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2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)最新文献

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New observation on gate-induced drain leakage in Silicon nanowire transistors with Epi-Free CMOS compatible technology on SOI substrate SOI衬底上无epi - CMOS兼容技术的硅纳米线晶体管栅极诱发漏极的新观察
Jiewen Fan, Ming Li, Xiaoyan Xu, Ru Huang
As a promising transistors beyond 22nm technology node, Silicon nanowire (Si NW) transistor has attracted a lot of attentions recently [1]-[4]. Due to its unique gate-all-around (GAA) structure, Si NW transistor provides enhanced gate controllability and reduced sub-threshold leakage. However, gate-induced drain leakage (GIDL) as another primary leakage mechanism is still challenging [5][6]. In addition, due to the lateral parasitic bipolar junction transistor (PBJT), GIDL can be further enhanced in floating body transistors including Si NW transistor [7]. Unfortunately, few work on the origin sources and mechanism of GIDL in Si NW transistors have been reported up to now. In this paper, we have successfully fabricated Si NW transistors of high driving current with diameter down to 10nm on SOI substrate. More serious GIDL at low |Vgs| in Si NW transistor is observed compared with planar devices, which results from the strong gate-controlled longitudinal band-to-band tunneling (L-BTBT) of Si NW transistor, rather than traditional vertical BTBT in planar device. The dependence of GIDL on geometry parameters is also evaluated for further optimization.
硅纳米线晶体管(Si NW)作为22nm技术节点以外的一种极具发展前景的晶体管,近年来备受关注。由于其独特的栅极全能(GAA)结构,Si NW晶体管提供了增强的栅极可控性和减少亚阈值泄漏。然而,门诱发漏漏(GIDL)作为另一种主要的泄漏机制仍然具有挑战性。此外,由于侧向寄生双极结晶体管(PBJT), GIDL可以在包括Si NW晶体管[7]在内的浮体晶体管中进一步增强。遗憾的是,到目前为止,关于硅纳米硅晶体管中GIDL的来源和机理的研究还很少。在本文中,我们成功地在SOI衬底上制作了直径小至10nm的高驱动电流的Si NW晶体管。与平面器件相比,在低|Vgs|下,Si NW晶体管的GIDL现象更为严重,这是由于Si NW晶体管具有强栅极控制的纵向带到带隧道效应(L-BTBT),而不是传统平面器件中的垂直带到带隧道效应。为了进一步优化,还评估了GIDL对几何参数的依赖性。
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引用次数: 7
Three-dimensional integrated circuits with NFET and PFET on separate layers fabricated by low temperature Au/SiO2 hybrid bonding 采用Au/SiO2低温杂化键合技术制备了具有net和pet层的三维集成电路
M. Goto, K. Hagiwara, Y. Iguchi, H. Ohtake, T. Saraya, E. Higurashi, H. Toshiyoshi, T. Hiramoto
We report the first demonstration of 3D ICs formed by the direct bonding of NFET and PFET prepared on separate layers. Hybrid bonding of Au/SiO2 at a low temperature of 200°C allows direct connection of NFETs and PFETs after completion of the FET process without area penalty. We have demonstrated successful operation of a 3D CMOS inverter bonded through 3-μm-diameter Au electrodes and a ring oscillator (RO) of 101 stages to show the feasibility of a novel 3D integration toward high-density ICs.
我们首次报道了由在不同层上制备的fet和fet直接键合形成的3D集成电路的演示。在200°C的低温下,Au/SiO2的杂化键合可以在FET工艺完成后直接连接nfet和pfet,而不会造成面积损失。通过3 μm直径的Au电极和101级的环形振荡器(RO),我们成功地实现了3D CMOS逆变器的工作,证明了一种新的高密度集成电路3D集成的可行性。
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引用次数: 6
Is high resistivity SOI wafer the substrate solution for RF System-on-Chip? 高电阻率SOI晶圆是射频片上系统的衬底解决方案吗?
J. Raskin
Systems-on-Chip (SoC) and Systems-in-Package (SiP) are the most feasible solutions to fulfil the requirements of the new communication systems [1]. Both solutions will lead to a fundamental change in the design of analogue front-end architectures. It requires a high performance technology with devices that provide complex digital functionalities and can easily achieve operating frequencies in the GHz range. Therefore, it appears that only the best submicron CMOS technologies could provide a feasible and cost-effective integration of the communication systems. SOI MOSFET technology has demonstrated its potentialities for high frequency reaching cut-off frequencies close to 500 GHz for nMOSFETs [2] and for harsh environments (high temperature, radiations). Partially depleted (PD) SOI is now massively serving the 45-nm digital market where it is seen as a low-cost - low-power alternative to bulk Si. Fully depleted (FD) devices are also widely spread as they outperform existing semiconductor technologies for extremely low power analogue applications [3]. For RF and SoC applications, SOI also presents the major advantage of providing high resistivity (HR) substrate capabilities, leading to substantially reduced substrate losses. Substrate resistivity values higher than 1 kΩ-cm can easily be achieved and High Resistivity Silicon (HR-Si) is commonly foreseen as a promising substrate for radio frequency integrated circuits (RFIC) and mixed signal applications [4].
片上系统(SoC)和包内系统(SiP)是满足新通信系统要求的最可行的解决方案[1]。这两种解决方案都将导致模拟前端架构设计的根本性变化。它需要一种高性能技术,其设备可以提供复杂的数字功能,并且可以轻松实现GHz范围内的工作频率。因此,只有最好的亚微米CMOS技术才能提供一种可行且具有成本效益的通信系统集成。SOI MOSFET技术已经证明了其在nmosfet[2]和恶劣环境(高温,辐射)中达到近500 GHz截止频率的高频潜力。部分耗尽(PD) SOI现在大量服务于45纳米数字市场,被视为低成本、低功耗的体硅替代品。全耗尽(FD)器件也被广泛应用,因为它们在极低功耗模拟应用中优于现有的半导体技术[3]。对于射频和SoC应用,SOI还具有提供高电阻率(HR)衬底能力的主要优势,从而大大降低了衬底损耗。衬底电阻率值高于1 kΩ-cm很容易实现,高电阻硅(HR-Si)通常被认为是射频集成电路(RFIC)和混合信号应用中很有前途的衬底[4]。
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引用次数: 0
Opportunities in 3D substrate bonding 3D基板粘合的机会
T. Matthias, T. Uhrmann, V. Dragoi, P. Lindner
Vertical stacking of thin chips combined with Through-Silicon-Vias (TSVs) as interconnects is an attractive path to higher functional density of ICs. Different functional entities of a device are manufactured separately and later integrated by wafer bonding. This enables a modular device architecture and thus a modular manufacturing supply chain. Device manufacturers can focus on their core competence, e.g., designing and building the ASIC, and then add standardized modules, such as logic controllers or memory, from other manufacturers. Stacking dies enables the electrical performance of a system-on-chip, but it reduces the design time, complexity and cost significantly. Wafer bonding is a key manufacturing technology for 3D ICs. Fusion wafer bonding, which was initally developed for SOI wafer manufacturing is the most promising wafer stacking technology for 3D ICs.
薄芯片的垂直堆叠与通硅过孔(tsv)作为互连是提高集成电路功能密度的一个有吸引力的途径。器件的不同功能实体分别制造,然后通过晶圆键合集成。这就实现了模块化的设备架构,从而实现了模块化的制造供应链。设备制造商可以专注于他们的核心竞争力,例如设计和构建ASIC,然后添加其他制造商的标准化模块,例如逻辑控制器或内存。堆叠晶片可以实现片上系统的电气性能,但它大大减少了设计时间、复杂性和成本。晶圆键合是3D集成电路的关键制造技术。融合晶圆键合最初是为SOI晶圆制造而开发的,是3D集成电路中最有前途的晶圆堆叠技术。
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引用次数: 2
Parallelism and pipelining in ultra low voltage digital circuits 超低电压数字电路中的并行和流水线
Mingoo Seok, Zhe Cao
We investigate two important performance-enhancing techniques - pipelining and parallelism - in the context of ultra-low voltage digital circuits. The investigation at near and sub-Vt supply voltages shows that pipelining can provide a superior benefit in throughput and energy-efficiency across a wide range of near and sub-Vt supply voltages while parallelism can provide a less amount of benefits only if the utilization of the circuits is high. Based on this investigation, an FFT core has been designed employing (1) an extensive degree of pipelining and (2) the parallelism with maximal utilization in major building blocks. The developed core demonstrates a significant amount of improvement in energy-efficiency and throughput over the existing near/sub-Vt FFT demonstrations.
我们研究了两种重要的性能增强技术-流水线和并行-在超低电压数字电路的背景下。在近电压和亚电压电压下的研究表明,在近电压和亚电压电压的大范围内,流水线可以提供优越的吞吐量和能源效率,而并行只有在电路利用率高的情况下才能提供较少的好处。基于这项调查,设计了一个FFT核心,采用(1)广泛程度的流水线和(2)在主要构建块中最大利用率的并行性。与现有的近/亚vt级FFT演示相比,开发的核心在能源效率和吞吐量方面有了显着提高。
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引用次数: 0
3D hetero-integration technology with backside TSV and reliability challenges 三维异质集成技术与后TSV和可靠性的挑战
Kang-wook Lee, M. Murugesan, T. Fukushima, T. Tanaka, M. Koyanagi
Recently, hetero-integrated system (3-D super chip) involving memory, processor, power ICs, sensor, and photonic circuits has attracted attention owing to its high performance, highspeed communication, multi-functionality, and low power consumption . However, heterointegration of devices with different functions has many technical challenges owing to various types of size, thickness, and substrate because they were fabricated by different technologies. In addition, current 3-D integration technologies have another challenge such as high manufacturing cost and long prototyping time to achieve 3-D super chip. To realize 3-D super-chip with low-cost, high flexibility, and rapid prototyping time, we proposed die-level 3-D hetero-integration technology with fine-size backside TSV. Commercially available 2-D chips with different functions and sizes could be processed and integrated in die-level. To fabricate 3-D super chip, each functional chip should be thinned to 10-50μm thickness. However, the ultra-thin nature of Si substrate leads to several problems such as weak mechanical strength, warping, local deformation, and residual stress in the stacked die. In addition, the large CTE difference between Si substrate and Cu TSV and μ-bump is posing risks of undesired thermo-mechanical stress generation and Cu contamination. In this paper, we describe new 3-D heterointegration technology with backside TSV for realizing 3-D super chip with low-cost, high flexibility, and rapid prototyping time and address our attention on some of the most potent reliability issues such as thermo-mechanical stress, crystal defects, and Cu contamination introduced in 3-D integration processes.
近年来,涉及存储器、处理器、功率集成电路、传感器和光子电路的异质集成系统(3d超级芯片)以其高性能、高速通信、多功能和低功耗而备受关注。然而,不同功能器件的异质集成由于其制造工艺的不同,其尺寸、厚度和衬底的类型也各不相同,给异质集成带来了许多技术挑战。此外,目前的3d集成技术还面临着制造成本高、原型制作时间长等难题。为了实现低成本、高灵活性和快速成型时间的三维超级芯片,我们提出了具有小尺寸背面TSV的模级三维异质集成技术。市售的不同功能和尺寸的二维芯片可以在模级进行加工和集成。为了制造3d超级芯片,每个功能芯片的厚度必须减薄到10-50μm。然而,硅衬底的超薄特性导致了叠模中机械强度弱、翘曲、局部变形和残余应力等问题。此外,Si衬底与Cu TSV和μ-bump之间的较大CTE差异存在产生不期望的热机械应力和Cu污染的风险。在本文中,我们描述了一种新的三维异质集成技术,该技术具有低成本、高灵活性和快速成型时间,并解决了我们关注的一些最重要的可靠性问题,如三维集成过程中引入的热机械应力、晶体缺陷和Cu污染。
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引用次数: 0
A low power and radiation-tolerant FPGA implemented in FD SOI process 一种低功耗、耐辐射的FPGA实现FD SOI工艺
Lihua Wu, Guoquan Zhang, Yan Zhao, Xiaowei Han, Bo Yang, Jianzhong Li, Jian Wang, Jiantou Gao, K. Zhao, Ning Li, Fang Yu, Zhong-li Liu
A 330,000 gate field programmable gate array (FPGA) VS12C fabricated on 0.2μm full-depletion silicon-on-insulator (FD SOI) process is presented and the test results indicate this chip has the lower power and higher tolerance to radiation compared with Xilinx radiation-hardened XQVR300 chip implemented on 0.22μm epitaxial silicon. This paper demonstrates the benefit of the FD SOI technology on low power and radiation-tolerant FPGA circuit design.
提出了一种采用0.2μm全损耗绝缘体上硅(FD SOI)工艺制作的33万栅极现场可编程门阵列(FPGA) VS12C芯片,测试结果表明,与采用0.22μm外延硅制作的赛灵思抗辐射XQVR300芯片相比,该芯片具有更低的功耗和更高的抗辐射能力。本文论证了FD SOI技术在低功耗、耐辐射FPGA电路设计中的优势。
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引用次数: 3
A 44μW/10MHz minimum power operation of 50K logic gate using 65nm SOTB devices with back gate control 采用带后门控制的65nm SOTB器件,50K逻辑门的最小功耗为44μW/10MHz
S. Morohashi, N. Sugii, T. Iwamatsu, S. Kamohara, Y. Kato, C. Pham, K. Ishibashi
Performance, leakage and Emin on 65-nm SOTB and bulk were compared. We evaluated ring oscillators for SOTB and bulk with the same layout pattern. It is shown that operation frequency can be controlled from 6MHz to 40MHz, leakage of sleep mode can be decreased by 3 orders of magnitude on SOTB. By applying adjustable body bias and supply voltage depending on frequency, energy of 50k gates CMOS logic circuit can be minimized to be 4.4pJ/Hz, which corresponds to 44μW at 10MHz. Leakage of the logic gates can be reduced at 4.2nA at sleep mode.
比较了65纳米SOTB和bulk的性能、泄漏和Emin。我们评估了具有相同布局模式的SOTB和bulk的环形振荡器。结果表明,工作频率可控制在6MHz ~ 40MHz范围内,睡眠模式的泄漏可降低3个数量级。通过施加可调的体偏置和电源电压,可以将50k栅极CMOS逻辑电路的能量降至4.4pJ/Hz,对应于10MHz时的44μW。在休眠模式下,逻辑门的漏电可以降低到4.2nA。
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引用次数: 4
SRAM row decoder design for wide voltage range in 28nm UTBB-FDSOI 宽电压范围的28nm UTBB-FDSOI SRAM行解码器设计
G. Suraci, B. Giraud, T. Benoist, A. Makosiej, O. Thomas
This paper focuses on the design of SRAM row decoder for modern portable devices, in 28nm Ultra-Thin Body and Buried oxide (UTBB) Fully-Depleted SOI (FDSOI) technology. The proposed Mixed Single Well (Mixed-SW) design concept enables a major speed improvement over a wide voltage range with no standby power penalty, as compared to a regular Vt (RVT) design. The simulation results of a Mixed-SW dual-port SRAM row decoder show 16% and 57% propagation delay reduction at 1V and 0.5V, respectively. The gain obtained at RVT design standby power is enabled by the wide range N-Well back biasing.
本文重点研究了基于28纳米超薄体和埋藏氧化物(UTBB)全耗尽SOI (FDSOI)技术的现代便携式SRAM行解码器的设计。与常规Vt (RVT)设计相比,所提出的混合单井(Mixed- sw)设计理念能够在宽电压范围内大幅提高速度,且没有待机功率损失。仿真结果表明,混合sw双端口SRAM行解码器在1V和0.5V下的传输延迟分别降低了16%和57%。在RVT设计备用功率下获得的增益是通过宽范围n -井反向偏置实现的。
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引用次数: 2
Harmonic distortion analysis of short channel junctionless nanowire transistors operating as amplifiers 用作放大器的短通道无结纳米线晶体管谐波失真分析
R. Doria, R. Trevisoli, M. de Souza, M. Pavanello
This work presented an experimental analysis of the nonlinearity of p- and n-type JNTs (junctionless nanowire transistors) of several L. It is shown that, at a fixed input bias VA, HD2 degrades with the raise of L due to lower the effect of RS and at a targeted V0, HD2 improves with L increase owing to the larger AV resulting from the smaller channel length modulation.
本文对几种L的p型和n型无结纳米线晶体管(JNTs)的非线性进行了实验分析。结果表明,在固定的输入偏置VA下,由于RS效应降低,HD2随着L的升高而降低;在目标V0下,由于较小的通道长度调制导致较大的AV, HD2随着L的增加而提高。
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引用次数: 3
期刊
2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)
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