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Proceedings of the 5th Electronics System-integration Technology Conference (ESTC)最新文献

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Reliability investigations of large die wafer level packages: Optimization of package structure and materials to improve board level reliability 大型晶圆级封装的可靠性研究:优化封装结构和材料以提高板级可靠性
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962809
Markus Jarn, Chueh-An Hsieh, Yu-Chi Pai, Tsaiying Wang, J. Hunt
Wafer level packaging (WLP) of electronic components has become increasingly popular in recent years. The WLP package has the same foot print as the die and is therefore the smallest package possible. This is important for applications where maximum functionality is required in a small space, especially for mobile devices. The largest package sizes and pin counts used for WLP components have steadily increased in recent years. As the mechanical stresses in WLP packages increase with die size as well, board level reliability becomes a major concern. As such, the questions arise: what is the maximum die size possible for a WLP to meet board level reliability requirements and, for a given package size, how can the board level reliability be improved? To start to answer these questions, we have designed a large die test vehicle based on a dummy wafer (8×8 mm in size with 444 connections at 0.4mm pitch) with features in the package that are common to devices in production today, such as redistribution traces, polymer passivation layers, under bump metallization, and solder balls for interconnection to the test board. Using wafer level processes, we have assembled the test vehicles under different conditions in a design of experiment. We varied the parameters of polymer passivation thickness, redistribution trace thickness, and final die thickness and then characterized the board level reliability under temperature cycling and drop test conditions for a statistically significant sample size.
近年来,电子元件的晶圆级封装(WLP)越来越受欢迎。WLP封装具有与模具相同的足迹,因此是最小的封装。这对于需要在小空间内实现最大功能的应用程序非常重要,特别是对于移动设备。近年来,用于WLP组件的最大封装尺寸和引脚数稳步增加。由于WLP封装中的机械应力随着芯片尺寸的增加而增加,板级可靠性成为一个主要问题。因此,问题出现了:WLP最大的芯片尺寸可能满足板级可靠性要求,对于给定的封装尺寸,如何提高板级可靠性?为了开始回答这些问题,我们设计了一个基于虚拟晶圆(8×8 mm尺寸,444个连接,0.4mm间距)的大型模具测试车,其封装特征在当今生产的设备中很常见,例如再分布迹线,聚合物钝化层,碰撞金属化,以及用于连接到测试板的焊接球。我们采用晶圆级工艺,在不同条件下组装了测试车,进行了实验设计。我们改变了聚合物钝化厚度、再分布厚度和最终模具厚度的参数,然后表征了温度循环和跌落测试条件下的板级可靠性。
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引用次数: 4
Evaluation and optimization of the mechanical strength of bonds between metal foil and aluminium pads on thin ASICs using gold ball studs as micro-rivets 采用金球螺柱作为微铆钉的薄asic上金属箔与铝衬垫之间的机械强度评估与优化
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962780
V. Giagka, A. Vanhoestenberghe, N. Donaldson, A. Demosthenous
We are developing an active implant for epidural spinal cord stimulation. A thin application specific integrated circuit (ASIC) (~80 μm) is to be embedded within it. The laser patterned tracks are electrically and mechanically thermosonically bonded on the ASIC pads using gold ball studs, forming micro-rivets through holes in the foil of the tracks, an interconnection method called electrical rivet bonding, or microflex [1]. In this work, we sought to characterize and optimize the technique, with respect to its bonding strength. The technique is relatively new and, so far, the mechanical strength of the bonds has only been investigated for interconnection on gold tracks. Standard ASICs however, normally come with aluminium pads. We ran a series of pull tests on the bonds between the metal tracks and aluminium ASIC pads. In these tests, we were concerned with the effect of the different parameters on the bond strength, and more specifically the size of the gold balls and the size of the holes in the foil. We recorded the maximum force (stress) before bond failure for different combinations of parameters. Our results indicate that average stress values can vary between 9.6 and 60 cN, depending on the process parameters. Different failure mechanisms have been identified and these are discussed. Overall, we conclude that larger holes provide larger contact areas with the substrate and generally result in stronger bonds, but the right combination of ball and hole sizes, could lead to strong bonds even with smaller holes.
我们正在研发一种用于硬膜外脊髓刺激的主动植入物。在其内部嵌入薄应用专用集成电路(ASIC) (~80 μm)。激光图型轨道使用金球螺柱在ASIC衬垫上电和机械热声结合,形成微铆钉穿过轨道箔的孔,这种互连方法称为电铆钉结合,或微弯曲[1]。在这项工作中,我们试图表征和优化技术,就其结合强度而言。这项技术相对较新,到目前为止,化学键的机械强度只研究了金轨道上的互连。然而,标准asic通常带有铝衬垫。我们对金属轨道和铝制ASIC衬垫之间的连接进行了一系列拉力测试。在这些测试中,我们关注的是不同参数对结合强度的影响,更具体地说,是金球的大小和箔上孔的大小。我们记录了不同参数组合下粘结破坏前的最大力(应力)。我们的结果表明,根据工艺参数的不同,平均应力值在9.6到60 cN之间变化。已经确定了不同的失效机制,并对其进行了讨论。总的来说,我们得出的结论是,更大的孔提供了更大的接触面积,通常会导致更强的键合,但球和孔尺寸的正确组合,即使是更小的孔,也可能导致更强的键合。
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引用次数: 2
Effect of UV light and low temperature on solution-processed, high-performance metal-oxide semiconductors and TFTs 紫外光和低温对溶液加工高性能金属氧化物半导体和tft的影响
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962762
H. Majumdar, J. Leppaniemi, K. Ojanpera, Olli‐Heikki Huttunen, A. Alastalo
This paper focuses on ultra-violet (UV)-curing of solution-processed metal-oxide (MO) semiconductors for application in thin film transistors (TFTs). The goal is to combine low-temperature thermal annealing with UV exposure and achieve printable transistors on flexible plastic substrates. In this paper we focus on the use of two different wavelengths of UV and clarify their effect on the performance of the metal-oxide semiconductors. The electrical properties of TFTs made with these semiconductors are characterized. The results show that wavelength of the UV exposure is critical for optimized performance of the semiconductor and the TFTs.
本文主要研究了用于薄膜晶体管(TFTs)的溶液处理金属氧化物(MO)半导体的紫外固化。目标是将低温热退火与紫外线曝光相结合,在柔性塑料衬底上实现可打印晶体管。本文重点介绍了两种不同波长的紫外光的使用,并阐明了它们对金属氧化物半导体性能的影响。对用这些半导体制成的tft的电学性能进行了表征。结果表明,紫外曝光波长对优化半导体和tft的性能至关重要。
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引用次数: 1
Cost components for 3D system integration 3D系统集成的成本组件
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962730
D. Velenis, M. Detalle, S. Van Huylenbroeck, A. Jourdain, A. Phommahaxay, J. Slabbekoorn, Teng Wang, E. Marinissen, K. Rebibis, Andy Miller, G. Beyer, E. Beyne
The cost of 3D process flows is one of the most important aspects for the broader adoption of 3D integration by the semiconductor industry. In this paper the processing cost of the features and components that enable 3D stacking is considered and compared. Different stacking approaches are considered: D2W, W2W and interposer-based stacking. Furthermore, the impact of processing yield and pre-stack testing is evaluated when considering the system integration cost for each one of the 3D stacking methods. In addition the size of the stacked active dies is parameterized and the effect on the system integration cost is explored. Also, the impact of pre-stack testing on interposer in relation to processing yield and the size of the stacked active dies is investigated.
3D工艺流程的成本是半导体行业广泛采用3D集成的最重要方面之一。本文考虑并比较了实现三维叠加的特征和部件的加工成本。考虑了不同的堆叠方法:D2W, W2W和基于中间层的堆叠。此外,在考虑系统集成成本的情况下,评估了每种3D堆叠方法的加工良率和堆叠前测试的影响。此外,还对叠置主动模的尺寸进行了参数化,探讨了叠置主动模的尺寸对系统集成成本的影响。此外,还研究了叠前测试对中间层的影响与加工成品率和叠后活性模具的尺寸有关。
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引用次数: 7
Fully gravure printed wireless cyclic voltammetry tags 全凹版印刷无线循环伏安标签
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962760
Younsu Jung, Hyejin Park, Jin-Ah Park, J. Noh, Yunchang Choi, M. Jung, Kyunghwan Jung, Myungho Pyo, Kevin Chen, A. Javey, Gyoujin Cho
For the first time, fully gravure printed wireless cyclic voltammetry (CV) tag is reported as a platform for the disposable wireless sensor tags by utilizing Ag nano-particle based conducting ink, BaTiO3 nano-particle based dielectric ink and single-walled carbon nanotube based semiconducting ink. The printed CV tag contains four functional units for the disposable wireless sensor tag: the rectenna to generate polarized DC volt through coupled 13.56 MHz AC, triangle wave generator to scan electrochemical cell by ±500 mV at lower frequency (<; 500 mHz), amplifier to enhance the output signal and signage to indicate detected level of specimens. Those printed four units will be used as a platform to further develop disposable wireless sensor tags by simply replacing sensor unit.
首次报道了采用银纳米颗粒导电油墨、钡纳米颗粒介电油墨和单壁碳纳米管半导体油墨制备的全凹印无线循环伏安(CV)标签作为一次性无线传感器标签的平台。打印的CV标签包含四个功能单元,用于一次性无线传感器标签:整流天线通过耦合的13.56 MHz交流产生极化直流电压,三角波发生器以±500 mV的低频扫描电化学电池(<;500 mHz),放大器输出信号增强,指示牌显示检测到的标本水平。这些打印的四个单元将被用作进一步开发一次性无线传感器标签的平台,只需更换传感器单元。
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引用次数: 0
Numerical analysis of the performance of highly oriented pyrolytic graphite heat spreader in thermal management of microelectronics assemblies 微电子组件热管理中高取向热解石墨散热片性能的数值分析
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962815
T. Tilford, A. Cook, H. Lu, A. Ramambasoa, F. Conseil
An inverse analysis approach combining numerical and experimental analyses has been utilised to determine the in-situ effective material properties of Highly Oriented Pyrolytic Graphite (HOPG) in a microelectronics test assembly. The approach adopted uses a Finite Element analysis package to determine temperature distribution over a thermal test assembly. A Virtual Design of Experiments approach is used to define a series of analyses with discrete thermal material properties which is used in conjunction with a particle swarm optimisation algorithm to form a response surface function relating temperature to material property values at a number of monitoring points. Experimental data is used to form an error metric which is subsequently minimised to determine effective material properties of the HOPG material. Subsequently a series of studies contrasting the performance of the HOPG material with common heat spreader materials were performed. Results show that the effective thermal property values of the HOPG material seem to be greater than suggested in existing literature and that the HOPG material reduces peak assembly temperatures by a significant amount.
采用数值分析和实验分析相结合的逆分析方法,确定了微电子测试组件中高取向热解石墨(HOPG)的原位有效材料性能。采用的方法是使用有限元分析包来确定热测试组件的温度分布。实验虚拟设计方法用于定义一系列具有离散热材料特性的分析,该分析与粒子群优化算法结合使用,以形成与许多监测点的温度与材料特性值相关的响应面函数。实验数据用于形成误差度量,该度量随后被最小化以确定HOPG材料的有效材料特性。随后进行了一系列研究,对比了HOPG材料与普通散热材料的性能。结果表明,HOPG材料的有效热性能值似乎比现有文献中建议的要大,并且HOPG材料显著降低了峰值组装温度。
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引用次数: 2
A comparative reliability study of copper-plated glass vias, drilled with CO2 and ArF excimer lasers 用CO2和ArF准分子激光钻孔的镀铜玻璃孔的比较可靠性研究
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962708
M. Broas, K. Demir, Y. Sato, V. Sundaram, R. Tummala
Interposer technologies for 2.5D and 3D integration schemes require formation of high density and reliable Through-Package-Vias (TPVs) at high throughput and low cost. Glass is proposed to be an ideal candidate material for interposer applications. Among various methods to form TPVs in glass, a variety of laser processing methods have been proposed as feasible methods. The via hole formation mechanisms of different lasers differ from each other which leads to variations in via quality. To study the effects of via quality on reliability, accelerated lifetime tests were conducted on copper-plated TPVs formed with different lasers in glass interposers. Two different lasers for the TPV formation were investigated in this study - a high power CO2 laser and an ArF-based excimer laser. Separate test vehicles containing vias drilled with each of these two methods were fabricated for thermal cycle tests (TCT). The test vehicles contained daisy chains. No failures were detected in the TCT based on a failure criterion of 10 % increase in resistance per daisy chain. TPVs were characterized with optical and electron microscopy after drilling, after fabrication, and after the tests.
用于2.5D和3D集成方案的中间体技术需要以高通量和低成本形成高密度和可靠的通封装通孔(TPVs)。玻璃被认为是中间体应用的理想候选材料。在玻璃中形成TPVs的各种方法中,人们提出了各种激光加工方法作为可行的方法。不同激光器的通孔形成机制不同,导致通孔质量的差异。为了研究通孔质量对可靠性的影响,对不同激光在玻璃中间层中形成的镀铜tpv进行了加速寿命试验。在这项研究中,研究了两种不同的激光用于TPV形成-高功率CO2激光和基于arf的准分子激光。用这两种方法中的每一种钻取含有孔的独立试验车辆,用于热循环试验(TCT)。测试车辆包含菊花链。根据每雏菊链电阻增加10%的故障标准,在TCT中没有检测到故障。在钻孔、制作和测试后,用光学和电子显微镜对TPVs进行了表征。
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引用次数: 2
Influence of thermal annealing on the deformation of Cu-filled TSV 热退火对cu填充TSV变形的影响
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962763
Hongwen He, X. Jing, Liqiang Cao, Daquan Yu, K. Xue, Wenqi Zhang
Through silicon via (TSV) is regarded as one of the most advanced packaging technologies, however, many serious reliability issues need to be paid more concerns. The Cu pumping effect is one of the most crucial reliability problems. Due to different coefficient of thermal expansion for different packaging materials, Cu-TSV can deform and damage the wiring redistribution layers and degrade the reliability of the package as a whole during normal processing. Therefore, this work focuses on the influence which different thermal annealing processes have on Cu pumping in Cu-filled TSVs. Cu TSVs having 20μm in diameter and 120μm in depth were fabricated on 200 mm wafers by etching, insulation layer deposition, barrier layer deposition, seed layer deposition and Cu plating in sequence. Then the wafer surface was polished to remove the excessive Cu. Two anneal approaches were designed to investigate Cu TSV pumping. One was CMP first before annealing, and the other was annealing before CMP and followed by the 2nd annealing. Anneal tests were done in a nitrogen environment to protect Cu from oxidation. The annealing temperatures were set at 300°C and 400°C with a dwell time of 40min. The degree of pumping was evaluated by measuring the height and volume profiles before and after annealing by using a white light interferometer. Results show that the Cu TSV increased by 0.105μm and 0.168μm in height and 90.443μm3 and 93.993μm3 in volume at 300°C and 400°C with CMP first approach. However, the Cu TSV increased by only 0.066μm and 0.075μm and 30.797μm3 and 10.077μm3 in volume at 300°C and 400°C with anneal first approach. It can be concluded that the Cu pumping effect may be restrained by anneal first approach.
透硅通孔封装技术(TSV)被认为是最先进的封装技术之一,但其可靠性问题仍需引起人们的重视。铜泵送效应是最关键的可靠性问题之一。由于不同封装材料的热膨胀系数不同,Cu-TSV在正常加工过程中会使布线重分布层变形和损坏,降低封装整体的可靠性。因此,本文着重研究了不同热处理工艺对Cu填充tsv中Cu泵送的影响。采用蚀刻、绝缘层沉积、阻挡层沉积、种子层沉积、镀铜等工艺,在200 mm晶圆上制备了直径为20μm、深度为120μm的Cu tsv。然后对晶圆片表面进行抛光以去除过量的Cu。设计了两种退火方法来研究Cu TSV抽运。一种是先进行CMP后退火,另一种是在CMP前退火,然后进行第二次退火。退火试验在氮气环境中进行,以防止铜被氧化。退火温度分别为300℃和400℃,保温时间为40min。利用白光干涉仪测量了退火前后的高度和体积分布,评价了抽运程度。结果表明:在300°C和400°C时,采用CMP第一方法,Cu TSV的高度分别增加了0.105μm和0.168μm,体积分别增加了90.443μm3和93.993μm3;在300°C和400°C时,Cu的TSV体积分别增加了0.066μm和0.075μm, 30.797μm3和10.077μm3。结果表明,退火第一法可以抑制铜的抽运效应。
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引用次数: 2
Printed passive components for RFID labels 用于RFID标签的印刷无源元件
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962823
J. Řeboun, T. Blecha, T. Syrový, A. Hamácek, Alexey Shlykevich
This paper deals with the research and development of printed flexible capacitors and inductors predominantly designed for the construction of RFID labels. These printed RF passive components are required for the construction of fully printed low cost passive RFID labels. The passive components are directly printed on PET substrate by the screen printing technique. The printing process was optimized in order to achieve a high yield and good electrical parameters at the frequency of 13,56 MHz. Electrical parameters of printed capacitors, such as impedance to frequency characteristic, capacity to temperature characteristic, capacity to bias voltage characteristic were measured in detail. The bending tests were also performed for verifying of printed capacitors flexibility. The performance of capacitors was verified in the real sample of resonant circuit at 13,56 MHz.
本文研究了主要用于RFID标签结构的印刷柔性电容器和电感器的研究和开发。这些印刷的射频无源元件是构建完全印刷的低成本无源RFID标签所必需的。采用丝网印刷技术将无源元件直接印刷在PET基板上。为了在13,56 MHz频率下获得高收率和良好的电气参数,对印刷工艺进行了优化。详细测量了印刷电容器的阻抗-频率特性、容量-温度特性、容量-偏置电压特性等电气参数。为了验证印刷电容器的柔性,还进行了弯曲试验。在13,56 MHz谐振电路的实际样品中验证了电容器的性能。
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引用次数: 7
A “microSD”sized RF transceiver manufactured as an embedded system-in-package 一种“microSD”大小的射频收发器,作为嵌入式系统级封装制造
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962744
D. Manessis, S. Karaszkiewicz, J. Kierdorf, A. Ostmann, R. Aschenbrenner, K. Lang
This paper brings into light the first prototype miniaturized system-in-package (SiP) microsystems built for wireless body-area-network medical devices which mandate low power consumption and extreme packaging miniaturization. Specifically, this paper focuses on the fabrication of a remote controller for wireless medical devices in the practical shape of an extended “microSD” card where the extended part will co-integrate a passive antenna. Actually the microSd card is a RF transceiver enclosing an advanced SoC, MEMS filters, flash memory and other passive components. The presented paper describes in detail all manufacturing steps for the realization of the extended “microSD” card and all technology developments achieved to reach this goal. Firstly, a 2-layer substrate has been successfully produced with 35μm ultra fine line copper structuring in conjunction with 75μm through-vias using subtractive technology. Subsequently, assembly technologies for heterogeneous BAN components were further developed in order to achieve the placement of the tiny IF SAW filters and BAW resonators on the substrate and to implement mixed assembly of soldered passives with fluxed chip packages. Finally, the paper highlights the embedding technology employed in the project for the manufacturing of the microSD cards on 18”x24” large panels. The extended microSD card will be used for testing, programming and controlling all vital SoC functions in the wireless medical devices. It has a size of 11mm×22mm×1.05mm with the antenna part occupying a space of 11mm×7mm×1.05mm.
本文介绍了第一个用于无线体域网络医疗设备的小型化系统级封装(SiP)微系统的原型,该系统要求低功耗和极端封装小型化。具体而言,本文重点研究了一种用于无线医疗设备的遥控器的制造,其实际形状为扩展的“microSD”卡,其中扩展部分将与无源天线共集成。实际上,microSd卡是一个射频收发器,包含先进的SoC, MEMS滤波器,闪存和其他无源组件。本文详细介绍了实现扩展“microSD”卡的所有制造步骤以及为实现这一目标而实现的所有技术发展。首先,利用35μm的超细线铜结构和75μm的过孔,利用减法技术成功地制作了两层基板。随后,异质BAN组件的组装技术进一步发展,以实现在衬底上放置微小的IF SAW滤波器和BAW谐振器,并实现焊接无源与磁通芯片封装的混合组装。最后,本文重点介绍了在18“x24”大面板上制造microSD卡的项目中采用的嵌入技术。扩展的microSD卡将用于无线医疗设备中所有重要SoC功能的测试、编程和控制。它的尺寸为11mm×22mm×1.05mm,天线部分占用11mm×7mm×1.05mm的空间。
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引用次数: 0
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Proceedings of the 5th Electronics System-integration Technology Conference (ESTC)
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