Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908812
Ho-Cheng Lee, Che-Hsin Lin
It is challenging to separate the immiscible liquid of low surface tension from water using the microfluidic device. This study presents a microfluidic chip composed of a T-junction, reaction channel and a novel liquid-liquid phase separator for continuously synthesizing fine gold nanoparticles in the organic solvent of toluene. The designed glass chip is used to separate two immiscible liquids via with the microfluidic channels of different depths. The surface tension and the capillary force differences are used to separate the two immiscible fluids. The stable segmented flow is initially produced by the T-junction and the gold salt is then reduced due at the reaction channel. The toluene with reduced AuNPs is finally collected via the designed separator downstream. Results show that the separator is capable for separating water (surface tension = 72.75 mN/m) and toluene (surface tension = 30.9 mN/m) with 92% separation efficiency. Results indicate that the gold nanoparticle (AuNPs) synthesized in the microdevice exhibits a narrower size distribution and better dispersion, comparing to the typical batch synthesis process. This study develops an efficient microfluidic system for stable chemical reaction and liquid-liquid phase separation in the microchannel.
{"title":"Liquid-liquid phase separator for synthesizing gold nanoparticles in toluene","authors":"Ho-Cheng Lee, Che-Hsin Lin","doi":"10.1109/NEMS.2014.6908812","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908812","url":null,"abstract":"It is challenging to separate the immiscible liquid of low surface tension from water using the microfluidic device. This study presents a microfluidic chip composed of a T-junction, reaction channel and a novel liquid-liquid phase separator for continuously synthesizing fine gold nanoparticles in the organic solvent of toluene. The designed glass chip is used to separate two immiscible liquids via with the microfluidic channels of different depths. The surface tension and the capillary force differences are used to separate the two immiscible fluids. The stable segmented flow is initially produced by the T-junction and the gold salt is then reduced due at the reaction channel. The toluene with reduced AuNPs is finally collected via the designed separator downstream. Results show that the separator is capable for separating water (surface tension = 72.75 mN/m) and toluene (surface tension = 30.9 mN/m) with 92% separation efficiency. Results indicate that the gold nanoparticle (AuNPs) synthesized in the microdevice exhibits a narrower size distribution and better dispersion, comparing to the typical batch synthesis process. This study develops an efficient microfluidic system for stable chemical reaction and liquid-liquid phase separation in the microchannel.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"23 1","pages":"298-301"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85287650","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908807
S. Zimmermann, S. A. Barragan, S. Fatikow
This paper presents a nanorobotic platform tailored for rapid prototyping of graphene based devices. Applying the capabilities of this platform, a nanorobotic strategy is proposed that enables the identification, electrical characterization and integration of graphene into device structures without using any time-consuming lithography procedures. In this way, graphene based devices can be fabricated and classified within few hours, significantly reducing the effort and consequently the costs of device prototyping. As an example of this strategy, graphene flakes are characterized and subsequently transferred onto trench structures resulting in partially suspended areas suitable to study graphene based nanoelectromechanical systems.
{"title":"Nanorobotic processing of graphene for rapid device prototyping","authors":"S. Zimmermann, S. A. Barragan, S. Fatikow","doi":"10.1109/NEMS.2014.6908807","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908807","url":null,"abstract":"This paper presents a nanorobotic platform tailored for rapid prototyping of graphene based devices. Applying the capabilities of this platform, a nanorobotic strategy is proposed that enables the identification, electrical characterization and integration of graphene into device structures without using any time-consuming lithography procedures. In this way, graphene based devices can be fabricated and classified within few hours, significantly reducing the effort and consequently the costs of device prototyping. As an example of this strategy, graphene flakes are characterized and subsequently transferred onto trench structures resulting in partially suspended areas suitable to study graphene based nanoelectromechanical systems.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"32 1","pages":"275-280"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80383033","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908749
C. Glacer, A. Dehé, D. Tumpold, R. Laur
In this paper a new way of increasing the enclosed air volume between the stator and the membrane of an electrostatic loudspeaker is introduced. Instead of using a thicker sacrificial layer, a stress-induced self-raising of the stator is utilized. Corrugation grooves in combination with highly tensile silicon nitride rings are causing a deflection of the stator after the release etch. For a stator diameter of 1 mm an out of plane deflection of up to 59 μm could be measured. On the electrical side, a pull-in voltage between 4 V and 16 V for the membrane and 27 V to 67 V for different stator variants was detected. In the free-field, a sound pressure level of 50 dB SPL at 10 kHz in 10 cm distance was measured for a small array. Variations of design and layout as well as technology parameters were varied to determine the ideal system with regard to maximum deflection, displaced volume and mechanical stability.
本文介绍了一种增加静电扬声器定子与膜间封闭风量的新方法。代替使用较厚的牺牲层，利用应力诱导的定子自升。波纹槽与高强度氮化硅环相结合，在释放蚀刻后引起定子的偏转。对于直径为1mm的定子，可以测量到最大59 μm的面外偏转。在电气方面，检测到膜的拉入电压在4 V到16 V之间，不同定子变体的拉入电压在27 V到67 V之间。在自由场中，测量了一个小型阵列在10 cm距离上的声压级，声压级为50 dB SPL。设计和布局的变化以及技术参数的变化，以确定关于最大挠度，位移体积和机械稳定性的理想系统。
{"title":"Silicon microspeaker with out-of-plane displacement","authors":"C. Glacer, A. Dehé, D. Tumpold, R. Laur","doi":"10.1109/NEMS.2014.6908749","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908749","url":null,"abstract":"In this paper a new way of increasing the enclosed air volume between the stator and the membrane of an electrostatic loudspeaker is introduced. Instead of using a thicker sacrificial layer, a stress-induced self-raising of the stator is utilized. Corrugation grooves in combination with highly tensile silicon nitride rings are causing a deflection of the stator after the release etch. For a stator diameter of 1 mm an out of plane deflection of up to 59 μm could be measured. On the electrical side, a pull-in voltage between 4 V and 16 V for the membrane and 27 V to 67 V for different stator variants was detected. In the free-field, a sound pressure level of 50 dB SPL at 10 kHz in 10 cm distance was measured for a small array. Variations of design and layout as well as technology parameters were varied to determine the ideal system with regard to maximum deflection, displaced volume and mechanical stability.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"12-16"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81041723","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908808
Chi-Fan Chen, Kuo-Wei Chang, Ting-Ru Yueh, Hong-Yuan Huang, Chen-Shien Liu
Nowadays, infertility is one of the major problems for many of married couples. Thus, there are a wide range of researches on infertility where the in vitro fertilization is the best known. However, the conventional approach to fertilize embryo requires more on manual operation times that may causes some damage of embryos. To overcome the drawback of conventional method, we present a microfluidic chip to trap cells and mimic a uterus in vitro by co-culturing stromal cells and mouse embryos. By dynamic resistance design, mouse embryos can be trapped individually. In this way, we can grow them by co-culturing with stromal cells in an open system with constant medium supply, known as dynamic perfusion. The novel method can reduce the manual operation and the possibility of damage to embryos. Also, the chip can track and manage individual embryos easily.
{"title":"A microfluidic device for automatic embryo trapping and coculture with stromal cells in vitro","authors":"Chi-Fan Chen, Kuo-Wei Chang, Ting-Ru Yueh, Hong-Yuan Huang, Chen-Shien Liu","doi":"10.1109/NEMS.2014.6908808","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908808","url":null,"abstract":"Nowadays, infertility is one of the major problems for many of married couples. Thus, there are a wide range of researches on infertility where the in vitro fertilization is the best known. However, the conventional approach to fertilize embryo requires more on manual operation times that may causes some damage of embryos. To overcome the drawback of conventional method, we present a microfluidic chip to trap cells and mimic a uterus in vitro by co-culturing stromal cells and mouse embryos. By dynamic resistance design, mouse embryos can be trapped individually. In this way, we can grow them by co-culturing with stromal cells in an open system with constant medium supply, known as dynamic perfusion. The novel method can reduce the manual operation and the possibility of damage to embryos. Also, the chip can track and manage individual embryos easily.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"110 1","pages":"281-284"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89327577","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908772
Y. J. Chang, C. H. Chang, C. Ho, J. Hsu, C. Kuo
Nano-structuring using laser direct writing technology has shown a great potential for industrial applications. A novel application of water droplets to this technology is proposed in this paper. With a hydrophobic layer and a controlled substrate temperature, a layer of randomly distributed water droplets with a high contact angle is formed on the substrate. These liquid droplets can be used as lenses to enhance the laser intensity at the bottom of the droplets. As a result, nanoscale holes can be fabricated on the substrate by controlling the laser energy density. We successfully fabricate holes with a diameter of 600nm at a substrate temperature of 12°C and a power density of 1.2×108 mW/cm2 in our experiments.
{"title":"Laser direct nano-structuring assisted by water droplets","authors":"Y. J. Chang, C. H. Chang, C. Ho, J. Hsu, C. Kuo","doi":"10.1109/NEMS.2014.6908772","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908772","url":null,"abstract":"Nano-structuring using laser direct writing technology has shown a great potential for industrial applications. A novel application of water droplets to this technology is proposed in this paper. With a hydrophobic layer and a controlled substrate temperature, a layer of randomly distributed water droplets with a high contact angle is formed on the substrate. These liquid droplets can be used as lenses to enhance the laser intensity at the bottom of the droplets. As a result, nanoscale holes can be fabricated on the substrate by controlling the laser energy density. We successfully fabricate holes with a diameter of 600nm at a substrate temperature of 12°C and a power density of 1.2×108 mW/cm2 in our experiments.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"6 1","pages":"117-120"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88082390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908861
D. Zhao, Xian Huang, Jun He, Li Zhang, Peng Liu, Fang Yang, Dacheng Zhang
In this work, compatible CMOS-MEMS process with surface micromachining is investigated. Surface micromachining method for cantilever fabrication has been merged with conventional CMOS process, and release of MEMS structure is conducted after CMOS process. We designed polysilicon MEMS structures as well as CMOS devices and circuits on a monolithic sensor chip for the investigation of the influence of stress induced by non-adequate post-CMOS annealing. The impact of step coverage and the releasing process on both the MEMS and CMOS components are also discussed.
{"title":"Study on compatible CMOS-MEMS process with surface micromachining for the application of monolithic integration","authors":"D. Zhao, Xian Huang, Jun He, Li Zhang, Peng Liu, Fang Yang, Dacheng Zhang","doi":"10.1109/NEMS.2014.6908861","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908861","url":null,"abstract":"In this work, compatible CMOS-MEMS process with surface micromachining is investigated. Surface micromachining method for cantilever fabrication has been merged with conventional CMOS process, and release of MEMS structure is conducted after CMOS process. We designed polysilicon MEMS structures as well as CMOS devices and circuits on a monolithic sensor chip for the investigation of the influence of stress induced by non-adequate post-CMOS annealing. The impact of step coverage and the releasing process on both the MEMS and CMOS components are also discussed.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"513-516"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83477513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908836
Song-Bin Huang, Yang Zhao, Deyong Chen, Yana Luo, Hsin-Chieh Lee, T. Chiu, Junbo Wang, Jing Chen, Min-Hsien Wu
This study reports a microfluidic platform for clogging-free electrical property analysis of cancer cells. A pneumatically-driven membrane-based active valve was integrated in this platform to unblock clogging events of constriction microchannels where pneumatic pressures were used to tune the deformation of a polydimethylsiloxan (PDMS) membrane serving as one wall of the constriction microchannel. The proposed platform was first used to unblock trapped polystyrene beads (30 μm in diameter) at the entrance of constriction microchannels and then the characterization of the cellular electrical properties of lung cancer cells was successfully demonstrated. Results showed that the measured cytoplasm conductivity (0.74±0.20 S/m) and specific membrane capacitance (2.17±0.58 μF/cm2) of cells were consistent with the results from the previous publications (0.73±0.17 S/m, and 2.00±0.60 μF/cm2, respectively). Overall, this study has presented a microfluidic platform for single cell analysis with an enhanced function for unblocking cell aggregates at the entrance of microchannels, which may function as a platform technology enabling cancer-cell electrical property characterization in the near future.
{"title":"A clogging-free microfluidic platform for size independent single cancer cellular electrical property characterization","authors":"Song-Bin Huang, Yang Zhao, Deyong Chen, Yana Luo, Hsin-Chieh Lee, T. Chiu, Junbo Wang, Jing Chen, Min-Hsien Wu","doi":"10.1109/NEMS.2014.6908836","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908836","url":null,"abstract":"This study reports a microfluidic platform for clogging-free electrical property analysis of cancer cells. A pneumatically-driven membrane-based active valve was integrated in this platform to unblock clogging events of constriction microchannels where pneumatic pressures were used to tune the deformation of a polydimethylsiloxan (PDMS) membrane serving as one wall of the constriction microchannel. The proposed platform was first used to unblock trapped polystyrene beads (30 μm in diameter) at the entrance of constriction microchannels and then the characterization of the cellular electrical properties of lung cancer cells was successfully demonstrated. Results showed that the measured cytoplasm conductivity (0.74±0.20 S/m) and specific membrane capacitance (2.17±0.58 μF/cm2) of cells were consistent with the results from the previous publications (0.73±0.17 S/m, and 2.00±0.60 μF/cm2, respectively). Overall, this study has presented a microfluidic platform for single cell analysis with an enhanced function for unblocking cell aggregates at the entrance of microchannels, which may function as a platform technology enabling cancer-cell electrical property characterization in the near future.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"95 1","pages":"398-402"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82683542","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908782
A. Liao, Wan-Chun Ma, H. Chuang, C. Yeh, Chih-Chung Huang
The application of transdermal delivery to a wider range of drugs is limited due to the significant barrier to penetration across the skin which is associated with the stratum corneum layer of the epidermis. In previous study in the literature, the feasibility and effects of the ultrasound (US) contrast agent, microbubbles (MBs) as the penetration enhancers for transdermal delivery in vivo were firstly demonstrated. In this study, the penetration depth, concentration, and efficiency of transdermal α-Arbutin delivery after MBs treatment with US in mice were demonstrated for 4 weeks. The penetration of α-arbutin on skin was enhanced by using ultrasound energy and MBs either for in vitro or for in vivo experiments. Experiment parameters were randomly divided into four groups (n=5 animals per group): (1) only penetrating α-Arbutin (C); (2) US combines with penetrating α-arbutin (U) (3) US combines with MBs contrast agent and penetrating α-arbutin (UB); (4) US combines with diluted MBs and penetrating α-arbutin (UBD). According to the results, the penetration depth of agarose phantom and pigskin of UBD group increase 47% and 84%, respectively. The in vitro skin permeation of 2% α-arbutin, UBD group was 83% greater than control group after 3 hour of permeation study. For in vivo study, the whitening effect (luminosity index) of mice skin in UBD group significantly increase 25% in one week, 34% in two weeks and tends towards stability in three weeks (37%) in C57BL/6J mice over a 4-week experimental period. Our results investigated that the treatments of ultrasound and MBs can increase skin permeability, enhance α-arbutin delivery to inhibit melanogenesis and not damage the skin in mice.
{"title":"The efficiency of transdermal α-Arbutin delivery after albumin microbubbles treatment with ultrasound in mice","authors":"A. Liao, Wan-Chun Ma, H. Chuang, C. Yeh, Chih-Chung Huang","doi":"10.1109/NEMS.2014.6908782","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908782","url":null,"abstract":"The application of transdermal delivery to a wider range of drugs is limited due to the significant barrier to penetration across the skin which is associated with the stratum corneum layer of the epidermis. In previous study in the literature, the feasibility and effects of the ultrasound (US) contrast agent, microbubbles (MBs) as the penetration enhancers for transdermal delivery in vivo were firstly demonstrated. In this study, the penetration depth, concentration, and efficiency of transdermal α-Arbutin delivery after MBs treatment with US in mice were demonstrated for 4 weeks. The penetration of α-arbutin on skin was enhanced by using ultrasound energy and MBs either for in vitro or for in vivo experiments. Experiment parameters were randomly divided into four groups (n=5 animals per group): (1) only penetrating α-Arbutin (C); (2) US combines with penetrating α-arbutin (U) (3) US combines with MBs contrast agent and penetrating α-arbutin (UB); (4) US combines with diluted MBs and penetrating α-arbutin (UBD). According to the results, the penetration depth of agarose phantom and pigskin of UBD group increase 47% and 84%, respectively. The in vitro skin permeation of 2% α-arbutin, UBD group was 83% greater than control group after 3 hour of permeation study. For in vivo study, the whitening effect (luminosity index) of mice skin in UBD group significantly increase 25% in one week, 34% in two weeks and tends towards stability in three weeks (37%) in C57BL/6J mice over a 4-week experimental period. Our results investigated that the treatments of ultrasound and MBs can increase skin permeability, enhance α-arbutin delivery to inhibit melanogenesis and not damage the skin in mice.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"9 1","pages":"163-167"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88737205","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908791
Xiaodong Sun, W. Yuan, Sen Ren, Jinjun Deng, C. Jiang
This paper presents a low-noise CMOS interface circuit of the resonant pressure sensor. A high-frequency carrier is employed to extract the small vibration signal of the resonator and suppress the low-frequency coupling signal. A differential detection circuit is implemented to suppress common mode noise. Sensor chip is packaged together with the interface ASIC, reducing the coupling capacitor of the resonator and the sensing electrode. The AS IC is fabricated in a 0.18 um CMOS process and the sensor chip is fabricated using a commercially available silicon-on-insulator wafer. The test result shows that the resonant pressure sensor has a nonlinearity of 0.045%FS, a hysteresis error of 0.14%FS, and a repeatability error of 0.18%FS.
本文提出了一种低噪声的CMOS谐振压力传感器接口电路。利用高频载波提取谐振腔的小振动信号，抑制低频耦合信号。差分检测电路用于抑制共模噪声。传感器芯片与接口专用集成电路封装在一起，减少了谐振器与传感电极的耦合电容。AS IC采用0.18 um CMOS工艺制造，传感器芯片采用市售的绝缘体上硅晶圆制造。测试结果表明，谐振式压力传感器的非线性为0.045%FS，滞后误差为0.14%FS，重复性误差为0.18%FS。
{"title":"A low-noise CMOS interface circuit for resonant pressure sensor","authors":"Xiaodong Sun, W. Yuan, Sen Ren, Jinjun Deng, C. Jiang","doi":"10.1109/NEMS.2014.6908791","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908791","url":null,"abstract":"This paper presents a low-noise CMOS interface circuit of the resonant pressure sensor. A high-frequency carrier is employed to extract the small vibration signal of the resonator and suppress the low-frequency coupling signal. A differential detection circuit is implemented to suppress common mode noise. Sensor chip is packaged together with the interface ASIC, reducing the coupling capacitor of the resonator and the sensing electrode. The AS IC is fabricated in a 0.18 um CMOS process and the sensor chip is fabricated using a commercially available silicon-on-insulator wafer. The test result shows that the resonant pressure sensor has a nonlinearity of 0.045%FS, a hysteresis error of 0.14%FS, and a repeatability error of 0.18%FS.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"6 1","pages":"204-207"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73295207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908834
Kunal Kashyap, Amarendra Kumar, Chung-Yao Yang, M. T. Hou, J. Yeh
Silicon nanostructures are extensively being researched for many different applications for industries. Here we present two different types of nanostructures, silicon nanoplates and nanoholes fabricated by electroless metal assisted wet etching for enhancing the bending strength by ~3.7 fold and ~6 fold respectively as compared to polished silicon samples which emphasize the dependence of bending strength on nanostructure morphologies. Roughness at the nanostructure bottom cause stress concentration to increase which degrades the bending strength. Moreover, this technology can open a pathway of flexible silicon substrates for flexible and bendable electronics.
{"title":"Silicon substrate strength enhancement depending on nanostructure morphology","authors":"Kunal Kashyap, Amarendra Kumar, Chung-Yao Yang, M. T. Hou, J. Yeh","doi":"10.1109/NEMS.2014.6908834","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908834","url":null,"abstract":"Silicon nanostructures are extensively being researched for many different applications for industries. Here we present two different types of nanostructures, silicon nanoplates and nanoholes fabricated by electroless metal assisted wet etching for enhancing the bending strength by ~3.7 fold and ~6 fold respectively as compared to polished silicon samples which emphasize the dependence of bending strength on nanostructure morphologies. Roughness at the nanostructure bottom cause stress concentration to increase which degrades the bending strength. Moreover, this technology can open a pathway of flexible silicon substrates for flexible and bendable electronics.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"13 1","pages":"390-393"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77263708","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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