存取存储器(RRAM)运行速度快、功耗低、可靠性高,是一种前景广阔的非易失性存储器技术。然而,负集现象仍然是 RRAM 面临的一个挑战,它会导致器件开关参数的恶化。在这项研究中,我们在基于 ZrO2 的 RRAM 中的 ZrO2 和 Ag 顶电极之间插入了一层 NiO 阻挡层,从而成功地解决了这一问题。此外,通过加入 p 型氧化物 NiO 层,该器件的电阻开关特性得到了显著增强。与单层 ZrO2 器件相比,双层 Ag/NiO/ZrO2/ITO RRAM 的循环耐久性(500 次)和保持时间(3 × 104s)都有所提高。我们对器件传导机制的分析和提出的电阻开关模型表明,氧空位在复位过程中起连接作用,导致复位行为失败。通过在基于 ZrO2 的 RRAM 中加入 p 型半导体 NiO 层,可以有效抑制氧空位对复位过程的干扰。这种方法不仅有效解决了 RRAM 器件中不可预见的负集现象,而且对高性能 RRAM 的发展具有重要意义。
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引用次数: 0
Density functional model of threshold voltage shifts at High-K/Metal gates 高-K/金属栅极阈值电压偏移的密度泛函模型
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-05-03 DOI: 10.1016/j.sse.2024.108949
R. Cao , Z. Zhang , Y. Guo , J. Robertson

A density functional analysis of oxide dipole layers used to set the threshold voltages in high-K/metal CMOS gate stacks is given in terms of the band alignments and chemical trends of these component oxide layers. The oxides SrO, La2O3, HfO2 and Al2O3 are found to have similar band gaps and form a ‘staircase’ of band alignments, allowing them to shift the metal electrode Fermi level in both n-type and p-type directions. This analysis supersedes previous largely empirical models based on metal oxide ion densities or electronegativity scales.

根据这些成分氧化物层的能带排列和化学趋势,对用于设置高 K/金属 CMOS 栅极堆栈阈值电压的氧化物偶极层进行了密度泛函分析。研究发现,氧化物 SrO、La2O3、HfO2 和 Al2O3 具有相似的带隙,并形成 "阶梯 "带排列,使它们能够在 n 型和 p 型方向上移动金属电极费米级。这一分析取代了以往主要基于金属氧化物离子密度或电负性标度的经验模型。
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引用次数: 0
Threshold voltage in FD-SOI MOSFETs FD-SOI MOSFET 的阈值电压
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-30 DOI: 10.1016/j.sse.2024.108947
Georges Pananakakis, Gérard Ghibaudo, Sorin Cristoloveanu

The threshold voltage definition and measurement in ultrathin FD-SOI MOS transistors are revisited by comparing theoretical and pragmatic extraction techniques, including novel approaches. The respective merits and limitations of methods based on the monitoring of the potential, mobile charge, gate-to-channel capacitance and drain current are emphasized. Back-gate biasing, thickness-induced quantization, potential fluctuations and surface roughness can enhance the disparity between various extraction methods. The origin of these deviations is clarified.

通过比较理论和实际提取技术(包括新方法),重新审视了超薄 FD-SOI MOS 晶体管中阈值电压的定义和测量。强调了基于监测电位、移动电荷、栅极到沟道电容和漏极电流的方法各自的优点和局限性。后栅偏压、厚度引起的量化、电位波动和表面粗糙度会加剧各种提取方法之间的差异。这些偏差的根源已得到澄清。
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引用次数: 0
Analysis of anomalous C-V behavior for extracting the traps density in the undoped polysilicon with a double-BOX structure 分析反常 C-V 行为以提取双 BOX 结构未掺杂多晶硅中的陷阱密度
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-26 DOI: 10.1016/j.sse.2024.108946
Yang Huang , Yiyi Yan , Massinissa Nabet , Fanyu Liu , Bo Li , Binhong Li , Zhengsheng Han , Sorin Cristoloveanu , Jean-Pierre Raskin

A new Double-BOX structure is introduced to reveal the electrical properties of undoped polysilicon used to enhance the performance of radio frequency SOI substrates. A plateau is clearly observed in the capacitance–voltage (C-V) characteristics, which is due to the influence of the potential barrier formed at the grain boundary. A tangential approximation method based on a three-element circuit model is proposed for correcting the measured C-V curve. With the corrected C-V curve, the effective trap density distribution in polysilicon is determined for each frequency.

为了揭示用于提高射频 SOI 基底面性能的未掺杂多晶硅的电气特性,我们引入了一种新的双 BOX 结构。在电容-电压(C-V)特性中可以清楚地观察到高原现象,这是由于在晶界处形成的势垒的影响。我们提出了一种基于三元素电路模型的切向近似方法,用于修正测量到的 C-V 曲线。利用修正后的 C-V 曲线,可以确定多晶硅中每个频率的有效陷阱密度分布。
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引用次数: 0
Forward leakage currents in GaN p-i-n diodes GaN pi-n 二极管的正向漏电流
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-22 DOI: 10.1016/j.sse.2024.108936
Ao Lu , Xiaofei Pan , Xinjie Zhou , Yang Li , Xiao Wang , Jinping Ao , Dawei Yan

Excessive forward leakage currents in GaN p-i-n diodes were investigated. Traditional diffusion mechanism dominates at VF > 2 V. The effective band gap is derived to be ∼2.21 eV, which is much lower than 3.4 eV and attributed to a band fluctuation caused by dislocations; At 1.35 V < VF < 2 V, a trap-assisted tunneling process becomes important, whose ideality factor is still larger than 4.1 at T = 400 K; Two distinct power-law relationships were observed at lower biases, separated at VF = 0.8 V, whose exponents are extracted to be ∼8 and ∼4, respectively. The behavior is in a good agreement with the space-charge-limited model, featuring an exponentially decaying distribution of trap states below the conduction band.

研究了 GaN pi-n 二极管中过大的正向漏电流。传统的扩散机制在 VF > 2 V 时占主导地位。在 1.35 V < VF < 2 V 时,阱辅助隧穿过程变得重要,其表意系数仍大于 4。在 T = 400 K 时,阱辅助隧道过程变得非常重要,其意念系数仍然大于 4;在 VF = 0.8 V 时,在较低偏压下观察到两个不同的幂律关系,其指数分别为 ∼8 和 ∼4。这种行为与空间电荷限制模型十分吻合,其特点是导带以下的阱态分布呈指数衰减。
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引用次数: 0
Impact of Gate Oxide Thickness on Flicker Noise (1/f) in PDSOI n-channel FETs 栅极氧化物厚度对 PDSOI n 沟道场效应晶体管闪烁噪声 (1/f) 的影响
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-16 DOI: 10.1016/j.sse.2024.108935
Shruti Pathak , Sumreti Gupta , Aarti Rathi , P. Srinivasan , Abhisek Dixit

This work reports the impact of gate oxide thickness on flicker noise (1/f) in 45-nm RFSOI NFET devices. In addition, the effect of finger width scaling on 1/f noise parameters is studied in linear region. The dominant source of 1/f noise is also analyzed. It is observed that thin oxide devices show carrier number fluctuation; however, for thick oxide devices, correlated number-mobility govern the noise. Extracted trap densities using 1/f noise show higher volume trap densities in thin oxide devices. Moreover, trap distribution behavior is analyzed using frequency exponent. Further, GLOBALFOUNDRIES PDK is utilized to model 1/f noise behavior of the devices.

这项研究报告了栅极氧化物厚度对 45 纳米 RFSOI NFET 器件闪烁噪声 (1/f) 的影响。此外,还研究了线性区域中指宽缩放对 1/f 噪声参数的影响。还分析了 1/f 噪声的主要来源。研究发现,薄氧化物器件会出现载流子数量波动;但对于厚氧化物器件,相关的数量-流动性会控制噪声。利用 1/f 噪声提取的陷阱密度显示,薄氧化物器件的体积陷阱密度更高。此外,还利用频率指数分析了陷阱分布行为。此外,还利用 GLOBALFOUNDRIES PDK 对器件的 1/f 噪声行为进行了建模。
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引用次数: 0
Synthesis of α-Fe2O3 nanorod for sensitive and selective detection of the n-butanol 用于灵敏和选择性检测正丁醇的 α-Fe2O3 纳米棒的合成
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-16 DOI: 10.1016/j.sse.2024.108934
Yina Yang , Yufeng Liu , Xiaohong Zheng , Xinfeng Qiao

In different environments, high concentration of n-butanol will have certain harm to the human senses and nervous system, meanwhile the electrochemical sensor limits its widespread use due to its high power consumption, so it is very meaningful to develop a semiconductor n-butanol sensor with low energy consumption. In this paper, α-Fe2O3 nanorods were prepared by one-step hydrothermal method and then assembled into a n-butanol sensor capable of detecting n-butanol, and the effects of two different calcination temperatures on the performance of the sensor were investigated. Due to its higher Fe3+ content, higher oxygen vacancy content and larger specific surface area, S1-250 provided more active sites for gas adsorption, which making the response of S1-250 to 100 ppm n-butanol at 215 °C reached to 88.4. Finally, the effect of the calcination temperature on the sensor and the response mechanism were discussed. This paper offers promising applications for low-energy n-butanol sensors assembled from a single material α −Fe2O3.

在不同的环境中,高浓度的正丁醇会对人的感官和神经系统产生一定的危害,而电化学传感器因耗电量大而限制了其广泛应用,因此开发一种低能耗的半导体正丁醇传感器非常有意义。本文采用一步水热法制备了α-Fe2O3纳米棒,然后将其组装成能够检测正丁醇的正丁醇传感器,并研究了两种不同煅烧温度对传感器性能的影响。由于 S1-250 具有较高的 Fe3+ 含量、较高的氧空位含量和较大的比表面积,为气体吸附提供了更多的活性位点,这使得 S1-250 在 215 ℃ 时对 100 ppm 正丁醇的响应达到了 88.4。最后,还讨论了煅烧温度对传感器的影响和响应机制。本文为由单一材料 α -Fe2O3 组装而成的低能正丁醇传感器提供了广阔的应用前景。
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引用次数: 0
High-performance uniform stepper-based InP double-heterojunction bipolar transistor (DHBT) on a 3-inch InP substrate 基于 3 英寸 InP 基底面的高性能均匀步进式 InP 双兼性双极晶体管 (DHBT)
IF 1.7 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-04-16 DOI: 10.1016/j.sse.2024.108933
Seung Heon Shin , Hyeon-Seok Jeong , Yong-Hyun Kim , Yong-Soo Jeon , Ji-Min Beak , Wan-Soo Park , In-Geun Lee , Jacob Yun , Ted Kim , Jae-Hak Lee , Hyuk-Min Kwon , Dae-Hyun Kim

In this paper, InP Double-Heterojunction Bipolar Transistors (DHBTs) on a 3-inch InP substrate is demonstrated through stepper-based photolithography. The performance of the fabricated InP DHBTs such as DC characteristics, high-frequency characteristics, and uniformity of the 3-inch wafer is investigated to verify the stepper-based fabrication process. To improve the high-frequency characteristics, the self-aligned base-emitter contact is realized by using the high height-to-width ratio and vertical sidewall emitter profile of the Au electroplating process. The fabricated DHBTs with WE = 0.6 μm and LE = 15 μm exhibits current gain (β) = 50 at VCE = 1.0 V and an open-base common-emitter breakdown voltage (BVCEO) of 5.7 V at JC = 0.01 mA/µm2 and 7.5 V at JC = 0.1 mA/µm2, respectively. Moreover, the fabricated DHBTs with WE = 0.6 μm and LE = 15 μm show excellent fT of 244 GHz and fmax of 221 GHz at JC = 4.4 mA/μm2 and VCE = 1.6 V. In order to evaluate the uniformity of the fabricated DHBTs, we measure current gain (β) and high-frequency characteristics with WE = 0.6 μm and LE = 15 μm and the average values and standard deviation of the β, fT, and fmax are β = 49.3 ± 1.9, fT = 241.4 ± 3.8 GHz, and fmax = 221.5 ± 4.0 GHz, respectively. Thanks to the optimized stepper-based fabrication process, the fabricated InP DHBTs exhibit well-balanced high-frequency characteristics and excellent uniformity.

本文通过步进式光刻技术,在 3 英寸 InP 基底面上演示了 InP 双异质结双极晶体管 (DHBT)。研究了所制造的 InP DHBT 的性能,如直流特性、高频特性和 3 英寸晶片的均匀性,以验证步进式制造工艺。为了改善高频特性,利用金电镀工艺的高高宽比和垂直侧壁发射极轮廓实现了自对准基极-发射极接触。制成的 DHBT 的 WE = 0.6 μm 和 LE = 15 μm 在 VCE = 1.0 V 时的电流增益 (β) = 50,在 JC = 0.01 mA/µm2 和 JC = 0.1 mA/µm2 时的开基共发射极击穿电压 (BVCEO) 分别为 5.7 V 和 7.5 V。此外,在 JC = 4.4 mA/µm2 和 VCE = 1.6 V 条件下,WE = 0.6 μm 和 LE = 15 μm 的 DHBT 具有出色的 fT(244 GHz)和 fmax(221 GHz)。β = 49.3 ± 1.9,fT = 241.4 ± 3.8 GHz,fmax = 221.5 ± 4.0 GHz。由于采用了优化的步进式制造工艺,制造出的 InP DHBT 具有均衡的高频特性和出色的均匀性。
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引用次数: 0
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Solid-state Electronics
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