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Experimental determination of reference intensity ratio essential for accurate thickness measurement of HfO2 ultrathin films by XPS 通过 XPS 准确测量 HfO2 超薄薄膜厚度所必需的参考强度比的实验测定
IF 1.7 4区 化学 Q4 CHEMISTRY, PHYSICAL Pub Date : 2024-02-16 DOI: 10.1002/sia.7293
Lulu Zhang, Yasushi Azuma, Akira Kurokawa, Hiroyuki Matsuzaki
When measuring the thickness of ultrathin overlayer films using X-ray photoelectron spectroscopy (XPS), accurate values of the reference intensity ratio (R0) and the effective attenuation length (L) are essential. By definition, R0 is the peak intensity ratio for an overlayer and the substrate in “bulk” phases. Two issues need to be addressed in experimental determining R0 for ultrathin films: (i) How might a contamination layer on the sample used for measuring peak intensities impact R0? And (ii) do differences in the structure or chemistry of an ultrathin film make it inappropriate to determine R0 using bulk forms of the overlayer? In this study, we demonstrate the experimental determination of the R0 for an ultrathin HfO2 film on a Si(100) substrate with a 2 nm SiO2 layer. The values of R0 were determined using (i) the bulk materials of the HfO2 film and substrate and (ii) the ultrathin HfO2 films after different cleaning treatments. The results show that the R0 determined by the ultrathin films is higher than that determined by the bulk materials. Also, keeping the same level of carbonaceous contamination on the sample surface by cleaning as much as possible is essential for an accurate experimental determination of R0. In addition, the effective attenuation length was obtained using samples with known thicknesses measured by X-ray reflectometry. The thicknesses and uncertainty budget of the ultrathin HfO2 films were then evaluated.
使用 X 射线光电子能谱(XPS)测量超薄叠层薄膜的厚度时,参考强度比(R0)和有效衰减长度(L)的精确值至关重要。根据定义,R0 是 "体 "相中叠层和基底的峰值强度比。在实验确定超薄薄膜的 R0 时需要解决两个问题:(i) 用于测量峰值强度的样品上的污染层会如何影响 R0?(ii) 超薄薄膜结构或化学性质的差异是否会导致不适合使用叠层的块状形式来确定 R0?在本研究中,我们演示了如何通过实验测定硅(100)基底上带有 2 nm SiO2 层的超薄 HfO2 薄膜的 R0。R0 值是通过 (i) HfO2 薄膜和基底的块状材料和 (ii) 经过不同清洁处理后的超薄 HfO2 薄膜测定的。结果表明,超薄薄膜测定的 R0 值高于块状材料测定的 R0 值。同时,通过清洁尽可能保持样品表面碳质污染水平不变对于准确测定 R0 至关重要。此外,有效衰减长度是通过 X 射线反射仪测量已知厚度的样品获得的。然后评估了超薄二氧化铪薄膜的厚度和不确定性预算。
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引用次数: 0
Surface acoustic wave spectroscopy for non-destructive coating and bulk characterization at temperatures up to 600°C enabled by piezoelectric aluminum nitride coated sensor 利用氮化铝压电涂层传感器,在高达 600°C 的温度条件下利用表面声波光谱进行无损涂层和块体表征
IF 1.7 4区 化学 Q4 CHEMISTRY, PHYSICAL Pub Date : 2024-02-13 DOI: 10.1002/sia.7291
Stefan Makowski, Martin Zawischa, Dieter Schneider, Stephan Barth, Sebastian Schettler, Thanh-Tung Hoang, Hagen Bartzsch, Martina Zimmermann
Surface acoustic wave spectroscopy has been established as non-destructive and fast method for characterization of mechanical properties of surfaces and bulk materials in both research and industry. The present work shows that by application of a novel and robust aluminum nitride (AlN) coated piezoelectric contact sensor the advantages of the method can be extended from room temperature to at least 600°C. An overview of sensor concepts and applications of the method is discussed first, followed by theoretical and practical considerations for design and coating of a novel temperature stable contact sensor. After fabrication of such a sensor using magnetron sputtering, it was tested in a modified surface acoustic wave spectroscopy setup with an incorporated heating table concerning signal amplitude and frequency range. The AlN coated sensor was found to perform well up to 600°C, with temperature limited by the specification of the heating table. At room temperature, performance was acceptable when compared with a conventional contact sensor using a PVDF piezoelectric foil. Application of the high temperature capabilities of the setup was demonstrated by measuring temperature stability of hydrogen-free amorphous carbon coatings (a-C and ta-C) depending on their sp3 carbon ratio. In another example, high precision temperature dependent measurement of Young's modulus for ultrasonic fatigue test specimen was taken, achieving an accuracy better than 1%. Use of the developed sensor opens up new possibilities in material science for in situ study of temperature depending mechanical properties for coatings and surfaces.
在研究和工业领域,表面声波光谱法已成为表征表面和块体材料力学特性的无损、快速方法。本研究表明,通过应用新型、坚固的氮化铝(AlN)涂层压电接触传感器,该方法的优势可以从室温扩展到至少 600°C。首先概述了传感器概念和该方法的应用,然后讨论了设计和涂层新型温度稳定接触式传感器的理论和实际考虑因素。在利用磁控溅射技术制造出这种传感器后,我们在改进的表面声波光谱仪装置中对其进行了测试,该装置带有一个有关信号振幅和频率范围的加热台。结果表明,AlN 涂层传感器在高达 600°C 的温度下性能良好,但温度受限于加热台的规格。在室温下,与使用 PVDF 压电箔的传统接触式传感器相比,其性能是可以接受的。通过测量无氢无定形碳涂层(a-C 和 ta-C)的温度稳定性(取决于其 sp3 碳比例),证明了该装置的高温应用能力。在另一个例子中,对超声波疲劳测试样本的杨氏模量进行了随温度变化的高精度测量,精度优于 1%。所开发传感器的使用为材料科学领域现场研究涂层和表面随温度变化的机械性能提供了新的可能性。
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引用次数: 0
Maximizing visible Raman resolution of nanodiamond grains fabricated by coaxial arc plasma deposition through oxygen plasma etching optimization 通过优化氧等离子刻蚀,最大限度地提高同轴电弧等离子沉积法制造的纳米金刚石晶粒的可见拉曼分辨率
IF 1.7 4区 化学 Q4 CHEMISTRY, PHYSICAL Pub Date : 2024-01-30 DOI: 10.1002/sia.7289
Sreenath Mylo Valappil, Abdelrahman Zkria, Phongsaphak Sittimart, Shinya Ohmagari, Tsuyoshi Yoshitake
Among the nondestructive carbon material characterization tools, the prominence of visible Raman spectroscopy has surged remarkably for many years due to its ability to explore a diverse array of carbon bonding configurations. However, to fully unlock the distinctive features concealed within carbon composite materials, additional specimen treatments or precise spectroscope calibrations are necessary. In the same regard, the tiny diamond grain size (5–10 nm) and the pronounced amount of sp2 carbon in the ultrananocrystalline diamond film represent major challenges in visible light excitation. In this work, we employ calibrated oxygen plasma reactive ion etching conditions to manifest the nanodiamond visible Raman signature from ultrananocrystalline diamond/amorphous carbon composite (UNCD/a-C) films fabricated by coaxial arc plasma deposition. Upon plasma etching, the broad defect band in the visible Raman spectra converged toward the diamond characteristic Raman peak at 1332 cm−1. A detailed explanation of band components of the Raman spectra is extracted through peak fitting procedures. The results of Raman spectroscopy are further correlated with the electrical characteristics of the nitrogen-doped UNCD/a-C films due to the optimized oxygen plasma etching processes.
在非破坏性的碳材料表征工具中,可见光拉曼光谱因其能够探索各种碳键构型,多年来一直备受推崇。然而,要完全揭示隐藏在碳复合材料中的独特特征,还需要额外的试样处理或精确的光谱校准。同样,超纳米金刚石薄膜中微小的金刚石晶粒尺寸(5-10 nm)和明显的 sp2 碳含量是可见光激发的主要挑战。在这项工作中,我们采用校准的氧等离子体活性离子刻蚀条件,从通过同轴电弧等离子体沉积制造的超纳米晶金刚石/非晶碳复合(UNCD/a-C)薄膜中显示出纳米金刚石可见光拉曼特征。等离子刻蚀后,可见拉曼光谱中的宽缺陷带向 1332 cm-1 处的金刚石特征拉曼峰靠拢。通过峰值拟合程序提取了拉曼光谱带成分的详细解释。拉曼光谱的结果与掺氮的 UNCD/a-C 薄膜的电学特性进一步相关联,这些电学特性是由优化的氧等离子刻蚀工艺产生的。
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引用次数: 0
Surface science insight note: A linear algebraic approach to elucidate native films on Fe3O4 surface 表面科学启示录:用线性代数方法阐明 Fe3O4 表面的原生薄膜
IF 1.7 4区 化学 Q4 CHEMISTRY, PHYSICAL Pub Date : 2024-01-30 DOI: 10.1002/sia.7290
Pascal Bargiela, Vincent Fernandez, David Morgan, Neal Fairley, Jonas Baltrusaitis
Standard materials are often used to obtain spectra that can be compared to those from unknown samples. Spectra measured from these known substances are also used as a means of computing sensitivity factors to allow quantification by X-ray photoelectron spectroscopy (XPS) of less well-defined materials. Spectra from known materials also provide line shapes suitable for inclusion in spectral models which, when fitted to spectra, permit the chemical state for a sample to be assessed. Both types of information depend on isolating photoemission signals from the inelastically scattered signal. In this Insight note, technical issues associated with the use of XPS of as received Fe3O4 powder sample surface are discussed. The Insight note is designed to show how linear algebraic techniques applied to data collected from a sample marketed as pure Fe3O4 powder are used to verify that XPS has been performed on chemistry representative of the sample. The methods described in this Insight note can further be utilized in elucidating complex XPS data obtained from thin films formed or evolved during cyclic/non-steady use of complex (electro)catalyst surfaces, especially in the presence of contaminants.
标准物质通常用于获取光谱,以便与未知样品的光谱进行比较。从这些已知物质中测得的光谱还可用于计算灵敏度系数,以便通过 X 射线光电子能谱 (XPS) 对定义不太明确的材料进行量化。已知材料的光谱还可提供适合纳入光谱模型的线形,当与光谱拟合时,可对样品的化学状态进行评估。这两类信息都取决于从非弹性散射信号中分离出光辐射信号。本 Insight 说明讨论了与接收到的 Fe3O4 粉末样品表面的 XPS 使用相关的技术问题。该 Insight note 旨在说明如何将线性代数技术应用于从作为纯净 Fe3O4 粉末销售的样品中收集的数据,以验证 XPS 是在样品的化学代表性上进行的。本 Insight 说明中描述的方法可进一步用于阐明从复杂(电)催化剂表面循环/非稳定使用过程中形成或演化的薄膜中获得的复杂 XPS 数据,尤其是在存在污染物的情况下。
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引用次数: 0
Tailoring the surface properties of molybdenum oxytelluride thin films by its compositional ratio 通过成分比调整氧化碲钼薄膜的表面特性
IF 1.7 4区 化学 Q4 CHEMISTRY, PHYSICAL Pub Date : 2024-01-29 DOI: 10.1002/sia.7288
Sangmin Han, Hee-Seung Yoon, Juyun Park, Jin-Woo Oh, Yong-Cheol Kang
In this work, RF magnetron co-sputtering was used to fabricate molybdenum oxytelluride thin films with different atomic ratios. Scanning electron micrographs and atomic force micrographs revealed that pure Mo thin films were segregated. Thin films with 40% Te content portrayed needle-like structures and thus had the largest Rq value of 2.48 nm. Contact angle measurements further supported the findings as the thin films with 40% Te content were the most hydrophobic. X-ray photoelectron spectroscopy results revealed that the major oxidation states of Mo from Te-poor to Te-rich TFs were changed from high (+6) to low (+4 and/or +2). X-ray diffraction data showed that peaks pertaining to molybdenum oxide species appeared, notably at 33.048° and 33.115°. Ultraviolet photoelectron spectroscopy and Kelvin probe measurements evinced that the work function increases with increasing Te content. Four-point probe measurements revealed that molybdenum oxytelluride thin films tend to have higher electrical conductivity than pure Mo and Te thin films.
在这项工作中,采用射频磁控共溅射技术制造了不同原子比的钼氧碲薄膜。扫描电子显微镜和原子力显微镜显示,纯钼薄膜呈离析状。含 40% Te 的薄膜呈现针状结构,因此 Rq 值最大,为 2.48 nm。接触角测量进一步证实了这一发现,因为含 40% Te 的薄膜疏水性最强。X 射线光电子能谱结果表明,从贫钛到富钛 TF 中,钼的主要氧化态由高(+6)变为低(+4 和/或 +2)。X 射线衍射数据显示,出现了与氧化钼物种有关的峰值,特别是在 33.048°和 33.115°。紫外光电子能谱和开尔文探针测量表明,功函数随 Te 含量的增加而增加。四点探针测量显示,碲化钼薄膜的导电率往往高于纯 Mo 和 Te 薄膜。
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引用次数: 0
Synergistic effect of new imidazoline derivative and 2-aminopyridine as corrosion inhibitors for Q235: Experimental and theoretical study 新型咪唑啉衍生物和 2- 氨基吡啶作为 Q235 缓蚀剂的协同效应:实验和理论研究
IF 1.7 4区 化学 Q4 CHEMISTRY, PHYSICAL Pub Date : 2024-01-28 DOI: 10.1002/sia.7286
Pengjie Wang, Lin Fan, Yuhao Song, Kuaihai Deng, Lei Guo, Zhonghui Li, Yuanhua Lin
In order to reduce the investment of corrosion inhibitors, based on experimental and theoretical studies, the corrosion inhibition and mechanism of new imidazoline derivatives (SMIS) and 2-aminopyridine (AMP) were investigated carefully. The best corrosion inhibition effect was at 0.7-g/L SMIS and 0.3-g/L AMP, the corrosion inhibition efficiency of weight loss, electrochemical impedance spectroscopy, and potentiodynamic polarization (Tafel) were 90.54%, 98.56% and 97.68%, respectively. Electrochemical research shows that SMIS& belongs to cathodic corrosion inhibition. SMIS& mainly increased the film resistance and charge transfer resistance in 1-M HCl, thus playing a certain role in corrosion inhibition. X-ray photoelectron spectroscopy and energy dispersive spectrometer proved that SMIS& can be adsorbed on the surface of Q235, molecular dynamics showed that there was a certain synergy between SMIS and AMP. This study confirmed that SMIS and AMP have a good synergistic effect, improve the corrosion inhibition efficiency, reduce the synthesis cost of SMIS, and have a certain guiding significance for synergistic corrosion inhibition.
为了减少缓蚀剂的投资,在实验和理论研究的基础上,对新型咪唑啉衍生物(SMIS)和2-氨基吡啶(AMP)的缓蚀作用和机理进行了细致的研究。0.7-g/L SMIS 和 0.3-g/L AMP 的缓蚀效果最好,失重、电化学阻抗谱和电位极化(Tafel)的缓蚀效率分别为 90.54%、98.56% 和 97.68%。电化学研究表明,SMIS& 属于阴极缓蚀剂。SMIS& 主要增加了 1-M HCl 中的膜电阻和电荷转移电阻,从而起到一定的缓蚀作用。X 射线光电子能谱和能量色散谱仪证明,SMIS&可吸附在 Q235 表面,分子动力学研究表明,SMIS 和 AMP 之间存在一定的协同作用。该研究证实了SMIS与AMP具有良好的协同效应,提高了缓蚀效率,降低了SMIS的合成成本,对协同缓蚀具有一定的指导意义。
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引用次数: 0
Wilhelmy balance—A simple and reliable method for determining immersion angles and surface energies even on non-planar and complex geometries? Wilhelmy 天平--即使在非平面和复杂几何形状上也能确定浸入角和表面能的简单可靠方法?
IF 1.7 4区 化学 Q4 CHEMISTRY, PHYSICAL Pub Date : 2024-01-28 DOI: 10.1002/sia.7287
Marius Behnecke, Eva Berghaus, Alina Wildeis, Eva Brandes, Svea Petersen
The growing significance of surface properties in modern materials, particularly in medical technology, drives the need for accurate characterization techniques. Traditional contact angle measurements face challenges when applied to intricate surfaces like dental implants. Here, tensiometry applying the Wilhelmy plate method has been described in the last decade to offer one solution for the evaluation of complex surface geometries by quantifying apparent contact angles based on wetting forces. This study evaluates a simple setup employing the Wilhelmy balance concept for immersion angle determination. Instead of using a force sensor as in tensiometers, the wetting force is determined via changes in mass signal by means of an analytical balance available in standard laboratories. The force is thus recorded inverse to conventional tensiometry. The approach was validated on diverse geometries and extended to intricate structures, including plasma-treated dental implants. Results were compared to conventional contact angle analysis systems underlining the reliability of the method in characterizing non-planar and complex surfaces. Additionally, the method was successfully extended to the evaluation of surface energies on planar and non-planar surfaces using various solvent sets. However, results evidenced that specimen geometry can influence the measurements to such an extent that immersion contact angles can no longer be calculated due to capillary effects. An outlook suggests further exploration with a wider range of test liquids to enhance accuracy in surface energy determination.
现代材料的表面特性越来越重要,尤其是在医疗技术领域,因此需要精确的表征技术。传统的接触角测量方法在应用于牙科植入物等复杂表面时面临挑战。在过去十年中,应用 Wilhelmy 板法的张力测量法为复杂表面几何形状的评估提供了一种基于润湿力量化表观接触角的解决方案。本研究评估了采用威廉天平概念测定浸入角的简单装置。湿润力不是像拉力计那样使用力传感器,而是通过标准实验室中的分析天平的质量信号变化来确定。因此,力的记录与传统的张力计相反。该方法已在各种几何形状上得到验证,并扩展到复杂结构,包括等离子处理的牙科植入物。结果与传统的接触角分析系统进行了比较,强调了该方法在表征非平面和复杂表面方面的可靠性。此外,该方法还成功扩展到使用各种溶剂组评估平面和非平面表面的表面能量。然而,结果表明,试样的几何形状会影响测量结果,以至于由于毛细管效应而无法计算浸入接触角。展望未来,建议进一步探索更广泛的测试液体,以提高表面能测定的准确性。
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引用次数: 0
Enhancing gamma irradiation resistance by a‐C film treatment on polytetrafluoroethylene (PTFE) surface 通过对聚四氟乙烯(PTFE)表面进行 A-C 薄膜处理增强其抗伽马辐照性能
IF 1.7 4区 化学 Q4 CHEMISTRY, PHYSICAL Pub Date : 2024-01-10 DOI: 10.1002/sia.7285
Liqiang Chai, Pengxiang Ma, Chengyan Jiang, L. Qiao, Peng Wang
Polytetrafluoroethylene (PTFE) solid self‐lubricating materials exhibit inferior tribological properties in the gamma‐irradiated environment. In this paper, amorphous hydrogen‐free carbon (a‐C) film was deposited on the PTFE polymer surface by magnetron sputtering, and the a‐C/PTFE samples were irradiated with gamma ray at a maximum dose of up to 5 MGy. The evolution of the structure and nanomechanical and tribological properties of a‐C/PTFE with different irradiation doses were investigated. The structural analyses reveal that the microstructure of a‐C films irradiated at 5 MGy doses is stable. Due to the covering of the a‐C film, significant cracks appear at the surface of the a‐C/PTFE sample only when the irradiation dose reaches 5 MGy. Before and after irradiation, the nanohardness and Young's modulus of the a‐C/PTFE are significantly higher than those of PTFE. The mechanical properties of PTFE are improved by a‐C film surface treatment. The friction experiments show that the average friction coefficients of both a‐C/PTFE and PTFE remain stable around 0.175 with increasing irradiation dose. When the irradiation dose is within 1 MGy, frictional behaviors occur only on the surface of a‐C films, and the wear rate of a‐C/PTFE is as low as 9.3 × 10−5 mm3/N.m, which is significantly lower than that of PTFE. The method of a‐C film treatment on the PTFE surface can dramatically improve the irradiation resistance of PTFE.
聚四氟乙烯(PTFE)固体自润滑材料在伽马射线辐照环境下的摩擦学性能较差。本文采用磁控溅射法在聚四氟乙烯聚合物表面沉积无定形无氢碳(a-C)薄膜,然后用最大剂量为 5 MGy 的伽马射线辐照 a-C/PTFE 样品。研究了不同辐照剂量下 a-C/PTFE 的结构演变、纳米力学性能和摩擦学性能。结构分析表明,在 5 MGy 剂量下辐照的 a-C 薄膜的微观结构是稳定的。由于 a-C 薄膜的覆盖作用,只有当辐照剂量达到 5 MGy 时,a-C/PTFE 样品的表面才会出现明显的裂纹。在辐照前后,a-C/PTFE 的纳米硬度和杨氏模量都明显高于 PTFE。a-C 薄膜表面处理改善了 PTFE 的机械性能。摩擦实验表明,随着辐照剂量的增加,a-C/PTFE 和 PTFE 的平均摩擦系数稳定在 0.175 左右。当辐照剂量在 1 MGy 以内时,摩擦行为只发生在 a-C 薄膜表面,a-C/PTFE 的磨损率低至 9.3 × 10-5 mm3/N.m,明显低于 PTFE。在聚四氟乙烯表面处理 a-C 薄膜的方法可以显著提高聚四氟乙烯的抗辐照性能。
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引用次数: 0
Importance of standard terminology in surface chemical analysis: ISO 18115-1:2023, general terms and terms used in spectroscopy 标准术语在表面化学分析中的重要性:ISO 18115-1:2023,光谱学中使用的一般术语和术语
IF 1.7 4区 化学 Q4 CHEMISTRY, PHYSICAL Pub Date : 2024-01-09 DOI: 10.1002/sia.7284
Alexander G. Shard, Donald R. Baer, Charles A. Clifford
The International Standard ISO 18115-1 on terminology in surface chemical analysis has been revised with clarifications, modifications, and deletions to more than 70 terms and with the addition of more than 50 terms in response to trends, issues, and needs identified by the surface analysis community. This revision adds terminology and concepts associated with emerging methods such as atom probe tomography, near ambient pressure XPS, and hard X-ray photoelectron spectroscopy. It includes 25 new and revised terms to ensure that the description of resolution is consistent across all surface analysis methods. The 630 terms in the document cover words or phrases used in describing the samples, instruments, and concepts involved in surface chemical analysis. The terms have been collated into subject specific sections to ensure that related terms can be found easily.
国际标准 ISO 18115-1 对表面化学分析术语进行了修订,澄清、修改和删除了 70 多个术语,并根据表面分析界确定的趋势、问题和需求增加了 50 多个术语。本次修订增加了与原子探针层析成像、近环境压力 XPS 和硬 X 射线光电子能谱等新兴方法相关的术语和概念。它包括 25 个新术语和修订术语,以确保所有表面分析方法对分辨率的描述保持一致。文件中的 630 个术语涵盖了用于描述样品、仪器和表面化学分析相关概念的单词或短语。这些术语已按主题分类整理,以确保相关术语易于查找。
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引用次数: 0
Effect of hydrogen on the chemical state, stoichiometry and density of amorphous Al2O3 films grown by thermal atomic layer deposition 氢对热原子层沉积法生长的无定形 Al2O3 薄膜的化学状态、化学计量和密度的影响
IF 1.7 4区 化学 Q4 CHEMISTRY, PHYSICAL Pub Date : 2024-01-07 DOI: 10.1002/sia.7282
Claudia Cancellieri, Simon Gramatte, Olivier Politano, Léo Lapeyre, Fedor Klimashin, Krzysztof Mackosz, Ivo Utke, Zbynek Novotny, Arnold M. Müller, Christof Vockenhuber, Vladyslav Turlo, Lars P. H. Jeurgens
Amorphous oxide thin films grown by thermal atomic layer deposition (ALD) typically contain high impurity concentrations of hydrogen, which affects both chemistry and structure and thereby the functional properties, such as the barrier properties in, for example, microelectronic and photovoltaic devices. This study discloses the effect of H incorporation in amorphous Al2O3 ALD oxide films on the local chemical binding states of Al, O and H, as well as the oxide density and stoichiometry, by a combined analytical approach using elastic recoil detection analysis, Rutherford backscattering spectroscopy and full chemical state analysis by dual-source X-ray photoelectron spectroscopy (XPS)/hard X-ray photoelectron spectroscopy (HAXPES). The experimental findings are compared with crystalline anhydrous α-Al2O3 and hydroxide α-Al (OH)3 reference phases and further supported by molecular dynamic simulations. It is shown that H preferably forms covalent –OH hydroxyl bonds with O in the nearest-neighbour coordination spheres of interstitial Al cations, which affects both the ligand electronic polarizability and the bond length of the randomly interconnected [AlOn] polyhedral building blocks in the amorphous ALD oxide films.
通过热原子层沉积(ALD)技术生长的非晶氧化物薄膜通常含有高浓度的氢杂质,这会影响其化学性质和结构,从而影响其功能特性,例如微电子和光伏设备的阻隔特性。本研究采用弹性反冲探测分析、卢瑟福反向散射光谱和双源 X 射线光电子能谱(XPS)/硬 X 射线光电子能谱(HAXPES)全化学态分析相结合的分析方法,揭示了非晶态 Al2O3 ALD 氧化物薄膜中加入氢对 Al、O 和 H 的局部化学结合态以及氧化物密度和化学计量学的影响。实验结果与结晶无水 α-Al2O3 和氢氧化物 α-Al (OH)3 参考相进行了比较,并得到了分子动力学模拟的进一步支持。实验结果表明,在间隙铝阳离子的近邻配位圈中,H 优先与 O 形成共价 -OH 羟基键,这既影响了配体的电子极化性,也影响了无定形 ALD 氧化物薄膜中随机互连的 [AlOn] 多面体结构单元的键长。
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引用次数: 0
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