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The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

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Nanoscaled biological gated field effect transistors for cytogenetic analysis 用于细胞遗传学分析的纳米生物门控场效应晶体管
Dorota Kwasny, M. Dimaki, K. B. Andersen, A. Zulfiqar, Z. Tümer, W. Svendsen
Cytogenetic analysis is the study of chromosome structure and function, and is often used in cancer diagnosis, as many chromosome abnormalities are linked to the onset of cancer. A novel label free detection method for chromosomal translocation analysis using nanoscaled field effect transistors (FET) is presented here. The FET is gated by the hybridization of the target DNA on the semiconducting nanowire. The results show an extreme sensitivity to the hybridization process, so that the hybridization and dehybridisation can be followed in real time. The nanoscaled FET is made of polysilicon using standard UV lithography enabling batch processing of the sensors.
细胞遗传学分析是对染色体结构和功能的研究,通常用于癌症诊断,因为许多染色体异常与癌症的发病有关。本文提出了一种利用纳米场效应晶体管(FET)进行染色体易位分析的新型无标记检测方法。该场效应管是通过靶DNA在半导体纳米线上的杂交进行门控的。结果表明,该方法对杂交过程具有极高的灵敏度,可以实时跟踪杂交和去杂交过程。纳米级FET由多晶硅制成,采用标准紫外光刻技术,可以批量处理传感器。
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引用次数: 3
A resonant MEMS magnetic field sensor with electromagnetic induction sensing 一种具有电磁感应感应的谐振式MEMS磁场传感器
Dehui Xu, Guoqiang Wu, B. Xiong, Yuelin Wang
In this paper, we propose a novel magnetic field sensor, which exploits capacitive driving and electromagnetic induction sensing to detect the external magnetic field. The capacitive driving reduces the power dissipation and the electromagnetic induction sensing makes the output signal with high linearity. The measurement results verify that the sensitivity can be increased by increasing the sensing coil number. However, the sensitivity was found not in linear direct proportion to the sensing coil number. The measured sensitivity (S) for the sensor with double layer coil and that with single layer coil are 3.5 μV/mT and 2.1 μV/mT, respectively.
本文提出了一种新型的磁场传感器,利用电容驱动和电磁感应来检测外部磁场。电容驱动降低了功耗,电磁感应使输出信号具有高线性度。测量结果表明,增加感应线圈数可以提高灵敏度。然而,发现灵敏度不是线性成正比的传感线圈数。双层线圈传感器和单层线圈传感器的实测灵敏度S分别为3.5 μV/mT和2.1 μV/mT。
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引用次数: 1
Reduction of machining motion error of an aspheric surface coordinate measuring machine by a new error compensation method 一种新的误差补偿方法减小非球面三坐标测量机的加工运动误差
Xiang Wei, Bing Li, Lijiao Jia, Zhuangde Jiang, Lei Chen
This paper suggests a new method to reduce the machine motion errors of a 2-dimension aspheric surface measuring. Using the laser interferometer to measure the site error of each point instead of the position error, straightness error and yaw and pitch error. Through error compensation of the new method, the simulation results and verification experiments showed that the site errors agree well within less than 5μm in the whole space. The new mathematical model, the calibration method and the data analysis method are described in detail in the paper.
提出了一种减小二维非球面测量中机床运动误差的新方法。利用激光干涉仪测量各点的位置误差,代替位置误差、直线度误差、偏航和俯仰误差。通过误差补偿,仿真结果和验证实验表明,在整个空间内,定位误差在小于5μm范围内吻合良好。文中详细介绍了新的数学模型、标定方法和数据分析方法。
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引用次数: 0
Printed low temperature metal oxide thin film transistors 印刷低温金属氧化物薄膜晶体管
Zheng Chen, Xinzhou Wu, T. Zhou, Z. Cui
Thin film transistors (TFT) were constructed by inkjet printing of indium oxide semiconductor, which were annealed at the temperature of 200-300°C. Good morphology of printed indium oxide films was achieved and the printed thin film transistors exhibited acceptable performances above 250°C of annealing temperature. Furthermore, electron mobility in excess of 0.5cm2/Vs was obtained at processed temperature of 200°C through additional vacuum annealing.
采用喷墨打印技术制备了氧化铟半导体薄膜晶体管(TFT),并对其进行了200 ~ 300℃的退火处理。在250°C以上的退火温度下,所制得的氧化铟薄膜具有良好的形貌和良好的性能。此外,在200°C的加工温度下,通过额外的真空退火,获得了超过0.5cm2/Vs的电子迁移率。
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引用次数: 0
Development of catalytic etching using dual materials 双材料催化蚀刻技术的发展
Mao-Jung Huang, N. Chu, Chun-Ming Chang, M. Shiao, C. Hsiao
In this study we presents an effective and simple process for forming multi-level vertical structures on a (100) silicon wafer. The dual materials including gold and platinum was employed as catalytic material in the etching process. We employed an etchant solution consisting of 4.6 M hydrofluoric acid, 0.44 M hydrogen peroxide, and isopropyl alcohol to produce microstructures at an etching rate of 0.294 μm/min and 0.648 μm/min during only gold (Au) and platinum (Pt) film, respectively. For the catalytic etching process with 10 nm-thick Au and Pt, the etching rate yield from Au film was increased to that generated from the etching process with single Pt film. In the meantime, the etching structure under Pt film became not obvious in the dual materials etching process. For the sample with 10 nm Au and 11 nm Pt, the significant etching produced on both Au and Pt region.
在这项研究中,我们提出了一种在(100)硅片上形成多层垂直结构的有效而简单的工艺。在蚀刻过程中,采用金和铂双材料作为催化材料。采用由4.6 M氢氟酸、0.44 M过氧化氢和异丙醇组成的蚀刻液,仅在金(Au)和铂(Pt)薄膜上分别以0.294 μm/min和0.648 μm/min的蚀刻速率生成微结构。对于10 nm厚Au和Pt的催化蚀刻工艺,Au膜的蚀刻速率产率提高到单Pt膜的蚀刻速率产率。同时,在双材料刻蚀过程中,Pt薄膜下的刻蚀结构变得不明显。对于10 nm Au和11 nm Pt的样品,在Au和Pt区域都产生了明显的蚀刻。
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引用次数: 0
Position determination of a ball grid array by automated optical inspection method 用自动光学检测方法确定球栅阵列的位置
Yi-Chuan Lin, Kerwin Wang
This paper introduces a novel automated optical inspection (AOI) method to measure the positions and diameters of micro-solder balls of a ball grid array (BGA). The method is focused on the refinement of optical configuration, image acquisition platform design to improve the time efficiency of AOI. We use a white LED ring as a light source. It is combined with the platform. The system can perform multiple image processing and object detection steps to locate the center of each ball. This paper also presents two methods to estimate the diameters of the balls. A dummy BGA, consists of misaligned solder balls, are assembled to a conductive substrate to evaluate the platform. Test result shows that the platform is capable of performing continuous image acquisition of a 15fps, 640 × 480, 8-bite grayscale video.
介绍了一种新型的自动光学检测(AOI)方法,用于测量球栅阵列(BGA)微焊点的位置和直径。该方法主要从光学结构的优化、图像采集平台的设计等方面来提高AOI的时间效率。我们使用白色LED环作为光源。它与平台相结合。该系统可以执行多个图像处理和目标检测步骤来定位每个球的中心。本文还提出了两种估算球直径的方法。假BGA由错位的焊料球组成,组装到导电基板上以评估平台。测试结果表明,该平台能够实现15fps、640 × 480、8位灰度视频的连续图像采集。
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引用次数: 2
Nucleus extraction from cells by optical-induced cell lysis on a continuous flow platform 连续流平台上光诱导细胞裂解提取细胞核
Shi Huang, Lien-Yu Hung, Gwo-Bin Lee
Nucleus extraction from cells is essential for a variety of biomedical applications. In this study, we have developed a microfluidic platform integrated with optical-induced dielectrophoresis (ODEP) and optical-induced cell lysis (OICL) techniques combined with a hydrodynamic focusing module for continuous single cell membrane lysis and nucleus extraction. This OICL chip was formed with indium-tin-oxide (ITO) glass and a photoconductive (amorphous silicon, a-Si) layer. The light was illuminated on a-Si to induce a non-uniform electric field, which then generated a transmembrane potential across the cell membrane, thus causing the disruption of cell membrane without damaging the nucleus. Therefore, we could use an optical-induced non-uniform electric field to continuously and selectively lyse the cell membrane and then collect the nucleus by using the ODEP force using different light patterns. These techniques may become a promising method for molecular cytogenetic investigations and nucleus transfer.
从细胞中提取细胞核对于各种生物医学应用是必不可少的。在这项研究中,我们开发了一个微流控平台,集成了光诱导电介质电泳(ODEP)和光诱导细胞裂解(OICL)技术,并结合了流体动力聚焦模块,用于连续的单细胞膜裂解和细胞核提取。该OICL芯片由氧化铟锡(ITO)玻璃和光导(非晶硅,a- si)层组成。光照射在a- si上,诱导非均匀电场,然后在细胞膜上产生跨膜电位,从而在不损伤细胞核的情况下破坏细胞膜。因此,我们可以利用光诱导的非均匀电场,在不同的光模式下,利用ODEP力连续选择性地裂解细胞膜,然后收集细胞核。这些技术可能成为分子细胞遗传学研究和细胞核转移的一种有前途的方法。
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引用次数: 1
High performance thread-based CE-EC system with variable volume injection capability and 3D detection electrodes 高性能螺纹CE-EC系统,具有可变体积注射能力和3D检测电极
Yuan-Yuan Yang, Yi-Chi Wei, Che-Hsin Lin
This study develops a high-performance thread-based microfluidic device with variable volume injection capability and 3-dimensional (3D) detection electrodes for capillary electrophoresis electrochemical (CE-EC) detection of biosamples. PMMA substrate with concave 3D electrodes produced with the hot-embossing method is used to enhance the sensing performance of the CEEC system. Results show that the chip with 3D sensing electrodes exhibits around 10-fold current response than that obtained using the chip with conventional 2D sensing electrodes for detecting 6.25 μM K3Fe (CN)6. In addition, the developed thread-based microfluidic system is capable of injecting variable sample volumes into the separation thread simply by winding different turns of the injection thread on the separation thread. The developed concave-shaped three-dimensional electrode provides a simple and low-cost method for thread-based CEEC applications.
本研究开发了一种高性能线程微流控装置,具有可变体积注射能力和三维(3D)检测电极,用于生物样品的毛细管电泳电化学(CE-EC)检测。采用热压法制备三维凹面电极的PMMA衬底,提高了CEEC系统的传感性能。结果表明,在检测6.25 μM K3Fe (CN)6时,采用三维传感电极的芯片的电流响应是传统二维传感电极芯片的10倍左右。此外,所开发的基于螺纹的微流体系统只需在分离螺纹上缠绕不同匝数的注射螺纹,即可将不同的样品体积注入分离螺纹。所开发的凹形三维电极为基于线程的CEEC应用提供了一种简单、低成本的方法。
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引用次数: 2
Design and fabrication of micro hot-wire flow sensor using 0.35μm CMOS MEMS technology 基于0.35μm CMOS MEMS技术的微型热线流量传感器的设计与制造
Z. Miao, C. Chao, Y. Chiu, Chia-Wei Lin, Yi-Kuen Lee
MEMS sensors are promising for Energy Efficient Building (EeB) because of the potential low cost and low power consumption. Various flow sensors based on MEMS technology have been fabricated. In this work, we designed and fabricated a polysilicon micro hot-wire flow sensor using a commercial 0.35μm 2P4M CMOS technology followed by post-CMOS processing. A post-CMOS MEMS process for a 1.5mm×1.5mm sensor chip using Deep Reactive Ion Etch (DRIE) and spray coating was utilized to finish the fabrication. The fabricated flow sensor was characterized at different flow rates. The fabricated sensor with a dimension of 300μm×2μm×3.76μm demonstrated a sensitivity of 23.87 mV/(m/s) and power consumption of 0.79 mW at Uin =5m/s. The experiment results were consistent with the theoretical prediction and the best results showed an average error of only 5%.
MEMS传感器因其潜在的低成本和低功耗而在节能建筑(EeB)中具有广阔的应用前景。各种基于MEMS技术的流量传感器已经被制造出来。本研究采用商用0.35μm 2P4M CMOS工艺设计并制作了多晶硅微热线流量传感器,并进行了后处理。采用后cmos MEMS工艺,采用深度反应离子蚀刻(Deep Reactive Ion Etch, DRIE)和喷涂工艺完成了1.5mm×1.5mm传感器芯片的制备。对所制备的流量传感器在不同流量下进行了表征。该传感器尺寸为300μm×2μm×3.76μm,在Uin =5m/s时灵敏度为23.87 mV/(m/s),功耗为0.79 mW。实验结果与理论预测一致,最佳结果平均误差仅为5%。
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引用次数: 9
Cellular behaviors on chemically/physically modified SiO2 surfaces 化学/物理改性SiO2表面上的细胞行为
Chung-Yao Yang, Amarendra Kumar, J. Yeh, Y. Yang
This paper describe an easy-to-handle approach to probe cellular behaviors via using silicon dioxide nanotextures with various functional groups. The silicon dioxide nanotextures were performed through using metal assisted chemical etching and wet oxidation. The pitch of nanotextures can be adjusted by controlling etching durations. The results showed that cells preferred to spread out on nanotextures with longer pitch rather than on nanotextures with shorter pitch. In addition, cells also preferred to adhere on planar surface rather than on nanotextured surface. We believe, this study can help us to get more insights of cell biology and biomedical-relevant researches.
本文描述了一种易于操作的方法,通过使用具有各种官能团的二氧化硅纳米结构来探测细胞行为。采用金属辅助化学蚀刻和湿氧化法制备了二氧化硅纳米结构。通过控制刻蚀时间可以调节纳米结构的间距。结果表明,细胞更倾向于在基音较长的纳米结构上展开,而不是在基音较短的纳米结构上展开。此外,细胞也倾向于在平面表面而不是纳米纹理表面粘附。我们相信,这项研究可以帮助我们对细胞生物学和生物医学相关的研究有更多的了解。
{"title":"Cellular behaviors on chemically/physically modified SiO2 surfaces","authors":"Chung-Yao Yang, Amarendra Kumar, J. Yeh, Y. Yang","doi":"10.1109/NEMS.2014.6908897","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908897","url":null,"abstract":"This paper describe an easy-to-handle approach to probe cellular behaviors via using silicon dioxide nanotextures with various functional groups. The silicon dioxide nanotextures were performed through using metal assisted chemical etching and wet oxidation. The pitch of nanotextures can be adjusted by controlling etching durations. The results showed that cells preferred to spread out on nanotextures with longer pitch rather than on nanotextures with shorter pitch. In addition, cells also preferred to adhere on planar surface rather than on nanotextured surface. We believe, this study can help us to get more insights of cell biology and biomedical-relevant researches.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"29 1","pages":"655-659"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78947490","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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