Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908880
S. A. M. Lajimi, G. Heppler, E. Abdel-Rahman
For a new type of a MEMS gyroscope made of a cantilever beam and an end-rigid-body, the reduced-order (discretized) model is obtained by using the method of assumed modes. The discretized model's static behavior is verified by comparing with the stationary partial differential governing equations. The free dynamics of the system are studied under a constant input voltage. The gyroscopic natural and pseudo-natural frequencies of the system are obtained. To operate the gyroscope in the frequency-modulation mode, the input angular rate is computed in analytical and numerical form.
{"title":"The application of a new beam-rigid body MEMS gyroscope in the frequency-modulation mode","authors":"S. A. M. Lajimi, G. Heppler, E. Abdel-Rahman","doi":"10.1109/NEMS.2014.6908880","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908880","url":null,"abstract":"For a new type of a MEMS gyroscope made of a cantilever beam and an end-rigid-body, the reduced-order (discretized) model is obtained by using the method of assumed modes. The discretized model's static behavior is verified by comparing with the stationary partial differential governing equations. The free dynamics of the system are studied under a constant input voltage. The gyroscopic natural and pseudo-natural frequencies of the system are obtained. To operate the gyroscope in the frequency-modulation mode, the input angular rate is computed in analytical and numerical form.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"47 1","pages":"586-591"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80872388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908896
H. L. The, N. Tran-Minh, H. Le-Thanh, F. Karlsen
In this paper, we propose a novel passive micromixer structure for high mixing efficiency based on the combination of multimixing principles. With a special structure, our proposed micromixer can create vortices, transversal flows and chaotic advections to provide high mixing efficiency event at low Reynolds number. Moreover, two narrow slits at two ends of each mixing unit remarkably reduce pressure drop, making it easy to be built into micro-devices. We conduct intensive simulation to evaluate the performance of our proposed micromixer by numerically solving the governing Navier-Stokes equation and convection-diffusion equation using COMSOL Multiphysics package. The simulation results indicate that our proposed micromixer may achieve stable mixing efficiency of 80% or above for a wide Reynolds number range from 0.5 to 100. Especially, at Reynolds number (Re) > 30, mixing efficiency is less dependent on Reynolds number. The mixing efficiency of our micromixer is two times higher than mixing efficiency of micromixer based on unbalanced splits and collisions of fluid at the same mixing channel length of 5mm. At Re = 30, our proposed micromixer has high mixing efficiency of 85% with moderate pressure drop ΔP = 12,600Pa.
{"title":"A novel micromixer with multimixing mechanisms for high mixing efficiency at low Reynolds number","authors":"H. L. The, N. Tran-Minh, H. Le-Thanh, F. Karlsen","doi":"10.1109/NEMS.2014.6908896","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908896","url":null,"abstract":"In this paper, we propose a novel passive micromixer structure for high mixing efficiency based on the combination of multimixing principles. With a special structure, our proposed micromixer can create vortices, transversal flows and chaotic advections to provide high mixing efficiency event at low Reynolds number. Moreover, two narrow slits at two ends of each mixing unit remarkably reduce pressure drop, making it easy to be built into micro-devices. We conduct intensive simulation to evaluate the performance of our proposed micromixer by numerically solving the governing Navier-Stokes equation and convection-diffusion equation using COMSOL Multiphysics package. The simulation results indicate that our proposed micromixer may achieve stable mixing efficiency of 80% or above for a wide Reynolds number range from 0.5 to 100. Especially, at Reynolds number (Re) > 30, mixing efficiency is less dependent on Reynolds number. The mixing efficiency of our micromixer is two times higher than mixing efficiency of micromixer based on unbalanced splits and collisions of fluid at the same mixing channel length of 5mm. At Re = 30, our proposed micromixer has high mixing efficiency of 85% with moderate pressure drop ΔP = 12,600Pa.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"98 1","pages":"651-654"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80910491","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908791
Xiaodong Sun, W. Yuan, Sen Ren, Jinjun Deng, C. Jiang
This paper presents a low-noise CMOS interface circuit of the resonant pressure sensor. A high-frequency carrier is employed to extract the small vibration signal of the resonator and suppress the low-frequency coupling signal. A differential detection circuit is implemented to suppress common mode noise. Sensor chip is packaged together with the interface ASIC, reducing the coupling capacitor of the resonator and the sensing electrode. The AS IC is fabricated in a 0.18 um CMOS process and the sensor chip is fabricated using a commercially available silicon-on-insulator wafer. The test result shows that the resonant pressure sensor has a nonlinearity of 0.045%FS, a hysteresis error of 0.14%FS, and a repeatability error of 0.18%FS.
本文提出了一种低噪声的CMOS谐振压力传感器接口电路。利用高频载波提取谐振腔的小振动信号，抑制低频耦合信号。差分检测电路用于抑制共模噪声。传感器芯片与接口专用集成电路封装在一起，减少了谐振器与传感电极的耦合电容。AS IC采用0.18 um CMOS工艺制造，传感器芯片采用市售的绝缘体上硅晶圆制造。测试结果表明，谐振式压力传感器的非线性为0.045%FS，滞后误差为0.14%FS，重复性误差为0.18%FS。
{"title":"A low-noise CMOS interface circuit for resonant pressure sensor","authors":"Xiaodong Sun, W. Yuan, Sen Ren, Jinjun Deng, C. Jiang","doi":"10.1109/NEMS.2014.6908791","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908791","url":null,"abstract":"This paper presents a low-noise CMOS interface circuit of the resonant pressure sensor. A high-frequency carrier is employed to extract the small vibration signal of the resonator and suppress the low-frequency coupling signal. A differential detection circuit is implemented to suppress common mode noise. Sensor chip is packaged together with the interface ASIC, reducing the coupling capacitor of the resonator and the sensing electrode. The AS IC is fabricated in a 0.18 um CMOS process and the sensor chip is fabricated using a commercially available silicon-on-insulator wafer. The test result shows that the resonant pressure sensor has a nonlinearity of 0.045%FS, a hysteresis error of 0.14%FS, and a repeatability error of 0.18%FS.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"6 1","pages":"204-207"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73295207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908779
K. Riaz, S. Leung, S. Tripathi, Gursimran Singh Sethi, H. Shagoshtasbi, Z. Fan, Y.-K. Lee
Micro electroporation (EP) devices with high efficiency and cell viability are useful for various biomedical applications, such as drug delivery and screening. However, these devices usually have low reliability due to undesirable electrochemical reactions. In this study, an Aluminum Nano-Spike EP (ANS-EP) chip was fabricated using nano-imprint lithography, electrochemical anodization and MEMS technology. The fabricated device was characterized using cervical cancer cell line (HeLa cells). The EP efficiency and cell viability as functions of electric pulse amplitude and duration were measured using digital fluorescent microscopy with Propidium Iodide (PI) dye. Numerical simulations of electric field strength indicated enhanced localized electric field at the tip due to high aspect ratio of nano-spikes. Systematic experiments revealed EP can be achieved with high efficiency and cell viability using ANS-EP chips without bubble generation at the critical applied voltage of 2.5 V, much smaller than the micro and conventional electroporators.
{"title":"An Aluminum Nano-Spike electroporation chip for low voltage delivery of molecules to cancer cells","authors":"K. Riaz, S. Leung, S. Tripathi, Gursimran Singh Sethi, H. Shagoshtasbi, Z. Fan, Y.-K. Lee","doi":"10.1109/NEMS.2014.6908779","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908779","url":null,"abstract":"Micro electroporation (EP) devices with high efficiency and cell viability are useful for various biomedical applications, such as drug delivery and screening. However, these devices usually have low reliability due to undesirable electrochemical reactions. In this study, an Aluminum Nano-Spike EP (ANS-EP) chip was fabricated using nano-imprint lithography, electrochemical anodization and MEMS technology. The fabricated device was characterized using cervical cancer cell line (HeLa cells). The EP efficiency and cell viability as functions of electric pulse amplitude and duration were measured using digital fluorescent microscopy with Propidium Iodide (PI) dye. Numerical simulations of electric field strength indicated enhanced localized electric field at the tip due to high aspect ratio of nano-spikes. Systematic experiments revealed EP can be achieved with high efficiency and cell viability using ANS-EP chips without bubble generation at the critical applied voltage of 2.5 V, much smaller than the micro and conventional electroporators.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"12 1","pages":"147-151"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78990960","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908834
Kunal Kashyap, Amarendra Kumar, Chung-Yao Yang, M. T. Hou, J. Yeh
Silicon nanostructures are extensively being researched for many different applications for industries. Here we present two different types of nanostructures, silicon nanoplates and nanoholes fabricated by electroless metal assisted wet etching for enhancing the bending strength by ~3.7 fold and ~6 fold respectively as compared to polished silicon samples which emphasize the dependence of bending strength on nanostructure morphologies. Roughness at the nanostructure bottom cause stress concentration to increase which degrades the bending strength. Moreover, this technology can open a pathway of flexible silicon substrates for flexible and bendable electronics.
{"title":"Silicon substrate strength enhancement depending on nanostructure morphology","authors":"Kunal Kashyap, Amarendra Kumar, Chung-Yao Yang, M. T. Hou, J. Yeh","doi":"10.1109/NEMS.2014.6908834","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908834","url":null,"abstract":"Silicon nanostructures are extensively being researched for many different applications for industries. Here we present two different types of nanostructures, silicon nanoplates and nanoholes fabricated by electroless metal assisted wet etching for enhancing the bending strength by ~3.7 fold and ~6 fold respectively as compared to polished silicon samples which emphasize the dependence of bending strength on nanostructure morphologies. Roughness at the nanostructure bottom cause stress concentration to increase which degrades the bending strength. Moreover, this technology can open a pathway of flexible silicon substrates for flexible and bendable electronics.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"13 1","pages":"390-393"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77263708","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908828
C. Lu, Kerwin Wang
This paper demonstrates a novel magnetic induced injection method of ferromagnetic composite to build electrically conductive through-silicon vias (TSVs). The through conductive via is filled with conductive ferromagnetic composite by attractive magnetic force. The composite is made of the mixture of silver and iron nanoparticles. SU-8 2002 is covered on the side walls of via as an insulating material by a low vacuum suction. After thermal curing process, the dielectric layer can possess an electric field as high as 5×106 V/cm. All of the fabrication steps are completed below 100 C. The TSVs can allow a current density of 6×107 A/m2. The leakage current is 2×10-6 A at 50 V. After DC electrical sintering, the resistances of each TSV is less than 0.85 Ω.
介绍了一种新型铁磁复合材料的磁致注入制备导电硅通孔的方法。通过吸引磁力填充导电铁磁性复合材料。这种复合材料是由银和铁纳米粒子的混合物制成的。SU-8 2002通过低真空吸盘作为绝缘材料覆盖在通孔侧壁上。经热固化处理后，介质层的电场可高达5×106 V/cm。所有的制造步骤都在100℃以下完成，tsv可以允许电流密度为6×107 a /m2。在50v时漏电流为2×10-6 A。直流电烧结后，各TSV的电阻均小于0.85 Ω。
{"title":"Filling through-silicon vias with conductive ferromagnetic silver-iron composite","authors":"C. Lu, Kerwin Wang","doi":"10.1109/NEMS.2014.6908828","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908828","url":null,"abstract":"This paper demonstrates a novel magnetic induced injection method of ferromagnetic composite to build electrically conductive through-silicon vias (TSVs). The through conductive via is filled with conductive ferromagnetic composite by attractive magnetic force. The composite is made of the mixture of silver and iron nanoparticles. SU-8 2002 is covered on the side walls of via as an insulating material by a low vacuum suction. After thermal curing process, the dielectric layer can possess an electric field as high as 5×106 V/cm. All of the fabrication steps are completed below 100 C. The TSVs can allow a current density of 6×107 A/m2. The leakage current is 2×10-6 A at 50 V. After DC electrical sintering, the resistances of each TSV is less than 0.85 Ω.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"23 1","pages":"366-369"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81492229","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908845
Yu-Jui Che, Huei-Wen Wu, Lein-Yu Hung, Hwan-You Chang, Kuan Wang, Gwo-Bin Lee
Reagents binding specifically to target molecules are essential tools for clinical diagnosis and targeted therapy. Screening of target cell-surface specific affinity reagents with bench-top methods has some drawbacks, including time-consuming, labor-intensive and requirement of large-scale instrument. Microfluidic platforms may overcome these drawbacks because they could automate and complete the screening process within a shorter period of time. Phage display is a promising technology in selection of cell-surface specific peptides. In recent years, a subpopulation of tumor cells named cancer stem cells is believed to be the tumorigenic cells and closely associated with metastasis. A specific peptide that can recognize and differentiate cancer stem cells from the rest of cancer cell population is therefore useful for early diagnosis and targeted therapy. In this study, selection of M13 phage displayed peptides that bind with colon cancer cells and colon cancer stem cells using an integrated microfluidic system was successfully demonstrated. Compared with the traditional methods, the total selection process was shortened to 36 hours while traditional method needs almost a month. More importantly, the screening process can be automated and performed on a single microfluidic chip. The developed technique may be promising for early diagnosis of cancer and target therapeutics.
{"title":"An integrated microfluidic system for screening of peptides specific to colon cancer cells and colon cancer stem cells using the phage display technology","authors":"Yu-Jui Che, Huei-Wen Wu, Lein-Yu Hung, Hwan-You Chang, Kuan Wang, Gwo-Bin Lee","doi":"10.1109/NEMS.2014.6908845","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908845","url":null,"abstract":"Reagents binding specifically to target molecules are essential tools for clinical diagnosis and targeted therapy. Screening of target cell-surface specific affinity reagents with bench-top methods has some drawbacks, including time-consuming, labor-intensive and requirement of large-scale instrument. Microfluidic platforms may overcome these drawbacks because they could automate and complete the screening process within a shorter period of time. Phage display is a promising technology in selection of cell-surface specific peptides. In recent years, a subpopulation of tumor cells named cancer stem cells is believed to be the tumorigenic cells and closely associated with metastasis. A specific peptide that can recognize and differentiate cancer stem cells from the rest of cancer cell population is therefore useful for early diagnosis and targeted therapy. In this study, selection of M13 phage displayed peptides that bind with colon cancer cells and colon cancer stem cells using an integrated microfluidic system was successfully demonstrated. Compared with the traditional methods, the total selection process was shortened to 36 hours while traditional method needs almost a month. More importantly, the screening process can be automated and performed on a single microfluidic chip. The developed technique may be promising for early diagnosis of cancer and target therapeutics.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"52 1","pages":"440-443"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87538907","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908771
Amarendra Kumar, Kunal Kashyap, K. Liao, M. T. Hou, J. Yeh
Glass nanostructures were fabricated by wet chemical etching instead of using the complicated nanolithography and expensive dry etching process. Super hydrophilic glass with contact angle of 1° was created using this nanostructure with 92% transparency. Self-assembled monolayer of Perfluorodecyl-trichlorosilane (FDTS) was used to further make the glass super hydrophobic with contact angle of 151° without affecting its transparency. Polysilicon layer of 300 nm was deposited on glass substrate first and nanostructures were fabricated in this layer by metal assisted wet chemical etching. Thermal oxidation converted the silicon nanostructure to silicon dioxide nanostructure. This technology is producible on mass scale and useful in preparation of anti-fogging and self-cleaning glass.
{"title":"Super hydrophobic/super hydrophilic transparent nanostructured glass fabricated by wet etching","authors":"Amarendra Kumar, Kunal Kashyap, K. Liao, M. T. Hou, J. Yeh","doi":"10.1109/NEMS.2014.6908771","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908771","url":null,"abstract":"Glass nanostructures were fabricated by wet chemical etching instead of using the complicated nanolithography and expensive dry etching process. Super hydrophilic glass with contact angle of 1° was created using this nanostructure with 92% transparency. Self-assembled monolayer of Perfluorodecyl-trichlorosilane (FDTS) was used to further make the glass super hydrophobic with contact angle of 151° without affecting its transparency. Polysilicon layer of 300 nm was deposited on glass substrate first and nanostructures were fabricated in this layer by metal assisted wet chemical etching. Thermal oxidation converted the silicon nanostructure to silicon dioxide nanostructure. This technology is producible on mass scale and useful in preparation of anti-fogging and self-cleaning glass.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"63 1","pages":"113-116"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78245692","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908820
Wei Ma, Ronghao Zeng, Dayu Liu, Y. Zohar, Yi-Kuen Lee
A SOI technology-based micro filtration system for circulating tumor cells (CTCs) isolation and enumeration is reported; this is in contrast of using single-crystal-silicon wafers resulting in poor etching uniformity. This microsystem consists of a silicon filter enclosed with PDMS layers, a digital syringe pump, a fluorescence microscope, a digital CCD camera in combination with the CellProfiler software for rapid cell enumeration. Human cervical cancer cells (HeLa cells) were used for preliminary tests of the system performance. 3D CFD simulations demonstrate that the velocity and shear stress can be well controlled to avoid hydrodynamic cell lysis. In comparing with our previous CTC chip using polycarbonate (PC) filter membrane, the SOI-based system has a much improved CTC capturing and enumeration performance.
{"title":"SOI technology-based microfiltration system for circulating tumor cells isolation and enumeration","authors":"Wei Ma, Ronghao Zeng, Dayu Liu, Y. Zohar, Yi-Kuen Lee","doi":"10.1109/NEMS.2014.6908820","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908820","url":null,"abstract":"A SOI technology-based micro filtration system for circulating tumor cells (CTCs) isolation and enumeration is reported; this is in contrast of using single-crystal-silicon wafers resulting in poor etching uniformity. This microsystem consists of a silicon filter enclosed with PDMS layers, a digital syringe pump, a fluorescence microscope, a digital CCD camera in combination with the CellProfiler software for rapid cell enumeration. Human cervical cancer cells (HeLa cells) were used for preliminary tests of the system performance. 3D CFD simulations demonstrate that the velocity and shear stress can be well controlled to avoid hydrodynamic cell lysis. In comparing with our previous CTC chip using polycarbonate (PC) filter membrane, the SOI-based system has a much improved CTC capturing and enumeration performance.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"12 1","pages":"333-336"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78360904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-13DOI: 10.1109/NEMS.2014.6908866
Yiting Yu, H. Zappe
Three-dimensional (3D) plasmon Talbot effect is experimentally investigated on three finite-sized, two-dimensional (2D) periodical arrays composed of subwavelength nanoholes with different fill factors. By using water as the output medium, both the focusing behavior and the plasmon Talbot revivals are clearly observed even when the operating wavelength is larger than the array period. And theoretically, with the output material having a refractive index of n, the operating wavelength to realize the plasmon Talbot effect can be enlarged by a factor of n-1. The integral and fractional plasmon Talbot revivals reproduce the device pattern with rich subwavelength hotspots (0.56~0.72λ) in exactly the same array period, which shows a great prospect for the low-cost, large-scale micro- and nanolithography. The preliminary experimental results indicate that the fill factor doesn't play an obvious influence on the size of the achieved plasmon Talbot hotspots.
{"title":"Experimental investigation of 3D plasmon talbot effect","authors":"Yiting Yu, H. Zappe","doi":"10.1109/NEMS.2014.6908866","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908866","url":null,"abstract":"Three-dimensional (3D) plasmon Talbot effect is experimentally investigated on three finite-sized, two-dimensional (2D) periodical arrays composed of subwavelength nanoholes with different fill factors. By using water as the output medium, both the focusing behavior and the plasmon Talbot revivals are clearly observed even when the operating wavelength is larger than the array period. And theoretically, with the output material having a refractive index of n, the operating wavelength to realize the plasmon Talbot effect can be enlarged by a factor of n-1. The integral and fractional plasmon Talbot revivals reproduce the device pattern with rich subwavelength hotspots (0.56~0.72λ) in exactly the same array period, which shows a great prospect for the low-cost, large-scale micro- and nanolithography. The preliminary experimental results indicate that the fill factor doesn't play an obvious influence on the size of the achieved plasmon Talbot hotspots.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"532-535"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78782437","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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