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Integration of polymer bonded magnets into magnetic sensors 聚合物粘结磁体与磁传感器的集成
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962754
K. Elian, H. Theuss
This paper introduces a novel assembly and manufacturing technology for integrating permanent magnets into magnet sensor modules by use of plastic bonded magnets. High precision speed sensors in automotive applications, e.g. in anti-blocking-system or engine management, are based on a magnetic measurement principle [1]. Typical sensor modules contain a semiconductor based sensor chip and a permanent magnet providing the necessary bias field (see Fig. 1). This field is modulated by a passing external gear wheel out of material with high magnetic permeability, which is part of the magnetic circuit. The wheel speed can directly be determined by measuring the frequency of the magnetic field modulation. Permanent magnets are often assembled in a sequential pick and place process. We report a novel assembly technology by direct molding of thermoplast bonded magnets onto a chip carrier containing pre-assembled sensors. We will show, that this offers the following advantages: - Highest accuracy - Optimum working point, in particular for GMR sensors - High throughput by efficient parallel process - Simplification of the module assembly.
介绍了一种利用塑料粘结磁铁将永磁体集成到磁体传感器模块中的新型装配制造技术。汽车应用中的高精度速度传感器,例如防堵系统或发动机管理,都是基于磁测量原理[1]。典型的传感器模块包含一个基于半导体的传感器芯片和一个提供必要偏置场的永磁体(见图1)。该偏置场由高磁导率材料通过的外部齿轮调制,该材料是磁路的一部分。通过测量磁场调制频率可以直接确定车轮转速。永磁体通常在连续的取放过程中组装。我们报告了一种新的组装技术,将热塑性粘结磁铁直接成型到包含预组装传感器的芯片载体上。我们将证明,这提供了以下优势:-最高精度-最佳工作点,特别是对于GMR传感器-高效并行处理的高吞吐量-简化模块组装。
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引用次数: 13
Effect of UV light and low temperature on solution-processed, high-performance metal-oxide semiconductors and TFTs 紫外光和低温对溶液加工高性能金属氧化物半导体和tft的影响
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962762
H. Majumdar, J. Leppaniemi, K. Ojanpera, Olli‐Heikki Huttunen, A. Alastalo
This paper focuses on ultra-violet (UV)-curing of solution-processed metal-oxide (MO) semiconductors for application in thin film transistors (TFTs). The goal is to combine low-temperature thermal annealing with UV exposure and achieve printable transistors on flexible plastic substrates. In this paper we focus on the use of two different wavelengths of UV and clarify their effect on the performance of the metal-oxide semiconductors. The electrical properties of TFTs made with these semiconductors are characterized. The results show that wavelength of the UV exposure is critical for optimized performance of the semiconductor and the TFTs.
本文主要研究了用于薄膜晶体管(TFTs)的溶液处理金属氧化物(MO)半导体的紫外固化。目标是将低温热退火与紫外线曝光相结合,在柔性塑料衬底上实现可打印晶体管。本文重点介绍了两种不同波长的紫外光的使用,并阐明了它们对金属氧化物半导体性能的影响。对用这些半导体制成的tft的电学性能进行了表征。结果表明,紫外曝光波长对优化半导体和tft的性能至关重要。
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引用次数: 1
A comparative reliability study of copper-plated glass vias, drilled with CO2 and ArF excimer lasers 用CO2和ArF准分子激光钻孔的镀铜玻璃孔的比较可靠性研究
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962708
M. Broas, K. Demir, Y. Sato, V. Sundaram, R. Tummala
Interposer technologies for 2.5D and 3D integration schemes require formation of high density and reliable Through-Package-Vias (TPVs) at high throughput and low cost. Glass is proposed to be an ideal candidate material for interposer applications. Among various methods to form TPVs in glass, a variety of laser processing methods have been proposed as feasible methods. The via hole formation mechanisms of different lasers differ from each other which leads to variations in via quality. To study the effects of via quality on reliability, accelerated lifetime tests were conducted on copper-plated TPVs formed with different lasers in glass interposers. Two different lasers for the TPV formation were investigated in this study - a high power CO2 laser and an ArF-based excimer laser. Separate test vehicles containing vias drilled with each of these two methods were fabricated for thermal cycle tests (TCT). The test vehicles contained daisy chains. No failures were detected in the TCT based on a failure criterion of 10 % increase in resistance per daisy chain. TPVs were characterized with optical and electron microscopy after drilling, after fabrication, and after the tests.
用于2.5D和3D集成方案的中间体技术需要以高通量和低成本形成高密度和可靠的通封装通孔(TPVs)。玻璃被认为是中间体应用的理想候选材料。在玻璃中形成TPVs的各种方法中,人们提出了各种激光加工方法作为可行的方法。不同激光器的通孔形成机制不同,导致通孔质量的差异。为了研究通孔质量对可靠性的影响,对不同激光在玻璃中间层中形成的镀铜tpv进行了加速寿命试验。在这项研究中,研究了两种不同的激光用于TPV形成-高功率CO2激光和基于arf的准分子激光。用这两种方法中的每一种钻取含有孔的独立试验车辆,用于热循环试验(TCT)。测试车辆包含菊花链。根据每雏菊链电阻增加10%的故障标准,在TCT中没有检测到故障。在钻孔、制作和测试后,用光学和电子显微镜对TPVs进行了表征。
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引用次数: 2
Cost components for 3D system integration 3D系统集成的成本组件
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962730
D. Velenis, M. Detalle, S. Van Huylenbroeck, A. Jourdain, A. Phommahaxay, J. Slabbekoorn, Teng Wang, E. Marinissen, K. Rebibis, Andy Miller, G. Beyer, E. Beyne
The cost of 3D process flows is one of the most important aspects for the broader adoption of 3D integration by the semiconductor industry. In this paper the processing cost of the features and components that enable 3D stacking is considered and compared. Different stacking approaches are considered: D2W, W2W and interposer-based stacking. Furthermore, the impact of processing yield and pre-stack testing is evaluated when considering the system integration cost for each one of the 3D stacking methods. In addition the size of the stacked active dies is parameterized and the effect on the system integration cost is explored. Also, the impact of pre-stack testing on interposer in relation to processing yield and the size of the stacked active dies is investigated.
3D工艺流程的成本是半导体行业广泛采用3D集成的最重要方面之一。本文考虑并比较了实现三维叠加的特征和部件的加工成本。考虑了不同的堆叠方法:D2W, W2W和基于中间层的堆叠。此外,在考虑系统集成成本的情况下,评估了每种3D堆叠方法的加工良率和堆叠前测试的影响。此外,还对叠置主动模的尺寸进行了参数化,探讨了叠置主动模的尺寸对系统集成成本的影响。此外,还研究了叠前测试对中间层的影响与加工成品率和叠后活性模具的尺寸有关。
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引用次数: 7
Influence of thermal annealing on the deformation of Cu-filled TSV 热退火对cu填充TSV变形的影响
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962763
Hongwen He, X. Jing, Liqiang Cao, Daquan Yu, K. Xue, Wenqi Zhang
Through silicon via (TSV) is regarded as one of the most advanced packaging technologies, however, many serious reliability issues need to be paid more concerns. The Cu pumping effect is one of the most crucial reliability problems. Due to different coefficient of thermal expansion for different packaging materials, Cu-TSV can deform and damage the wiring redistribution layers and degrade the reliability of the package as a whole during normal processing. Therefore, this work focuses on the influence which different thermal annealing processes have on Cu pumping in Cu-filled TSVs. Cu TSVs having 20μm in diameter and 120μm in depth were fabricated on 200 mm wafers by etching, insulation layer deposition, barrier layer deposition, seed layer deposition and Cu plating in sequence. Then the wafer surface was polished to remove the excessive Cu. Two anneal approaches were designed to investigate Cu TSV pumping. One was CMP first before annealing, and the other was annealing before CMP and followed by the 2nd annealing. Anneal tests were done in a nitrogen environment to protect Cu from oxidation. The annealing temperatures were set at 300°C and 400°C with a dwell time of 40min. The degree of pumping was evaluated by measuring the height and volume profiles before and after annealing by using a white light interferometer. Results show that the Cu TSV increased by 0.105μm and 0.168μm in height and 90.443μm3 and 93.993μm3 in volume at 300°C and 400°C with CMP first approach. However, the Cu TSV increased by only 0.066μm and 0.075μm and 30.797μm3 and 10.077μm3 in volume at 300°C and 400°C with anneal first approach. It can be concluded that the Cu pumping effect may be restrained by anneal first approach.
透硅通孔封装技术(TSV)被认为是最先进的封装技术之一,但其可靠性问题仍需引起人们的重视。铜泵送效应是最关键的可靠性问题之一。由于不同封装材料的热膨胀系数不同,Cu-TSV在正常加工过程中会使布线重分布层变形和损坏,降低封装整体的可靠性。因此,本文着重研究了不同热处理工艺对Cu填充tsv中Cu泵送的影响。采用蚀刻、绝缘层沉积、阻挡层沉积、种子层沉积、镀铜等工艺,在200 mm晶圆上制备了直径为20μm、深度为120μm的Cu tsv。然后对晶圆片表面进行抛光以去除过量的Cu。设计了两种退火方法来研究Cu TSV抽运。一种是先进行CMP后退火,另一种是在CMP前退火,然后进行第二次退火。退火试验在氮气环境中进行,以防止铜被氧化。退火温度分别为300℃和400℃,保温时间为40min。利用白光干涉仪测量了退火前后的高度和体积分布,评价了抽运程度。结果表明:在300°C和400°C时,采用CMP第一方法,Cu TSV的高度分别增加了0.105μm和0.168μm,体积分别增加了90.443μm3和93.993μm3;在300°C和400°C时,Cu的TSV体积分别增加了0.066μm和0.075μm, 30.797μm3和10.077μm3。结果表明,退火第一法可以抑制铜的抽运效应。
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引用次数: 2
Nano-porous structure control under electrodeposition and dealloying conditions for low-temperature bonding 电沉积和合金化条件下低温键合的纳米孔结构控制
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962819
M. Saito, K. Matsunaga, J. Mizuno, H. Nishikawa
We investigated a low-temperature bond formation process, wherein nanoporous structures were formed on electrode surfaces by electrodeposition and dealloying. The morphology control of a nanoporous Au-Ag structure was investigated using electrochemical deposition and electrochemical methods. The ligament size of the electrodeposited Au-Ag films after dealloying increased upon annealing. The ligament size of 10-20 nm for as-deposited increased to 50-100 nm for films annealed at 150 °C. The samples that were annealed at 50 °C before dealloying indicated a finer nanoporous structure, which corresponded to the highest bond strength of the evaluated samples. The volume of selective dissolution was small on as-deposited samples despite the anodic current being the largest of the examined films. Inductively coupled plasma mass spectrometry (ICP-MS) analysis showed that the change of the Ag content of the films after dealloying of as-deposited samples was the smallest of the examined films. Small ligament size with a finer nanoporous structure resulted in high bond strength.
我们研究了一种低温键形成过程,其中电极表面通过电沉积和合金化形成纳米孔结构。采用电化学沉积和电化学方法研究了纳米孔Au-Ag结构的形貌控制。退火后,经合金化处理的电沉积Au-Ag薄膜的韧带尺寸增大。在150°C退火后,膜的韧带尺寸从10-20 nm增加到50-100 nm。经50°C退火后的样品显示出更细的纳米孔结构,这与评估样品的最高结合强度相对应。尽管阳极电流是所检查薄膜中最大的,但在沉积样品上选择性溶解的体积很小。电感耦合等离子体质谱(ICP-MS)分析表明,沉积样品经脱合金处理后,膜中银含量的变化最小。韧带尺寸小,纳米孔结构细,结合强度高。
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引用次数: 0
Investigations on advanced soldering mechanisms for transient liquid phase soldering (TLPS) in power electronics 电力电子瞬态液相焊接(TLPS)先进焊接机制的研究
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962773
A. Syed-Khaja, J. Franke
This paper gives an overview of the optimization of the present state-of-the-art soldering technologies for diffusion soldering in power electronics, in particular for Transient liquid phase soldering (TLPS) with enhancements in process conditions to reduce the void percentage in the interconnections and at the same time accelerate the rate of intermetallic phase (IMP) formation. Addressing the difficulties in realizing a void-free TLPS joint in large-area die-attach in power electronics, the variations in soldering process parameters like temperature, pressure and time are discussed. The complete transformation of thin Sn-Cu solder interlayers (15-20μm) into Cu6Sn5 and Cu3Sn IMPs and related void information for varying solder profile variants have been explained. To evaluate the potential for TLPS process, the advanced reflow soldering mechanisms like vacuum vapor-phase soldering and over-pressure convection soldering have been investigated. Depending on the void percentages and IMP formation rate, an optimized interconnection process has been introduced which is capable of realizing TLPS joints with convectional electronic production equipment.
本文概述了目前最先进的焊接技术的优化,用于电力电子器件的扩散焊接,特别是瞬态液相焊接(TLPS),通过改进工艺条件来减少互连中的空隙率,同时加快金属间相(IMP)的形成速度。针对电力电子领域大面积贴装中实现无空洞TLPS接头的困难,讨论了焊接工艺参数如温度、压力和时间的变化。解释了薄Sn-Cu钎料中间层(15-20μm)完全转变为Cu6Sn5和Cu3Sn IMPs以及不同钎料形状变化的相关空洞信息。为了评估TLPS工艺的潜力,研究了真空气相焊和超压对流焊等先进的回流焊机制。根据空穴率和IMP形成速率的不同,提出了一种优化的连接工艺,可以实现传统电子生产设备的TLPS接头。
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引用次数: 14
Chosen electrical, noise and stability characteristics of passive components embedded in printed circuit boards 所选的嵌入在印刷电路板中的无源元件的电气、噪声和稳定性特性
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962765
A. Dziedzic, A. Kłossowicz, P. Winiarski, A. Stadler, W. Stęplewski
This paper presents systematic studies of electrical, noise and long-term stability parameters of resistors (thin-film or polymer thick-film) and capacitors embedded in Printed Circuit Boards (PCBs). The temperature dependence of resistance or capacitance were determined in a wide temperature range (from -180°C to 130°C) and analyzed as a function of geometry of passives and cladding process. The in-situ accelerated ageing process (basic properties of passives measured directly at ageing conditions) was carried out to perform long-term behavior analysis. Low frequency noise measurements were made in room temperature using noise spectra measurements in dc bridge configuration. The R(T) characteristics are linear with almost constant, negative value of differential TCR (of about -60 ppm/K for 100 Ω/sq Ni-P resistors). Both groups of investigated resistors revealed similar range of relative resistance changes after ageing processes but the results showed the quite different behavior of both groups versus time. It means that the dynamics of ageing changes was different. Only positive resistance changes were observed for Ni-P resistors, whereas the shape of characteristics for polymer ones were much more complex, exhibited increase as well as decrease in resistance under environmental exposure. 1/f noise generated by resistance fluctuations was found as the main noise component but the significant difference of noise level was observed for both groups of investigated resistors. The C(T) characteristics are nonlinear with larger capacitance changes at higher temperature. Capacitors exposed to elevated temperature exhibited capacitance and dissipation factor decrease. The relative changes were from the range from -12% to -2% for capacitance and up to -60% for dissipation factor. The value of relative drift of parameters was dependent strongly on dielectric composition and size. Moreover the results revealed nonlinear characteristics in temperature domain as well.
本文系统地研究了印制电路板(pcb)内嵌电阻(薄膜或聚合物厚膜)和电容器的电学、噪声和长期稳定性参数。在较宽的温度范围内(从-180°C到130°C)测定了电阻或电容的温度依赖性,并分析了被动材料几何形状和包层工艺的函数。进行了原位加速老化过程(在老化条件下直接测量被动式的基本性能),以进行长期行为分析。利用直流电桥结构下的噪声谱测量,在室温下进行了低频噪声测量。R(T)特性与几乎恒定的负差分TCR值呈线性关系(对于100个Ω/sq的Ni-P电阻器,约为-60 ppm/K)。两组研究的电阻器在老化过程中显示出相似的相对电阻变化范围,但结果显示两组电阻随时间的变化有很大不同。这意味着老龄化的动态变化是不同的。Ni-P电阻器只观察到正的电阻变化,而聚合物电阻器的特性形状要复杂得多,在环境暴露下表现出电阻的增加和减少。发现电阻波动产生的1/f噪声是主要噪声成分,但两组电阻的噪声水平存在显著差异。温度越高,电容变化越大,C(T)特性呈非线性。暴露在高温下的电容器表现出电容和耗散系数的降低。电容的相对变化范围从-12%到-2%,耗散因子的相对变化幅度高达-60%。参数的相对漂移值与介电成分和尺寸密切相关。结果还揭示了温度域的非线性特征。
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引用次数: 1
Printed passive components for RFID labels 用于RFID标签的印刷无源元件
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962823
J. Řeboun, T. Blecha, T. Syrový, A. Hamácek, Alexey Shlykevich
This paper deals with the research and development of printed flexible capacitors and inductors predominantly designed for the construction of RFID labels. These printed RF passive components are required for the construction of fully printed low cost passive RFID labels. The passive components are directly printed on PET substrate by the screen printing technique. The printing process was optimized in order to achieve a high yield and good electrical parameters at the frequency of 13,56 MHz. Electrical parameters of printed capacitors, such as impedance to frequency characteristic, capacity to temperature characteristic, capacity to bias voltage characteristic were measured in detail. The bending tests were also performed for verifying of printed capacitors flexibility. The performance of capacitors was verified in the real sample of resonant circuit at 13,56 MHz.
本文研究了主要用于RFID标签结构的印刷柔性电容器和电感器的研究和开发。这些印刷的射频无源元件是构建完全印刷的低成本无源RFID标签所必需的。采用丝网印刷技术将无源元件直接印刷在PET基板上。为了在13,56 MHz频率下获得高收率和良好的电气参数,对印刷工艺进行了优化。详细测量了印刷电容器的阻抗-频率特性、容量-温度特性、容量-偏置电压特性等电气参数。为了验证印刷电容器的柔性,还进行了弯曲试验。在13,56 MHz谐振电路的实际样品中验证了电容器的性能。
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引用次数: 7
A “microSD”sized RF transceiver manufactured as an embedded system-in-package 一种“microSD”大小的射频收发器,作为嵌入式系统级封装制造
Pub Date : 2014-11-24 DOI: 10.1109/ESTC.2014.6962744
D. Manessis, S. Karaszkiewicz, J. Kierdorf, A. Ostmann, R. Aschenbrenner, K. Lang
This paper brings into light the first prototype miniaturized system-in-package (SiP) microsystems built for wireless body-area-network medical devices which mandate low power consumption and extreme packaging miniaturization. Specifically, this paper focuses on the fabrication of a remote controller for wireless medical devices in the practical shape of an extended “microSD” card where the extended part will co-integrate a passive antenna. Actually the microSd card is a RF transceiver enclosing an advanced SoC, MEMS filters, flash memory and other passive components. The presented paper describes in detail all manufacturing steps for the realization of the extended “microSD” card and all technology developments achieved to reach this goal. Firstly, a 2-layer substrate has been successfully produced with 35μm ultra fine line copper structuring in conjunction with 75μm through-vias using subtractive technology. Subsequently, assembly technologies for heterogeneous BAN components were further developed in order to achieve the placement of the tiny IF SAW filters and BAW resonators on the substrate and to implement mixed assembly of soldered passives with fluxed chip packages. Finally, the paper highlights the embedding technology employed in the project for the manufacturing of the microSD cards on 18”x24” large panels. The extended microSD card will be used for testing, programming and controlling all vital SoC functions in the wireless medical devices. It has a size of 11mm×22mm×1.05mm with the antenna part occupying a space of 11mm×7mm×1.05mm.
本文介绍了第一个用于无线体域网络医疗设备的小型化系统级封装(SiP)微系统的原型,该系统要求低功耗和极端封装小型化。具体而言,本文重点研究了一种用于无线医疗设备的遥控器的制造,其实际形状为扩展的“microSD”卡,其中扩展部分将与无源天线共集成。实际上,microSd卡是一个射频收发器,包含先进的SoC, MEMS滤波器,闪存和其他无源组件。本文详细介绍了实现扩展“microSD”卡的所有制造步骤以及为实现这一目标而实现的所有技术发展。首先,利用35μm的超细线铜结构和75μm的过孔,利用减法技术成功地制作了两层基板。随后,异质BAN组件的组装技术进一步发展,以实现在衬底上放置微小的IF SAW滤波器和BAW谐振器,并实现焊接无源与磁通芯片封装的混合组装。最后,本文重点介绍了在18“x24”大面板上制造microSD卡的项目中采用的嵌入技术。扩展的microSD卡将用于无线医疗设备中所有重要SoC功能的测试、编程和控制。它的尺寸为11mm×22mm×1.05mm,天线部分占用11mm×7mm×1.05mm的空间。
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引用次数: 0
期刊
Proceedings of the 5th Electronics System-integration Technology Conference (ESTC)
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