Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908750
Ferdi Hizal, N. Rungraeng, S. Jun, Chang‐Hwan Choi
Nanoporous and nanopillared anodic aluminum oxide surfaces in both hydrophilic and hydrophobic surface conditions were engineered to examine for bacterial adhesions (S. aureus and E. coli K-12) under both stagnant and dynamic flow environments. The hydrophobic nanopillared surfaces showed the most pronounced effect to prevent the bacteria adhesions in both stagnant and dynamic flow conditions. It is attributed to the air layer entrapped on the hydrophobic surface due to the roughness-induced superhydrophobicity as well as the minimized contact area of the solid surface to the bacteria due to the pillared surface morphology.
{"title":"Nano-engineered alumina surfaces for prevention of bacteria adhesions","authors":"Ferdi Hizal, N. Rungraeng, S. Jun, Chang‐Hwan Choi","doi":"10.1109/NEMS.2014.6908750","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908750","url":null,"abstract":"Nanoporous and nanopillared anodic aluminum oxide surfaces in both hydrophilic and hydrophobic surface conditions were engineered to examine for bacterial adhesions (S. aureus and E. coli K-12) under both stagnant and dynamic flow environments. The hydrophobic nanopillared surfaces showed the most pronounced effect to prevent the bacteria adhesions in both stagnant and dynamic flow conditions. It is attributed to the air layer entrapped on the hydrophobic surface due to the roughness-induced superhydrophobicity as well as the minimized contact area of the solid surface to the bacteria due to the pillared surface morphology.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"17 1","pages":"17-22"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83579088","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908804
Chuan Chang, Liangxu Lin, Yi-Shiuan Wu, F. Tseng
In this paper, an open-loop reduction system (OLRS) [1] is employed to produce the core-shell Pt (platinum)/Ru (ruthenium) catalysts on the carbon nanotube/carbon fiber supports (CNT/CF) for direct methanol fuel cell (DMFC) application. By adjusting pH value of the ionized reduction environment, Pt4+ can be first converted into Pt2+ to allow partial Ru replacement with Pt by redox transmetalation and produce Pt/Ru core-shell nano structures [2,3]. Methanol oxidation efficiency and carbon monoxide (CO) poisoning tolerance of the prepared core-shell nano catalysts can be greatly enhanced by our developed OLRS compared to conventional reflux system [4].
{"title":"Enhancement of catalytic efficiency by partial replacement of ruthenium with platinum nanoparticles for direct methanol fuel cell","authors":"Chuan Chang, Liangxu Lin, Yi-Shiuan Wu, F. Tseng","doi":"10.1109/NEMS.2014.6908804","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908804","url":null,"abstract":"In this paper, an open-loop reduction system (OLRS) [1] is employed to produce the core-shell Pt (platinum)/Ru (ruthenium) catalysts on the carbon nanotube/carbon fiber supports (CNT/CF) for direct methanol fuel cell (DMFC) application. By adjusting pH value of the ionized reduction environment, Pt4+ can be first converted into Pt2+ to allow partial Ru replacement with Pt by redox transmetalation and produce Pt/Ru core-shell nano structures [2,3]. Methanol oxidation efficiency and carbon monoxide (CO) poisoning tolerance of the prepared core-shell nano catalysts can be greatly enhanced by our developed OLRS compared to conventional reflux system [4].","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"57 1","pages":"260-264"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85509523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908805
Sanghyeon Yoon, Hankeun Lee, A. Fraiwan, C. Dai, Seokheun Choi
We report a micro-sized microbial solar cell (MSC) that can produce sustainable energy through photosynthetic reactions of cyanobacteria, Synechocystis PCC 6803 in the anode. The MSC has 57-μL anode/cathode chambers defined by laser-machined poly(methyl methacrylate) (PMMA) substrates. We obtained a maximum power density of 7.09 nW/cm2 which is one hundred seventy times more power than previously reported MEMS MSCs. The importance of the light intensity was demonstrated by the higher values of generated current during daytimes than those through the nights, indicating light-dependent photosynthetic processes. Considering that sunlight offers an unlimited source of energy, development of self-sustainable MSCs that rely on light as an energy source will become an increasingly important area of research in the future. In accordance with the MSC, we developed a photosynthetic cathode-based microbial fuel cell (MFC) showing that the use of cyanobacteria can be useful as well as efficient and sustainable catalysts for the cathode since they act as oxygenators.
{"title":"A micro-sized microbial solar cell","authors":"Sanghyeon Yoon, Hankeun Lee, A. Fraiwan, C. Dai, Seokheun Choi","doi":"10.1109/NEMS.2014.6908805","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908805","url":null,"abstract":"We report a micro-sized microbial solar cell (MSC) that can produce sustainable energy through photosynthetic reactions of cyanobacteria, Synechocystis PCC 6803 in the anode. The MSC has 57-μL anode/cathode chambers defined by laser-machined poly(methyl methacrylate) (PMMA) substrates. We obtained a maximum power density of 7.09 nW/cm2 which is one hundred seventy times more power than previously reported MEMS MSCs. The importance of the light intensity was demonstrated by the higher values of generated current during daytimes than those through the nights, indicating light-dependent photosynthetic processes. Considering that sunlight offers an unlimited source of energy, development of self-sustainable MSCs that rely on light as an energy source will become an increasingly important area of research in the future. In accordance with the MSC, we developed a photosynthetic cathode-based microbial fuel cell (MFC) showing that the use of cyanobacteria can be useful as well as efficient and sustainable catalysts for the cathode since they act as oxygenators.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"21 1","pages":"265-268"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79911181","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908756
Xuan-Fu Chen, Ju-Nan Kuo
This paper present an available centrifugal process for rapid blood separation and plasma preparation steps on CD microfluidic platform. The new lab-on-CD microstructure capable of directly separating plasma from the whole blood into different reservoirs, and performing equal plasma flow division and decanting plasma are demonstrated and characterized. We propose a CD microfluidic platform, including a microchannel network consisting of a plasma separation microchannel network and a splitter/decantation microchannel network. A series of computational fluid dynamics (CFD) simulations are performed to determine the optimal geometry parameters of the flow division network and the plasma decanted volumes. The experimental results show that 96% separation efficiency is achieved for diluted blood of 6% hematocrit. The optimized flow division networks cause a variation of no more than 0.5 nL in the plasma samples collected from the left and right branches. By manipulating the CD rotation speed, the constant volume of plasma can be decanted into the detection chamber.
{"title":"Blood separation and plasma preparation on a compact disk microfluidic chip","authors":"Xuan-Fu Chen, Ju-Nan Kuo","doi":"10.1109/NEMS.2014.6908756","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908756","url":null,"abstract":"This paper present an available centrifugal process for rapid blood separation and plasma preparation steps on CD microfluidic platform. The new lab-on-CD microstructure capable of directly separating plasma from the whole blood into different reservoirs, and performing equal plasma flow division and decanting plasma are demonstrated and characterized. We propose a CD microfluidic platform, including a microchannel network consisting of a plasma separation microchannel network and a splitter/decantation microchannel network. A series of computational fluid dynamics (CFD) simulations are performed to determine the optimal geometry parameters of the flow division network and the plasma decanted volumes. The experimental results show that 96% separation efficiency is achieved for diluted blood of 6% hematocrit. The optimized flow division networks cause a variation of no more than 0.5 nL in the plasma samples collected from the left and right branches. By manipulating the CD rotation speed, the constant volume of plasma can be decanted into the detection chamber.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"10 1","pages":"47-50"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77126570","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908783
Asif Iqbal, S. Khan, Nafiz Ur Rahman, T. Faraz
Strongly correlated electron devices using Metal Insulator Transition (MIT) Oxides are prospective alternatives along the new generation of high speed devices based on novel mechanisms. Taking the advantages of correlated electrons which are capable of forming a variety of electronic phases, MIT Oxides and Phase Change Materials (PCM) are treated as the frontiers of emergent device research. With the prospect of downsizing devices to the nanoscale regime, benefits over conventional semiconductor devices are attained. Aided by recent advances in fabrication technology, considerable improvements have been achieved to tailor the Metal-Insulator (MI) transition properties of MIT Oxides. In this study, the tailoring of MI transition properties for a particular group of MIT Oxides, namely the transition metal perovskite oxides of RNiO3 family are studied on the epitaxial platform. Finally, antiferromagnetism characteristics and anonymous resistivity inherent within those oxides are studied.
{"title":"Epitaxial growth controlled tailoring of Metal-Insulator (MI) Transition properties of rare earth correlated oxides","authors":"Asif Iqbal, S. Khan, Nafiz Ur Rahman, T. Faraz","doi":"10.1109/NEMS.2014.6908783","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908783","url":null,"abstract":"Strongly correlated electron devices using Metal Insulator Transition (MIT) Oxides are prospective alternatives along the new generation of high speed devices based on novel mechanisms. Taking the advantages of correlated electrons which are capable of forming a variety of electronic phases, MIT Oxides and Phase Change Materials (PCM) are treated as the frontiers of emergent device research. With the prospect of downsizing devices to the nanoscale regime, benefits over conventional semiconductor devices are attained. Aided by recent advances in fabrication technology, considerable improvements have been achieved to tailor the Metal-Insulator (MI) transition properties of MIT Oxides. In this study, the tailoring of MI transition properties for a particular group of MIT Oxides, namely the transition metal perovskite oxides of RNiO3 family are studied on the epitaxial platform. Finally, antiferromagnetism characteristics and anonymous resistivity inherent within those oxides are studied.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"4 1","pages":"168-171"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82451386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908811
D. Kim, K. Kim, J. Shim
In this study, the formation of a toroidal microvortex by optoelectrokinetic effect was numerically simulated using COMSOL v4.2a multiphysics software. AC voltage was applied to the two parallel electrodes in a microchannel to generate temperature gradient in the fluids. In addition to the AC electrothermal effect, local heating by a laser illumination was also considered. Numerical simulations were conducted for dielectric fluids. The toroidal microvortex induced by the optoelectrokinetic effect shows that two counter-rotating vortices are produced above the bottom electrodes. Fluid motions in the middle of bottom boundary are cancelled out by flows in opposite directions and consequently producing stagnation. It is expected that micro/nano particles are deposited in bottom electrode. Local heating enhanced the intensity of microvortex substantially due to the additional temperature gradient, it was confirmed that the AC electrothermal effect with laser illumination can be used for rapid concentration of micro/nano particles in the spot area.
{"title":"Numerical simulation on the formation of a toroidal microvortex by the optoelectrokinetic effect","authors":"D. Kim, K. Kim, J. Shim","doi":"10.1109/NEMS.2014.6908811","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908811","url":null,"abstract":"In this study, the formation of a toroidal microvortex by optoelectrokinetic effect was numerically simulated using COMSOL v4.2a multiphysics software. AC voltage was applied to the two parallel electrodes in a microchannel to generate temperature gradient in the fluids. In addition to the AC electrothermal effect, local heating by a laser illumination was also considered. Numerical simulations were conducted for dielectric fluids. The toroidal microvortex induced by the optoelectrokinetic effect shows that two counter-rotating vortices are produced above the bottom electrodes. Fluid motions in the middle of bottom boundary are cancelled out by flows in opposite directions and consequently producing stagnation. It is expected that micro/nano particles are deposited in bottom electrode. Local heating enhanced the intensity of microvortex substantially due to the additional temperature gradient, it was confirmed that the AC electrothermal effect with laser illumination can be used for rapid concentration of micro/nano particles in the spot area.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"17 1","pages":"294-297"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87856314","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908796
Jin You, Hyowon Moon, B. Lee, Ju-young Jin, Z. Chang, J. F. Suh, Jinseok Kim, Jungyul Park, Y. Hwang
In this study, we demonstrate that drug treatments change cardiomyocyte contractile force in vitro. Contractile force was determined by bending deflection of the cantilever end. We quantified the effect of Digoxin, Isoproterenol, and BayK8644, drugs that increase contractile force, on cardiomyocyte contractile forces when grown on the grooved cantilever. We also investigated the effect of Verapamil, which decreases contractile force. We applied Digoxin, Isoproterenol, and BayK8644 on day 8, and Verapamil on day 5. Digoxin, Isoproterenol, and BayK8644 increased cardiomyocyte contractile forces by 19.31%, 9.75%, and 23.81%, respectively. Verapamil decreased the contractile force by 48.06%. In summary, we monitored bending movement with cantilever sensors and concluded that cardiomyocyte contractile force changes in response to various drug treatments.
{"title":"Cardiomyocyte contractile force changes in response to chemical environments","authors":"Jin You, Hyowon Moon, B. Lee, Ju-young Jin, Z. Chang, J. F. Suh, Jinseok Kim, Jungyul Park, Y. Hwang","doi":"10.1109/NEMS.2014.6908796","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908796","url":null,"abstract":"In this study, we demonstrate that drug treatments change cardiomyocyte contractile force in vitro. Contractile force was determined by bending deflection of the cantilever end. We quantified the effect of Digoxin, Isoproterenol, and BayK8644, drugs that increase contractile force, on cardiomyocyte contractile forces when grown on the grooved cantilever. We also investigated the effect of Verapamil, which decreases contractile force. We applied Digoxin, Isoproterenol, and BayK8644 on day 8, and Verapamil on day 5. Digoxin, Isoproterenol, and BayK8644 increased cardiomyocyte contractile forces by 19.31%, 9.75%, and 23.81%, respectively. Verapamil decreased the contractile force by 48.06%. In summary, we monitored bending movement with cantilever sensors and concluded that cardiomyocyte contractile force changes in response to various drug treatments.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"18 1","pages":"225-228"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83702961","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908800
Z. Luo, Deyong Chen, Junbo Wang
This paper presents a resonant pressure sensor based on SOI wafer technology. In this device, pressure under measurement causes a deflection of a pressure-sensitive silicon square diaphragm, which is further translated to stress build up in “H” type doubly-clamped micro resonant beams, leading to resonant frequency shift. In device fabrication, through-glass vias and silicon-to-glass anodic bonding technologies were utilized. A high-strength hermetic sealing was then achieved after anodic bonding, with the resonators working in vacuum. Experimental results recorded a device resolution of 10pa, with the nonlinearity of 0.03% when pressure varying from 10kPa to 100kPa.
{"title":"Resonant pressure sensor with through-glass electrical interconnect based on SOI wafer technology","authors":"Z. Luo, Deyong Chen, Junbo Wang","doi":"10.1109/NEMS.2014.6908800","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908800","url":null,"abstract":"This paper presents a resonant pressure sensor based on SOI wafer technology. In this device, pressure under measurement causes a deflection of a pressure-sensitive silicon square diaphragm, which is further translated to stress build up in “H” type doubly-clamped micro resonant beams, leading to resonant frequency shift. In device fabrication, through-glass vias and silicon-to-glass anodic bonding technologies were utilized. A high-strength hermetic sealing was then achieved after anodic bonding, with the resonators working in vacuum. Experimental results recorded a device resolution of 10pa, with the nonlinearity of 0.03% when pressure varying from 10kPa to 100kPa.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"14 1","pages":"243-246"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83874197","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908765
Jiaqi Wang, K. Aw, Rajnish N. Sharma
With controlled drug delivery system, appropriate and effective amount of drug can be precisely delivered at appropriate time by a micropump. This is achieved with the use of diffuser and nozzle elements that eliminate the need for valve mechanism simplifying the micropump design and fabrication. A preliminary valveless micropump prototype has been demonstrated and the systematic optimization to improve the performance at low Reynolds number (Re <; 100), typical in drug delivery system, is presented here.
{"title":"Optimization of valveless micropump for drug delivery","authors":"Jiaqi Wang, K. Aw, Rajnish N. Sharma","doi":"10.1109/NEMS.2014.6908765","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908765","url":null,"abstract":"With controlled drug delivery system, appropriate and effective amount of drug can be precisely delivered at appropriate time by a micropump. This is achieved with the use of diffuser and nozzle elements that eliminate the need for valve mechanism simplifying the micropump design and fabrication. A preliminary valveless micropump prototype has been demonstrated and the systematic optimization to improve the performance at low Reynolds number (Re <; 100), typical in drug delivery system, is presented here.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"48 9 1","pages":"86-88"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82728890","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908788
Che-Hsin Lin, L. Fu, Chia-Yen Lee
A MEMS-based humidity sensor is proposed comprising thiol-coated gold nanoparticles (AuNPs) deposited on a glass substrate with aluminum interdigitated electrodes (IDEs). In the proposed device, the humidity is measured by monitoring the change in the device resistance as the water molecules are absorbed by the AuNPs. A highly sensitive sensing performance is obtained as a result of the large surface area of the AuNPs and the hydrophilic nature of the thiol coating. The experimental results show that the sensor has a time response of 10 s when the humidity is changed abruptly from 30%R.H. to 80%R.H. and a recovery time of 5 s when the humidity is restored to 30%R.H. In addition, it is shown that the sensor has a sensitivity of 2.83 kΩ/%R.H. over the humidity range of 20 ~ 90%R.H. Finally, the sensor is shown to have good reliability (i.e., ±1.2%R.H.) over an extended period of 72 h.
{"title":"MEMS-based humidity sensor based on thiol-coated gold nanoparticles","authors":"Che-Hsin Lin, L. Fu, Chia-Yen Lee","doi":"10.1109/NEMS.2014.6908788","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908788","url":null,"abstract":"A MEMS-based humidity sensor is proposed comprising thiol-coated gold nanoparticles (AuNPs) deposited on a glass substrate with aluminum interdigitated electrodes (IDEs). In the proposed device, the humidity is measured by monitoring the change in the device resistance as the water molecules are absorbed by the AuNPs. A highly sensitive sensing performance is obtained as a result of the large surface area of the AuNPs and the hydrophilic nature of the thiol coating. The experimental results show that the sensor has a time response of 10 s when the humidity is changed abruptly from 30%R.H. to 80%R.H. and a recovery time of 5 s when the humidity is restored to 30%R.H. In addition, it is shown that the sensor has a sensitivity of 2.83 kΩ/%R.H. over the humidity range of 20 ~ 90%R.H. Finally, the sensor is shown to have good reliability (i.e., ±1.2%R.H.) over an extended period of 72 h.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"191-194"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82827959","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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